CN206232840U - A kind of molybdenum guide shell and single crystal growing furnace - Google Patents
A kind of molybdenum guide shell and single crystal growing furnace Download PDFInfo
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- CN206232840U CN206232840U CN201621361889.7U CN201621361889U CN206232840U CN 206232840 U CN206232840 U CN 206232840U CN 201621361889 U CN201621361889 U CN 201621361889U CN 206232840 U CN206232840 U CN 206232840U
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Abstract
The utility model provides a kind of molybdenum guide shell and the single crystal growing furnace comprising it, and it includes molybdenum inner cylinder, heat-insulation layer, molybdenum outer barrel and installs locating ring；Annular seal space is formed between the molybdenum inner cylinder and the molybdenum outer barrel, the heat-insulation layer is arranged in the annular seal space；The molybdenum inner cylinder has slippery inner surface；The molybdenum outer barrel location and installation in the installation locating ring, for installing the molybdenum guide shell by the installation locating ring.Using such scheme, the utility model is by the replacing to guide shell machining based conception and material, pollution of the impurity to silicon single crystal rod in reducing graphite material during monocrystalline silicon growing；Change existing graphite material guide shell the characteristics of deficiency, reduces because guide shell fragmentation, the thermal field for coming off and causing damage risk in toughness；It is easily worked, lifts product service life；And the temperature of water conservancy diversion tube inner surface can be effectively reduced, separates cylinder internal and external temperature, for the smooth growth of silicon single crystal provides certain facility.
Description
Technical field
The utility model is related to monocrystalline silicon growing field, more particularly to, a kind of molybdenum guide shell and single crystal growing furnace.
Background technology
Monocrystalline silicon is the important materials of the advanced equipments of high grade and precision such as integrated circuit and solar panel, and it is to oxygen content in silicon chip
With strict requirements, in case manufactured chip such as is burning at the major accident using process.In monocrystalline silicon growing process
In, oxygen element is mainly derived from the absorption oxygen and crucible on polycrystal raw material surface, and the concentration for reducing oxygen element in melt is monocrystalline silicon
The faced matter of utmost importance of growth.Exist in SiO forms because the oxygen element in melt is more, by guide shell, by argon gas stream
Crucible center is converged to, so as to accelerate the volatilization of SiO, oxygen concentration in melt can be greatly reduced.Meanwhile, the argon gas stream of convergence can
Accelerate the cooling of crystal ingot, increase crystal ingot axial-temperature gradient, improve crystal ingot growth rate.
Guide shell is indispensable important component in monocrystalline silicon growing furnace, and the growth for single crystal silicon material has very
Important effect.The processing technology of guide shell, the quality of material selection are for the speed of growth control of crystal and guide shell in itself
Life-span have a very big relation, guide shell can not only reduce the argon gas flowing whirlpool of upper of furnace body during monocrystalline silicon growing
Born of the same parents, and depositions of the SiO on single crystal growing furnace top can be reduced.For example, monocrystalline silicon growing furnace thermal field structure as shown in figure 1, including
Guide shell 10, upper heat-insulation system 20, crucible system 30, heater body 40, middle heat-insulation system 50, heater electrode 60, lower guarantor
The grade of warm system 70 constitutes structure.Guide shell is mainly used in cut-off thermal field inside and outside so that external temperature is far below internal temperature
Degree, so as to play a part of to accelerate crystal-pulling speed, while the also effect with water conservancy diversion.
Monocrystal stove or monocrystalline silicon growing device during silicon single crystal is drawn, are protected in protective gas argon gas or nitrogen
Carried out in shield, graphite heater is heated to the crucible that polycrystalline silicon raw material is filled in graphite crucible support, made many in crucible
Crystal silicon melting sources, and reach technique seeding requirement, wherein, graphite to be mainly characterized by intensity in the event of high temperatures larger,
And it is resistant to certain high temperature.Now, monocrystalline silicon seed is directly inserted into the solution of the polysilicon of melting by guide shell, progressively
Melting polysilicon solution in guiding crucible is crystallized according to the atomic arrangement mode of monocrystalline silicon seed, grows new silicon list
Crystal, i.e. monocrystalline silicon.But graphite guide shell is during use, easily oxidation, service life is shorter.
The guide shell used in current monocrystal stove is mainly multiple with the combination of graphite insulation material or C/C using high purity graphite
Condensation material is prepared from.Guide functions mainly are played to high temperature protection gas during use.This requires to make water conservancy diversion
Material needed for cylinder not only will can have resistant to elevated temperatures performance, in addition it is also necessary to certain toughness and antioxygenic property.Seeding and life
To possess certain thermal and insulating performance and cracking resistance in process long, it is ensured that silicon single crystal rod and the polycrystalline for melting in guide shell
Temperature difference between silicon raw material.
But, prior art is primarily present following shortcoming：
1st, guide shell rapidoprint uses high purity graphite and graphite insulation material or C/C composite processings to form,
There is certain impurity in material, under the high temperature conditions, impurity can be evaporated in itself, influence the purity of monocrystal.
