CN206204473U - A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling - Google Patents
A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling Download PDFInfo
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- CN206204473U CN206204473U CN201621214389.0U CN201621214389U CN206204473U CN 206204473 U CN206204473 U CN 206204473U CN 201621214389 U CN201621214389 U CN 201621214389U CN 206204473 U CN206204473 U CN 206204473U
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Abstract
The utility model provides a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, and it includes wheeled translation device, charging apparatus and lifting means；Charging apparatus is arranged at wheeled translation device；Lifting means is fixedly installed on charging apparatus；Charging apparatus sets charging inner cylinder, and lifting means sets hoisting mechanism, and hoisting mechanism is connected with charging inner cylinder；Charging apparatus sets charging door, and charging door is connected with charging inner cylinder；Charging apparatus lower section sets export structure, and export structure is connected with charging inner cylinder.The utility model realizes the secondary charging process in single crystal growth process, ensure the secondary charging under conditions of safe and reliable, also utilize lifting means, pollution to raw material is reduced as far as during secondary charging, can be after above a stove crystal production be finished, in the case of blowing out of not lowering the temperature, carry out the second stove polycrystalline silicon raw material charging process, so as to the consumption of electric energy being effectively reduced in crystal growing process, cost-effective, raising efficiency.
Description
Technical field
The utility model is related to monocrystalline silicon production, more particularly to, a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling.
Background technology
Single crystal growing furnace is to produce the main production equipments that monocrystalline silicon piece is used in solar panel.Generally according to charging,
Vacuumize, material, seeding, shouldering, isometrical, ending, several steps such as blowing out are produced.
The production process of monocrystalline silicon is under vacuum argon gas, after filling solid multi-crystalline silicon raw material in crucible, by heating
Polycrystalline silicon raw material is melted, by the tension force between the rotation of seed crystal and liquid, and is lifted up manufacturing monocrystal.At present,
Crystal pulling substantially uses disposable feed way, i.e., before heating disposably toward polycrystalline silicon material is filled it up with crucible, due to silicon material
Appearance and size reason, significant portion of space can be caused when silicon material is held in crucible, so as to crucible can not be made full use of
The useful space.Additionally, crucible top there remains larger space after the fusing of solid-state silicon.
Therefore, based on above two reason, still there is ample space above crucible after silicon material is completely melt, crucible is not
It is fully used so that the shared proportion in whole production process of crucible depreciation is larger.
Though in addition, there is part producer to have been achieved with the secondary charging of single crystal growing furnace at present, because secondary charging device is generally
External device (ED) or container type device, need to realize lifting blowing process by the lifting means in secondary furnace chamber during,
It is right that the manpower for needing cost certain during autonomous working, reproduction can not be reached is carried out by secondary charging mechanism and equipment
Connect, and needs make it feed under conditions of artificial monitoring, want after the first stove crystal pulling is finished for some equipment, want by setting
Standby or mechanism completes auto feed, and in the case of not blowing out, the production task for continuing to complete follow-up heat has been laid quite
Obstruction, while make production cost higher, the depreciation loss per heat is higher, influences productivity effect.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of new multiple charging mechanism of single crystal growing furnace continuous crystal-pulling.
The technical solution of the utility model is as follows：A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, it includes wheeled flat
Moving device, charging apparatus and lifting means；The charging apparatus is arranged at the wheeled translation device, the wheeled translation device
For driving the charging apparatus to translate；The lifting means is fixedly installed on the charging apparatus；The charging apparatus is set
Charging inner cylinder, the lifting means sets hoisting mechanism, and the hoisting mechanism is connected with the charging inner cylinder, described for controlling
Charging inner cylinder is moved up and down；The charging apparatus sets charging door, and the charging door is connected with the charging inner cylinder, for loading
Polycrystalline silicon raw material is to the charging inner cylinder；The charging apparatus lower section sets export structure, the export structure and the charging
Inner cylinder is connected, and the export structure is used to export the polycrystalline silicon raw material.
For example, the export structure is used for when the charging inner cylinder moves up and down predeterminated position, in the charging
Wound packages enters the part connection of the polycrystalline silicon raw material, and the controlled output polycrystalline silicon raw material.For example, predeterminated position is the cone
Shape valve is moved down into the position for opening the spacing zone so that the barrel chamber is in connected state with the output cavity；And for example,
Predeterminated position for the quartzy lifting arm drive the cone valve be moved down into the cone valve open the spacing zone so that
The barrel chamber is in the position of connected state with the output cavity.
Preferably, the charging apparatus also sets up charging outer barrel, and the charging inner cylinder is arranged at the charging outer barrel；
The inside of the wall portion of the charging outer barrel sets position-limit mechanism, and the position-limit mechanism is used to limit the charging inner cylinder in the dress
Expect the height and position of outer barrel；The charging door is arranged in the wall portion of the charging outer barrel；The bottom of the charging outer barrel sets
Put the export structure.
Preferably, the charging inner cylinder includes cylinder and quartz cover on the lower cylinder of cone valve, quartz, quartz；The quartz cover with
The upper cylinder connection of quartz, the quartzy lower cartridge portion is socketed on inside the upper cylinder of the quartz, and the lower cylinder of the quartz sets and is connected
Logical barrel chamber, spacing zone and output cavity, inside the upper cylinder of the barrel chamber connection quartz；The cone valve is at least partially arranged at
In the output cavity, the bottom of the output cavity connects the export structure, and the top of the output cavity connects the spacing zone,
The cone valve is used to be moved up and down relative to the spacing zone in stress to make the barrel chamber and institute to switch the spacing zone
State output cavity phase break-make；The position-limit mechanism is used to limit height and position of the upper cylinder of the quartz in the charging outer barrel；
The lifting means also sets up elevator bearing, and the elevator bearing is fixedly installed on the top of the charging outer barrel；It is described
Hoisting mechanism includes elevator with quartzy lifting arm；The elevator is fixedly installed on the elevator bearing, and the quartz is carried
Rising stem is arranged in the top of the charging outer barrel, and the first end of the quartzy lifting arm is connected with the elevator, the quartz
Second end of lifting arm is connected with the cone valve, and the quartzy lifting arm is used to be moved up by the hoister control, with
Drive and moved on the cone valve.
For example, the height and position includes upper cylinder height and position and lower cylinder height and position, the position-limit mechanism includes and institute
State the first corresponding limited block of cylinder height and position and second limited block corresponding with the lower cylinder height and position, institute
The described upper cylinder of the charging outer barrel is limited in when stating the first limited block for moving down the upper cylinder of the quartz highly
Position, second limited block be used to being limited in when moving down the lower cylinder of quartz the charging outer barrel it is described under
Cylinder height and position.
For example, cross-sectional area of the cross-sectional area of the Part I taper of the cone valve less than the spacing zone, and institute
The cross-sectional area of the cross-sectional area more than the spacing zone of the Part II taper of cone valve is stated, for receiving the cone valve
Moved up and down to switch the spacing zone relative to the spacing zone during control, and then cause that the barrel chamber is in the output cavity
Connected state or non-interconnected state；The barrel chamber is in connected state, i.e., described barrel chamber and the output cavity with the output cavity
Communicate；The barrel chamber is in non-interconnected state with the output cavity, i.e., described barrel chamber is mutually broken with the output cavity.
