CN206232841U - A kind of single crystal growing furnace quartz guide shell - Google Patents
A kind of single crystal growing furnace quartz guide shell Download PDFInfo
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- CN206232841U CN206232841U CN201621361890.XU CN201621361890U CN206232841U CN 206232841 U CN206232841 U CN 206232841U CN 201621361890 U CN201621361890 U CN 201621361890U CN 206232841 U CN206232841 U CN 206232841U
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- China
- Prior art keywords
- inner cylinder
- interior tube
- tube stent
- quartzy inner
- quartzy
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Abstract
The utility model discloses a kind of single crystal growing furnace quartz guide shell, it is provided with quartzy inner cylinder and interior tube stent, the interior tube stent is located at the outer wall of the quartzy inner cylinder, and the inwall of the quartzy inner cylinder is provided with iridium layer, heat-insulation layer is provided between the quartzy inner cylinder and the interior tube stent；The quartzy inner cylinder is cone, and the upper end-face edge of the quartzy inner cylinder is provided with shirt rim；The quartzy inner cylinder upper and lower ends are equipped with the concave station of a sealing；The quartzy inner cylinder has slippery inner surface and surrounding is without any lapping defect；The iridium layer is arranged in the slippery inner surface；The interior tube stent is crucible shape, and the upper and lower ends of the interior tube stent are respectively provided with the boss of a sealing, and the boss matches with the concave station makes the quartzy inner cylinder be fixed on the interior tube stent；The upper end of the interior tube stent is provided with the shaft shoulder of a facet；During monocrystalline silicon growing, guide shell has intensity and thermal insulation higher, under the high temperature conditions with crack resistance and shock resistance higher.
Description
Technical field
The utility model is related to mechanical field, more particularly to a kind of single crystal growing furnace quartz guide shell.
Background technology
During monocrystal stove draws silicon single crystal, in protective gas argon gas or nitrogen protection, graphite heater is to stone
The silica crucible that polycrystalline silicon raw material is filled in black crucible tray is heated, and melts the polycrystalline silicon raw material in crucible, and reach work
The requirement of skill seeding.Now, monocrystalline silicon seed is directly inserted into the solution of the polysilicon of melting by guide shell, progressively guides stone
Melting polysilicon solution in English crucible is crystallized according to the atomic arrangement mode of monocrystalline silicon seed, grows new silicon single crystal
Body.
The guide shell used in current monocrystal stove is mainly multiple with the combination of graphite insulation material or C/C using high purity graphite
Condensation material is prepared from.Guide functions mainly are played to high temperature protection gas during use.This requires to make water conservancy diversion
Material needed for cylinder not only will can have resistant to elevated temperatures performance, in addition it is also necessary to certain toughness and antioxygenic property.Seeding and life
To possess certain thermal and insulating performance and cracking resistance in process long, it is ensured that silicon single crystal rod and the polycrystalline for melting in guide shell
Temperature difference between silicon raw material.
Prior art is primarily present following shortcoming：
1st, guide shell rapidoprint uses high purity graphite and graphite insulation material or C/C composite processings to form,
There is certain impurity in material, under the high temperature conditions, impurity can be evaporated in itself, influence the purity of monocrystal；
Although the 2, graphite material can high temperature resistant, its toughness and oxidation resistant poor-performing, the graphite in hot environment
Can become increasingly harder, give play to its anti-compression property, but toughness is gradually reduced, and easily aoxidize with residual oxygen in stove；
3rd, graphite product is poor in the Performance comparision of insulation and heat-insulated aspect, and the service life under hot conditions is also shorter.
In order to ensure the temperature difference in guide shell between silicon single crystal rod and the polycrystalline silicon raw material of melting, cooling tube water flowing is generally introduced now
Guide shell is cooled down, but this can bring huge unseen accident, once Cooling Pipe Crack, furnace pressure rises rapidly,
Stove has the possibility of blast.
4th, large-sized guide shell process-cycle is long, and consumptive material is more, high cost, processing difficulties, is unfavorable for that equipment was being produced
In journey corresponding part adjustment is done with the adjustment of technique；Therefore the prior art is defective, it is necessary to improve.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of single crystal growing furnace quartz guide shell.
To achieve the above object, the utility model employs following technical schemes：A kind of single crystal growing furnace quartz guide shell,
Quartzy inner cylinder and interior tube stent are provided with, the interior tube stent is located at the outer wall of the quartzy inner cylinder, the inwall of the quartzy inner cylinder
Iridium layer is provided with, heat-insulation layer is provided between the quartzy inner cylinder and the interior tube stent；The quartzy inner cylinder is cone, institute
The upper end-face edge for stating quartzy inner cylinder is provided with shirt rim；The quartzy inner cylinder upper and lower ends are equipped with the concave station of a sealing；The quartz
Inner cylinder has slippery inner surface and surrounding is without any lapping defect；The iridium layer is arranged in the slippery inner surface；The inner cylinder branch
Frame is crucible shape, and the upper and lower ends of the interior tube stent are respectively provided with the boss of a sealing, and the boss matches with the concave station to be made
The quartzy inner cylinder is fixed on the interior tube stent；The upper end of the interior tube stent is provided with the shaft shoulder of a facet.
