CN206015141U - Vertical pulling method produces monocrystal silicon continuous feeding - Google Patents
Vertical pulling method produces monocrystal silicon continuous feeding Download PDFInfo
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- CN206015141U CN206015141U CN201620919403.0U CN201620919403U CN206015141U CN 206015141 U CN206015141 U CN 206015141U CN 201620919403 U CN201620919403 U CN 201620919403U CN 206015141 U CN206015141 U CN 206015141U
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- casing drum
- continuous feeding
- monocrystal silicon
- pulling method
- vertical pulling
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Abstract
Vertical pulling method production monocrystal silicon continuous feeding disclosed in this utility model, including charging hopper and pulling apparatus, charging hopper includes filling department, reducing diameter part and the channel part being sequentially connected from top to bottom, reducing diameter part is provided with material blocking block, casing drum is provided with channel part, and casing drum lower surface carries out folding by casing drum baffle plate, is connected with casing drum connecting rod on casing drum baffle plate, pulling apparatus include that connected Power Component and rope, rope are connected with casing drum connecting rod through after material blocking block.Vertical pulling method of the present utility model production monocrystal silicon continuous feeding solves the problems, such as existing feeder as single charge amount causes that charging times are more, feeding accounts for duration less, which arranges charging hopper storage raw material and carries out internal gas purification, it is poured into when needing to feed in casing drum, then reach ad-hoc location opening casing drum baffle plate to realize to charging process in silica crucible, which once feeds and can meet a piece monocrystalline of drawing.
Description
Technical field
This utility model belongs to monocrystalline silicon production equipment technical field, and in particular to vertical pulling method production monocrystal silicon is added with continuous
Material device.
Background technology
In order to save vertical pulling method production monocrystal silicon cost, typically using repeatedly feeding intake, by the way of single stove draws many monocrystalline,
Now be used mostly for 1 meter of length, the cylinder type quartz feeder processed of 200 millimeter of diameter, once feed on 20 kilograms of left sides
The right side, if 800 kilograms of inventory, draws 5 monocrystalline, needs to feed more than 30 times.Charging needs personnel that raw material is loaded charging every time
In device, and feeder is cleared up, then feeder is loaded in auxiliary chamber of single crystal furnace, fed by single crystal growing furnace pulling apparatus
Operation, the charging used time was at 1 hour or so every time.
Utility model content
The purpose of this utility model is to provide vertical pulling method production monocrystal silicon continuous feeding, solves existing adding
Glassware causes the problem that charging times are more, charging accounts for duration less due to single charge amount.
The technical scheme adopted by this utility model is：Vertical pulling method produces monocrystal silicon continuous feeding, including charging
Storehouse and pulling apparatus, charging hopper include filling department, reducing diameter part and the channel part being sequentially connected, the upper end of filling department from top to bottom
Face have can folding top cover, the lower surface of channel part fixed with auxiliary chamber of single crystal furnace valve storehouse by flange, and reducing diameter part is provided with closure
Material blocking block, is provided with casing drum in channel part, casing drum lower surface carries out folding, casing drum baffle plate by casing drum baffle plate
On be connected with casing drum connecting rod, length of the casing drum length of connecting rod more than casing drum, the upper surface connection limited location method of casing drum
Diameter of the blue and stop flange with diameter greater than auxiliary chamber of single crystal furnace valve storehouse, pulling apparatus include connected Power Component and rope,
Rope is connected with casing drum connecting rod through after material blocking block.
The characteristics of this utility model, also resides in,
Striker plate is fitted with the work surface of reducing diameter part.
Casing drum baffle plate is separated with casing drum and conically shaped, and the basal diameter of casing drum baffle plate is more than casing drum
Diameter, casing drum connecting rod is connected on the summit of casing drum baffle plate.
Casing drum baffle plate is movably connected on casing drum lower surface, drives the activity of casing drum baffle plate by lifting casing drum connecting rod
Carry out the opening and closing movement of casing drum.
Power Component is connected motor and curled hair wheel, and rope is wound on curled hair wheel.