For example, first limited block can adjust respectively with the position of second limited block set, to adjust institute respectively
Cylinder height and position is stated with the lower cylinder height and position；And for example, the bottom of the upper cylinder of the quartz sets tongue, the lower cylinder of the quartz
Top the convex portion that matches with the tongue, the convex portion and the tongue elastic engaging are set, for making the quartz under
Cylinder part is socketed on inside the upper cylinder of the quartz and is sticked at the tongue inside the upper cylinder of the quartz, and in the stone
When cylinder is moved down into upper cylinder height and position jointly with the upper cylinder of quartz under English, by Action of Gravity Field so that the convex portion with it is described
Tongue is separated, so that the lower cylinder of the quartz is separated with the upper cylinder of the quartz, and is exerted a force upwards in the quartzy lifting arm
When makes the lower cylinder of the quartz, and above cylinder socket-connects with the quartz；For example, the convex portion has the first elastomeric joint, described first
Elastomeric joint and the tongue elastic engaging；And for example, the tongue has the second elastomeric joint, and second elasticity is combined
Portion and the convex portion elastic engaging.
Preferably, the hoisting mechanism also includes telescopic joint and soft molybdenum filament rope；The first end of the soft molybdenum filament rope with
The elevator connection, the soft end of molybdenum filament rope second is connected with the first end of the quartzy lifting arm；The telescopic joint sets
It is placed between the charging outer barrel and the charging inner cylinder, the quartzy lifting arm is closely arranged in the telescopic joint so that described
Charging inner cylinder keeps sealing state relative to the top of the charging outer barrel with the contact site of the quartzy lifting arm；It is described to stretch
The first end of casing coupling is connected with the top of the charging outer barrel, and the second end of the telescopic joint is connected with the quartz cover, described
Telescopic joint is used to, when the quartzy lifting arm is moved up and down, be stretched by the direction for moving up and down.
Preferably, the wall portion of the charging outer barrel is equipped with vacuum pumping opening, and the vacuum pumping opening is used to connect vacuum
Exhaust pipe.
Preferably, the outside of the wall portion of the charging outer barrel sets keeper, and the charging apparatus passes through the keeper
It is fixedly connected with the lifting means.
Preferably, the charging outer barrel also sets up the lading door for closing the charging door.
Preferably, it is additionally provided with sealing structure between the charging door and the lading door.
Preferably, the wheeled translation device is vehicle.
For example, the wheeled translation device is wheeled vehicle.
Preferably, the wheeled translation device sets elevating mechanism, and the charging apparatus is arranged at the elevating mechanism, institute
Elevating mechanism is stated for driving the charging apparatus to lift.
Using such scheme, the utility model is coordinated by wheeled translation device and charging apparatus etc., realizes monocrystal
Secondary charging process in growth course, it is ensured that the secondary charging under conditions of safe and reliable, also using lifting means, to the greatest extent may be used
Energy ground is reduced during secondary charging to the pollution of raw material, simple to operate, is fixed conveniently, easy-to-use.So, can be preceding
After the stove crystal production of face one is finished, in the case of blowing out of not lowering the temperature, the second stove polycrystalline silicon raw material charging process is carried out, so that effectively
Ground reduces the consumption of the electric energy in crystal growing process, cost-effective, raising efficiency.
The utility model other schemes also can ensure that single crystal growing furnace continuous crystal-pulling is multiple during needing to be fed
Charging mechanism can move to the corresponding position of charging and be docked with relevant device, and auto feed is realized in cooperation.
The utility model other schemes can also realize supermatic program, shirtsleeve operation mode and convenient
Self locking locking function, for crystalline substance process long provides easily secondary charging so that long again brilliant easy in the case of non-blowing out
In realization, and avoid pollution of the raw material in secondary charging mechanism, reduce operation cost of enterprises, be enterprise efficiently, safety, ring
Crystalline substance long is protected to provide safeguard.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the utility model one.
Fig. 2 is the broken section structural representation of the embodiment of the utility model one.
Fig. 3 is the part-structure schematic diagram of the embodiment of the utility model one.
Fig. 4 is the broken section structure enlarged diagram of the embodiment of the utility model one.
Specific embodiment
Below in conjunction with the accompanying drawings and specific embodiment, the utility model is described in detail, the following examples can group
Conjunction is used, also, the utility model can be realized using various forms, is not limited to each specific implementation described by this specification
Example, there is provided the purpose of these embodiments is more thoroughly comprehensively readily appreciated to disclosure of the present utility model.Further
It should be noted that when a certain structure is fixed on another structure, including the structure is directly or indirectly fixed on this another
Structure, or the structure is fixed on another structure by one or more of the other intermediate structure.When a structure connection
Another structure, including the structure is directly or indirectly connected to another structure, or the structure is passed through one or many
Individual other intermediate structures are connected to another structure.Also, described "and/or" include " and " it is possible with two kinds of "or"
Embodiment.
An example of the present utility model is, a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, and it includes wheeled translation
Equipment, charging apparatus and lifting means；The charging apparatus is arranged at the wheeled translation device, and the wheeled translation device is used
Translated in the charging apparatus is driven；The lifting means is fixedly installed on the charging apparatus；The charging apparatus sets dress
Material inner cylinder, the lifting means sets hoisting mechanism, and the hoisting mechanism is connected with the charging inner cylinder, for controlling the dress
Material inner cylinder is moved up and down；The charging apparatus sets charging door, and the charging door is connected with the charging inner cylinder, many for loading
Crystal silicon raw material is to the charging inner cylinder；Charging apparatus lower section sets export structure, in the export structure and the charging
Cylinder connection, the export structure is used to export the polycrystalline silicon raw material.For example, the export structure is used to export the polysilicon
Raw material is to single crystal growing furnace.So, coordinated by wheeled translation device and charging apparatus etc., realize two in single crystal growth process
Secondary charging process, it is ensured that the secondary charging under conditions of safe and reliable, also using lifting means, is reduced as far as secondary
It is simple to operate to the pollution of raw material during charging, it is fixed conveniently, it is easy-to-use.So, can be in an above stove crystal production
After finishing, in the case of blowing out of not lowering the temperature, the second stove polycrystalline silicon raw material charging process is carried out, so as to be effectively reduced crystal growth
During electric energy consumption, cost-effective, raising efficiency.
For example, a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, it includes wheeled translation device, charging apparatus and lifting
Equipment；For example, wheeled translation device is wheeled translation device, the wheeled translation device of crawler type, the wheeled translation of conveyor type
Equipment or the wheeled translation device of lift-on/lift-off type etc.；Preferably, the wheeled translation device is vehicle.Preferably, it is described wheeled flat
Moving device is wheeled vehicle.For example, wheeled translation device is vehicle, for example, wheeled translation device is dolly, for example automatically
Dolly.So, can be translated in the position of raw material input position and an at least single crystal growing furnace such that it is able to be at least one single
Brilliant stove repeatedly feeds, and after above a stove crystal production is finished, in the case of blowing out of not lowering the temperature, carries out the second stove polycrystalline silicon raw material
Charging process, so as to the consumption of electric energy being effectively reduced in crystal growing process, cost-effective, raising efficiency.
