CN206365042U - Vibrating diaphragm and MEMS microphone in a kind of MEMS microphone - Google Patents
Vibrating diaphragm and MEMS microphone in a kind of MEMS microphone Download PDFInfo
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- CN206365042U CN206365042U CN201621322971.9U CN201621322971U CN206365042U CN 206365042 U CN206365042 U CN 206365042U CN 201621322971 U CN201621322971 U CN 201621322971U CN 206365042 U CN206365042 U CN 206365042U
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- Prior art keywords
- vibrating diaphragm
- radiant section
- mems microphone
- pressure relief
- relief device
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- 230000005855 radiation Effects 0.000 claims abstract description 8
- 238000005452 bending Methods 0.000 claims abstract description 7
- 230000008021 deposition Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 230000001771 impaired effect Effects 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 235000006040 Prunus persica var persica Nutrition 0.000 description 1
- 240000006413 Prunus persica var. persica Species 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Abstract
The utility model is related to vibrating diaphragm and MEMS microphone in a kind of MEMS microphone, and gap includes multiple radiant sections from home position to external radiation, and positioned at the radiant section termination and respectively roundabout arc section for bending towards radiant section both sides；The pressure relief device includes the flap surrounded by two neighboring radiant section and two two neighboring arc sections in radiant section termination, and the neck in constraint shape between two arc sections, and the flap is linked together with vibrating diaphragm body by neck.Vibrating diaphragm of the present utility model, on the basis of relieving characteristics are ensured, reduces the vibrating diaphragm area of occupancy, it is ensured that the performance of vibrating diaphragm.
Description
Technical field
The utility model is related to a kind of vibrating diaphragm for sounding, more precisely, is related to shaking in a kind of MEMS microphone
Film；The utility model further relates to a kind of MEMS microphone.
Background technology
MEMS (Micro Electro Mechanical System) microphone is the microphone manufactured based on MEMS technology, vibrating diaphragm therein, back pole plate
It is the important component in MEMS microphone, vibrating diaphragm, back pole plate constitute capacitor and integrated turn for realizing acoustic-electric on silicon
Change.The manufacture craft of traditional vibrating diaphragm is to do layer of oxide layer on a silicon substrate, and the mode deposited is then utilized in oxide layer
Make one layer of vibrating diaphragm, after overdoping, tempering, etch needed for figure, vibrating diaphragm is fixed on by the rivet point at its edge
In substrate.Certainly, in addition it is also necessary to the extraction electrode from vibrating diaphragm, by vibration of membrane of shaking, the distance between vibrating diaphragm and back pole plate are changed,
So as to which voice signal is converted into electric signal.
When MEMS microphone by mechanical shock, blow, fall when, MEMS chip therein can be rushed by larger acoustic pressure
Hit, this often makes vibrating diaphragm be caused rupture impaired by excessive pressure, so as to cause the failure of whole microphone.
Utility model content
A purpose of the present utility model there is provided the vibrating diaphragm in a kind of MEMS microphone.
According to one side of the present utility model there is provided the vibrating diaphragm in a kind of MEMS microphone, including vibrating diaphragm body and
The pressure relief device being constrained on vibrating diaphragm body by gap；The gap includes multiple radiation from home position to external radiation
Section, and positioned at the radiant section termination and respectively roundabout arc section for bending towards radiant section both sides；The pressure relief device is included by adjacent
The flap that two radiant sections and two two neighboring arc sections in radiant section termination are surrounded, and positioned at two arc sections it
Between the neck in constraint shape, the flap linked together with vibrating diaphragm body by neck.
Alternatively, the radiant section is uniformly distributed in a circumferential direction at least provided with three.
Alternatively, the both sides of the neck are along its axisymmetrical.
Alternatively, the radiant section is linearly or curve-like.
Alternatively, the pressure relief device is provided with one, is distributed in the central area of vibrating diaphragm body.
Alternatively, the pressure relief device is provided with multiple, and the plurality of pressure relief device is evenly distributed on the circumference of vibrating diaphragm body
On direction.
According to another aspect of the present utility model, a kind of MEMS microphone, including above-mentioned vibrating diaphragm are additionally provided.
Alternatively, the gap is formed when deposition forms vibrating diaphragm body by way of etching.
Vibrating diaphragm of the present utility model, during original state, flap is integrally flushed with vibrating diaphragm body, that is to say, that at flap
In closed mode；When by such as mechanical shock, blow, fall brought larger sound pressure when, flap can using neck as branch
Point is tilted up or down, so that effective pressure release path is formd, to reach the purpose of pressure release；For an angle, make
Vibrating diaphragm can bear the temporal pressure produced by big acoustic pressure or falling process, it is to avoid chip it is impaired.
Pressure relief device of the present utility model, on the basis of relieving characteristics are ensured, reduces the vibrating diaphragm area of occupancy, it is ensured that
The performance of vibrating diaphragm.
It is of the present utility model other by referring to the drawings to the detailed description of exemplary embodiment of the present utility model
Feature and its advantage will be made apparent from.
Brief description of the drawings
The accompanying drawing for constituting a part for specification describes embodiment of the present utility model, and uses together with the description
In explanation principle of the present utility model.
