CN209193020U - A kind of wafer shifting sheet devices - Google Patents
A kind of wafer shifting sheet devices Download PDFInfo
- Publication number
- CN209193020U CN209193020U CN201821711251.0U CN201821711251U CN209193020U CN 209193020 U CN209193020 U CN 209193020U CN 201821711251 U CN201821711251 U CN 201821711251U CN 209193020 U CN209193020 U CN 209193020U
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- wafer
- moves
- piece
- casket
- plate base
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Abstract
The utility model discloses a kind of wafer shifting sheet devices；Piece machine is moved including tool and is placed on the wafer casket that tool moves the wafer casket being fully loaded on piece machine and zero load, and the two corresponding placements of wafer casket；The lower end surface that the tool moves piece machine is equipped with the pushing meanss reciprocally pushed.A pushing meanss, which are arranged, in the lower section that tool moves piece machine in the present apparatus can drive shifting piece sleeve and the wafer of shifting piece sleeve inner installation to move plate base and move back and forth；And wafer moves the wafer shifting piece push rod being arranged on plate base and is set as compartment structure, neighbouring wafer moves between piece push rod and is provided with interval, and the interval and the thickness of a wafer in wafer casket match, in this way when pushing meanss drive wafer to move piece push rod and move inward, the wafer of half in fully loaded wafer casket can be accordingly moved in the wafer casket of other side zero load；It is structurally reasonable to realize the purpose of movable part wafer, it is ingenious in design, have very strong practicability.
Description
Technical field
The utility model relates to semiconductor test field, specifically a kind of wafer moves sheet devices.
Background technique
In semiconductor test, wafer test occupies very big specific gravity.Wafer itself has expensive, frangible feature,
So needing great care when carrying and mobile wafer.Wafer after the completion of testing in currently available technology is to be placed in wafer
Row's pocket is provided in casket fixture, in wafer casket from top to down, as shown in Fig. 2, 21 being wherein pocket, usually fully loaded crystalline substance
25 wafers can be put in circle casket.Piece machine is moved by using existing tool in the market to realize wafer in different wafer caskets
Transfer is prepared for the test of next stage.
It, can only be in wafer slot that disposably will be fully loaded in the prior art when using moving piece machine and being shifted to wafer
All wafers are transferred in a unloaded wafer casket, but really can not achieve the function of the either part transfer of transfer in batches
Energy；The wafer in wafer casket is all fully loaded under normal circumstances, and a half in the wafer casket for needing to be fully loaded in some cases
The wafer of amount is transferred in another unloaded wafer casket, and is then difficult to realize above-mentioned function using existing shifting sheet devices.
Utility model content
Purpose of utility model: in view of the deficiency of the prior art, a kind of wafer shifting sheet devices are provided.
Technical solution: in order to realize that above-mentioned purpose of utility model, the technical solution adopted in the utility model are as follows: Yi Zhongjing
Circle moves sheet devices；Piece machine is moved including tool and is placed on the wafer casket that tool moves the wafer casket being fully loaded on piece machine and zero load,
And the two corresponding placements of wafer casket；The lower end surface that the tool moves piece machine is equipped with a promotion dress reciprocally pushed
It sets, and interlocking bar is installed in the pushing meanss, the position for the wafer casket which is fully loaded with from the lower direction that tool moves piece machine
Extend and be also equipped with the shifting piece sleeve placed vertically in boom end, wafer is also equipped in the shifting piece sleeve and moves piece
Substrate, the wafer moves plate base and upwardly extends setting, and its one side of the board is provided with the wafer shifting piece crossed out and pushes away
Bar, the wafer shifting piece push rod is spaced from top to down to be uniformly arranged；The wafer moves piece push rod and fully loaded wafer casket
Position it is corresponding；And the spacing that upper and lower two adjacent wafers are moved between piece push rod is corresponding with the thickness of wafer in wafer casket；Make
Wafer move piece push rod 7 can compartment alignment wafer casket in wafer.