Preferably, the shirt rim is the upper end-face edge one week of the quartzy inner cylinder, and the shirt rim carries sealed groove, described
Shirt rim width is about in 5cm or so.
Preferably, the concave station is four, and the concave station is separately positioned on a left side for the top and bottom of the quartzy inner cylinder
Right both sides.
Preferably, the boss is four, and the boss is separately positioned on a left side for the top and bottom of the interior tube stent
Right both sides.
Preferably, the heat-insulation layer is high purity graphite insulation quilt.
Preferably, the top of the interior tube stent is provided with fixture, by the fixture to guide shell carry out positioning and
It is fixed.
Beneficial effect relative to prior art is that, using such scheme, the utility model is during monocrystalline silicon growing
Reduce pollution of the impurity to silicon single crystal rod in graphite material, with intensity and thermal insulation higher, under the high temperature conditions with compared with
Crack resistance and shock resistance high, is difficult to be combined with oxygen and is aoxidized.
Brief description of the drawings
Fig. 1 is the structural representation of one embodiment of the present utility model.
Specific embodiment
For the ease of understanding the utility model, below in conjunction with the accompanying drawings and specific embodiment, the utility model is carried out more detailed
Thin explanation.Preferred embodiment of the present utility model is given in accompanying drawing.But, the utility model can be with many different
Form is realized, however it is not limited to embodiment described by this specification.On the contrary, the purpose for providing these embodiments is made to this
The understanding of the disclosure of utility model is more thorough comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can directly on another element
Or can also there is element placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or may be simultaneously present centering elements.Term " fixation " that this specification is used, " being integrally formed ",
"left", "right" and similar statement are for illustrative purposes only.
Unless otherwise defined, this specification is used all of technology and scientific terminology with belong to skill of the present utility model
The implication that the technical staff in art field is generally understood that is identical.In art used in the description of the present utility model in this specification
Language is intended merely to describe the purpose of specific embodiment, is not intended to limit the utility model.
As shown in figure 1, one embodiment of the present utility model is：A kind of single crystal growing furnace quartz guide shell, is provided with quartzy inner cylinder
102 and interior tube stent 104, the interior tube stent 104 is located at the outer wall of the quartzy inner cylinder 102, the quartzy inner cylinder 102 it is interior
Wall is provided with iridium layer 101, and heat-insulation layer 103 is provided between the quartzy inner cylinder 102 and the interior tube stent 104；For example：The stone
English inner cylinder 102 has inverted cone or truncated cone-shaped；The quartzy inner cylinder 102 has slippery inner surface and surrounding connects without any
Trace, the wall thickness of quartzy inner cylinder 102 is more uniform, and oblique cone surface evenness and smoothness requirements are all higher, finish subsistence level
Within 5 μ, for example：There is metal iridium material to be made iridium layer 101, iridium layer 101 is arranged on centre bit in the conical walls of quartzy inner cylinder 102
Put, the thickness of inlaying of iridium layer 101 only has 2-3 μ, and iridium layer 101 is consistent with the shape of quartzy inner cylinder 102；For example：The quartzy inner cylinder
102 upper end-face edge is provided with shirt rim；The shirt rim is located at the upper end-face edge one week of the quartzy inner cylinder 102, and the shirt rim carries
Sealed groove, the shirt rim width about in 5cm or so, for example：The upper and lower ends of quartzy inner cylinder 102 are equipped with a sealing
Concave station；Preferably, concave station is four, and the concave station is separately positioned on the upper end both sides of quartzy inner cylinder 102 and quartzy inner cylinder 102
Lower end both sides；The concave station of lower end both sides be arranged on to the outer wall of quartzy inner cylinder 102 to the corresponding distance of center mobile phase at, according to leading
The size of flow cartridge, the position that concave station is set can also change, such as;The bottom outer wall of quartzy inner cylinder 102 moves 10CM or so to center,
, when being heated with the polycrystalline silicon raw material of melting to silicon single crystal rod, bottom angle camber ratio is relatively thin, prevents that phase can not be born for guide shell
Corresponding temperature and there is broken hole, prevent hazard event from occurring；The upper boss of the concave station of upper end both sides and interior tube stent 104 to
Coordinate；The iridium layer 101 is arranged in the slippery inner surface；For example：Iridium layer 101 is made up of multiple iridium conical rings, iridium conical ring by
In itself into conical ring shape mirror surface structure, and without any seam, the reflection function with very strong light and temperature, plus stone
English has the features such as bending strength is big, and thermal conductivity factor is small in itself, the two is integrated into a whole, with very strong light and temperature
Albedo, and uniform temperature can be born, itself will not rupture, come off.