Although the 2, graphite material can high temperature resistant, its toughness and oxidation resistant poor-performing, the graphite in hot environment
Can become increasingly harder, give play to its anti-compression property, but toughness is gradually reduced, and easily aoxidize with residual oxygen in stove.
3rd, graphite product is poor in the Performance comparision of insulation and heat-insulated aspect, and the service life under hot conditions is also shorter.
In order to ensure the temperature difference in guide shell between silicon single crystal rod and the polycrystalline silicon raw material of melting, cooling tube water flowing is generally introduced now
Guide shell is cooled down, but this can bring huge unseen accident, once Cooling Pipe Crack, furnace pressure rises rapidly,
Stove has the possibility of blast.
4th, large-sized guide shell process-cycle is long, and consumptive material is more, high cost, processing difficulties, is unfavorable for that equipment was being produced
In journey corresponding part adjustment is done with the adjustment of technique.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of new molybdenum guide shell and single crystal growing furnace, with monocrystalline silicon
Pollution of the impurity to silicon single crystal rod in graphite material is reduced in growth course；Existing graphite material guide shell is changed in toughness
Not enough the characteristics of, reduce because guide shell fragmentation, the thermal field for coming off and causing damage risk；It is easily worked, lifting product uses the longevity
Life；And the temperature of water conservancy diversion tube inner surface can be effectively reduced, separates cylinder internal and external temperature, promote silicon single crystal smooth growth.
The technical solution of the utility model is as follows：A kind of molybdenum guide shell, it includes molybdenum inner cylinder, heat-insulation layer, molybdenum outer barrel and peace
Dress locating ring；Annular seal space is formed between the molybdenum inner cylinder and the molybdenum outer barrel, the heat-insulation layer is arranged in the annular seal space；Institute
Stating molybdenum inner cylinder has slippery inner surface；The molybdenum outer barrel location and installation in the installation locating ring, for installing fixed by described
Position ring installs the molybdenum guide shell.
Preferably, the molybdenum inner cylinder has slippery inner surface.
Preferably, the molybdenum outer barrel is prepared using spinning process.
Preferably, the molybdenum outer barrel has smooth outer surface.
Preferably, the installation locating ring is provided with positioning shoulder seat.
Preferably, the shaft shoulder is provided with the positioning shoulder seat, for molybdenum outer barrel described in location and installation and load-bearing.
Preferably, the heat-insulation layer includes graphite heat-insulation layer.
Preferably, the heat-insulation layer includes graphite soft felt.
Preferably, the molybdenum inner cylinder fixes ditch with the positioning that is adapted is respectively provided with the link position of the molybdenum outer barrel
Groove, the positioning fixing groove between the molybdenum inner cylinder and the molybdenum outer barrel by being adapted forms the annular seal space.
For example, the positioning fixing groove includes bulge-structure and groove structure.
The another technical scheme of the utility model is as follows：A kind of single crystal growing furnace, it has molybdenum guide shell described in any of the above-described.
Using such scheme, the utility model by the replacing to guide shell machining based conception and material, in monocrystalline silicon growing
During reduce graphite material in pollution of the impurity to silicon single crystal rod；Change existing graphite material guide shell not enough in toughness
The characteristics of, reduce because guide shell fragmentation, the thermal field for coming off and causing damage risk；It is easily worked, lifts product service life；And
And the temperature of water conservancy diversion tube inner surface can be effectively reduced, separate cylinder internal and external temperature, for the smooth growth of silicon single crystal provides certain
It is convenient.
Brief description of the drawings
Fig. 1 is the guide shell application schematic diagram of prior art.
Fig. 2 is the schematic diagram of the embodiment of the utility model one.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the utility model is described in detail, the following examples can group
Conjunction is used, also, the utility model can be realized using various forms, is not limited to each specific implementation described by this specification
Example, there is provided the purpose of these embodiments is more thoroughly comprehensively readily appreciated to disclosure of the present utility model.Further
It should be noted that when a certain structure is fixed on another structure, including the structure is directly or indirectly fixed on this another
Structure, or the structure is fixed on another structure by one or more of the other intermediate structure.When a structure connection
Another structure, including the structure is directly or indirectly connected to another structure, or the structure is passed through one or many
Individual other intermediate structures are connected to another structure.Also, described "and/or" include " and " it is possible with two kinds of "or"
Embodiment.