For example, the charging apparatus is arranged at the wheeled translation device, the wheeled translation device is described for driving
Charging apparatus is translated；For example, being provided with the charging apparatus on wheeled translation device；Preferably, the wheeled translation
Equipment sets elevating mechanism, and the charging apparatus is arranged at the elevating mechanism, and the elevating mechanism is used to drive the charging
Equipment is lifted.So, the charging apparatus goes for the input and output of the polycrystalline silicon raw material of various different height positions.
Fixed effect is preferably installed in order to obtain, it is preferred that the outside setting of the wall portion of the charging outer barrel of the charging apparatus is fixed
Part, the charging apparatus is fixedly connected by the fixture with the elevating mechanism.So, related embodiment is coordinated, can
Ensure during needing to be fed, the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling can move to the corresponding position of charging
Docked with relevant device, and auto feed is realized in cooperation.
For example, the lifting means is fixedly installed on the charging apparatus；For example, the lifting means is fixedly installed on institute
State the top of charging apparatus；And for example, the lifting means is fixedly installed on the outside of the wall portion of the charging apparatus, i.e., described to carry
The equipment of liter is fixedly installed on the outside wall portions of the charging apparatus.For example, the charging apparatus sets charging outer barrel, the lifting sets
The outside of the standby wall portion for being fixedly installed on the charging outer barrel, i.e., described lifting means is fixedly installed on the outer of the charging outer barrel
Wall portion.For example, the charging apparatus sets charging inner cylinder, the lifting means sets hoisting mechanism, the hoisting mechanism and institute
Charging inner cylinder connection is stated, for controlling the charging inner cylinder to move up and down；So, can be by lifting means and its hoisting mechanism
The control charging inner cylinder is moved up and down, and coordinates other structures to realize that single crystal growing furnace continuous crystal-pulling repeatedly feeds.In order to obtain more preferably
Installation fixed effect, it is preferred that the outside of the wall portion of the charging outer barrel sets keeper, and the charging apparatus is by described
Keeper is fixedly connected with the lifting means.
For example, the charging apparatus sets charging door, the charging door is connected with the charging inner cylinder, for loading polycrystalline
Silicon raw material is to the charging inner cylinder；For example, the charging door has square structure or circular configuration；For example, the charging door tool
There are square-section or circular cross-section；So, polycrystalline silicon raw material is encased in by the charging inner cylinder by charging door；Preferably, institute
State charging outer barrel and also set up lading door for closing the charging door.For example, the lading door is articulated with the charging door, and
Such as, the lading door is articulated with the wall portion of the charging outer barrel, and and for example, the lading door is articulated with the wall portion of the charging outer barrel
Outside, i.e., it is described charging outer barrel outside wall portions；Preferably, sealing knot is additionally provided between the charging door and the lading door
Structure, for sealing the charging door with the lading door.For example, sealing structure is rubber strip.And for example, the sealing structure is set
In the edge placement of the charging door.
For example, as shown in figure 4, charging apparatus lower section sets export structure 131, the export structure and the charging
Inner cylinder 109 is connected, and the export structure is used to export the polycrystalline silicon raw material.For example, the export structure set valve and its
Controlling switch, the controlling switch is turned on and off the valve for controlled, and it is described that the valve is used for the output when opening
Polycrystalline silicon raw material.For example, the export structure is used for when the charging inner cylinder moves up and down predeterminated position, with the charging
Inner cylinder loads the part connection of the polycrystalline silicon raw material, and the controlled output polycrystalline silicon raw material.And for example, the export structure is used
During Yu Tong material states, the part for loading the polycrystalline silicon raw material with the charging inner cylinder connects, wherein, the logical material state
For：The charging inner cylinder moves up and down predeterminated position, and the cone valve of the charging inner cylinder is released with spacing zone, and polysilicon is former
Material enters the output cavity of charging inner cylinder from the barrel chamber of charging inner cylinder by the spacing zone of the inner cylinder that feeds.For example, predeterminated position is institute
State cone valve and be moved down into the position for opening the spacing zone so that the barrel chamber is in connected state with the output cavity；Again
Such as, predeterminated position for the quartzy lifting arm drive the cone valve be moved down into the cone valve open the spacing zone with
Make the barrel chamber that the position of connected state is in the output cavity.So, coordinate related embodiment, can realize highly automated
The program of change, shirtsleeve operation mode and convenient self locking locking function, for crystalline substance process long provides easily secondary adding
Material so that the crystalline substance long again in the case of non-blowing out is easily achieved, and avoids pollution of the raw material in secondary charging mechanism, reduces
Operation cost of enterprises, is that crystalline substance long provides safeguard efficient, safe and environment-friendlyly for enterprise.
For example, the charging apparatus lower section sets location structure and export structure, the location structure is used to be located by connecting
Single crystal growing furnace, the crucible of the single crystal growing furnace that is for example located by connecting, and the export structure is opened after the single crystal growing furnace that is located by connecting, by institute
State export structure and export the polycrystalline silicon raw material.For example, the location structure sets sensor, the sensor is used to sense list
Whether the isolating valve of brilliant stove is opened, and when isolating valve is opened, notifies the controlling switch of the export structure, is opened by the control
The valve for opening the export structure is closed, the polycrystalline silicon raw material is exported.The sensor is additionally operable to sensing the polysilicon
Raw material is all exported when completing, and notifies the controlling switch, and the valve is closed by the controlling switch.And for example, the positioning
The position sensor that structure setting is connected with the wheeled translation device, the position sensor answers single crystal growing furnace to set for location sense
Standby position, notifies the wheeled translation device, and single crystal furnace equipment is voluntarily moved to by the wheeled translation device, controls institute
State the export structure below charging apparatus to be docked with single crystal furnace equipment, for example, controlling described below the charging apparatus
The connection corresponding with the isolating valve in single crystal furnace equipment of the valve of export structure.For example, the wheeled translation device is automatic carriage.
Preferably, the charging apparatus also sets up charging outer barrel, and the charging inner cylinder is arranged at the charging outer barrel；
The inside of the wall portion of the charging outer barrel sets position-limit mechanism, and the position-limit mechanism is used to limit the charging inner cylinder in the dress
Expect the height and position of outer barrel；The charging door is arranged in the wall portion of the charging outer barrel；The bottom of the charging outer barrel sets
Put the export structure.That is, the wall portion of described charging outer barrel is equipped with the charging door, and the charging door is connected outside the charging
The inside of cylinder and outside；The export structure is arranged at the bottom of the charging outer barrel.Wherein, the charging inner cylinder is arranged at institute
Charging outer barrel is stated, including the charging inner cylinder is all arranged at charging outer barrel or the charging inner cylindrical portion
It is arranged at the charging outer barrel.In order to obtain preferably charging effect, it is to avoid air is disturbed, it is preferred that outside the charging
The wall portion of cylinder is equipped with vacuum pumping opening, and the vacuum pumping opening is used to connect vacuum suction pipeline, is taken out by outside vacuum
Gas equipment and its vacuum suction pipeline, extract the inner air of the charging outer barrel out from the vacuum pumping opening.