The interior tube stent 104 is crucible shape, and the upper and lower ends of the interior tube stent 104 are respectively provided with the boss of a sealing, institute
Stating boss and matching with the concave station makes the quartzy inner cylinder 102 be fixed on the interior tube stent 104；For example：Boss is four
Individual, the boss is separately positioned on the upper end both sides and lower end both sides of the interior tube stent 104, the boss and water conservancy diversion of upper end both sides
The upper end concave station of inner cylinder 102 coordinates, and boss and the lower end concave station of water conservancy diversion inner cylinder 102 of lower end both sides coordinate, the concave station of water conservancy diversion inner cylinder 102 with
Interior tube stent 104 is engaged makes both nested fixed；The upper end of the interior tube stent 104 is provided with the shaft shoulder of a facet, for example：
The shaft shoulder is engaged positioning with other parts and fixes, and undertakes the weight of whole quartz guide shell, because the difference of condition and position,
When to water conservancy diversion with location and installation, movement is carried out, it is also possible to interior tube stent 104 is moved by the shaft shoulder.
Preferably, the heat-insulation layer 103 is high purity graphite insulation quilt.
Preferably, the top of the interior tube stent 104 is provided with fixture 5, and guide shell is determined by the fixture 5
Position and fixation, such as fixture 5 is located at the bottom of the upper boss of interior tube stent 104 and both are not attached to, and the volume of fixture 5 will
Bigger than upper boss, so when installing, positioning, fixture 5 can have more spaces to move, and fixture 5 is
The irony product of various shapes, such as：Template, cylinder, square etc., are provided with keeper or installation position, just on irony product
In positioning and installation.
Beneficial effect relative to prior art is that, using such scheme, the utility model is during monocrystalline silicon growing
Reduce pollution of the impurity to silicon single crystal rod in graphite material, with intensity and thermal insulation higher, under the high temperature conditions with compared with
Crack resistance and shock resistance high, is difficult to be combined with oxygen and is aoxidized.
It should be noted that above-mentioned each technical characteristic continues to be mutually combined, the various embodiments that formation is not enumerated above,
It is accordingly to be regarded as the scope of the utility model specification record；Also, for those of ordinary skills, can be according to above stating
It is bright to be improved or converted, and all these modifications and variations should all belong to the protection model of the utility model appended claims
Enclose.
Claims (6)
1. a kind of single crystal growing furnace quartz guide shell, it is characterised in that be provided with quartzy inner cylinder and interior tube stent, the interior tube stent is located at
The outer wall of the quartzy inner cylinder, the inwall of the quartzy inner cylinder is provided with iridium layer, between the quartzy inner cylinder and the interior tube stent
It is provided with heat-insulation layer；
The quartzy inner cylinder is cone, and the upper end-face edge of the quartzy inner cylinder is provided with shirt rim；The quartzy inner cylinder upper and lower ends
It is equipped with the concave station of a sealing；The quartzy inner cylinder has slippery inner surface and surrounding is without any lapping defect；The iridium layer is arranged at
In the slippery inner surface；
The interior tube stent is crucible shape, and the upper and lower ends of the interior tube stent are respectively provided with the boss of a sealing, the boss and institute
Stating concave station and matching makes the quartzy inner cylinder be fixed on the interior tube stent；The upper end of the interior tube stent is provided with a facet
The shaft shoulder.
2. a kind of single crystal growing furnace quartz guide shell according to claim 1, it is characterised in that the shirt rim is the quartzy inner cylinder
Upper end-face edge one week, the shirt rim carries sealed groove, and the shirt rim width is in 5cm.
3. a kind of single crystal growing furnace quartz guide shell according to claim 1, it is characterised in that the concave station is four, described recessed
Platform is separately positioned on the left and right sides of the top and bottom of the quartzy inner cylinder.
4. a kind of single crystal growing furnace quartz guide shell according to claim 1, it is characterised in that the boss is four, described convex
Platform is separately positioned on the left and right sides of the top and bottom of the interior tube stent.
5. a kind of single crystal growing furnace quartz guide shell according to claim 1, it is characterised in that the heat-insulation layer is that high purity graphite is protected
Warm felt.
6. a kind of single crystal growing furnace quartz guide shell according to claim 1, it is characterised in that the top of the interior tube stent is provided with
Fixture, is positioned and is fixed by the fixture to guide shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621361890.XU CN206232841U (en) | 2016-12-13 | 2016-12-13 | A kind of single crystal growing furnace quartz guide shell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621361890.XU CN206232841U (en) | 2016-12-13 | 2016-12-13 | A kind of single crystal growing furnace quartz guide shell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206232841U true CN206232841U (en) | 2017-06-09 |
Family
ID=58992179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621361890.XU Expired - Fee Related CN206232841U (en) | 2016-12-13 | 2016-12-13 | A kind of single crystal growing furnace quartz guide shell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206232841U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106521616A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Single crystal furnace quartz guide cylinder |
| CN111172585A (en) * | 2018-11-12 | 2020-05-19 | 上海新昇半导体科技有限公司 | Reflecting screen of single crystal growth furnace and single crystal growth furnace |
-
2016
- 2016-12-13 CN CN201621361890.XU patent/CN206232841U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106521616A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Single crystal furnace quartz guide cylinder |
| CN111172585A (en) * | 2018-11-12 | 2020-05-19 | 上海新昇半导体科技有限公司 | Reflecting screen of single crystal growth furnace and single crystal growth furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170609 Termination date: 20191213 |