CN212851005U - Vibrating diaphragm, capacitive sensor and microphone - Google Patents
Vibrating diaphragm, capacitive sensor and microphone Download PDFInfo
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- CN212851005U CN212851005U CN202022280961.6U CN202022280961U CN212851005U CN 212851005 U CN212851005 U CN 212851005U CN 202022280961 U CN202022280961 U CN 202022280961U CN 212851005 U CN212851005 U CN 212851005U
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- 230000007306 turnover Effects 0.000 claims abstract description 8
- 239000003990 capacitor Substances 0.000 claims description 6
- 238000010276 construction Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 7
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 230000008719 thickening Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
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Abstract
The utility model discloses a vibrating diaphragm, capacitive sensor and microphone. The vibrating diaphragm comprises a vibrating diaphragm main body, an air leakage structure and a thickened part; an air leakage opening is formed in the vibrating diaphragm main body; the air release structure comprises a valve flap and a connecting part, the valve flap and the vibrating diaphragm main body are arranged in the air release opening, the connecting part is connected with the valve flap and the vibrating diaphragm main body, and the valve flap can turn over relative to the connecting part so as to adjust the opening of the air release opening; the thickened portion is provided on the connecting portion. The utility model discloses technical scheme has improved the compressive strength of disappointing structure, further reaches the compressive strength's that improves the vibrating diaphragm effect, has prolonged the life of vibrating diaphragm.
Description
Technical Field
The utility model relates to a microphone technical field, in particular to vibrating diaphragm, capacitive sensor and microphone.
Background
A capacitive MEMS (micro electro mechanical system) sensor is widely used in a microphone, and the capacitive MEMS sensor includes a diaphragm and a back plate to form a capacitor structure, thereby implementing a function of converting an acoustic signal into an electrical signal. When the microphone receives striking, blowing or falls, the vibrating diaphragm of capacitanc MEMS sensor arouses vibrating diaphragm distortion and breaks easily when receiving the excess atmospheric pressure, on this basis, generally adopts to set up the release valve on the vibrating diaphragm and increases the anti atmospheric pressure ability, but current release valve structure when receiving great atmospheric pressure, also takes place the phenomenon of breaking easily, and leads to the microphone to scrap.
The above is only for the purpose of assisting understanding of the technical solutions of the present application, and does not represent an admission that the above is prior art.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a vibrating diaphragm aims at solving the easy cracked problem of vibrating diaphragm to improve the anti atmospheric pressure ability of vibrating diaphragm, increase of service life.
In order to achieve the above purpose, the utility model provides a vibrating diaphragm, which comprises a vibrating diaphragm main body, an air release structure and a thickened part; the vibrating diaphragm main body is provided with an air leakage port; the air release structure comprises a valve flap and a connecting part, the valve flap is arranged on the air release opening, the connecting part is connected with the valve flap and the vibrating diaphragm main body, and the valve flap can turn over relative to the connecting part so as to adjust the opening degree of the air release opening; the thickened portion is provided on the connecting portion.
In an embodiment of the present invention, the valve flap, the connecting portion and the vibrating diaphragm main body are of an integral structure.
In an embodiment of the present invention, the thickened portion and the connecting portion are an integral structure.
In an embodiment of the present invention, the thickness dimension of the thickened portion is less than or equal to 1 um.
In an embodiment of the present invention, a gap is formed between the valve flap and the diaphragm main body.
In an embodiment of the present invention, the gap is disposed in an arc shape, and an arc radian of the gap is a major arc; the connecting portion is formed between the two free end portions of the slit.
The utility model discloses an embodiment, the structure of disappointing includes at least two the valve clack, each the valve clack with form one between the vibrating diaphragm main part the gap, at least two sections the gap connects gradually, adjacent two sections the whole S type that is in the gap, and is central symmetry for its position of connecting.
The utility model relates to an embodiment, be equipped with a plurality ofly in the vibrating diaphragm main part the disappointing mouth, it is a plurality of disappointing mouth evenly distributed is in the circumferencial direction of vibrating diaphragm main part, each disappointing mouth corresponds and sets up one the structure of disappointing.
