CN206532765U - A kind of adjustable wafer is from center positioning device - Google Patents
A kind of adjustable wafer is from center positioning device Download PDFInfo
- Publication number
- CN206532765U CN206532765U CN201720185122.1U CN201720185122U CN206532765U CN 206532765 U CN206532765 U CN 206532765U CN 201720185122 U CN201720185122 U CN 201720185122U CN 206532765 U CN206532765 U CN 206532765U
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- Prior art keywords
- guide rail
- cylindrical support
- hole
- positioning device
- support block
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model is related to a kind of adjustable wafer from center positioning device, including disc base, the upper surface of disc base is uniformly laid with cylindrical support block more than two, every group of cylindrical support block is two, the outer rim of disc base is uniformly laid with more than two reinforcements, guide rail is fixedly connected with cylindrical support block, the upper plane of the reinforcement connects and is labeled with scale on the bottom surface of guide rail, the two sides of guide upper；The top slidingtype of guide rail is connected with mobile sliding block, the bottom of mobile sliding block offers the isosceles trapezoid chute matched with the top of guide rail, the front end of mobile sliding block is fixedly connected with connecting rod, and one end of the connecting rod is fixedly connected with setting element, and the bottom of setting element opens up fluted.The utility model can meet the transmission of different-diameter wafer, reduce labor intensity of operating staff.
Description
Technical field
The utility model is related to semiconductor integrated circuit and makes field, and more particularly to a kind of adjustable wafer is fixed from center
Position device.
Background technology
In silicon semiconductor production of integrated circuits, wafer is widely used；In to crystal column surface detection and process,
Need to carry out substantial amounts of transport to wafer.Having a variety of electronic, manual wafer loading/unloadings to carry at present, to put complicated, cost higher,
Be not suitable for low and middle-end semiconductor equipment；Existing manual wafer loading/unloading, which carries, puts, and most of wafer keepers are to move
, can only loading/unloading carry fixed diameter wafer, because wafer keeper is fixed on mechanical finger or pallet, transmission not
With diameter wafer when, it is necessary to change all multicomponents such as setting element, mechanical finger or pallet, operating process is cumbersome,
Efficiency of transmission is had a strong impact on, while reducing operating efficiency.
Utility model content
The utility model solves manual loading/unloading and carries brilliant by providing a kind of adjustable wafer from center positioning device
Bowlder changes the problem of many element operations such as setting element, mechanical finger or pallet are cumbersome, can meet different-diameter wafer
Transmission, reduce labor intensity of operating staff.
To achieve these goals, the technical solution of the utility model is：
A kind of adjustable wafer is from center positioning device, including disc base, and the upper surface of the disc base is uniform
It is laid with cylindrical support block more than two, every group of cylindrical support block is two cylindrical support blocks of two, every group not same
One circumference but on same center line, the outer rim of disc base is uniformly laid with more than two reinforcements, disc base it is upper
Surface and the upper surface of reinforcement at grade, are fixedly connected with guide rail on cylindrical support block, the upper of the reinforcement is put down
Face connects the bottom surface of guide rail, and the vertical section of guide upper is rectangular in the vertical section of isosceles trapezoid, bottom, and the two of guide upper
Scale is labeled with side；The top slidingtype of guide rail is connected with mobile sliding block, and the bottom of mobile sliding block is offered and guide rail
The isosceles trapezoid chute that matches of top, the front end of mobile sliding block is fixedly connected with connecting rod, and one end of the connecting rod, which is fixed, to be connected
Setting element is connected to, the top of the setting element is in half truncated cone-shaped, bottom in semi-cylindrical, and the bottom of setting element is offered
Groove.
Further, the center of the disc base offers counter sink.
Further, the upper plane of the guide rail offers first through hole and the second through hole, the first through hole and second
Through hole is connected with every group of cylindrical support block respectively, and the centre-to-centre spacing of first through hole and the second through hole is equal to every group of two cylinder branch
The centre-to-centre spacing of bracer.
Further, the bottom of the mobile sliding block offers in screwed hole, the screwed hole and is laid with stop screw.
Further, the cylindrical support block is that the angle between three groups, the cylindrical support block of two adjacent groups is 120 °.