Charging hopper both sides are connected to vacuum pump and argon inlet port.
The medium position of charging hopper offers peep-hole.
The beneficial effects of the utility model are：Vertical pulling method production monocrystal silicon of the present utility model is solved with continuous feeding
Existing feeder causes the problem that charging times are more, charging accounts for duration less due to single charge amount.Of the present utility model straight
Traction therapy produces monocrystal silicon continuous feeding and arranges charging hopper storage raw material and carry out internal gas purification, will when needing to feed
Which is poured in casing drum, is then reached ad-hoc location opening casing drum baffle plate and is realized to charging process in silica crucible, one
Secondary charging can meet a piece monocrystalline of drawing, and do substrate using silicon material, quartz, it is to avoid pollution raw material, and have independent
Vacuum system, safe, can with the integrated use of single crystal growing furnace, save installation cost.
Description of the drawings
Fig. 1 is the dimensional structure diagram that vertical pulling method of the present utility model produces monocrystal silicon continuous feeding；
Fig. 2 is the sectional view that vertical pulling method of the present utility model produces monocrystal silicon continuous feeding；
Fig. 3 be in vertical pulling method of the present utility model production monocrystal silicon continuous feeding charging hopper to casing drum feed supplement
Sectional view；
Fig. 4 is the section view that vertical pulling method production monocrystal silicon continuous feeding of the present utility model feeds to silica crucible
Figure.
In figure, 1. curled hair wheel, 2. rope, 3. charging hopper, 4. material blocking block, 5. striker plate, 6. casing drum connecting rod, 7. feeds
Cylinder, 8. casing drum baffle plate, 9. auxiliary chamber of single crystal furnace valve storehouse, 10. single crystal growing furnace, 11. raw materials, 12. silica crucibles.
Specific embodiment
Conventionally, as the design of single crystal growing furnace itself, limits the volume of existing feeder, single charge amount
Less, charging times are caused to increase, feed time increases, existing feed time has accounted for more than the 15% of the crystal pulling used time, affects life
Efficiency is produced, is increased human users' load, and the process for repeatedly feeding can be brought impurity into, reduce monocrystalline minority carrier lifetime
More than 20%, affect crystal quality.
With reference to the accompanying drawings and detailed description this utility model is described in detail.
The structure of the vertical pulling method production monocrystal silicon continuous feeding that this utility model is provided as depicted in figs. 1 and 2, is wrapped
Charging hopper 3 and pulling apparatus are included, charging hopper 3 includes filling department, reducing diameter part and the channel part being sequentially connected from top to bottom, loaded
The upper surface in portion have can folding top cover, the lower surface of channel part fixed with auxiliary chamber of single crystal furnace valve storehouse 9 by flange, and reducing diameter part sets
The material blocking block 5 of closure is equipped with, casing drum 7 in channel part, is provided with, 7 lower surface of casing drum is opened by casing drum baffle plate 8
Close, on casing drum baffle plate 8, be connected with casing drum connecting rod 6,6 length of casing drum connecting rod is more than the length of casing drum 7, casing drum 7
Upper surface be connected with stop flange and stop flange with diameter greater than auxiliary chamber of single crystal furnace valve storehouse 9 diameter, pulling apparatus include being connected
Power Component and rope 2, rope 2 is through being connected with casing drum connecting rod 6 after material blocking block 5.
Charging hopper 3 is stainless steel, and top cover can be with folding, and both sides have connection vacuum pump and argon inlet connect respectively
Mouthful, there is peep-hole at middle part, inlays pyroceram, and its underpart connects auxiliary chamber of single crystal furnace valve storehouse 9, sealing surface rubber by flange
O-ring is sealed, and is taper, and lays striker plate 5 at undergauge.
Further, striker plate 5 is silicon or quartz material, lamellar, is laid at 3 taper reducing of charging hopper.