An example of the present utility model is, a kind of molybdenum guide shell, and it includes molybdenum inner cylinder, heat-insulation layer, molybdenum outer barrel and installation
Locating ring；Annular seal space is formed between the molybdenum inner cylinder and the molybdenum outer barrel, the heat-insulation layer is arranged in the annular seal space；It is described
Molybdenum inner cylinder has slippery inner surface；The molybdenum outer barrel location and installation in the installation locating ring, for being positioned by described installation
Ring installs the molybdenum guide shell.Preferably, the molybdenum inner cylinder has slippery inner surface, so can easily increase new material,
Thermal field inside and outside can also be separated by mirror-reflection so that external temperature is far below internal temperature.Preferably, the molybdenum
Outer barrel is prepared using spinning process, and such process-cycle is short, and consumptive material is few, low cost, easy to process, to the equipment in initial debugging stage
For, facilitate guide shell to coordinate the change of technique.Preferably, the molybdenum outer barrel has smooth outer surface, so can be easily
Increase new material, it is also possible to which thermal field inside and outside are separated by mirror-reflection.For example, the molybdenum inner cylinder has inverted circular cone
The shape of shape or truncated cone-shaped, and for example, the slippery inner surface of the molybdenum inner cylinder has circular conical surface or round table surface shape, for example, described
The slippery inner surface of molybdenum inner cylinder has the appearance of cone or truncated cone-shaped.Wherein, circular conical surface is defined as follows：If bus is
With the straight line of rotary shaft oblique, then the surfaces of revolution of formation is called circular conical surface, now, the intersection point of bus and axle is called circular conical surface
Summit.Round table surface is by that analogy.For example, truncated cone is removed with a plane parallel to circular cone bottom surface, between bottom surface and section
Part is called round platform, and round platform also has axle, bottom surface, side and a bus with cylinder as circular cone, and with the letter of round platform platform axle
Represent round platform.For example, with right-angled trapezium perpendicular to straight line where the waist on base as rotary shaft, remaining each side rotation and the song that is formed
The solid that face is surrounded is called round platform rotary shafts and is called the formed disc of axle right-angled trapeziums upper and lower bottom rotation of round platform and is referred to as
The upper and lower bottom surface of round platform, another formed curved surface of waist rotation is referred to as the side of round platform, the right-angled trapezium of each position on side
Waist is referred to as the bus of round platform, and the length of the trapezoidal waist on the axle of round platform is called the height of round platform, and the height of round platform is also upper and lower bottom surface
Between distance.Round table surface is the side of round platform.Molybdenum guide shell described in above-described embodiment and embodiments below, is especially suitable for monocrystalline
Stove is used, and the molybdenum guide shell has intensity and thermal insulation higher, under the high temperature conditions with crack resistance and antidetonation higher
Property, is difficult to be combined with oxygen and is aoxidized；And in terms of processing low cost, easy processing, consumptive material is few, cycle is short.
Although the guide shell of molybdenum has taken on a new look in high temperature resistant and toughness than graphite guide shell, molybdenum plate has in itself
Certain defect, with certain impurity, once heating, these impurity are then discharged rapidly, growing environment are polluted, to silicon list
Brilliant growth is unfavorable, therefore, to solve the above problems, it is preferred that the molybdenum inner cylinder has slippery inner surface, i.e., described molybdenum inner cylinder
Also be surface of the molybdenum inner cylinder away from the molybdenum outer barrel towards the inner surface of drawn monocrystalline silicon, the molybdenum inner cylinder it is smooth in
Tantalum layer is set on surface, and the hardness of tantalum is moderate, is rich in ductility, filament formula thin foil can be pulled into.Its thermal coefficient of expansion very little,
Toughness is very strong.Tantalum has very outstanding chemical property, with high corrosion resistance, is particularly suitable for making in the growth of monocrystalline silicon
With.And for example, the molybdenum outer barrel has smooth outer surface, i.e., away from the surface of the molybdenum inner cylinder, it is smooth outer to described molybdenum outer barrel
Surface, tantalum layer is also set in the smooth outer surface of the molybdenum outer barrel.Preferably, the tantalum layer in the smooth outer surface away from
The surface of the molybdenum outer barrel is minute surface, preferably gapless minute surface.So having preferably prevents molybdenum plate from polluting and cut-off thermal field
The internal effect with outside.For example, plate metal tantalum in the molybdenum guide shell body surfaces, including the molybdenum outer barrel outer surface
And metal tantalum is plated on the inner surface of the molybdenum inner cylinder, form tantalum layer.
Preferably, the tantalum layer in the slippery inner surface is gapless mirror away from the surface of the slippery inner surface
Face.For example, the thickness of the tantalum layer is 1 to 5 micron.Preferably, the thickness of the tantalum layer is 2 to 3 microns.So, by
Molybdenum inner cylinder slippery inner surface sets one layer of tantalum layer of the smooth surface of gapless minute surface, and not only high temperature resistant, is particularly suitable for argon gas gas
Atmosphere decompression crystal pulling, and help to lift the purity of monocrystal.Preferably, the tantalum layer is towards the surface of the slippery inner surface
Extended structure is provided with, for example, the extended structure is embedded in the molybdenum inner cylinder, and for example, the extended structure is some tapers
Lug boss, for example, the tapered protrusion portion is conical protrusions portion, it is highly the 30% to 50% of radius；Preferably, it is each described
Tapered protrusion portion is arranged as some coaxial annulars, i.e., the center of circle of each annular is located along the same line；Preferably, each taper
Lug boss is arranged as some coaxial annulars, and the axle is the axis of the slippery inner surface of the molybdenum inner cylinder.So, by design
The extended structure of the molybdenum inner cylinder is embedded in, the tantalum layer itself is advantageously allowed and is formed some thermal gradient layers, so that
Seed crystal is easier to drive silicon atom to arrange to form monocrystalline in order using the degree of supercooling of crystallization front.