In order to achieve the above object, the present invention further provides a capacitive sensor comprising a base, a support member, a back plate and the above vibrating diaphragm; the vibrating diaphragm is arranged on the base, and the supporting piece is arranged on one side of the vibrating diaphragm, which is deviated from the base, and is supported between the vibrating diaphragm and the back pole plate to form a capacitor structure. The vibrating diaphragm comprises a vibrating diaphragm main body, an air leakage structure and a thickened part; the vibrating diaphragm main body is provided with an air leakage port; the air release structure comprises a valve flap and a connecting part, the valve flap is arranged on the air release opening, the connecting part is connected with the valve flap and the vibrating diaphragm main body, and the valve flap can turn over relative to the connecting part so as to adjust the opening degree of the air release opening; the thickened portion is provided on the connecting portion.
In order to achieve the above object, the present invention further provides a microphone, including the above capacitive sensor; the capacitive sensor comprises a base, a supporting piece, a back plate and the diaphragm; the vibrating diaphragm is arranged on the base, and the supporting piece is arranged on one side of the vibrating diaphragm, which is deviated from the base, and is supported between the vibrating diaphragm and the back pole plate to form a capacitor structure. The vibrating diaphragm comprises a vibrating diaphragm main body, an air leakage structure and a thickened part; the vibrating diaphragm main body is provided with an air leakage port; the air release structure comprises a valve flap and a connecting part, the valve flap is arranged on the air release opening, the connecting part is connected with the valve flap and the vibrating diaphragm main body, and the valve flap can turn over relative to the connecting part so as to adjust the opening degree of the air release opening; the thickened portion is provided on the connecting portion.
The utility model discloses offer the mouth that loses heart that is used for the air current to pass through in the vibrating diaphragm main part of technical scheme vibrating diaphragm, the valve clack setting of disappointing structure is in mouthful department that loses heart, be connected through connecting portion between this valve clack and the vibrating diaphragm main part, make the valve clack can be for connecting portion upset motion in order to adjust the aperture of disappointing mouth according to atmospheric pressure size, thereby guarantee atmospheric pressure and to the impact force of vibrating diaphragm main part in vibrating diaphragm main part can bear the within range, and simultaneously, set up thickening portion in connecting portion department, with the stress intensity of reinforcing connecting portion department, prevent connecting portion fracture or break, thereby the joint strength of valve clack and vibrating diaphragm main part has been guaranteed, and then improved the compressive strength of disappointing structure, further reach the effect that improves the compressive.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an embodiment of a diaphragm according to the present invention;
FIG. 2 is a schematic structural view of an air leaking structure and a thickened portion according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of an embodiment of the capacitive sensor of the present invention.
The reference numbers illustrate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 100 | Vibrating diaphragm |
101 | |
| 200 | |
210 | Valve |
| 220 | Connecting |
230 | |
| 300 | Thickened |
400 | |
| 500 | |
600 | Back electrode plate |
The objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as upper, lower, left, right, front and rear … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model provides a vibrating diaphragm.
In the embodiment of the present invention, as shown in fig. 1, fig. 2 and fig. 3, the diaphragm includes a diaphragm main body 100, a venting structure 200 and a thickened portion 300; the diaphragm main body 100 is provided with an air release opening 101; the air release structure 200 comprises a valve flap 210 arranged in the air release opening 101 and a connecting part 220, the connecting part 220 connects the valve flap 210 with the diaphragm main body 100, and the valve flap 210 can be turned over relative to the connecting part 220 to adjust the opening of the air release opening 101; the thickened portion 300 is provided on the connecting portion 220.
The diaphragm main body 100 is provided with an air release opening 101 for air flow circulation, so that the effects of air release and pressure release are realized. The valve flap 210 of the air release structure 200 is arranged at the air release opening 101 and can be turned over relative to the connecting part 220 to realize the function of adjusting the opening of the air release opening 101, and when the air pressure is high due to high impact, the valve flap 210 is turned over to increase the opening of the air release opening 101, so that the speed of air flow circulation is increased, and the efficiency of pressure release is increased; when the impact is not received or the impact received is small (corresponding to the initial state), the valve flap 210 is inverted to reduce the opening degree at the air-escape opening 101. Thereby realizing the functions of improving the compressive strength of the diaphragm and preventing the diaphragm main body 100 from cracking.
