CN206504070U - A kind of voice coil motor drives two-dimensional ultraprecise locating platform - Google Patents
A kind of voice coil motor drives two-dimensional ultraprecise locating platform Download PDFInfo
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- CN206504070U CN206504070U CN201720177333.0U CN201720177333U CN206504070U CN 206504070 U CN206504070 U CN 206504070U CN 201720177333 U CN201720177333 U CN 201720177333U CN 206504070 U CN206504070 U CN 206504070U
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Abstract
The utility model is related to a kind of voice coil motor driving two-dimensional ultraprecise locating platform, and the first motor is installed on horizontal base；Move up and down platform and be connected in above the first motor and moved up and down by the driving of the first motor along the first guide rail for being layed in perpendicular base, and by being separately mounted to the first grating scale reading ruler of perpendicular base side and moving up and down the first grating scale reading head conjunction measuring upper and lower displacement amount of platform side；Movable platform, which is located at, to be moved up and down above platform, by being moved forward and backward installed in the second motor driving moved up and down on platform along being layed in the second guide rail moved up and down on platform, and by being separately mounted to move up and down the second grating scale reading head of platform side and the second grating scale reading ruler conjunction measuring amount of moving forward and backward of movable platform side；The utility model has the advantages that driving error is small, platform by volume is small, fast response time, bearing capacity is strong, accuracy is high, man-machine efficiency high, different control models can be achieved.
Description
Technical field
The utility model is related to the technical field of precise distance measurement, more particularly to a kind of voice coil motor driving two-dimensional ultraprecise
Locating platform.
Background technology
With the development of science and technology, to the performance requirement more and more higher of ultraprecise displacement platform, ultraprecise displacement platform
Increasingly tend to miniaturization, commercialization, precision.Ultraprecise displacement platform is increasingly widely used in：Novel mechanical is manufactured, surpassed
Precision Machining, bioengineering, IC manufacturing, medical science, scanning probe microscopy, PSTM, optics are adjusted
Whole, fiber alignment.
Transmission mechanism is used as motor and ball-screw using stepper motor more than common ultraprecise displacement platform
Fit structure, when meeting identical displacement and identical load, the volume of the structure is relatively large, while ball-screw
Transmission mechanism can have driving error, so as to influence the positioning precision of platform.And the speed responsive of the structure is slow, carrying energy
Power is low.The use of the module of linear electric motors is generally one-dimensional module for the displacement platform system using other linear electric motors, it is controlled
System complex, its precise Positioning Control is difficult to realize for the personnel of non-controlling industry, and its control model is fixed, purposes has
Limit, cost are high.The structure of existing Ultra-precision positioning platform and moulding are perfect not enough on the market, there is that volume is big, be difficult behaviour
The problems such as work, moulding initialization, man-machine inefficiency.
The content of the invention
The purpose of this utility model is to overcome the deficiencies in the prior art there is provided a kind of driving error is small, platform by volume is small,
Fast response time, bearing capacity are strong, accuracy is high, man-machine efficiency high, the voice coil motor driving two of different control models can be achieved
Tie up Ultra-precision positioning platform.
To achieve the above object, technical scheme provided by the utility model is：A kind of two-dimentional superfinishing of voice coil motor driving
Close locating platform, including platform base, mobile platform, first and second guide rail, first and second motor and first and second grating scale, its
In, platform base is made up of horizontal base and perpendicular base, and the first motor is installed on horizontal base；Mobile platform is flat including moving up and down
Platform and movable platform, move up and down platform and are connected in above the first motor by the driving of the first motor along being layed in perpendicular base
The first guide rail move up and down, and by being separately mounted to the first grating scale reading ruler of perpendicular base side and moving up and down platform side
The first grating scale reading head conjunction measuring upper and lower displacement amount in face；Movable platform, which is located at, to be moved up and down above platform, by pacifying
The second guide rail moved up and down mounted in the second motor driving moved up and down on platform along being layed on platform is moved forward and backward, and
By being separately mounted to move up and down the second grating scale reading head of platform side and the second grating scale of movable platform side
The reading ruler conjunction measuring amount of moving forward and backward.