Further, pulling apparatus include motor, curled hair wheel 1 and rope 2, on 3 top cover of charging hopper, by electricity
Machine, curled hair wheel 1 are rotated and drive rope 2, carry out the operation that constant speed lifts casing drum 7.
Further, the rope 2 of pulling apparatus passes through material blocking block 4, and material blocking block 4 is cylindric, silicon material.
Further, the connection casing drum of rope 2 connecting rod 6, casing drum connecting rod 6 is stainless steel.
Further, casing drum connecting rod 6 runs through casing drum 7, and casing drum 7 is cylindrical shape, quartz material.
Further, 6 bottom of casing drum connecting rod is connected with casing drum baffle plate 8, and casing drum baffle plate 8 is by casing drum connecting rod 6
Lifting reaches the purpose of 7 lower part outlet of folding casing drum.Casing drum baffle plate 8 is quartz material, can be movably connected on casing drum 7
Lower surface, it is also possible to casing drum 7 without annexation, simply by the purpose that lifting reaches 7 lower part outlet of folding casing drum.
Example, casing drum baffle plate 8 can be with 7 connectionless relation of casing drum, and conically shaped, its basal diameter is more than casing drum
7 lower part outlet diameter, drives lifting to reach the purpose of folding casing drum 7 by casing drum connecting rod 6.Casing drum baffle plate 8 also may be used
Think that plectane is filled, which is passed through the lower surface that the movable connection methods such as such as hinge are connected to casing drum connecting rod 6, is connected by casing drum
Bar 6 drives opposite side lifting to reach the purpose of folding casing drum 7.
Referring to Fig. 3, during actual installation, raw material 11 is loaded in the filling department of charging hopper 3 and reducing diameter part is blocked by material blocking block 4
Outlet, is arranged on charging hopper 3 on auxiliary chamber of single crystal furnace valve storehouse 9, now in auxiliary chamber of single crystal furnace valve storehouse 9 at isolating valve using sling cart
In closed mode, by connecting vacuum pump and argon inlet, charging hopper 3 is carried out purifying except air；Then using pulling apparatus
Casing drum connecting rod 6 and casing drum baffle plate 8 is driven to rise so as to closing 7 lower ending opening of casing drum and driving which to rise, until plus
By 4 jack-up of material blocking block, the raw material 11 in the filling department of charging hopper 3 is slipped in casing drum 7 barrel connecting rod 6, by peeping for charging hopper 3
Window, observation material packaged enter situation, when casing drum 7 filled by raw material 11, decline casing drum 7, material blocking block 4 fall prevention material block after
Continuous landing.
Referring to Fig. 4, during actual charging, isolating valve in concubine valve storehouse 2 is opened, decline casing drum 7, until 7 upper end of casing drum
The stop flange in face is placed on the lower flange in auxiliary chamber of single crystal furnace valve storehouse 2, and now casing drum 7 blocks stopping and declines, and casing drum gear
Plate 8 continues slow decline, and when barrel baffle plate 8 to be added departs from the distance of 7 lower edge of casing drum more than material block size, raw material 11 slips into list
In silica crucible 12 in brilliant stove 10；After in casing drum 7, raw material 11 is completely added in silica crucible 12, casing drum 7 is risen,
Repeat above-mentioned feed supplement process, until completing required feeding quantity.Isolating valve in auxiliary chamber of single crystal furnace valve storehouse 2 is closed finally, using lifting
Charging hopper 3 is removed by car, continues next step pulling operation.
Vertical pulling method of the present utility model production monocrystal silicon continuous feeding single charge can reach 150 kilograms with
On, and feed the used time can reduce 80%, simultaneously because carry out gas purification and avoid impurity pollute so that monocrystalline minority
Carrier lifetime raises more than 10%.