It is excellent in order to obtain preferably cut-off thermal field inside and outside to cause external temperature far below the effect of internal temperature
Choosing, the molybdenum outer barrel has smooth outer surface.Preferably, it is additionally provided with thermal insulation on the outside of the smooth outer surface of the molybdenum outer barrel
Layer, for example, the thickness of the insulating layer is 1.5 to 2 times of the thickness of the molybdenum outer barrel.And for example, the molybdenum outer barrel has quartz
Supporting structure or molybdenum support structure；And for example, the profile of the molybdenum outer barrel or the side away from the molybdenum inner cylinder have truncated conical shape.
And for example, it is provided with cavity body between the insulating layer and the molybdenum outer barrel, it is preferred that the cavity body vacuumizes setting.It is preferred that
, supporter is additionally provided between the insulating layer and the molybdenum outer barrel, for obtaining more preferably support strength so that it is described every
Warm layer is difficult to collapse.Preferably, the supporter is integrally formed setting with the insulating layer；Or, the supporter with it is described
Molybdenum outer barrel is phase same material, for example, the molybdenum outer barrel has smooth outer surface and extends projection institute in the smooth outer surface
State supporter；And/or, the supporter is quartz column.And for example, some institutes are provided between the insulating layer and the molybdenum outer barrel
Supporter is stated, for example, each support body arrangement is some coaxial annulars, i.e., the center of circle of each annular is located along the same line；
Preferably, each support body arrangement is some coaxial annulars, and the axle is the axis of the slippery inner surface of the molybdenum inner cylinder；
So, preferable support effect can be obtained.Preferably, graphite heat-insulation layer is provided with the cavity body, for example, the cavity
It is provided with graphite soft felt in vivo.For example, the graphite soft felt sets some through holes, for wearing correspondingly respectively when mounted
Cross the supporter.So, preferable thermal insulation effect can be obtained.
For the ease of installing and protecting the molybdenum guide shell, it is preferred that the molybdenum guide shell is provided with installation locating ring, use
In molybdenum guide shell described in location and installation, or, it is understood that it is used for molybdenum guide shell described in location and installation to install locating ring
The molybdenum outer barrel, wherein, it is described that the outside that locating ring is located at the molybdenum outer barrel is installed, for protecting the molybdenum guide shell.For example,
The molybdenum outer barrel location and installation in the installation locating ring, for installing the molybdenum guide shell by the installation locating ring.Example
Such as, the external diameter for installing locating ring is more than the external diameter of the molybdenum outer barrel, preferably to protect the molybdenum guide shell.Preferably,
The installation locating ring is provided with positioning shoulder seat, by molybdenum guide shell described in the positioning shoulder seat location and installation, for example, passing through institute
Positioning shoulder seat is stated by the molybdenum guide shell location and installation in upper heat-insulation system or other positions.For example, the positioning shoulder seat is opened up
There is mounting groove or be fixedly installed mounting blocks.
For the ease of installing and protecting the molybdenum guide shell, it is preferred that the top of the molybdenum outer barrel sets the shaft shoulder, for matching somebody with somebody
Close the fixation molybdenum guide shell itself；Or, the shaft shoulder is used for molybdenum outer barrel described in location and installation and load-bearing；For example, the axle
Shoulder pressure is located at upper heat-insulation system, for when the molybdenum guide shell itself is installed on heat-insulation system, the shaft shoulder to be located at outside the molybdenum
Between cylinder and upper heat-insulation system, to bear certain pressure.And for example, the shaft shoulder is prepared using quartz material.For example, the axle
Shoulder is two pieces or three pieces of discrete separate components, and and for example, the shaft shoulder has cirque structure, for example, the shaft shoulder is stone
Ying Huan, it is preferred that the shaft shoulder is double-layer circular structure, the internal diameter of the upper strata ring of the double-layer circular structure and the double-deck ring
The internal diameter of lower floor's ring of shape structure is identical, and the external diameter of the upper strata ring of the double-layer circular structure is more than the double-layer circular structure
Lower floor's ring external diameter；For example, the double-layer circular structure has inverted type tee section.So, installation institute can be consolidated
The molybdenum outer barrel of molybdenum guide shell is stated, and there is certain protective effect to the molybdenum guide shell and its molybdenum outer barrel.It is preferred that
, the shaft shoulder is provided with the positioning shoulder seat, or the positioning shoulder seat accepts the shaft shoulder, for described in location and installation
Molybdenum outer barrel and load-bearing.