Fig. 1 is the structural representation of the utility model vibrating diaphragm.
Fig. 2 is the structural representation in gap in Fig. 1.
Fig. 3 is the structural representation of one of flap in Fig. 2.
Fig. 4 is the schematic diagram of second of embodiment of the utility model vibrating diaphragm.
Fig. 5 is the schematic diagram of the third embodiment of the utility model vibrating diaphragm.
Fig. 6 is the schematic diagram of the 4th kind of embodiment of the utility model vibrating diaphragm.
Embodiment
Various exemplary embodiments of the present utility model are described in detail now with reference to accompanying drawing.It should be noted that：Unless another
Illustrate outside, the part and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments is not limited
Make scope of the present utility model.
The description only actually at least one exemplary embodiment is illustrative below, never as to this practicality
New and its application or any limitation used.
It may be not discussed in detail for technology and equipment known to person of ordinary skill in the relevant, but in appropriate situation
Under, the technology and equipment should be considered as a part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it need not be further discussed in subsequent accompanying drawing in individual accompanying drawing.
With reference to Fig. 1, Fig. 2, the utility model provides the vibrating diaphragm in a kind of MEMS microphone, it include vibrating diaphragm body 1 with
And at least one pressure relief device a being constrained on vibrating diaphragm body 1 by gap, set on vibrating diaphragm body 1 according to predetermined shape
Put gap, and described pressure relief device a is defined by the gap on vibrating diaphragm body 1.
The gap includes multiple radiant sections from home position to external radiation, and positioned at radiant section termination and distinguishes circuitous
Arc section from back bending to radiant section both sides；Each radiant section is from home position to external radiation, in the outside of each radiant section
Termination undertakes two arc sections, and two arc sections extend from the tip position of radiant section towards the outside of radiant section, and
The final both sides for bending towards radiant section roundabout respectively.
The pressure relief device a includes being enclosed by two neighboring radiant section and two two neighboring arc sections in radiant section termination
Into flap 2, and the neck 20 in constraint shape between two arc sections, the flap 2 passes through with vibrating diaphragm body 1
Neck 20 links together.The neck 20 is relative to flap 2 in constraint shape so that flap 2 can be fulcrum with the neck 20
Upwardly or downwardly tilt, to form the path of air.
Specifically, with reference to Fig. 2, the first radiant section 3, the second radiant section 4 are from the position in the center of circle to external radiation, therebetween
Angle can be decided according to the actual requirements.The first arc section a of non-close is provided with the outside termination of first radiant section 3
30th, the first arc section b 31, two arc sections prolong from the tip position of the first radiant section 3 towards the outside of the first radiant section 3
Stretch, and the final roundabout both sides for bending towards the first radiant section 3.Likewise, being provided with the outside termination of second radiant section 4 non-
The second arc section a 40, the second arc section b 41 of closing, two arc sections are from the tip position of the second radiant section 4 towards the
The outside extension of two radiant sections 4, and the final roundabout both sides for bending towards the second radiant section 4.
First radiant section 3, the second radiant section 4 and the first adjacent arc section b 31, the second arc section a 40 enclose
Into flap 2, and position between the first arc section b 31, the second arc section a 40 forms the neck 20 in constraint shape,
So that the flap 2 is linked together by the neck 20 and vibrating diaphragm body 1, with reference to Fig. 1, Fig. 2, Fig. 3.The flap 2 is in the peach heart
Shape, it is preferred that the both sides of the neck 20 are along its axisymmetrical.And the selection of the shape of neck 20 can be by adjusting circular arc
The shape of section is realized.
Vibrating diaphragm of the present utility model, during original state, flap is integrally flushed with vibrating diaphragm body, that is to say, that at flap
In closed mode；When by such as mechanical shock, blow, fall brought larger sound pressure when, flap can using its neck as
Fulcrum is tilted up or down, so that effective pressure release path is formd, to reach the purpose of pressure release；For an angle,
Allow the vibrating diaphragm to bear the temporal pressure produced by big acoustic pressure or falling process, it is to avoid chip it is impaired.
Pressure relief device a of the present utility model can be provided with one, and pressure relief device a can be distributed in vibrating diaphragm body 1
Central area, with reference to Fig. 1.The pressure relief device a can also be provided with multiple, and the plurality of pressure relief device a is evenly distributed on vibrating diaphragm
On the circumferencial direction of body 1.
Radiant section of the present utility model is preferably at least provided with three, is uniformly distributed in a circumferential direction.Fig. 4, which is shown, to be set
The angle being equipped between the schematic diagram of eight radiant sections, two neighboring radiant section is 45 °.Fig. 5, which is shown, is provided with 12 spokes
The angle penetrated between the schematic diagram of section, two neighboring radiant section is 30 °.Fig. 6 shows the schematic diagram for being provided with three radiant sections,
Angle between two neighboring radiant section is 120 °.Fig. 1 shows the schematic diagram for being provided with six radiant sections, two neighboring radiation
Angle between section is 60 °.That is, those skilled in the art can select according to demand flap quantity and radiant section it
Between angle.Under identical area, angle is smaller, and flap is then easier to open, the angle between radiant section be preferably 30 ° extremely
120°。
Radiant section of the present utility model can be linearly, it would however also be possible to employ curve-like.Wherein, two neighboring radiant section is handed over
The position connect forms cutting-edge structure, and this allows for the flap and is easier to be opened, to ensure the performance of vibrating diaphragm.