Preferably, as shown in figure 4, the charging inner cylinder include on cone valve 108, the lower cylinder 109, quartz of quartz cylinder 110 and
Quartz cover 111；The quartz cover is connected with the upper cylinder of the quartz, and the quartzy lower cartridge portion is socketed in the upper cylinder of the quartz
Portion, the lower cylinder of the quartz sets barrel chamber 191, spacing zone 192 and the output cavity 193 being connected, and the barrel chamber connects the quartz
Inside upper cylinder；For example, the quartz cover is connected with the top of the charging outer barrel or the charging outer barrel.
For example, as shown in figure 4, the cone valve 108 is at least partially arranged in the output cavity 193, the output cavity
Bottom connect the export structure, the top of the output cavity connects the spacing zone, and the cone valve is used in stress
Moved up and down relative to the spacing zone makes the barrel chamber with the output cavity phase break-make to switch the spacing zone；So, lead to
The on off operating mode that cone valve controls the spacing zone is crossed, on off operating mode includes connection and non-interconnected, i.e., by cone valve application cylinder
Can chamber be by spacing zone and the connected state of output cavity, so as to control polycrystalline silicon raw material enter by spacing zone from barrel chamber export
Chamber.
For example, the position-limit mechanism is used to limit height and position of the upper cylinder of the quartz in the charging outer barrel；This
Sample, the extreme lower position of cylinder on quartz can be set by position-limit mechanism.And for example, as shown in figure 4, the position-limit mechanism is removable
Limited block 115, can move up and down within a certain height, for adjusting the limitation upper cylinder of the quartz up and down in the charging
The height and position of outer barrel, the height and position is also known as maximum height limit position or upper cylinder height and position, i.e., described position-limit mechanism
To may move limited block, for adjusting the maximum height limit position or the upper cylinder height and position, the maximum height limit position up and down
Put or the upper cylinder height and position is height and position of the upper cylinder of the limitation quartz in the charging outer barrel.So, pass through
Removable limited block can up and down adjust the extreme lower position of cylinder on quartz so that charging outer barrel can have multiple rule with charging inner cylinder
Lattice are simultaneously applied to various single crystal growing furnaces.
For example, the lifting means also sets up elevator bearing, the elevator bearing is fixedly installed on outside the charging
The top of cylinder；The hoisting mechanism includes elevator with quartzy lifting arm；The elevator is fixedly installed on the elevator branch
Seat, the quartzy lifting arm is arranged in the top of the charging outer barrel, first end and the elevator of the quartzy lifting arm
Connection, the second end of the quartzy lifting arm is connected with the cone valve, and the quartzy lifting arm is used to receive the elevator control
System is moved up, and moved on the cone valve with being driven.For example, the second end of the quartzy lifting arm is spirally connected with the cone valve.
For example, the inside of the cone valve is molybdenum, outside is quartz.For example, the cone valve has quartzy inner bag and molybdenum outer layer.Again
Such as, the cone valve has quartzy lower half and the quartzy first half, and the quartzy first half is covered with molybdenum outer layer.And for example, the taper
Valve includes the cylinder half of the conical first half and cylindrical lower half, the cone of the conical first half and cylindrical lower half
Footpath is identical and with identical rotary shaft.
Preferably, the hoisting mechanism also includes telescopic joint and soft molybdenum filament rope；The first end of the soft molybdenum filament rope with
The elevator connection, the soft end of molybdenum filament rope second is connected with the first end of the quartzy lifting arm；For example, such as Fig. 4 institutes
Show, the telescopic joint 112 is arranged between the charging outer barrel and the charging inner cylinder, and the quartzy lifting arm 116 is closely worn
Located at the telescopic joint so that the charging inner cylinder relative to it is described charging outer barrel top contact with the quartzy lifting arm
Position keeps sealing state；The first end of the telescopic joint is connected with the top 102A of the charging outer barrel, the telescopic joint
Second end is connected with the quartz cover 111, and the telescopic joint is used for when the quartzy lifting arm is moved up and down, by moving up and down
Direction stretched.
Preferably, the elevator sets pulley, driver and lifting control module, the lifting control module with it is described
Driver is connected, and the lifting control module is fixedly installed on the elevator bearing, the lifting control with the driver
Module is used to control the driver to rotate clockwise or rotate counterclockwise, the first end of the soft molybdenum filament rope and the driving
Device is connected, and the soft end of molybdenum filament rope second is connected with the first end of the quartzy lifting arm, and the soft molybdenum filament rope passes through institute
State pulley and hang the drawing quartzy lifting arm, under the driver drives, being moved along the opposite both direction of pulley, to match somebody with somebody
Close and move or move down on the quartzy lifting arm.Preferably, the elevator sets sluggish part, and the sluggish part connection is described soft
Property molybdenum filament rope, for the speed that the sluggishness soft molybdenum filament rope itself is moved to the soft extreme direction of molybdenum filament rope second；For example,
The soft molybdenum filament rope is set around the sluggish part, or, it is described slow that the soft molybdenum filament rope is connected into zigzag or M fonts
Stagnant part, so, when polycrystalline silicon raw material is loaded to the charging inner cylinder, under the Action of Gravity Field of the polycrystalline silicon raw material, drives
The upper cylinder of quartz, the lower cylinder of the quartz are moved down jointly with the cone valve, and drive the quartzy lifting arm to moving down
It is dynamic, and it is slow to the soft extreme direction of molybdenum filament rope second to draw the soft molybdenum filament rope itself from the soft end of molybdenum filament rope second
Slow mobile, i.e., the described soft end of molybdenum filament rope second slowly declines with the quartzy lifting arm in the presence of the sluggish part；Institute
State when cylinder on quartz is moved down into the described upper cylinder height and position of the charging outer barrel and stop, the quartz lower cylinder and institute
State cone valve to continue to move down, and drive the quartzy lifting arm to be slowly moved downward with the soft end of molybdenum filament rope second,
And avoided too fast decline by the hysteresis of the sluggish part；The quartz lower cylinder feeds in outer barrel when moving down to described
Stopped during the described lower cylinder height and position in portion, the cone valve continues to move down, and drive the quartzy lifting arm with it is described
The soft end of molybdenum filament rope second slowly moves downward, and is avoided too fast decline by the hysteresis of the sluggish part；The taper
When valve is moved down into a certain position, the cone valve is released with the spacing zone, and polycrystalline silicon raw material passes through spacing zone from barrel chamber
Into output cavity.So, by the hysteresis of sluggish part, the too fast decline of cone valve can be avoided so that polycrystalline silicon raw material from
It is more controllable that barrel chamber enters output cavity by spacing zone.