The beneficial effects of the utility model are：
Wafer need to only be placed on the top of setting element by the utility model, wafer can automatic descending, setting element it is upper
Portion can play a part of buffering in half truncated cone-shaped, it is to avoid the abrasion brought during wafer vertical landing, effectively the use of extension wafer
Life-span；Scale is labeled with guide rail, setting element synchronizing moving, position can be driven with the mobile sliding block of spacing regulation in the horizontal direction
Put regulation more accurate；Reinforcement is arranged in immediately below guide rail, it is to avoid guide rail is rocked, and is made to move during sliding block moves along the rail
It is more solid and reliable；The device is not limited by transmission diameter wafer size, it is not necessary to change setting element, mechanical finger or support
All multicomponents such as disk, improve wafer transfer efficiency, and the utility model can meet the transmission of different-diameter wafer, reduce behaviour
Make personnel labor intensity, effectively improve operating efficiency.
Brief description of the drawings
Fig. 1 is a kind of structural representation of the adjustable wafer of the utility model from center positioning device.
Fig. 2 is a kind of structural representation of the adjustable wafer of the utility model from the side view of center positioning device.
Fig. 3 is a kind of adjustable wafer of the utility model disc base and reinforcement connection from center positioning device
Structural representation.
Fig. 4 is that a kind of adjustable wafer of the utility model is connected from center positioning device middle guide with mobile sliding block
Structural representation.
Fig. 5 is a kind of structural representation of adjustable wafer setting element from center positioning device of the utility model.
In accompanying drawing marked as：1 is guide rail, and 2 be mobile sliding block, and 3 be connecting rod, and 4 be disc base, and 5 be stop screw, and 6 are
Setting element, 7 be counter sink, and 8 be screwed hole, and 9 be cylindrical support block, and 10 be reinforcement.
Embodiment
The utility model is further illustrated with reference to the accompanying drawings and detailed description：
As shown in Fig. 1~Fig. 5, a kind of adjustable wafer is from center positioning device, including disc base 4, the disk
The angle that the upper surface of base 4 is uniformly laid between three groups of cylindrical support blocks 9, the cylindrical support block 9 of two adjacent groups is 120 °,
Every group of cylindrical support block 9 is two cylindrical support blocks 9 of two, every group not in same circumference but on same center line, circle
The outer rim of seat 4 of trying to get to the heart of a matter uniformly is laid with three reinforcements 10, and the upper surface of disc base 4 and the upper surface of reinforcement 10 are same
In plane, guide rail 1 is fixedly connected with cylindrical support block 9, the upper plane of guide rail 1 offers first through hole and the second through hole, the
One through hole and the second through hole are connected with every group of cylindrical support block 9 respectively, cylindrical support block 9 is fixedly connected on guide rail 1, first
The centre-to-centre spacing of through hole and the second through hole is equal to the centre-to-centre spacing of every group of two cylindrical support blocks 9, the upper plane of the reinforcement 10
The bottom surface of guide rail 1 is connected, the vertical section on the top of guide rail 1 is rectangular in the vertical section of isosceles trapezoid, bottom, the top of guide rail 1
Scale is labeled with two sides；The top slidingtype of guide rail 1 is connected with mobile sliding block 2, the bottom of mobile sliding block 2 offer with
The isosceles trapezoid chute that the top of guide rail 1 matches, the front end of mobile sliding block 2 is fixedly connected with connecting rod 3, the one of the connecting rod 3
End is fixedly connected with setting element 6, and the top of the setting element 6 is in semi-cylindrical, setting element 6 in half truncated cone-shaped, bottom
Bottom open up fluted, the bottom of mobile sliding block 2, which is offered, is laid with stop screw 5, disk bottom in screwed hole 8, screwed hole 8
The center of seat 4 offers counter sink 7.
The present apparatus by the cooperation of counter sink and bolt is fixed on manual wafer loading/unloading carried and put, it is straight according to wafer
Footpath size, promotes the mobile sliding block 2 on every group of guide rail 1 successively in advance, makes to move sliding block 2 and moves to correct position along guide rail 1 and stop
Only move, the scope of three mobile formation of sliding block 2 is equal to diameter wafer, and wafer is placed manually to the top of setting element 6, brilliant
Top of the circle by self gravitation along setting element 6 is moved downward, bottom surface and the upper surface of cylindrical support block 9 when wafer
When, wafer stops landing, now the groove of the bottom of setting element 6 with crystal round fringes are tangent contacts, fastening stop screw 5 makes shifting
Movable slider 2 is fixed on stop motion on guide rail 1, limits the motion in wafer level direction, now wafer is to be fixed, and is no longer transported
It is dynamic.
Embodiment described above, simply preferred embodiment of the present utility model, is not limited of the present utility model
Practical range, therefore the equivalent change or modification that all construction, feature and principles according to described in the utility model the scope of the claims are done,
It should be included in present utility model application the scope of the claims.