In order to promote crystal growth, it is to avoid the heat-insulation layer is interfered or polluted in single crystal growth process, it is preferred that
The molybdenum inner cylinder with the positioning fixing groove that is adapted, the molybdenum inner cylinder and institute are respectively provided with the link position of the molybdenum outer barrel
State the positioning fixing groove for passing through to be adapted between molybdenum outer barrel and form the annular seal space.For example, the positioning fixing groove
Including bulge-structure and groove structure.The molybdenum inner cylinder with the projection that is adapted is respectively provided with the link position of the molybdenum outer barrel
Structure and groove structure, or, set by an at least bulge-structure at the link position with the molybdenum outer barrel of the molybdenum inner cylinder
With the combining structure that at least a groove structure is constituted, set and institute at the link position with the molybdenum inner cylinder of the molybdenum outer barrel
State the fit structure that combining structure is adapted, it will be understood that the fit structure also by an at least groove structure accordingly with least
One bulge-structure is constituted, i.e. molybdenum inner cylinder set combining structure, molybdenum outer barrel set fit structure, by fit structure with combine
The adaptation of structure, so as to seal the link position of the molybdenum inner cylinder and the molybdenum outer barrel.It should be noted that the sealing is phase
To the sealing in meaning, the heat-insulation layer can be avoided from interfering or pollute in single crystal growth process；And from atom
From the point of view of angle, in the world in the absence of the sealing in absolute sense.
In order to further lift growth, it is to avoid the heat-insulation layer is interfered in single crystal growth process, it is preferred that
The top of the molybdenum outer barrel sets seal boss, and the heat-insulation layer is sealed for molybdenum inner cylinder described in location and installation and press-contacting type, i.e.
By molybdenum inner cylinder described in the seal boss location and installation, now, the molybdenum inner cylinder pressure touches seal boss, and the molybdenum inner cylinder
Seal the heat-insulation layer jointly with the molybdenum outer barrel, that is, the molybdenum inner cylinder with the molybdenum outer barrel on the top of the molybdenum guide shell
The heat-insulation layer is sealed jointly；It should be noted that sealing described here is not the sealing in absolute sense, but in certain journey
Caused on degree the heat-insulation layer not with crystal or contacts argon gas, in order to avoid pollute.For example, the molybdenum inner cylinder be provided with it is described
The first groove structure that seal boss is adapted, is engaged so that institute by first groove structure with the seal boss
State molybdenum inner cylinder and seal the heat-insulation layer jointly on the top of the molybdenum guide shell with the molybdenum outer barrel.
For example, the heat-insulation layer includes graphite heat-insulation layer.Preferably, the heat-insulation layer is graphite heat-insulation layer.Preferably, institute
Graphite heat-insulation layer is stated for graphite insulation quilt.So, both stone can be avoided by sealing again using the heat insulation effect that graphite is outstanding
Ink pollution.Preferably, the bottom of the molybdenum outer barrel sets sealing convex portion, for coordinating molybdenum described in the seal boss location and installation
Inner cylinder and the sealing heat-insulation layer.For example, the molybdenum inner cylinder is provided with the second groove structure being adapted with the sealing convex portion,
It is engaged with the sealing convex portion by second groove structure so that the molybdenum inner cylinder is led with the molybdenum outer barrel in the molybdenum
The bottom of flow cartridge seals the heat-insulation layer jointly.For example, the top of the molybdenum inner cylinder passes through described with the top of the molybdenum outer barrel
Seal boss reaches a certain degree of sealing effectiveness, and, the bottom of the molybdenum inner cylinder passes through institute with the bottom of the molybdenum outer barrel
State sealing convex portion and reach a certain degree of sealing effectiveness, so as to realize that the molybdenum inner cylinder is jointly close with the molybdenum outer barrel on the whole
Seal the heat-insulation layer.
In order to reach more preferable load-bearing and sealing effectiveness, for example, the top of the molybdenum outer barrel sets load-carrying members, extends knot
Structure and sealing structure；The load-carrying members are used to fixedly mount the molybdenum guide shell itself；The extended structure connects institute respectively
Load-carrying members are stated with the sealing structure；The sealing structure is used to seal the heat-insulation layer；For example, the load-carrying members include
The shaft shoulder；And for example, the sealing structure includes the seal boss, or, the seal boss is arranged at the sealing knot
Structure；And for example, the sealing structure is the seal boss.For example, the sealing structure by the molybdenum inner tube installation in described
Heat-insulation layer described in the pressure seal of seal boss.And for example, the sealing structure also sets up support top, itself and the molybdenum inner cylinder
Top is in contact, the top for supporting the molybdenum inner cylinder.
