CN206163710U - Directionality reconfigurable microelectronics machinery antenna - Google Patents
Directionality reconfigurable microelectronics machinery antenna Download PDFInfo
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- CN206163710U CN206163710U CN201621263031.7U CN201621263031U CN206163710U CN 206163710 U CN206163710 U CN 206163710U CN 201621263031 U CN201621263031 U CN 201621263031U CN 206163710 U CN206163710 U CN 206163710U
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- cantilever beam
- antenna
- reconfigurable
- mems
- microelectron
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Abstract
The utility model discloses a directionality reconfigurable microelectronics machinery antenna, this microelectronics machinery antenna use the gaAs as the substrate, are equipped with microstrip antenna feeder, star type structure microstrip antenna radiation unit, MEMS cantilever beam, cantilever beam bridge mound on the substrate. Through the voltage of exerting the polarity identical variation in size to the drop -down electrode of cantilever beam homonymy, the MEMS cantilever beam just has bending in various degree like this to the realization is to the little reconsitution of microwave antenna directionality, through exerting the voltage that polarity is opposite to the drop -down electrode in the cantilever beam left and right sides, MEMS cantilever beam both sides will produce opposite direction's bending like this to the realization is to the big reconsitution of microwave antenna directionality.
Description
Technical field
This utility model is related to a kind of microstrip antenna based on microelectromechanical systems (MEMS) technology, more particularly to a kind of
The reconfigurable microelectron-mechanical antenna of directivity, belongs to microelectromechanical systems field.
Background technology
Antenna directly affects nothing as indispensable in radio system and very important part, the quality of itself
The overall performance of line electric system.The task of antenna is that the high frequency electric energy (keying wave) that transmitter is exported is converted into into electromagnetic wave
It radiate, or space wave signal is converted into into high frequency electric energy and gives receiver.
In order to be able to good above-mentioned purpose of realizing, classical single-mode antenna can not meet radar system to wave beam
Figuration and quick scanning etc. require that this causes directivity reconfigurable antenna to earn widespread respect and fast-developing.
Over nearly more than 20 years, with developing rapidly for MEMS technology, MEMS cantilever beam structures are conducted in-depth research, made
Must be possibly realized using MEMS technology reconfigurable antenna directivity.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of reconfigurable microelectron-mechanical antenna of directivity, leads to
Cross MEMS technology and restructural is realized to antenna directivity so that its simple structure, operation facility.
This utility model is employed the following technical solutions to solve above-mentioned technical problem：
This utility model provides a kind of directivity reconfigurable microelectron-mechanical antenna, and the microelectron-mechanical antenna is with arsenic
Gallium is substrate, and microstrip antenna feeder line, hub-and-spoke configuration microstrip antenna radiation element, MEMS cantilever beams, cantilever glider bridge are provided with substrate
Pier；Wantonly four spoke sides of the hub-and-spoke configuration microstrip antenna radiation element are connected respectively with a cantilever beam bridge pier, each cantilever
Beam bridge pier connects a MEMS cantilever beam, wherein, respectively arrange in the both sides of cantilever beam bridge pier in the lower section of each MEMS cantilever beam
One cantilever beam pull-down electrode, each cantilever beam pull-down electrode is provided with dielectric layer, the medium in each cantilever beam pull-down electrode
Layer is provided with sacrifice layer between corresponding MEMS cantilever beams；The hub-and-spoke configuration microstrip antenna radiation element of not connected cantilever beam bridge pier
Spoke side is connected with microstrip antenna feeder line.
Used as further prioritization scheme of the present utility model, each cantilever beam pull-down electrode, cantilever beam bridge pier are and substrate
Connection.
Used as further prioritization scheme of the present utility model, the dielectric layer is SiN.
Used as further prioritization scheme of the present utility model, four cantilever beam bridge piers are identical.
Used as further prioritization scheme of the present utility model, the sacrifice layer is polyimide sacrificial layer.
Used as further prioritization scheme of the present utility model, four MEMS cantilever beams are identical.