Preferably, the lower end that the wafer moves plate base offers a step groove；And it is placed in the step groove
The odd even sliding block of one separate installment, the odd even sliding block are placed on together with wafer shifting plate base and move in piece sleeve；And the surprise
The height of even sliding block is set as corresponding with the thickness of wafer；And a driving lever is also equipped on odd even sliding block；And move piece sleeve
On be then provided with sliding slot, the driving lever is stretched out out of sliding slot.
Preferably, the wafer, which moves plate base and moves on piece sleeve, is additionally provided with two corresponding screw threads up and down
Hole is equipped with the ripple pearl screw for separating fixation in the threaded hole.
Preferably, the front end for moving piece sleeve is additionally provided with limiting slot；And the wafer is moved on plate base and is then set
It is equipped with corresponding limited block, which is arranged in limiting slot, and the wafer, which moves plate base, to drive limited block to be lifted,
And odd even sliding block can then be moved to the lower end that wafer moves plate base from step groove at this time.
Preferably, being additionally provided with mobile control handle in the pushing meanss.
The utility model has the advantages that the utility model compared with prior art, has the advantage that
(1) shifting piece sleeve and shifting piece set can be driven by a pushing meanss being arranged in the lower section that tool moves piece machine in the present apparatus
The internal wafer installed of cylinder moves plate base and moves back and forth；And wafer moves the wafer shifting piece push rod being arranged on plate base and is set as being spaced
Formula structure, neighbouring wafer, which moves between piece push rod, is provided with interval, and a wafer in the interval and wafer casket
Thickness matches, can be in wafer casket that will be fully loaded in this way when pushing meanss drive wafer to move piece push rod and move inward
The wafer of half is accordingly moved in the wafer casket of other side zero load；It is structurally reasonable to realize the purpose of movable part wafer,
It is ingenious in design, have very strong practicability；
(2) step groove is arranged in the lower end of wafer moving substrate in the present apparatus, and a separation is placed in the step groove
The odd even sliding block of formula, which is separate type, when odd even sliding block is arranged in step groove, the mobile base of wafer
The position of wafer mobile putter corresponds to the wafer of odd-numbered line in wafer casket on plate, at this time control pushing meanss drive move piece sleeve to
The wafer of odd-numbered line can be moved in unloaded another wafer casket by medial movement；And one end distance will be lifted on wafer moving substrate
Afterwards, after odd even sliding block to be moved to the left to the lower section of wafer moving substrate from the position of step groove, then by the mobile base of wafer
After plate is fixed, the position of wafer moving substrate just rises the height of a wafer thickness, then by wafer moving substrate it is fixed after,
Just move the wafer of even number line in wafer casket；Therefore the present apparatus is by adjusting conversion, can complete in wafer casket odd-numbered line and
The transfer work of even number line difference wafer, it is ingenious in design, it is easy to use.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is wafer box structure figure in the utility model；
Fig. 3 is that wafer moves plate base structure chart in the utility model；
Fig. 4 is that piece tube-in-tube structure figure is moved in the utility model；
Fig. 5 is wafer moves what shifting piece sleeve assembly installation diagram of plate base；
Wafer moves the plate base location drawing when Fig. 6 is mobile even number line wafer；
Wafer moves the plate base location drawing when Fig. 7 is mobile odd-numbered line wafer.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the utility model is furtherd elucidate, the present embodiment is with the utility model
Implemented under premised on technical solution, it should be understood that these embodiments are merely to illustrate the utility model rather than limit this reality
With novel range.
