A kind of jet post and solar silicon wafers drier
Technical field
The utility model is related to solar silicon wafers drier technical field, more particularly to a kind of jet post and solar silicon wafers
Drier.
Background technology
Solar silicon wafers drier of the prior art is typically dried by the way of high temperature adds jet, prior art
In jet post on set valve quantity it is few, the gas flow of ejection is few.As shown in figure 1, due to CDA gases (CLEAN DRY
AIR, i.e. compression drying air) only enter from the upper end of jet post, and it is identical and equidistant to be arranged on the valve size on jet post
In distribution, therefore the valve of jet post upper end and the valve Existential Space of jet post lower end and gas sprays temporal difference,
The uniformity for causing CDA gases to be distributed in chamber is had differences so as to have influence on the drying time.
Utility model content
First purpose of the present utility model is to provide a kind of jet post, and it causes that the distribution of gas is more uniform, subtracts
The drying time is lacked.
Second purpose of the present utility model is to provide a kind of solar silicon wafers drier comprising above-mentioned jet post, its
So that distribution of the gas in drying machine cavity is more uniform, the drying time is reduced.
It is that, up to first purpose, the utility model uses following technical scheme:
A kind of jet post, the top of jet post is provided with air inlet, and the side wall of jet post is provided with several through holes, some
Individual through hole is arranged along the side wall of jet post in array, and the diameter of several through holes is in from top to bottom ladder along the side wall of jet post
Type increases.
Wherein, the side wall of jet post is disposed with the first porose area, the second porose area and the 3rd porose area, through hole bag from top to bottom
Include and be arranged on several first stomatas of the first porose area, be arranged on several second stomatas of the second porose area and be arranged on the 3rd hole
Several the 3rd stomatas in area, the diameter of the diameter less than the second stomata of the first stomata, the diameter of the second stomata is less than the 3rd gas
The diameter in hole.
Wherein, several first stomatas are uniformly distributed in the first porose area, and several second stomatas uniformly divide in the second porose area
Cloth, several the 3rd stomatas are uniformly distributed in the 3rd porose area.
Wherein, the equal length of the first porose area, the second porose area and the 3rd porose area.
Wherein, a diameter of 0.1mm of the first stomata, a diameter of 0.2mm of the second stomata, the 3rd stomata it is a diameter of
0.3mm。
Wherein, a diameter of 0.1~0.3mm of through hole.
Wherein, the length of jet post is 6~10cm, and the external diameter of jet post is 2~3cm.
It is that, up to second purpose, the utility model uses following technical scheme:
A kind of solar silicon wafers drier, including base plate, circular several silicon wafer bearing boxes for being distributed in plate upper surface
And the cover plate being oppositely arranged with base plate, the center of base plate is provided with above-mentioned jet post.
The beneficial effects of the utility model:A kind of jet post, the top of jet post is provided with air inlet, the side wall of jet post
Several through holes are provided with, several through holes are arranged along the side wall of jet post in array, and the diameter of several through holes is along jet
The side wall of post increases in stepped from top to bottom.Jet post of the present utility model and solar silicon wafers drier, gas is from air inlet
Mouth enters inside jet post, and the diameter of several through holes increases in stepped from top to bottom along the side wall of jet post so that be located at
Being relatively large in diameter for the through hole of jet post lower end, so that the distribution of gas is more uniform, reduces the drying time.
Brief description of the drawings
Fig. 1 is the structural representation of the jet post of prior art.
Fig. 2 is the structural representation of jet post of the present utility model.
Reference is as follows:
1- jet posts;11- air inlets;12- through holes;The porose areas of 13- first;The stomatas of 131- first;The porose areas of 14- second;141-
Second stomata;The porose areas of 15- the 3rd;The stomatas of 151- the 3rd
Specific embodiment
The technical solution of the utility model is further illustrated with reference to Fig. 2 and by specific embodiment.
As shown in Fig. 2 a kind of jet post 1, the top of jet post 1 is provided with air inlet 11, and the side wall of jet post 1 is provided with
Several through holes 12, several through holes 12 are arranged along the side wall of jet post 1 in array, and the diameter of several through holes 12 is along jet
The side wall of post 1 increases in stepped from top to bottom.Jet post 1 of the present utility model, gas enters in jet post 1 from air inlet 11
Portion, the diameter of several through holes 12 increases in stepped from top to bottom along the side wall of jet post 1 so that positioned at the lower end of jet post 1
Through hole 12 be relatively large in diameter so that the distribution of gas is more uniform, reduce the drying time.
In the present embodiment, as shown in Fig. 2 the side wall of jet post 1 is disposed with the first porose area 13, the second hole from top to bottom
The porose area 15 of area 14 and the 3rd, through hole 12 includes being arranged on several first stomatas 131 of the first porose area 13, is arranged on the second porose area
14 several second stomatas 141 and several the 3rd stomatas 151 for being arranged on the 3rd porose area 15, the diameter of the first stomata 131
Less than the diameter of the second stomata 141, the diameter of the diameter less than the 3rd stomata 151 of the second stomata 141.
In the present embodiment, several first stomatas 131 are uniformly distributed in the first porose area 13, and several second stomatas 141 exist
Second porose area 14 is uniformly distributed, and several the 3rd stomatas 151 are uniformly distributed in the 3rd porose area 15 so that the distribution of gas is more equal
It is even.Preferably, the equal length of the first porose area 13, the second porose area 14 and the 3rd porose area 15.
In the present embodiment, a diameter of 0.1~0.3mm of through hole 12, a diameter of 0.1mm of the first stomata 131, the second stomata
141 a diameter of 0.2mm, a diameter of 0.3mm of the 3rd stomata 151.In other embodiments, the first stomata 131, the second stomata
141 and the 3rd stomata 151 diameter also dependent on other numerical value needed in 0.1~0.3mm of selection.
In the utility model, the length of jet post 1 is 6~10cm, and the external diameter of jet post 1 is 2~3cm.In the present embodiment,
The length of jet post 1 is 8cm, and the external diameter of jet post 1 is 2.5cm.In other embodiments, the length of jet post 1 also dependent on
Need selection 6cm, 10cm etc., the external diameter of jet post 1 is also dependent on needing selection 2cm, 3cm etc..
A kind of solar silicon wafers drier, including base plate, circular several silicon wafer bearing boxes for being distributed in plate upper surface
And the cover plate being oppositely arranged with base plate, the center of base plate is provided with above-mentioned jet post 1.Gas enters spray from air inlet 11
Inside gas column 1, the diameter of several through holes 12 increases in stepped from top to bottom along the side wall of jet post 1 so that positioned at jet
Being relatively large in diameter for the through hole 12 of the lower end of post 1, so that the distribution of gas is more uniform, reduces the drying time.
Above content is only preferred embodiment of the present utility model, for one of ordinary skill in the art, according to this reality
With new thought, will change in specific embodiments and applications, this specification content should not be construed as
To limitation of the present utility model.