Valve clack 210 is connected with vibrating diaphragm main part 100 through connecting portion 220, valve clack 210 is with connecting portion 220 to carry out the upset motion as the atress portion, in order to prevent that valve clack 210 is at motion in-process connecting portion 220 fracture or break, set up thickening portion 300 on this connecting portion 220, with the atress intensity of increase connecting portion 220, and then improved the joint strength of valve clack 210 and vibrating diaphragm main part 100, the effect of the intensity of reinforcing run-flat structure 200 has been reached, the atmospheric pressure resistance intensity of vibrating diaphragm has further been improved.
It can be understood that the specific structure of the air release structure 200 may be determined according to actual situations, for example, the air release structure 200 may be integrally formed with the diaphragm main body 100, or may be formed separately, as long as it is ensured that the valve flap 210 can turn over relative to the connecting portion 220 according to the magnitude of the air pressure, and the opening of the air release opening 101 is adjusted.
In the practical application process, the specific structure of the thickened portion 300 may also be determined according to the practical situation, and optionally, the thickened portion 300 may be configured as a rib structure or a bump structure, etc. to ensure the stress strength at the connection portion 220.
The utility model discloses offer the mouth 101 that loses heart that is used for the air current to pass through on the vibrating diaphragm main part 100 of technical scheme vibrating diaphragm, the valve clack 210 of disappointing structure 200 sets up in the mouth 101 department that loses heart, be connected through connecting portion 220 between this valve clack 210 and the vibrating diaphragm main part 100, make valve clack 210 can for connecting portion 220 upset motion in order to adjust the aperture of losing heart 101 according to atmospheric pressure size, thereby guarantee atmospheric pressure and in the impact force of vibrating diaphragm main part 100 can bear the scope at vibrating diaphragm main part 100, and simultaneously, set up thickening portion 300 in connecting portion 220 department, with the stress strength of reinforcing connecting portion 220 department, prevent connecting portion 220 fracture or break, thereby the joint strength of valve clack 210 with vibrating diaphragm main part 100 has been guaranteed, and then improved the compressive strength of losing heart structure 200, further reach the effect that improves the compressive strength of vibrating diaphragm.
In order to better adjust the impact of the gas impact on the diaphragm body 100, referring to fig. 1 and 2, the valve flap 210, the connection portion 220, and the diaphragm body 100 are an integral structure. At this time, the air release structure 200 is integrally formed with the diaphragm main body 100, and it can be understood that the diaphragm main body 100 forms the valve flap 210 in the process of opening the air release opening 101, and when the air flow impacts, the valve flap 210 is driven by the air flow to turn over relative to the diaphragm main body 100, so as to adjust the opening degree of the air release opening 101. Optionally, the diaphragm body 100, the valve flap 210, and the connection portion 220 are deposited by using a polysilicon material.
Alternatively, referring to fig. 1 and 2, the thickened portion 300 is of unitary construction with the connecting portion 220. On the basis of the above embodiment, the connecting portion 220 and the diaphragm main body 100 are integrated, and the thickened portion 300 and the diaphragm main body 100 are integrated, thereby saving the process flow. Alternatively, the deposition thickness at the connection portion 220 may be increased to form the thickened portion 300 while in the deposition process.
In order to increase the strength of the connection portion 220 without affecting the vibration effect of the diaphragm, the thickness dimension of the thickened portion 300 is less than or equal to 1 um. Alternatively, the thickness dimension of the thickened portion 300 may be 0.5um, 0.6um, 0.7um, 0.8um, 0.9um, or 1 um.
In an embodiment of the present invention, referring to fig. 2, a gap 230 is formed between the valve flap 210 and the diaphragm main body 100. When the valve flap 210 is turned to the position of the minimum opening degree of the air release opening 101, that is, when the valve flap 210 is turned to be flush with the diaphragm main body 100, the air release opening 101 has a gap 230 between the valve flap 210 and the diaphragm main body 100, so that when the valve flap 210 is turned to the position of the minimum opening degree of the air release opening 101, the air flow can still flow out through the gap 230 to play a role of pressure release.