As shown in Figures 1 to 7, a kind of wafer moves sheet devices；Piece machine 1, which is moved, including tool and is placed on tool moves piece machine 1
Upper fully loaded wafer casket 2 and the wafer casket 2 of zero load, and the two corresponding placements of wafer casket 2；The tool moves piece machine
1 lower end surface is equipped with the pushing meanss 3 reciprocally pushed, and is equipped with interlocking bar 4 in the pushing meanss 3, the interlocking bar 4
The position of the wafer casket 2 fully loaded from the lower direction that tool moves piece machine 1 extends and is also equipped with the shifting placed vertically in boom end
Piece sleeve 5 is also equipped with wafer in the shifting piece sleeve 5 and moves plate base 6, and the wafer moves plate base 6 and upwardly extends
Setting, and its one side of the board is provided with the wafer crossed out and moves piece push rod 7, and the wafer moves piece push rod 7 from top to down
Interval is uniformly arranged；It is corresponding with the fully loaded position of wafer casket 2 that the wafer moves piece push rod 7；And upper and lower two-phase vincial faces
The spacing that circle moves between piece push rod 7 is corresponding with the thickness of wafer 8 in wafer casket 2；Make wafer move piece push rod 7 can compartment pair
Wafer 8 in quasi-crystalline substance circle casket 2.
The lower end that the wafer moves plate base 6 offers a step groove 9；And a separation is placed in the step groove 9
The odd even sliding block 10 of formula installation, the odd even sliding block 10 and wafer move plate base 6 and are placed in shifting piece sleeve 5 together；And the surprise
The height of even sliding block 10 is set as corresponding with the thickness of wafer 8；And a driving lever 11 is also equipped on odd even sliding block 10；And it moves
Sliding slot 12 is then provided on piece sleeve 5, the driving lever 11 is stretched out out of sliding slot 12.
The wafer, which moves plate base 6 and moves on piece sleeve 5, is additionally provided with two corresponding threaded holes 13 up and down, the spiral shell
The ripple pearl screw 14 for separating fixation is installed in pit 13.
The front end for moving piece sleeve 5 is additionally provided with limiting slot 15；And the wafer moves on plate base 6 and is then provided with phase
Corresponding limited block 16, the limited block 16 are arranged in limiting slot 15, and the wafer, which moves plate base 6, can drive limited block 16 to lift
It rises, and odd even sliding block 10 can then be moved to the lower end that wafer moves plate base 6 from step groove 9 at this time；In the pushing meanss 3
It is additionally provided with mobile control handle 17.
A pushing meanss, which are arranged, in the lower section that tool moves piece machine in the present apparatus can drive shifting piece sleeve and shifting piece sleeve
The wafer of inside installation moves plate base and moves back and forth；And wafer moves the wafer shifting piece push rod being arranged on plate base and is set as compartment
Structure, neighbouring wafer, which moves between piece push rod, is provided with interval, and the thickness of a wafer in the interval and wafer casket
Degree matches, can be one in wafer casket that will be fully loaded in this way when pushing meanss drive wafer to move piece push rod and move inward
Half wafer is accordingly moved in the wafer casket of other side zero load；It is structurally reasonable to realize the purpose of movable part wafer, if
It counts ingenious, has very strong practicability.
A step groove is arranged in the lower end of wafer moving substrate in the present apparatus, and a separate type is placed in the step groove
Odd even sliding block, which is separate type, as shown in fig. 6, when odd even sliding block is arranged in step groove, wafer
The position of wafer mobile putter corresponds to the wafer of odd-numbered line in wafer casket on moving substrate, controls pushing meanss at this time and drives shifting piece
Sleeve, which moves inward, can be moved to the wafer of odd-numbered line in unloaded another wafer casket.
As shown in fig. 7, after one end distance being lifted on wafer moving substrate, from the position of step groove to the left by odd even sliding block
After side is moved to the lower section of wafer moving substrate, then by after the fixation of wafer moving substrate, the position of wafer moving substrate just rises
The height of one wafer thickness, then will wafer moving substrate it is fixed after, so that it may the wafer of even number line in mobile wafer casket；Therefore
The present apparatus can complete the transfer work of odd-numbered line and even number line difference wafer in wafer casket by adjusting conversion, ingenious in design,
It is easy to use.
Specific embodiment is a preferred embodiment of the utility model, is not for limiting the utility model
Implement and scope of the claims, all equivalence changes made according to content described in present utility model application scope of patent protection
And modification, it should be included in the utility model patent application range.