In order to reach more preferable load-bearing and sealing effectiveness, for example, the bottom of the molybdenum outer barrel sets polycrystalline substance, connection knot
Structure and supporting construction；The polycrystalline substance is used as the bottom of the molybdenum guide shell itself, is thereon the heat-insulation layer and the molybdenum
Inner cylinder；The attachment structure connects the polycrystalline substance with the supporting construction respectively；The supporting construction and the molybdenum inner cylinder
Bottom be in contact, the bottom for supporting the molybdenum inner cylinder；Wherein, the supporting construction includes the sealing convex portion.And for example,
The sealing convex portion sets slot, and the bottom of the molybdenum inner cylinder is inserted in the slot.For example, the bottom of the slot sets shape
, for planting the molybdenum inner cylinder when the slot, there is slight and irreversible deformation, to obtain better seal in structure changes
Effect.And for example, the slot adjacent bottom position sets some double wedge structures, its protrusion direction towards the bottom of the slot,
For when the molybdenum inner cylinder of planting is in the slot, forming interference fit, and there is slight and irreversible deformation, to obtain
Take better seal effect.
For example, the molybdenum guide shell includes：The inverted cone-shaped of inner side one is seamless smooth molybdenum inner cylinder, for example, larger on molybdenum inner cylinder
There is one week shirt rim with sealed groove on mouth end margin, for example, shirt rim width is about in 5cm or so.The wall thickness of molybdenum inner cylinder compared with
For uniform, the molybdenum inner cylinder has slippery inner surface, for example, the molybdenum inner cylinder has default oblique cone surface evenness and bright and clean
Degree, finish is surface roughness（surface roughness）, refer to smaller spacing and small peak valley that finished surface has
Unevenness.Preferably, the finish of molybdenum inner cylinder is less than 5 μm, and preferably finish is less than 4 μm.Center in molybdenum inner cylinder conical walls
Position, is provided with thickness for 2-3 μm, and shape is consistent with molybdenum inner cylinder, cone, conoid or round platform that be made up of metal tantalum
Body, shape be not as it was previously stated, include bottom surface.For example, the inner surface of the tantalum cone or tantalum round estrade is minute surface, inner surface is
Away from the surface of molybdenum inner cylinder, inner surface surrounding is without any lapping defect, and smooth, such as interior table of tantalum cone or tantalum round estrade
The finish in face is less than 4 μm.And for example, it is high purity graphite insulation quilt on the outside of molybdenum inner cylinder, temperature is primarily served during use
Degree isolation and supporting role.And for example, the outside of the soft felt of graphite insulation is the molybdenum outer barrel of molybdenum guide shell, also known as support, for example, should
Like crucible, upper and lower ends all have a seal boss to molybdenum outer barrel shape, match with molybdenum inner cylinder, and for example upper end has seal boss,
Molybdenum inner cylinder is provided with the first groove structure being adapted with the seal boss, and lower end has sealing convex portion, and molybdenum inner cylinder is provided with
The second groove structure being adapted with the sealing convex portion, after mounting, the structure such as the seal boss and sealing convex portion, on the one hand
The weight of molybdenum inner cylinder is born, molybdenum inner cylinder is positioned and fixed, on the other hand to the graphite soft felt between molybdenum inner cylinder and molybdenum outer barrel
Most there is certain sealing function, so that under conditions of high temperature, minimal amount of volatilization impurity cannot also be passed through in graphite soft felt.
And for example, there is the shaft shoulder of a facet upper end of the molybdenum outer barrel of molybdenum guide shell, and during use, the shaft shoulder is engaged fixed with other parts
Position and fixation, undertake the weight of whole molybdenum guide shell.
For example, during use, molybdenum guide shell is first installed, it is overall to be connected with the part that it matches, by molybdenum
The molybdenum outer barrel of guide shell undertakes all wt of whole molybdenum guide shell.Because being seamless specular cone that metal tantalum is made in molybdenum inner cylinder
Body, it is necessary to explanation, the top end of the cone is provided with opening, is similar to loudspeaker, when horn mouth is by temperature radiation, metal
Tantalum minute surface can be emitted light and heat by the form for reflecting, and reduce the temperature on surface.The reverse side of molybdenum inner cylinder is because there is graphite soft
Felt is intercepted to the high temperature for coming from heater, makes to greatly reduce by the temperature in direct radiation to molybdenum inner cylinder, it is ensured that using
During temperature difference in molybdenum guide shell between silicon single crystal rod and the polycrystalline silicon raw material of melting such that it is able to promote monocrystal
Generation.The various embodiments described above, by using the physicochemical characteristics of material, under conditions of high temperature, it is to avoid because of material property
It is not enough and cause guide shell fragmentation, the accident such as come off；And one can be entered to temperature and the reflex of light using tantalum metal films
Step reduces the temperature of guide shell surfaces externally and internally, separates cylinder internal and external temperature, for crystalline substance long is smoothed out providing certain facility.