Further, first and second motor is voice coil motor.
Further, first and second grating scale is increment type grating scale, is used as position feedback device.
Further, two motors are by the DC drivers driving installed in perpendicular base another side, and the DC drivers are received
Control command sent by the controller for the side of being provided thereon.
Further, controller includes control model selecting module, limits gain setting module, control parameter setting mould
Block, displacement and translational speed setting module and display module；
Wherein, control model selecting module, including current control mode, speed control mode, position control mode；
Gain setting module is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, platform is improved
Response performance；
Control parameter setting module, maximum speed, acceleration and deceleration, back to zero side during setting mobile platform motion
Formula；
Displacement and translational speed setting module, set the displacement and translational speed of mobile platform；
Display module, the current various peration datas of display.
Further, data are transmitted by serial communication between controller and DC drivers.
This programme principle is as follows：
On the controller setting control model, limit gain, control parameter and displacement and translational speed, therewith
The order set is sent to DC drivers, and DC drivers drive first and second motor according to order, thus drive move up and down it is flat
Platform is moved up and down along the first guide rail, and movable platform is moved forward and backward along the second guide rail, moves up and down platform with before
The displacement of mobile platform is respectively by first and second optical grating ruler measurement afterwards, and display module shows the number such as displacement and translational speed
According to back to zero after completion work.
Compared with prior art, this programme has advantages below and beneficial effect：
1. voice coil motor is selected, in structure, it is not necessary to transmission mechanism, driving error and platform by volume are reduced；Property
On energy, fast response time, bearing capacity is strong.
2. coordinating grating scale, the positioning precision of platform is higher；Theoretical upper mounting plate, which whether there is, limits big resolution ratio, and its resolution ratio is only
It is limited to displacement transducer；For different positioning accuracy requests, it is only necessary to install the grating reading chi of different precision.
3.DC drivers can complete electric current loop, speed ring, the relative parameters setting of displacement ring, when use environment changes only
The relevant parameter of DC drivers need to be adjusted, just can complete the accurate control to platform.
4. the outgoing position and reaction speed of DC drivers are directly controlled by controller serial communication, the work of its control ring
Pattern is a variety of, need to can only realize the control of the different mode of platform to the corresponding call instruction defecate collection of DC drivers transmission by serial ports
System, can use current control mode, the translational speed to mobile platform is needed when to mobile platform power output requirement accurate control
Speed control mode is used when accurately controlling, displacement control mode is used when high to the positioning accuracy request of mobile platform.
5. mechanical structure can system extension, system reconstructing, to adapt to different application platforms；System meet it is open, can
Transplantability, autgmentability, the requirement of mutual operation.
6. meet the two-dimensional ultraprecise positioning of up and down and back and forth direction.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the structural representation of controller in the utility model.
Embodiment
With reference to specific embodiment, the utility model is described in further detail：
Referring to shown in accompanying drawing 1-2, a kind of voice coil motor described in the present embodiment drives two-dimensional ultraprecise locating platform, including
Platform base 1, mobile platform 2, the increment type grating scale 9 of first and second guide rail, 3,4, first and second voice coil motor 5,6, first and second,
10th, DC drivers 11 and controller 12.
Wherein, platform base 1 is made up of horizontal base 101 and perpendicular base 102, and the first voice coil motor 5 is installed on horizontal base 101
On.
Mobile platform 2 includes moving up and down platform 7 and movable platform 8.
Move up and down platform 7 and be connected in the top of the first voice coil motor 5 and driven by the first voice coil motor 5 along being layed in perpendicular bottom
First guide rail 3 of seat 102 is moved up and down, and by being separately mounted to the reading ruler of the first increment type grating scale 9 of the perpendicular side of base 102
With the reading head conjunction measuring upper and lower displacement amount of the first increment type grating scale 9 for moving up and down the side of platform 7.