For example, the driver sets housing, and is placed in the stator and rotor of the enclosure interior, the housing is consolidated
Surely the elevator bearing is arranged at, the lifting control module is fixedly installed on the housing, the stator and the lifting
Control module is connected, and the lifting control module is used to control the rotor clockwise to rotate or turn counterclockwise by the stator
Dynamic, the first end of the soft molybdenum filament rope is connected with the rotor.
And for example, the height and position includes upper cylinder height and position and lower cylinder height and position, and the position-limit mechanism includes and institute
State the first corresponding limited block of cylinder height and position and second limited block corresponding with the lower cylinder height and position, institute
The described upper cylinder of the charging outer barrel is limited in when stating the first limited block for moving down the upper cylinder of the quartz highly
Position, second limited block be used to being limited in when moving down the lower cylinder of quartz the charging outer barrel it is described under
Cylinder height and position；For example, first limited block can adjust respectively with the position of second limited block set, to adjust respectively
The upper cylinder height and position and the lower cylinder height and position；For example, the position of first limited block and second limited block
Can adjust respectively and set, to adjust the upper cylinder height and position respectively with the lower cylinder height and position；And for example, the upper cylinder of the quartz
Bottom protruded bottom kerf is set, the top of the lower cylinder of quartz sets the sunken bottom portion matched with the protruded bottom kerf, the sunken bottom portion
With the protruded bottom kerf elastic engaging, go up cylinder inside and be sticked in described for making the quartzy lower cartridge portion be socketed on the quartz
At the protruded bottom kerf on quartz inside cylinder, and cylinder is moved down into cylinder jointly with cylinder on the quartz under the quartz
During height and position, by Action of Gravity Field so that the sunken bottom portion is separated with the protruded bottom kerf, so that the quartz lower cylinder and institute
Cylinder on quartz is stated to be separated, and make when the quartzy lifting arm exerts a force upwards it is described quartz under cylinder with it is described quartz on cylinder be nested
Connect；For example, the sunken bottom portion has the first elastic portion, first elastic portion and the protruded bottom kerf elastic engaging；And for example, it is described
Protruded bottom kerf has the second elastic portion, second elastic portion and sunken bottom portion elastic engaging.So, only under the quartz
When cylinder is subject to larger gravity, the lower cylinder of the quartz is separated with the upper cylinder of the quartz, can effectively control the lower cylinder of the quartz
Move down.
For example, the quartzy lifting arm is used to be moved down by the hoister control, to drive the cone valve downward
It is mobile.And for example, the quartzy lifting arm is used to be moved up and down by the hoister control, to drive the cone valve upper and lower
It is mobile.For example, when loading polycrystalline silicon raw material to the charging inner cylinder, the cone valve is in close contact with the spacing zone, i.e. institute
State cone valve and be in close contact state with the spacing zone, polycrystalline silicon raw material cannot be entered after having arrived barrel chamber by spacing zone
Output cavity；Now, the upper cylinder of the quartz, the lower cylinder of the quartz receive the Action of Gravity Field of polycrystalline silicon raw material with the cone valve, jointly
Move down, and drive the quartzy lifting arm to move down；The upper cylinder of quartz is moved down into the charging outer barrel
Described upper cylinder height and position when stop, the lower cylinder of quartz continues to move down with the cone valve, and drives the quartz
Lifting arm is moved down；Stop when when the lower cylinder of the quartz being moved down to the described lower cylinder height and position of the charging outer barrel
Under, the cone valve continues to move down, and drives the quartzy lifting arm to move down；The cone valve is moved down into certain
During one position, the cone valve is released with the spacing zone, that is, depart from and be in close contact, and polycrystalline silicon raw material passes through spacing zone from barrel chamber
Into output cavity, for example, when the cone valve is moved down into predeterminated position, the cone valve is released with the spacing zone；Plus
After the completion of material, the quartzy lifting arm is used to be moved up by the hoister control, moved on the cone valve with being driven, described
When cone valve is moved upwards up to a certain position, the cone valve is in close contact with the spacing zone, so that under driving the quartz
Cylinder is moved up, and then drives the lower cylinder of the quartz to leave the lower cylinder height and position；The cone valve and the lower cylinder of the quartz
Entirety is continued to move up, so as to drive the upper cylinder of the quartz to move up, and then drives the upper cylinder of the quartz to leave on described
Cylinder height and position.And for example, when when the lower cylinder of the quartz being moved down to the described lower cylinder height and position of the charging outer barrel
When stopping, start the elevator, control the quartzy lifting arm to move down, the quartzy lifting arm is used to receive the lifting
Machine control is moved down, to drive the cone valve to move down, to control the cone valve to be released with the spacing zone.
For example, as shown in figure 4, the cross-sectional area of the Part I taper 108A of the cone valve 108 is less than described spacing
The cross-sectional area in area 192, and the Part II taper 108B of the cone valve cross-sectional area more than the spacing zone 192 horizontal stroke
Sectional area, for making the cone valve be moved up and down relative to the spacing zone to switch the spacing zone when controlled, and then
So that the barrel chamber 191 is in connected state or non-interconnected state with the output cavity 193；At the barrel chamber and the output cavity
In connected state, i.e., described barrel chamber is communicated with the output cavity；The barrel chamber is in non-interconnected state, i.e. institute with the output cavity
Barrel chamber is stated mutually to break with the output cavity.
For example, as shown in figure 4, the bottom setting tongue 110A of the upper cylinder of the quartz, the top of the lower cylinder of quartz is set
The convex portion 109A matched with the tongue, for example, maximum outside diameter of the minimum diameter of the tongue less than the convex portion；Again
Such as, the convex portion has the outer portion turned up, and outer portion activity is embedded in the tongue, i.e., described outer portion can be with embedding
Enter in the tongue, can also depart from from the tongue；And for example, the convex portion abuts with tongue activity, the tongue
For limiting the extreme position that the convex portion moves down, for example, the convex portion is engaged with the tongue, for making the stone
English lower cartridge portion is socketed on inside the upper cylinder of the quartz, and cylinder is moved down into the convex portion with the tongue under the quartz
During abutting, make at the tongue that the lower cylinder of quartz is sticked in inside the upper cylinder of the quartz, and the quartzy lifting arm to
The convex portion is separated from each other with the tongue during upper force, so that the lower cylinder of the quartz increases with the upper jacket casing socket part point of the quartz
Plus.For example, the convex portion has the first elastomeric joint, first elastomeric joint and the tongue elastic engaging；And for example,
The tongue has the second elastomeric joint, second elastomeric joint and the convex portion elastic engaging.So, can strengthen
The abutting effect of the convex portion and the tongue.