In order to enable the impact force of the air flow to better adjust the movement of the valve flap 210, referring to fig. 2, the slit 230 is arranged in an arc shape, and the arc radian of the slit 230 is a major arc; the two free ends of the slit 230 form a connection 220 therebetween. It can be understood that the position of the gap 230 is a position where the valve flap 210 is disconnected from the diaphragm body 100, and a position where the valve flap 210 is connected to the diaphragm body 100, that is, the connection portion 220, is between two free ends of the gap 230. Alternatively, in order to make the flap 210 more flexible in the turning motion, the arc curvature of the slit 230 is a major arc (the major arc is a curvature greater than 180 ° and smaller than 360 °), so that the connection portion 220 has a gradually-restricted neck-shaped structure, and the size of the connection position between the flap 210 and the diaphragm main body 100 is reduced, and thus the flap 210 is more easily turned upward or downward using the connection portion 220 as a fulcrum to form a passage for the air flow. On the basis, the connecting portion 220 is a weak portion of the diaphragm, so that the connecting portion 220 is provided with a thickened portion 300 to increase the strength and prevent the connecting portion 220 from being broken.
In an embodiment of the present invention, referring to fig. 2, the air release structure 200 includes at least two valve flaps 210, a gap 230 is formed between each valve flap 210 and the diaphragm main body 100, at least two segments of gaps 230 are connected in sequence, and two adjacent segments of gaps 230 are integrally S-shaped and are centrosymmetric with respect to the connecting position.
The air release structure 200 includes at least two valve flaps 210, so that the diaphragm body 100 can release air simultaneously through a plurality of air release channels when being impacted by air flow, so as to split the impact force of the air flow and prevent the phenomenon of breakage caused by too large impact force when only a single air release channel is impacted. Gaps 230 are formed between the valve flap 210 and the diaphragm main body 100, when the number of the valve flaps 210 is multiple, the multiple sections of gaps 230 are sequentially connected, each two adjacent sections of gaps 230 are integrally S-shaped and are centrosymmetric relative to the connecting position, and at this time, a connecting part 220 is formed between the connecting position of the two adjacent sections of gaps 230 and the free end of any one of the gaps 230.
It can be understood that, two adjacent valve flaps 210 are symmetrically arranged, and when the impact is large, the two valve flaps 210 with symmetrical structures can turn over and move by taking respective connecting parts 220 as fulcrums, so that an effective pressure relief channel is formed, and the purpose of pressure relief is achieved. The structure of two adjacent symmetrical valve flaps 210 is adopted, so that the size of the valve flaps 210 can meet the requirement without too much excrement, and the performance requirement of the diaphragm is ensured.
The utility model discloses an embodiment, referring to fig. 1, be equipped with a plurality of disappointing mouths 101 on vibrating diaphragm main part 100, a plurality of disappointing mouths 101 evenly distributed is in the circumferencial direction of vibrating diaphragm main part 100, and each disappointing mouth 101 corresponds and sets up a structure 200 that loses heart. It can be understood that the number of the air-bleed structures 200 is plural, and the plural air-bleed structures 200 are uniformly distributed in the circumferential direction of the diaphragm main body 100 so as to balance the stress position of the diaphragm body 100 and avoid the distortion or the crack of the diaphragm body 100 caused by the disturbance of the air flow.
The utility model discloses still provide a capacitive sensor, refer to fig. 3, this capacitive sensor includes base 400, support piece 500, backplate 600 and vibrating diaphragm, and the concrete structure of this vibrating diaphragm refers to above-mentioned embodiment, because this capacitive sensor has adopted all technical scheme of above-mentioned all embodiments, consequently has all beneficial effects that the technical scheme of above-mentioned embodiment brought at least, and the repeated description is no longer given here. Wherein, the vibrating diaphragm is disposed on the base 400, and the supporting member 500 is disposed on a side of the vibrating diaphragm departing from the base 400, and is supported between the vibrating diaphragm and the back plate 600 to form a capacitor structure. The diaphragm and the backplate 600 are supported by the support member 500, so that a dielectric layer is provided between the diaphragm and the backplate 600, thereby forming a parallel plate capacitor structure of the diaphragm and the backplate 600. The sound wave is conducted to the vibrating diaphragm so that the vibrating diaphragm vibrates, and the vibration of the vibrating diaphragm enables the distance between the vibrating diaphragm and the back plate 600 to be changed, so that the change of the capacitance is realized, and the effect of converting the sound signal into the electric signal is achieved.