Movable platform 8, which is located at, moves up and down the top of platform 7, by installed in the second voice coil loudspeaker voice coil moved up and down on platform 7
Motor 6 drives the second guide rail 4 moved up and down along being layed on platform 7 to move forward and backward, and by being separately mounted to move up and down
The reading head of the second increment type grating scale 10 of the side of platform 7 and the second increment type grating scale 10 of the side of movable platform 8 are read
The number chi conjunction measuring amount of moving forward and backward.
First and second voice coil motor 5,6 installed in the DC drivers 11 of the perpendicular another side of base 102 by driving, and the DC drives
The control command that device 11 is received is sent by the controller 12 for the side of being provided thereon, and passes through string between controller 12 and DC drivers 11
Mouth communication data transmission；
Controller 12 includes control model selecting module 1101, limits gain setting module 1102, control parameter setting mould
Block 1103, displacement and translational speed setting module 1104 and display module 1105.
Wherein, control model selecting module 1101, including current control mode, speed control mode, position control mode；
Gain setting module 1102 is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, improved
The response performance of platform, directly can be connected to set by computer in coarse adjustment with driver；
Control parameter setting module 1103, maximum speed, acceleration and deceleration, back to zero during setting mobile platform movement
Mode；
Displacement and translational speed setting module 1104, the displacement of mobile platform can be as accurate as 1um, for example, set
Surely it is mobile 4000um to move 4000, and translational speed is translational speed when mobile platform reaches stabilized speed, the shifting of platform
Dynamic speed can reach speed quickly, for observation running fix process it can also be provided that slower movement velocity；
Display module 1105, the current various peration datas of display.
The present embodiment course of work is as follows：
Position control mode, the limitation and gain of reasonable set DC drivers and platform movement are selected in controller 12
When maximum speed, acceleration and deceleration, reset mode, displacement and translational speed, will order hair after each module setting
DC drivers 11 are given, DC drivers 11 drive first and second voice coil motor 5,6 according to order, platform 7 is moved up and down so as to drive
Moved up and down along the first guide rail 3, movable platform 8 is moved forward and backward along the second guide rail 4, moves up and down the He of platform 7
The displacement of movable platform 8 is measured by first and second increment type grating scale 9,10 respectively, the display of display module 1105 it is mobile away from
From with the data such as translational speed, complete back to zero after work.
In the present embodiment, from voice coil motor, in structure, it is not necessary to transmission mechanism, driving error and platform are reduced
Volume；In performance, fast response time, bearing capacity is strong.
Coordinate grating scale, the positioning precision of platform is higher；Theoretical upper mounting plate, which whether there is, limits big resolution ratio, its resolution ratio only by
It is limited to displacement transducer；For different positioning accuracy requests, it is only necessary to install the grating reading chi of different precision.
DC drivers can complete electric current loop, and speed ring, the relative parameters setting of displacement ring is only needed when use environment changes
The relevant parameter of DC drivers is adjusted, the accurate control to platform just can be completed.
The outgoing position and reaction speed of DC drivers are directly controlled by controller serial communication, its control ring Working mould
Formula is a variety of, need to can only realize the control of the different mode of platform to the corresponding call instruction defecate collection of DC drivers transmission by serial ports,
Current control mode can be used when to mobile platform power output requirement accurate control, the translational speed to mobile platform needs essence
Speed control mode is really used during control, displacement control mode is used when high to the positioning accuracy request of mobile platform.
Mechanical structure can system extension, system reconstructing, to adapt to different application platforms；System meets open, removable
Plant property, the requirement of autgmentability, mutual operation.
Meet the two-dimensional ultraprecise positioning of up and down and back and forth direction.
Examples of implementation described above are only the preferred embodiment of the utility model, not limit of the present utility model with this
Practical range, therefore the change that all shape, principles according to the utility model are made, all should cover in protection domain of the present utility model
It is interior.