Claims (5)
1. a kind of adjustable wafer is from center positioning device, including disc base, it is characterised in that the disc base it is upper
Surface is uniformly laid with cylindrical support block more than two, and every group of cylindrical support block is two cylindrical supports of two, every group
Block is not in same circumference but on same center line, and the outer rim of disc base is uniformly laid with more than two reinforcements, disk
The upper surface of base and the upper surface of reinforcement at grade, are fixedly connected with guide rail, the reinforcement on cylindrical support block
The upper plane of muscle connects the bottom surface of guide rail, and the vertical section of guide upper is rectangular in the vertical section of isosceles trapezoid, bottom, guide rail
Scale is labeled with the two sides on top；The top slidingtype of guide rail is connected with mobile sliding block, and the bottom of mobile sliding block is opened up
There is the isosceles trapezoid chute that the top with guide rail matches, the front end of mobile sliding block is fixedly connected with connecting rod, the one of the connecting rod
End is fixedly connected with setting element, under the top of the setting element is in semi-cylindrical, setting element in half truncated cone-shaped, bottom
Portion opens up fluted.
2. a kind of adjustable wafer according to claim 1 is from center positioning device, it is characterised in that the disk bottom
The center of seat offers counter sink.
3. a kind of adjustable wafer according to claim 1 is from center positioning device, it is characterised in that the guide rail
Upper plane offers first through hole and the second through hole, and the cylindrical support block of the first through hole and the second through hole respectively with every group connects
Connect, the centre-to-centre spacing of first through hole and the second through hole is equal to the centre-to-centre spacing of every group of two cylindrical support blocks.
4. a kind of adjustable wafer according to claim 1 is from center positioning device, it is characterised in that described mobile sliding
The bottom of block offers in screwed hole, the screwed hole and is laid with stop screw.
5. a kind of adjustable wafer according to claim 1 is from center positioning device, it is characterised in that the cylinder branch
Bracer is that the angle between three groups, the cylindrical support block of two adjacent groups is 120 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720185122.1U CN206532765U (en) | 2017-02-28 | 2017-02-28 | A kind of adjustable wafer is from center positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720185122.1U CN206532765U (en) | 2017-02-28 | 2017-02-28 | A kind of adjustable wafer is from center positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206532765U true CN206532765U (en) | 2017-09-29 |
Family
ID=59915013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720185122.1U Active CN206532765U (en) | 2017-02-28 | 2017-02-28 | A kind of adjustable wafer is from center positioning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206532765U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107887318A (en) * | 2017-12-15 | 2018-04-06 | 广东工业大学 | A kind of wafer disks positioner |
| CN108622660A (en) * | 2018-04-09 | 2018-10-09 | 芜湖立普德机械科技有限公司 | A kind of glass fixture being automatically positioned |
| CN109865642A (en) * | 2017-12-05 | 2019-06-11 | 株洲中车时代电气股份有限公司 | A kind of chip center's positioning fixture |
-
2017
- 2017-02-28 CN CN201720185122.1U patent/CN206532765U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109865642A (en) * | 2017-12-05 | 2019-06-11 | 株洲中车时代电气股份有限公司 | A kind of chip center's positioning fixture |
| CN109865642B (en) * | 2017-12-05 | 2021-05-14 | 株洲中车时代半导体有限公司 | Chip center positioning clamp |
| CN107887318A (en) * | 2017-12-15 | 2018-04-06 | 广东工业大学 | A kind of wafer disks positioner |
| CN108622660A (en) * | 2018-04-09 | 2018-10-09 | 芜湖立普德机械科技有限公司 | A kind of glass fixture being automatically positioned |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP02 | Change in the address of a patent holder |
Address after: 518109 Guangdong city of Shenzhen province Longhua District, Dalang Street Wave Industrial Park Road No. 1 A District Office kohodo Plaza, room 1618 Patentee after: Institute of Microelectronics of Chinese Academy of Sciences Address before: Unit two on the west side of building high road 518000 Guangdong city of Shenzhen province high tech Zone No. 11 Guangming Street EVOC Technology Industrial Park Machinery Plant Patentee before: Institute of Microelectronics of Chinese Academy of Sciences |
|
| CP02 | Change in the address of a patent holder | ||
| CP03 | Change of name, title or address |
Address after: 518110 101, 201, 301, No.2, Shanghenglang fourth industrial zone, Tongsheng community, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Zhongke feice Technology Co.,Ltd. Address before: 518109 room 1618, area a, kaihaoda Plaza office, No.1, Dalang Industrial Park Road, Dalang street, Longhua District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Zhongke Flying Test Technology Co.,Ltd. |
|
| CP03 | Change of name, title or address |