The utility model discloses still provide a microphone, this microphone includes capacitive sensor, and this capacitive sensor's concrete structure refers to above-mentioned embodiment, because this microphone has adopted the whole technical scheme of above-mentioned all embodiments, consequently has all beneficial effects that the technical scheme of above-mentioned embodiment brought at least, and the repeated description is no longer given here. The microphone can be applied to electronic equipment such as mobile phones, computers or wearable equipment.
The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structure changes made by the contents of the specification and the drawings under the inventive concept of the present invention, or the direct/indirect application in other related technical fields are included in the patent protection scope of the present invention.
Claims (10)
1. A diaphragm, comprising:
the vibrating diaphragm comprises a vibrating diaphragm main body, wherein an air leakage opening is formed in the vibrating diaphragm main body;
the gas release structure comprises a valve flap and a connecting part, the valve flap is arranged on the gas release opening, the connecting part is connected with the valve flap and the vibrating diaphragm main body, and the valve flap can turn over relative to the connecting part so as to adjust the opening degree of the gas release opening; and
a thickened portion provided on the connecting portion.
2. The diaphragm of claim 1, wherein the valve flap, the connecting portion, and the diaphragm body are of an integral structure.
3. The diaphragm of claim 2, wherein the thickened portion is of unitary construction with the connecting portion.
4. The diaphragm of any of claims 1-3, wherein the thickness dimension of the thickened portion is less than or equal to 1 um.
5. The diaphragm of any one of claims 1 to 3, wherein a gap is formed between the valve flap and the diaphragm body.
6. The diaphragm of claim 5, wherein the gap is arc-shaped, and the arc radian of the gap is a major arc; the connecting portion is formed between the two free end portions of the slit.
7. The diaphragm of claim 6, wherein the air-bleed structure includes at least two valve flaps, each valve flap forms a gap with the diaphragm body, at least two segments of the gaps are sequentially connected, and two adjacent segments of the gaps are integrally S-shaped and are centrosymmetric with respect to the connecting position.
8. The diaphragm according to any one of claims 1 to 3, wherein a plurality of said air-release openings are provided on said diaphragm main body, said plurality of said air-release openings are uniformly distributed in the circumferential direction of said diaphragm main body, and each of said air-release openings is correspondingly provided with one of said air-release structures.
9. A capacitive sensor comprising a base, a support, a backplate and a diaphragm as claimed in any one of claims 1 to 8; the vibrating diaphragm is arranged on the base, and the supporting piece is arranged on one side of the vibrating diaphragm, which is deviated from the base, and is supported between the vibrating diaphragm and the back pole plate to form a capacitor structure.
10. A microphone comprising a capacitive sensor according to claim 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022280961.6U CN212851005U (en) | 2020-10-13 | 2020-10-13 | Vibrating diaphragm, capacitive sensor and microphone |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022280961.6U CN212851005U (en) | 2020-10-13 | 2020-10-13 | Vibrating diaphragm, capacitive sensor and microphone |
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| Publication Number | Publication Date |
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| CN212851005U true CN212851005U (en) | 2021-03-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022280961.6U Active CN212851005U (en) | 2020-10-13 | 2020-10-13 | Vibrating diaphragm, capacitive sensor and microphone |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
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2020
- 2020-10-13 CN CN202022280961.6U patent/CN212851005U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114125664A (en) * | 2021-11-15 | 2022-03-01 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
| WO2023083104A1 (en) * | 2021-11-15 | 2023-05-19 | 歌尔微电子股份有限公司 | Sensor and wearable device |
| CN114125664B (en) * | 2021-11-15 | 2024-03-19 | 歌尔微电子股份有限公司 | Sensor and wearable equipment |
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Address after: 266101 f / F, phase II, Qingdao International Innovation Park, 1 Keyuan Weiyi Road, Laoshan District, Qingdao City, Shandong Province Patentee after: Geer Microelectronics Co.,Ltd. Address before: Room 103, 396 Songling Road, Laoshan District, Qingdao City, Shandong Province 266100 Patentee before: Goer Microelectronics Co.,Ltd. |