Claims (6)
1. a kind of voice coil motor drives two-dimensional ultraprecise locating platform, it is characterised in that：Including platform base (1), mobile platform
(2), first and second guide rail (3,4), first and second motor (5,6) and first and second grating scale (9,10), wherein, platform base (1)
It is made up of horizontal base (101) and perpendicular base (102), the first motor (5) is installed on horizontal base (101)；Mobile platform (2) includes
Platform (7) and movable platform (8) are moved up and down, platform (7) is moved up and down and is connected in above the first motor (5) by the first electricity
Machine (5) driving is moved up and down along the first guide rail (3) for being layed in perpendicular base (102), and by being separately mounted to perpendicular base (102)
On first grating scale (9) reading ruler of side and first grating scale (9) the reading head conjunction measuring for moving up and down platform (7) side
Bottom offset amount；Movable platform (8), which is located at, to be moved up and down above platform (7), by installed in move up and down on platform (7) the
The second guide rail (4) that two motors (6) driving is moved up and down on platform (7) along being layed in is moved forward and backward, and by being separately mounted to
Move up and down second grating scale (10) reading head of platform (7) side and the second grating scale of movable platform (8) side
(10) the reading ruler conjunction measuring amount of moving forward and backward.
2. a kind of voice coil motor driving two-dimensional ultraprecise locating platform according to claim 1, it is characterised in that：Described
First, two motors (5,6) are voice coil motor.
3. a kind of voice coil motor driving two-dimensional ultraprecise locating platform according to claim 1, it is characterised in that：Described
First, two grating scales (9,10) are increment type grating scale.
4. a kind of voice coil motor driving two-dimensional ultraprecise locating platform according to claim 1, it is characterised in that：Described
First, two motors (5,6) are by DC drivers (11) driving installed in perpendicular base (102) another side, and the DC drivers (11) connect
The control command received is sent by the controller (12) for the side of being provided thereon.
5. a kind of voice coil motor driving two-dimensional ultraprecise locating platform according to claim 4, it is characterised in that：The control
Device (12) processed includes control model selecting module (1101), limits gain setting module (1102), control parameter setting module
(1103), displacement and translational speed setting module (1104) and display module (1105)；
Wherein, control model selecting module (1101), including current control mode, speed control mode, position control mode；
Gain setting module (1102) is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, improves flat
The response performance of platform；
Control parameter setting module (1103), maximum speed, acceleration and deceleration, back to zero side during setting mobile platform movement
Formula；
Displacement and translational speed setting module (1104), set the displacement and translational speed of mobile platform；
Display module (1105), the current various peration datas of display.
6. a kind of voice coil motor driving two-dimensional ultraprecise locating platform according to claim 4, it is characterised in that：The control
Data are transmitted by serial communication between device (12) processed and DC drivers (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720177333.0U CN206504070U (en) | 2017-02-27 | 2017-02-27 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720177333.0U CN206504070U (en) | 2017-02-27 | 2017-02-27 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
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| CN206504070U true CN206504070U (en) | 2017-09-19 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106907550A (en) * | 2017-02-27 | 2017-06-30 | 华南农业大学 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
| WO2019109547A1 (en) * | 2017-12-05 | 2019-06-13 | 深圳市兆威机电股份有限公司 | Anti-shake oscillation mechanism |
| CN111082594A (en) * | 2019-12-31 | 2020-04-28 | 中国科学院空间应用工程与技术中心 | Space linear motion mechanism and on-orbit inspection device |
| CN112202374A (en) * | 2020-09-28 | 2021-01-08 | 广东工业大学 | Voice coil motor micro-positioning platform, motion control method, device and system |
-
2017
- 2017-02-27 CN CN201720177333.0U patent/CN206504070U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106907550A (en) * | 2017-02-27 | 2017-06-30 | 华南农业大学 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
| WO2019109547A1 (en) * | 2017-12-05 | 2019-06-13 | 深圳市兆威机电股份有限公司 | Anti-shake oscillation mechanism |
| CN111082594A (en) * | 2019-12-31 | 2020-04-28 | 中国科学院空间应用工程与技术中心 | Space linear motion mechanism and on-orbit inspection device |
| CN111082594B (en) * | 2019-12-31 | 2021-07-27 | 中国科学院空间应用工程与技术中心 | Space linear motion mechanism and on-orbit inspection device |
| CN112202374A (en) * | 2020-09-28 | 2021-01-08 | 广东工业大学 | Voice coil motor micro-positioning platform, motion control method, device and system |
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