For example, when loading polycrystalline silicon raw material to the charging inner cylinder, the cone valve is in close contact with the spacing zone, i.e.,
The cone valve and the spacing zone are in close contact state, and polycrystalline silicon raw material has arrived after barrel chamber or cannot in barrel chamber
Output cavity is entered by spacing zone；Now, the upper cylinder of the quartz, the lower cylinder of the quartz receive polycrystalline silicon raw material with the cone valve
Action of Gravity Field, moves down jointly, and drives the quartzy lifting arm to move down；The upper cylinder of quartz is moved down into removable
Stopped at dynamic limited block, i.e., the described upper cylinder of quartz is moved down into the maximum height limit position or the institute of the charging outer barrel
Stopped when stating cylinder height and position；The lower cylinder of the quartz continues to move down with the cone valve, and drives the quartz lifting
Bar is moved down；The quartz lower cylinder stops when being contacted with the tongue to the convex portion when moving down, the cone valve after
It is continuous to move down, and drive the quartzy lifting arm to move down；When the cone valve is moved down into a certain position, the cone
Shape valve is released with the spacing zone, that is, depart from and be in close contact, and polycrystalline silicon raw material enters output cavity, example from barrel chamber by spacing zone
Such as, when the cone valve is moved down into predeterminated position, the cone valve is released with the spacing zone；It is described after the completion of charging
Quartzy lifting arm is used to be moved up by the hoister control, moved on the cone valve with being driven, and the cone valve is moved upwards
When moving a certain position, the cone valve is in close contact with the spacing zone, so as to drive the lower cylinder of the quartz to move up, enters
And drive the lower cylinder of the quartz to leave the lower cylinder height and position；The cone valve integrally continues up shifting with the lower cylinder of the quartz
It is dynamic, so as to drive the upper cylinder of the quartz to move up, and then drive the upper cylinder of the quartz to leave the upper cylinder height and position.Again
Such as, when being stopped when when the lower cylinder of the quartz being moved down to the described lower cylinder height and position of the charging outer barrel, institute is started
State elevator, control the quartzy lifting arm to move down, the quartzy lifting arm is used for by the hoister control to moving down
It is dynamic, to drive the cone valve to move down, to control the cone valve to be released with the spacing zone.
Continue with the illustration multiple charging mechanism of single crystal growing furnace continuous crystal-pulling.
For example, the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling includes：For carrying charging apparatus in the horizontal plane（It is main
Cartridge）Weight and can perpendicular to the ground side bring up main feeding material cylinder fast lifting positioning wheeled translation device, for example
Wheeled translation device is automatic vehicle, below by taking automatic vehicle as an example, but is equally applicable to other wheeled translation devices.For example,
Automatic vehicle has the locomotive function in horizontal plane, is moved rapidly on any point ground that can be in factory building region, for example,
The automatic weight lifting arm for protracting of getting off two has certain act effect of stretching, and can will fill polysilicon or the casing drum of other raw materials
It is overall to be lifted in perpendicular, and can stop at an arbitrary position, enable casing drum rapidly with single crystal furnace equipment on
Isolating valve match centering.For example, main casing drum includes charging outer barrel, there is the ear that positioning is used above charging outer barrel,
Under normal circumstances, the stopping means for being stretched out on weight lifting arm on the ear and automatic vehicle matches, it is ensured that main casing drum it is relative with
The position of automatic vehicle, ensures the distance between main casing drum and equipment blocking valve position indirectly.For example, being installed on charging outer barrel
There are hinged lading door and its sealing structure, for example, sealing structure is sealing ring, such as rubber ring etc..Main casing drum top
Portion is fixedly connected elevator bearing, or, main casing drum top or charging outer barrel top are wholely set with elevator bearing；Example
Such as, main casing drum top or charging outer barrel top are flange arrangement, for example, main casing drum top or charging outer barrel top are upper method
It is blue.Elevator bearing has fixed supporting role to elevator thereon, for example, the soft molybdenum filament rope of elevator is lifted with quartz
Bar connect, the lower section of quartzy lifting arm be threadedly coupled inside one be outside molybdenum quartz cone valve, under quartz cylinder it is defeated
Go out chamber and play sealing function, form the quartz pipe for accommodating polycrystalline silicon raw material.Charging outer barrel abuts against upper end, there is one true
Empty bleeding point, it is convenient to be connected with vacuum suction pipeline.Charging outer barrel includes：The top one end is connected with elevator bearing,
The other end is connected with quartz cover, and carries out the telescopic joint of sealing function, telescopic joint centrally through a quartz lifting long
Bar（That is quartz pushrod）, above cylinder is connected quartz cover with quartz, and cylinder is installed on charging outer barrel on quartz, and by charging outer barrel
The limitation of the adjustable limit block on kerbstone English below cylinder.For example, the lower cylinder of quartz passes through convex on respective barrel with the upper cylinder of quartz
Play structure mutually spacing connection so that the lower cylinder of quartz can not be separated with the upper cylinder of quartz when separating to a certain extent.
When using, by polycrystalline silicon raw material, the lower cylinder of the loading quartz and cone valve are close under being formed from the lading door opened
In seal structure, lower sealing structure includes cone valve, barrel chamber and partial spacing zone；Automatic vehicle is by charging apparatus（That is cartridge）
It is loaded on preceding cantilever arm, material closes lading door after filling up, automatic vehicle shift position, adjustment height makes to be exported under cartridge
The valve of structure connection corresponding with the isolating valve in single crystal furnace equipment, such as valve has flange face, and flange face and single crystal growing furnace set
Standby upper isolating valve correspondence is connected, and fixes export structure and single crystal furnace equipment；And for example, export structure includes flange arrangement,
For example, export structure includes lower flange, the flange face connection corresponding with the isolating valve in single crystal furnace equipment of lower flange, and fix
Export structure and single crystal furnace equipment.Interface connection will be vacuumized on vacuum lead and charging outer barrel, and open ball above
Valve, is extracted the air in the charging apparatus total system and comes, that is, the outer barrel that feeds is extracted with the air in charging inner cylinder
Come, reach in the cavity of the charging apparatus total system as far as possible in the absence of the effect of air.Then open in single crystal furnace equipment
Isolating valve, the elevator motor rotation of lifting means loosens soft molybdenum filament rope, makes cylinder on quartz, quartz lower cylinder, quartz
Cylinder, quartz pushrod, cone valve are moved downwardly together, when after cylinder on quartz and limited block contact, cylinder stop motion on quartz is quartzy
Lower cylinder continues to move downward, and cylinder runs into the spacing rear stop motion of cylinder on quartz under waiting quartz, and cone valve is in polycrystalline silicon raw material gravity
Continue lower motion or cone valve in the presence of lower and self gravitation under polycrystalline silicon raw material gravity, under elevator effect and itself
Continue lower motion in the presence of gravity, last cone valve and the lower cylinder of quartz are disengaged, produce gap, polycrystalline silicon raw material just from
Fallen into the crucible of single crystal growing furnace in gap, so as to reach the effect of charging.After the completion of charging, the isolation closed in single crystal furnace equipment
Valve, single crystal growing furnace departs from charging apparatus, and the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling is filled under the auxiliary of automatic vehicle to loading area
Full material, waits charging next time.