Claims (7)
1. vertical pulling method produces monocrystal silicon continuous feeding, it is characterised in that including charging hopper (3) and pulling apparatus, described
Charging hopper (3) includes that filling department, reducing diameter part and the channel part being sequentially connected, the upper surface of the filling department have from top to bottom
Can folding top cover, the lower surface of the channel part is fixed with auxiliary chamber of single crystal furnace valve storehouse (9) by flange, and the reducing diameter part is provided with
The material blocking block (5) of closure, is provided with casing drum (7) in the channel part, casing drum (7) lower surface is kept off by casing drum
Plate (8) carries out folding, is connected with casing drum connecting rod (6) on casing drum baffle plate (8), and casing drum connecting rod (6) length is big
In the length of casing drum (7), the upper surface of casing drum (7) is connected with stop flange and the stop flange is with diameter greater than institute
The diameter in auxiliary chamber of single crystal furnace valve storehouse (9) is stated, the pulling apparatus include connected Power Component and rope (2), the lifting
Rope (2) is connected with casing drum connecting rod (6) through after the material blocking block (5).
2. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the reducing diameter part
Striker plate (5) is fitted with work surface.
3. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the casing drum gear
Plate (8) is separated with the casing drum (7) and shape (8) is cone, and the basal diameter of casing drum baffle plate (8) is more than institute
The diameter of casing drum (7) is stated, casing drum connecting rod (6) are connected on the summit of casing drum baffle plate (8).
4. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the casing drum gear
Plate (8) is movably connected on the casing drum (7) lower surface, drives casing drum baffle plate (8) activity by lifting casing drum connecting rod (6)
Carry out the opening and closing movement of casing drum (7).
5. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the Power Component
For connected motor and curled hair wheel (1), rope (2) are wound on curled hair wheel (1).
6. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the charging hopper
(3) both sides are connected to vacuum pump and argon inlet port.
7. vertical pulling method as claimed in claim 1 produces monocrystal silicon continuous feeding, it is characterised in that the charging hopper
(3) medium position offers peep-hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620919403.0U CN206015141U (en) | 2016-08-22 | 2016-08-22 | Vertical pulling method produces monocrystal silicon continuous feeding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620919403.0U CN206015141U (en) | 2016-08-22 | 2016-08-22 | Vertical pulling method produces monocrystal silicon continuous feeding |
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| CN206015141U true CN206015141U (en) | 2017-03-15 |
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| CN201620919403.0U Active CN206015141U (en) | 2016-08-22 | 2016-08-22 | Vertical pulling method produces monocrystal silicon continuous feeding |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023508A (en) * | 2018-10-23 | 2018-12-18 | 宁夏旭樱新能源科技有限公司 | Single crystal growing furnace new type of continuous feeding device |
| CN114164487A (en) * | 2022-02-10 | 2022-03-11 | 杭州中欣晶圆半导体股份有限公司 | Quartz feeding system for transversely stacking polycrystalline silicon raw materials and lossless feeding method |
| CN116200805A (en) * | 2023-04-27 | 2023-06-02 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
| TWI845224B (en) * | 2022-03-24 | 2024-06-11 | 中國大陸商中環領先半導體科技股份有限公司 | Feeding assembly, single crystal growth device and feeding method having the same |
-
2016
- 2016-08-22 CN CN201620919403.0U patent/CN206015141U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109023508A (en) * | 2018-10-23 | 2018-12-18 | 宁夏旭樱新能源科技有限公司 | Single crystal growing furnace new type of continuous feeding device |
| CN109023508B (en) * | 2018-10-23 | 2024-02-13 | 宁夏旭樱新能源科技有限公司 | Novel continuous feeding device for single crystal furnace |
| CN114164487A (en) * | 2022-02-10 | 2022-03-11 | 杭州中欣晶圆半导体股份有限公司 | Quartz feeding system for transversely stacking polycrystalline silicon raw materials and lossless feeding method |
| TWI845224B (en) * | 2022-03-24 | 2024-06-11 | 中國大陸商中環領先半導體科技股份有限公司 | Feeding assembly, single crystal growth device and feeding method having the same |
| CN116200805A (en) * | 2023-04-27 | 2023-06-02 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
| CN116200805B (en) * | 2023-04-27 | 2023-08-11 | 北京大学 | Continuous Czochralski crystal pulling device and application method thereof |
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