Claims (5)
1. a kind of wafer moves sheet devices, piece machine (1) is moved including tool and is placed on tool and moves the wafer casket being fully loaded on piece machine (1)
, and the two wafer casket (2) corresponding placements (2) and unloaded wafer casket (2)；It is characterized by: the tool moves
The lower end surface of piece machine (1) is equipped with the pushing meanss (3) reciprocally pushed, and is equipped with interlocking bar in the pushing meanss (3)
(4), the interlocking bar (4) extend from the position of the fully loaded wafer casket (2) in the lower direction that tool moves piece machine (1) and boom end also
The shifting piece sleeve (5) placed vertically is installed, wafer is also equipped in the shifting piece sleeve (5) and moves plate base (6), it is described
Wafer move plate base (6) and upwardly extend setting, and its one side of the board is provided with wafer shifting piece push rod (7) crossed out,
The wafer moves piece push rod (7), and interval is uniformly arranged from top to down；The wafer moves piece push rod (7) and fully loaded wafer
The position of casket (2) is corresponding；And upper and lower two adjacent wafers move spacing and wafer casket (2) interior wafer (8) between piece push rod (7)
Thickness is corresponding；So that wafer is moved piece push rod (7) can wafer (8) in the alignment wafer casket (2) of compartment.
2. a kind of wafer according to claim 1 moves sheet devices, it is characterised in that: the wafer moves plate base (6)
Lower end offers a step groove (9)；And the odd even sliding block (10) of a separate installment is placed in the step groove (9), the surprise
Even sliding block (10) and wafer move plate base (6) and are placed in shifting piece sleeve (5) together；And the height of the odd even sliding block (10) is set
It is set to corresponding with the thickness of wafer (8)；And a driving lever (11) are also equipped on odd even sliding block (10)；And move piece sleeve (5)
On be then provided with sliding slot (12), the driving lever (11) is stretched out out of sliding slot (12).
3. a kind of wafer according to claim 2 moves sheet devices, it is characterised in that: the wafer move plate base (6) and
It moves on piece sleeve (5) and is additionally provided with two corresponding threaded holes (13) up and down, be equipped in the threaded hole (13) separable solid
Fixed ripple pearl screw (14).
4. a kind of wafer according to claim 2 moves sheet devices, it is characterised in that: the front end for moving piece sleeve (5) is also
It is provided with limiting slot (15)；And the wafer moves on plate base (6) and is then provided with corresponding limited block (16), the limited block
(16) it is arranged in limiting slot (15), the wafer, which moves plate base (6), can drive limited block (16) to be lifted, and odd even is sliding at this time
Block (10) can then be moved to the lower end that wafer moves plate base (6) at step groove (9).
5. a kind of wafer according to claim 1 moves sheet devices, it is characterised in that: also set in the pushing meanss (3)
It is equipped with mobile control handle (17).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821711251.0U CN209193020U (en) | 2018-10-22 | 2018-10-22 | A kind of wafer shifting sheet devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821711251.0U CN209193020U (en) | 2018-10-22 | 2018-10-22 | A kind of wafer shifting sheet devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209193020U true CN209193020U (en) | 2019-08-02 |
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ID=67408639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821711251.0U Active CN209193020U (en) | 2018-10-22 | 2018-10-22 | A kind of wafer shifting sheet devices |
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| CN (1) | CN209193020U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110356828A (en) * | 2018-10-22 | 2019-10-22 | 江苏艾科半导体有限公司 | It is a kind of can bidirectional modulation wafer move sheet devices |
-
2018
- 2018-10-22 CN CN201821711251.0U patent/CN209193020U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110356828A (en) * | 2018-10-22 | 2019-10-22 | 江苏艾科半导体有限公司 | It is a kind of can bidirectional modulation wafer move sheet devices |
| CN110356828B (en) * | 2018-10-22 | 2024-04-23 | 江苏艾科半导体有限公司 | Wafer moving device capable of being adjusted in two directions |
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