For example, the utility model provides a kind of molybdenum guide shell, in single crystal growing furnace, molybdenum guide shell to be added with metal molybdenum as main
After work raw material, such as technique by rotary press modelling are molded molybdenum guide shell, then metal tantalum is plated in guide shell body surfaces.This
Sample, the guide shell produced has intensity higher and heat energy back function, under the high temperature conditions with crack resistance higher and
Shock resistance, is difficult to be combined with oxygen and is aoxidized, and the impurity in Mo is not easy to be diffused into pollution silicon monocrystal growth in high temperature furnace.
The low cost in terms of processing, easy processing, consumptive material is few, cycle is short.For example, the molybdenum guide shell is included for guide shell fixed installation
Guide shell locating ring is installed, i.e. for installing the molybdenum guide shell by the installation locating ring.For example, being positioned installing
Guide shell molybdenum outer barrel and the associated shaft shoulder are placed in the positioning shoulder seat of ring.For example, molybdenum outer barrel is mainly molybdenum spinning form,
Mirror ultrafinish is carried out on the surface of the molybdenum product of shaping, molybdenum minute surface is formed it into.What is filled on the inside of molybdenum outer barrel is heat-insulation layer,
Such as heat-insulation layer is graphite soft felt, and graphite soft felt plays function of heat insulation in guide shell.It is heat-insulation layer in graphite soft felt
Inner side is exactly most important molybdenum inner cylinder.For example, being connected by mutually reserved positioning fixing groove between molybdenum inner cylinder and molybdenum outer barrel
Connect, graphite soft felt is completely sealed in the space between molybdenum inner cylinder and molybdenum outer barrel, its absorb high temperature in the case of, graphite
The impurity evaporated in soft felt will not be distributed between molybdenum cylinder, be entered into thermal field environment.Preferably, molybdenum inner cylinder
Certain thickness tantalum is plated with the outside of inner side and molybdenum outer barrel, and makes coating uniform during plating, and surface is smooth
Such as minute surface.
During use, molybdenum guide shell is first installed, as shown in figure 1, bore big mouth place upward, overall and its phase
The part matched somebody with somebody is connected, and all wt that locating ring undertakes whole molybdenum guide shell is installed by molybdenum guide shell.Because molybdenum inner cylinder inner side
Plated metal tantalum on surface, such as, by coating process, control uniformly and into minute surface by metal tantalum plated film, during installation its
Upward, when horn mouth is subject to temperature radiation, metal tantalum minute surface can be emitted light and heat by the form for reflecting horn mouth, from
And reduce the temperature on surface.The reverse side of molybdenum inner cylinder, i.e., towards the one side of molybdenum outer barrel, because having graphite soft felt to coming from heater
High temperature is intercepted, and makes to greatly reduce by the heat in direct radiation on the outside of molybdenum inner cylinder to molybdenum inner cylinder, it is ensured that during use
There is certain differences in crystallisation temperature between the polycrystalline silicon raw material melted outside silicon single crystal rod and circular cone in molybdenum guide shell circular cone, meet
Crystal growth condition, accelerates crystal growth.
So, it is achieved that using the physicochemical characteristics of material, under the high temperature conditions, reduces material property deficiency and cause
Guide shell fragmentation, the accident such as come off；Using the minute surface of guide shell surface tantalum coating to temperature and the reflex of light, reduction is led
The temperature of flow cartridge surfaces externally and internally, separates cylinder internal and external temperature, for the smooth growth of silicon single crystal provides certain facility.
And for example, a kind of molybdenum guide shell is as shown in Fig. 2 including molybdenum outer barrel 101, graphite soft felt 102, molybdenum inner cylinder 103, tantalum layer
104 and install locating ring 105, for example, tantalum layer therein 104 be molybdenum inner cylinder tantalum coating；Preferably, molybdenum inner cylinder is in itself by rotation
Pressure technology is molded, and does not have any lapping defect and seam, can so realize during processing, and the inner surface of molybdenum inner cylinder is put down very much
It is whole, tantalum layer is set on this basis, metal tantalum coating is for example plated, coating is uniform and forms minute surface, with very strong light and energy
The reflection function of amount, metal molybdenum physical characteristic in itself determines that it has stronger bending strength and the capacity of heat transmission.It is gold plated
The pyramid type molybdenum inner cylinder for belonging to tantalum not only can reflected energy, moreover it is possible to resist high temperature, so that in equipment running process, will not split,
Will not fall off and fall into crucible or thermal field, so as to avoid destruction growth apparatus or environment.The outer layer of molybdenum inner cylinder is used with guarantor
Warm nature can graphite soft felt support, make it be unlikely to be deformed at high temperature and by the graphite soft felt left and right sides
High temperature separates.There is boss, graphite soft felt is simultaneously firmly sealed in two by the molybdenum inner cylinder positioning after the convenient tantalum to plating on molybdenum outer barrel
Between person, at high temperature, the impurity in graphite soft felt is also sealed therebetween simultaneously, it is impossible to entered in environment of crystal growth.