For example, as shown in figure 1, a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, including for cartridge can before and after it is left
The automatic vehicle 101 of motion positions under upper right, the charging outer barrel 102 being engaged with automatic vehicle 101 sets on charging outer barrel 102
There is the vacuum pumping opening 105 for connecting vacuum pipe；The elevator bearing being connected with each other with charging outer barrel 102 upper flange
103, the elevator 104 installed above of elevator bearing 103, the lifting arm 106 being connected with the tightrope of elevator 104.Charging is outer
The lading door 107 and its corresponding sealing structure for being exclusively used in charging are set on cylinder 102；As shown in figure 3, being set on charging outer barrel 102
Charging door 107A is put, the fitted seal structure of lading door 107 closes the charging door 107A.
For example, as shown in Fig. 2 the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling is also set up for controlling cylinder 110 on quartz to transport
The adjustable limit block 115 of dynamic position, for fixing the bolt hole 114 of outer cartridge 102 and elevator bearing 103 and wearing spiral shell
The bolt of keyhole 114, the sealing ring 113 for sealing outer cartridge 102 and elevator bearing 103, sealing is flexible to stretch
Section 112, prevents the quartz cover plate 111 of contamination of raw material, charging and the lower cylinder 109, Yi Jiyong of the upper cylinder 110 of sporting quartz, quartz
In the cone valve 108 of blowing.Quartzy lifting arm 116 connects cone valve 108；In Fig. 1 to Fig. 4, lifting arm 106 is quartz lifting
Bar 116, for ease of recognizing and avoiding confusion, is labeled as lifting arm 106, positioned at dress in the part being placed on outside charging apparatus
Expect the part of device interior（I.e. in sectional view）Labeled as quartzy lifting arm 116, also it is understood that the of the quartzy lifting arm
One end is lifting arm 106, and the second end of the quartzy lifting arm is quartzy lifting arm 116.
For example, single crystal furnace equipment is needed when fed, it is only necessary to which the isolating valve of its own is closed, and by secondary stove
Cylinder rotates to other positions, and the related operating space above isolating valve all is allowed out, can now be carried out in secondary stove bucket
Seed crystal is installed or the crystal for just pulling out is laid down.Before charging, in loading area, the automatic vehicle that will be provided with charging apparatus is answered
Position, i.e. the lower end of charging apparatus is placed in extreme lower position, then opens lading door, and by correlation need plus raw material from the charging
Door loads, and after filling, closes lading door.Vacuum line is connected in vacuum pumping opening, connected is Vacuum ball valve, is beaten
The valve of Vacuum ball valve is opened, the air fed in outer barrel is taken out, make the vacuum in charging apparatus inside i.e. charging apparatus cavity
Degree reaches requirement, closes Vacuum ball valve, it is preferred that remove the pipeline of vacuum valve front end, keeps the vacuum of charging outer barrel.
Then fed：Start automatic vehicle, cause it to move at equipment, finely tune horizontal level, then adjust upright position, make charging
Equipment is run to above isolating valve, and adjusts hole position, coordinates it, tightens corresponding fixing bolt.Isolating valve is opened, startup is carried
The machine of liter, quartzy lifting arm starts to decline together with polycrystalline silicon raw material, cylinder, quartz lower cylinder and cone valve one on quartz cover plate, quartz
Rise it is slow decline, after cylinder contact with adjustable limit block on quartz, cylinder stop motion on quartz, it is quartzy under cylinder and cone valve after
Continuous to move downward, the also stop motion after position limiting structure in cylinder under quartz and the upper cylinder of quartz meets, cone valve continues to transport downwards
It is dynamic.Now cone valve continues to form a gap between cylinder under quartz after moving, and it is increasing until polycrystalline silicon raw material from this
Dropped in gap, i.e., in the crucible that polycrystalline silicon raw material starts drop to single crystal growing furnace from this gap.For example, using quartzy lifting arm
Cone valve is promoted to move downward, after gap reaches to be sized, elevator shuts down.And for example, cone valve is made by gravity
Move downward.For example, after the polycrystalline silicon raw material in quartz pipe is fallen in crucible completely, elevator starts and draws soft molybdenum
Cord, such as elevator are inverted and are involved in wherein soft molybdenum filament rope, successively by pipe and stone on cone valve, quartzy down tube, quartz
English lid lifts go back to origin-location, and telescopic joint returns to original position, is then lifted out machine out of service.Isolating valve is closed, and is unclamped
The fixture of isolating valve and charging apparatus, slow horizontal movement, leaves single crystal growing furnace and sets after the segment distance of automatic vehicle vertical-lift one
It is standby, loading area is run to, continue to feed, wait charging next time.The secondary furnace tube of single crystal furnace equipment is returned to after installing new seed crystal
Originally crystal pulling position, continues crystal pulling.So, the secondary charging process in single crystal growth process is realized, it is ensured that can in safety
Secondary charging under conditions of leaning on, also using lifting means, is reduced as far as during secondary charging the pollution to raw material,
The second stove polycrystalline silicon raw material charging process can be carried out after above a stove crystal production is finished, in the case of blowing out of not lowering the temperature,
So as to the consumption of electric energy being effectively reduced in crystal growing process, cost-effective, raising efficiency.
For example, wheeled translation device sets elevating mechanism, charging apparatus is arranged at elevating mechanism, and lifting means is fixedly installed
In charging apparatus；For example, as shown in figure 3, automatic vehicle 101 sets lift with roller structure 130 on automatic vehicle 101
Structure, elevating mechanism includes support underframe 121, and the crane 122 being fixed on support underframe 121 is installed on crane 122
Lowering or hoisting gear 123, the pair of sliding structure 124 for being slidably mounted on crane 122 and being connected with lowering or hoisting gear 123, with lifting
Device 123 is connected and for controlling the lowering or hoisting gear 123 control assembly 120 of descending operation is carried out to slide construction 124, is fixed on
Travelling carriage 125 in pair of sliding structure 124, and a pair of support arms 126 being fixed on travelling carriage 125；For example, roller knot
Structure 130 is arranged at crane 122, for servo-actuated rolling；The outside of wall portion of the charging outer barrel 102 of charging apparatus sets open loop portion
129, a pair of the keepers 127 being fixed in open loop portion 129, and if being individually fixed in open loop portion 129 and keeper 127
Dry rib 128；For example, open loop portion has C-shaped configuration, rib has triangular structure.Elevator bearing 103 is fixed on dress
The top of the charging outer barrel 102 of material equipment, elevator 104 is fixedly installed on elevator bearing 103, the wall portion of the outer barrel 102 that feeds
Vacuum pumping opening 105 is equipped with, lifting arm 106 is arranged in the top of the charging outer barrel 102, and charging door 107A is arranged in charging
The wall portion of outer barrel, charging outer barrel 102 also sets up the lading door 107 of closing charging door 107A.So, it is possible to use automatic water is translated
Dolly is moved as planar movement power source, by the use of itself lifting means as opening and closing charging apparatus valve power source, by wherein each
Position-limit mechanism constitutes Precise Position System, it is ensured that when single crystal furnace equipment needs charging, single crystal growing furnace continuous crystal-pulling repeatedly feeds
Mechanism has been filled with material, position that can be where automatic running to single crystal furnace equipment, by each spacing and sensing mechanism positioning, makes
The multiple charging mechanism of single crystal growing furnace continuous crystal-pulling carries out docking single crystal furnace equipment automatically, and completes the process for feeding, and raising equipment makes
It is the cost of the aspects such as artificial enterprise's production attenuating, electric power, plant maintenance with efficiency.