Pressure relief device of the present utility model, its is simple in construction, on the basis of relieving characteristics are ensured, it is possible to reduce occupancy
Vibrating diaphragm area, so as to ensure that the performance of vibrating diaphragm.
Vibrating diaphragm of the present utility model can be applied in MEMS microphone, so that the acoustic resistive pressure energy power of MEMS microphone is improved,
Therefore, the utility model additionally provides a kind of MEMS microphone, it includes substrate, backplane, and constitutes flat electricity with backplane
Hold the above-mentioned vibrating diaphragm of structure.This frame mode of backplane and vibrating diaphragm belongs to the common knowledge of those skilled in the art.In system
When making MEMS microphone, backplane, vibrating diaphragm are formed by way of deposition, etching.Above-mentioned gap can be in deposition
When forming vibrating diaphragm, formed by way of etching.
Although some specific embodiments of the present utility model are described in detail by example, this area
It is to be understood by the skilled artisans that above example is merely to illustrate, rather than in order to limit scope of the present utility model.This
Field it is to be understood by the skilled artisans that can be in the case where not departing from scope and spirit of the present utility model, to above example
Modify.Scope of the present utility model is defined by the following claims.
Claims (8)
1. the vibrating diaphragm in a kind of MEMS microphone, it is characterised in that：By gap system including vibrating diaphragm body and on vibrating diaphragm body
Into pressure relief device；The gap includes multiple radiant sections from home position to external radiation, and positioned at radiant section termination simultaneously
The roundabout arc section for bending towards radiant section both sides respectively；The pressure relief device includes being radiated by two neighboring radiant section and this two
The flap that the two neighboring arc sections of Duan Duantou are surrounded, and the neck in constraint shape between two arc sections, it is described
Flap is linked together with vibrating diaphragm body by neck.
2. vibrating diaphragm according to claim 1, it is characterised in that：The radiant section is evenly distributed at least provided with three
On circumferencial direction.
3. vibrating diaphragm according to claim 1, it is characterised in that：The both sides of the neck are along its axisymmetrical.
4. vibrating diaphragm according to claim 1, it is characterised in that：The radiant section is linearly or curve-like.
5. the vibrating diaphragm according to any one of Claims 1-4, it is characterised in that：The pressure relief device is provided with one, distribution
In the central area of vibrating diaphragm body.
6. the vibrating diaphragm according to any one of Claims 1-4, it is characterised in that：The pressure relief device is provided with multiple, and this is more
Individual pressure relief device is evenly distributed on the circumferencial direction of vibrating diaphragm body.
7. a kind of MEMS microphone, it is characterised in that：Including the vibrating diaphragm as described in claim any one of 1-6.
8. MEMS microphone according to claim 7, it is characterised in that：The gap when deposition forms vibrating diaphragm body,
Formed by way of etching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621322971.9U CN206365042U (en) | 2016-12-05 | 2016-12-05 | Vibrating diaphragm and MEMS microphone in a kind of MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621322971.9U CN206365042U (en) | 2016-12-05 | 2016-12-05 | Vibrating diaphragm and MEMS microphone in a kind of MEMS microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206365042U true CN206365042U (en) | 2017-07-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621322971.9U Active CN206365042U (en) | 2016-12-05 | 2016-12-05 | Vibrating diaphragm and MEMS microphone in a kind of MEMS microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206365042U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110022519A (en) * | 2018-01-08 | 2019-07-16 | 美商富迪科技股份有限公司 | MEMS condenser microphone |
| CN110636417A (en) * | 2018-06-25 | 2019-12-31 | 台湾积体电路制造股份有限公司 | Microphone and method of manufacturing microphone |
| US11381917B2 (en) * | 2016-08-31 | 2022-07-05 | Goertek, Inc. | Vibration diaphragm in MEMS microphone and MEMS microphone |
-
2016
- 2016-12-05 CN CN201621322971.9U patent/CN206365042U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11381917B2 (en) * | 2016-08-31 | 2022-07-05 | Goertek, Inc. | Vibration diaphragm in MEMS microphone and MEMS microphone |
| CN110022519A (en) * | 2018-01-08 | 2019-07-16 | 美商富迪科技股份有限公司 | MEMS condenser microphone |
| CN110022519B (en) * | 2018-01-08 | 2020-12-22 | 美商富迪科技股份有限公司 | Micro-electro-mechanical system microphone |
| CN110636417A (en) * | 2018-06-25 | 2019-12-31 | 台湾积体电路制造股份有限公司 | Microphone and method of manufacturing microphone |
| US11089408B2 (en) | 2018-06-25 | 2021-08-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS microphone having diaphragm |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200611 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 266104 Laoshan Qingdao District North House Street investment service center room, Room 308, Shandong Patentee before: GOERTEK TECHNOLOGY Co.,Ltd. |