Graphite soft felt is primarily served and intercepted by the irradiated next temperature in molybdenum outer barrel side, prevents it to be transmitted on molybdenum inner cylinder, it is ensured that to use
During temperature difference in molybdenum guide shell between silicon single crystal rod and the polycrystalline silicon raw material of melting meet silicon monocrystal growth condition.Outside molybdenum
The shaft shoulder of cylinder is positioned and fixed using guide shell installation locating ring, and all of weight is transferred into guide shell installation positioning
On ring.Avoid reducing guide shell inner side temperature using water-cooling apparatus in whole process.Avoid oxidizable, frangible graphite
Soft felt heat-insulation layer, increases the overall service life of guide shell.Tantalum coating increased the heat reflection inside molybdenum cone, and block
Molybdenum defect in manufacturing process in itself, improves control and guide shell making in itself of the speed of growth of silicon single crystal body during use
Use the life-span.
With reference to using molybdenum guide shell described in any of the above-described embodiment, the another embodiment of the utility model is, a kind of single crystal growing furnace,
It has molybdenum guide shell described in any of the above-described embodiment.
Further, embodiment of the present utility model also includes that each technical characteristic of the various embodiments described above is mutually combined shape
Into molybdenum guide shell and single crystal growing furnace with the molybdenum guide shell.The utility model is processed making and is spun into by mould
Type, the process-cycle is short, and consumptive material is few, and low cost is easy to process, for the equipment in initial debugging stage, facilitates guide shell to coordinate
The change of technique；The tantalum coating on guide shell surface not only solves the problems, such as guide shell internal and external temperature, also solves molybdenum guide shell sheet
The release of body impurity hot conditions, effectively prevents the water pipe cooling used to solve the problems, such as guide shell internal and external temperature, it is to avoid
Pipe burst and cause the risk that stove explodes；And change the not enough spy in toughness of existing graphite material guide shell
Point, reduces because of guide shell fragmentation, the impaired problem of the thermal field for coming off and causing.
It should be noted that above-mentioned each technical characteristic continues to be mutually combined, the various embodiments that formation is not enumerated above,
It is accordingly to be regarded as the scope of the utility model specification record；Also, for those of ordinary skills, can be according to above stating
It is bright to be improved or converted, and all these modifications and variations should all belong to the protection model of the utility model appended claims
Enclose.
Claims (10)
1. a kind of molybdenum guide shell, it is characterised in that it includes molybdenum inner cylinder, heat-insulation layer, molybdenum outer barrel and installs locating ring；
Annular seal space is formed between the molybdenum inner cylinder and the molybdenum outer barrel, the heat-insulation layer is arranged in the annular seal space；
The molybdenum inner cylinder has slippery inner surface；
The molybdenum outer barrel location and installation in the installation locating ring, for installing the molybdenum water conservancy diversion by the installation locating ring
Cylinder.
2. molybdenum guide shell according to claim 1, it is characterised in that the molybdenum inner cylinder has slippery inner surface.
3. molybdenum guide shell according to claim 1, it is characterised in that the molybdenum outer barrel is prepared using spinning process.
4. molybdenum guide shell according to claim 1, it is characterised in that the molybdenum outer barrel has smooth outer surface.
5. molybdenum guide shell according to claim 1, it is characterised in that the installation locating ring is provided with positioning shoulder seat.
6. molybdenum guide shell according to claim 5, it is characterised in that the shaft shoulder is provided with the positioning shoulder seat, for positioning
The molybdenum outer barrel and load-bearing are installed.
7. molybdenum guide shell according to claim 1, it is characterised in that the heat-insulation layer includes graphite heat-insulation layer.
8. molybdenum guide shell according to claim 7, it is characterised in that the heat-insulation layer includes graphite soft felt.
9. molybdenum guide shell according to claim 1, it is characterised in that at the molybdenum inner cylinder and the link position of the molybdenum outer barrel
The positioning fixing groove being adapted is respectively provided with, the positioning between the molybdenum inner cylinder and the molybdenum outer barrel by being adapted is consolidated
Determine groove and form the annular seal space.
10. a kind of single crystal growing furnace, it is characterised in that with the molybdenum guide shell as any one of claim 1 to 9.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621361889.7U CN206232840U (en) | 2016-12-13 | 2016-12-13 | A kind of molybdenum guide shell and single crystal growing furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621361889.7U CN206232840U (en) | 2016-12-13 | 2016-12-13 | A kind of molybdenum guide shell and single crystal growing furnace |
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| Publication Number | Publication Date |
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| CN206232840U true CN206232840U (en) | 2017-06-09 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106521617A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Molybdenum guide cylinder and single crystal furnace |
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2016
- 2016-12-13 CN CN201621361889.7U patent/CN206232840U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106521617A (en) * | 2016-12-13 | 2017-03-22 | 宝鸡市宏佳有色金属加工有限公司 | Molybdenum guide cylinder and single crystal furnace |
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