Further, embodiment of the present utility model also includes that each technical characteristic of the various embodiments described above is mutually combined shape
Into the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, also known as charging mechanism, portable charging mechanism or single crystal growing furnace charging mechanism.
It should be noted that above-mentioned each technical characteristic continues to be mutually combined, the various embodiments that formation is not enumerated above,
It is accordingly to be regarded as the scope of the utility model specification record；Also, for those of ordinary skills, can be according to above stating
It is bright to be improved or converted, and all these modifications and variations should all belong to the protection model of the utility model appended claims
Enclose.
Claims (10)
1. a kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling, it is characterised in that including wheeled translation device, charging apparatus and carry
The equipment of liter；
The charging apparatus is arranged at the wheeled translation device, and the wheeled translation device is used to drive the charging apparatus to put down
Move；
The lifting means is fixedly installed on the charging apparatus；
The charging apparatus sets charging inner cylinder, and the lifting means sets hoisting mechanism, the hoisting mechanism and the charging
Inner cylinder is connected, for controlling the charging inner cylinder to move up and down；
The charging apparatus sets charging door, and the charging door is connected with the charging inner cylinder, arrived for loading polycrystalline silicon raw material
The charging inner cylinder；The charging door has circular configuration；
The charging apparatus lower section sets export structure, and the export structure is connected with the charging inner cylinder, the export structure
For exporting the polycrystalline silicon raw material.
2. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 1, it is characterised in that the charging apparatus also sets
Charging outer barrel is put, the charging inner cylinder is arranged at the charging outer barrel；
The inside of the wall portion of the charging outer barrel sets position-limit mechanism, and the position-limit mechanism is used to limit the charging inner cylinder in institute
State the height and position of charging outer barrel；
The charging door is arranged in the wall portion of the charging outer barrel；
The bottom of the charging outer barrel sets the export structure.
3. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 2, it is characterised in that the charging inner cylinder includes
Cylinder and quartz cover on the lower cylinder of cone valve, quartz, quartz；
The quartz cover is connected with the upper cylinder of the quartz, and the quartzy lower cartridge portion is socketed on inside the upper cylinder of the quartz, described
The lower cylinder of quartz sets barrel chamber, spacing zone and the output cavity being connected, inside the upper cylinder of the barrel chamber connection quartz；
The cone valve is at least partially arranged in the output cavity, and the bottom of the output cavity connects the export structure, institute
The top for stating output cavity connects the spacing zone, the cone valve be used in stress relative to the spacing zone move up and down with
Switching the spacing zone makes the barrel chamber with the output cavity phase break-make；
The position-limit mechanism is used to limit height and position of the upper cylinder of the quartz in the charging outer barrel；
The lifting means also sets up elevator bearing, and the elevator bearing is fixedly installed on the top of the charging outer barrel；
The hoisting mechanism includes elevator with quartzy lifting arm；
The elevator is fixedly installed on the elevator bearing, and the quartzy lifting arm is arranged in the top of the charging outer barrel
Portion, the first end of the quartzy lifting arm is connected with the elevator, the second end and the cone valve of the quartzy lifting arm
Connection, the quartzy lifting arm is used to be moved up by the hoister control, moved on the cone valve with being driven.
4. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 3, it is characterised in that the hoisting mechanism is also wrapped
Telescopic joint is included with soft molybdenum filament rope；
The first end of the soft molybdenum filament rope is connected with the elevator, and the soft end of molybdenum filament rope second and the quartz are lifted
The first end connection of bar；
The telescopic joint is arranged between the charging outer barrel and the charging inner cylinder, and the quartzy lifting arm is closely arranged in institute
Telescopic joint is stated so that the charging inner cylinder is protected relative to the top of the charging outer barrel with the contact site of the quartzy lifting arm
Hold sealing state；
The first end of the telescopic joint is connected with the top of the charging outer barrel, the second end and the quartz cover of the telescopic joint
Connection, the telescopic joint is used to, when the quartzy lifting arm is moved up and down, be stretched by the direction for moving up and down.
5. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 4, it is characterised in that the wall of the charging outer barrel
Portion is equipped with vacuum pumping opening, and the vacuum pumping opening is used to connect vacuum suction pipeline.
6. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 4, it is characterised in that the wall of the charging outer barrel
The outside of portion sets keeper, and the charging apparatus is fixedly connected by the keeper with the lifting means.
7. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 1, it is characterised in that the charging outer barrel also sets
Put the lading door for closing the charging door.
8. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 7, it is characterised in that the charging door with it is described
Sealing structure is additionally provided between lading door.
9. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to claim 1, it is characterised in that the wheeled translation device
It is vehicle.
10. the multiple charging mechanism of single crystal growing furnace continuous crystal-pulling according to any one of claim 1 to 9, it is characterised in that described
Wheeled translation device sets elevating mechanism, and the charging apparatus is arranged at the elevating mechanism, and the elevating mechanism is used to drive
The charging apparatus lifting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621214389.0U CN206204473U (en) | 2016-11-11 | 2016-11-11 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621214389.0U CN206204473U (en) | 2016-11-11 | 2016-11-11 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
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| Publication Number | Publication Date |
|---|---|
| CN206204473U true CN206204473U (en) | 2017-05-31 |
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ID=58752309
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621214389.0U Expired - Fee Related CN206204473U (en) | 2016-11-11 | 2016-11-11 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
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| Country | Link |
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| CN (1) | CN206204473U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757309A (en) * | 2016-11-11 | 2017-05-31 | 宝鸡市宏佳有色金属加工有限公司 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
| CN114381797A (en) * | 2021-12-29 | 2022-04-22 | 宁夏申和新材料科技有限公司 | Telescopic quartz feeding device, straight pulling single crystal furnace and method for improving pulling speed |
-
2016
- 2016-11-11 CN CN201621214389.0U patent/CN206204473U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106757309A (en) * | 2016-11-11 | 2017-05-31 | 宝鸡市宏佳有色金属加工有限公司 | A kind of multiple charging mechanism of single crystal growing furnace continuous crystal-pulling |
| CN106757309B (en) * | 2016-11-11 | 2020-01-14 | 宝鸡市宏佳有色金属加工有限公司 | Continuous crystal pulling multiple feeding mechanism of single crystal furnace |
| CN114381797A (en) * | 2021-12-29 | 2022-04-22 | 宁夏申和新材料科技有限公司 | Telescopic quartz feeding device, straight pulling single crystal furnace and method for improving pulling speed |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170531 Termination date: 20191111 |