This utility model adopts above technical scheme compared with prior art, the technology based on MEMS of the present utility model
The reconfigurable microelectron-mechanical antenna of directivity has following significant advantage：
1st, the star-like irradiation structure of microelectron-mechanical antenna is provided with MEMS cantilever beams from four direction, under four cantilever beams
Square both sides are respectively arranged pull-down electrode, so as to the directivity of effectively reconfigurable microwave antenna；
2nd, by applying the different voltage of polarity formed objects to cantilever beam the same side pull-down electrode, MEMS cantilever beams will
There is different degrees of bending, so as to realize the little reconstruct to microwave antenna directivity；
3rd, by applying opposite polarity voltage to cantilever beam left and right sides pull-down electrode, MEMS cantilever beams will the side of generation
To contrary bending, so as to realize the big reconstruct to microwave antenna directivity；
4th, structure of the present utility model is based on MEMS technology, the principal advantages with MEMS, such as small volume, weight
Gently, power consumption is low；
5th, antenna of the present utility model and monolithic integrated microwave circuit (MMIC) technique are completely compatible, be easy to it is integrated, this
Number of advantages is that traditional microstrip antenna is incomparable, therefore it has research and using value well.
Description of the drawings
Fig. 1 is the top view of the reconfigurable microelectron-mechanical antenna of directivity.
Fig. 2 is the sectional view before cantilever beam release.
Fig. 3 is the sectional view after cantilever beam release.
In figure：1- microstrip antenna feeder lines, 2- hub-and-spoke configuration antenna elements, 3-MEMS cantilever beams, the drop-down electricity of 4- cantilever beams
Pole, 5- cantilever beam bridge piers, 6- polyimide sacrificial layers, 7-SiN dielectric layers, 8-GaAs substrates.
Specific embodiment
The technical solution of the utility model is described in further detail below in conjunction with the accompanying drawings：
The reconfigurable microelectron-mechanical antenna of directivity of the present utility model is a kind of reconfigurable microwave antenna of directivity,
With GaAs substrate, as shown in Figures 1 to 3, the microelectron-mechanical antenna is provided with micro-strip day with GaAs substrate 8 on substrate
Line feeder line 1, hub-and-spoke configuration microstrip antenna radiation element 2, MEMS cantilever beams 3, cantilever beam bridge pier 5, cantilever beam pull-down electrode 4, SiN are situated between
Matter layer 7 and polyimide sacrificial layer 6.
Wantonly four spoke sides of the hub-and-spoke configuration microstrip antenna radiation element 2 are connected respectively with a cantilever beam bridge pier 5, often
Individual cantilever beam bridge pier 5 connects a MEMS cantilever beam 3, and the lower section of each MEMS cantilever beam 3 respectively sets in the both sides of cantilever beam bridge pier 5
A cantilever beam pull-down electrode 4 is put, each cantilever beam pull-down electrode 4 is provided with SiN dielectric layers 7, each cantilever beam pull-down electrode 4
On SiN dielectric layers 7 and corresponding MEMS cantilever beams 3 between be provided with polyimide sacrificial layer 6；Not connected cantilever beam bridge pier 5
The spoke side of hub-and-spoke configuration microstrip antenna radiation element 2 is connected with microstrip antenna feeder line 1.
In this utility model, microstrip antenna feeder line 1 receives armed microwave signal and gives hub-and-spoke configuration microstrip antenna spoke
Unit 2 is penetrated, hub-and-spoke configuration microstrip antenna radiation element 2 is connected to four identical cantilever beam bridge piers 5, four identical cantilever beam bridge piers
5 four identical MEMS cantilever beams 3 of connection, both sides are respectively provided with a cantilever beam pull-down electrode below each MEMS cantilever beam 3
4, in each of the lower pulling electrode 4 be provided with SiN dielectric layers 7, be provided with poly- between each SiN dielectric layer 7 and each MEMS cantilever beam 3
Acid imide sacrifice layer 6.
Microstrip antenna feeder line receives armed microwave signal, by hub-and-spoke configuration microwave antenna radiation element and four phases
Same cantilever beam launches microwave signal.Because both sides are respectively arranged pull-down electrode below MEMS cantilever beam structures, from
And the restructural of the directivity for realizing adjusting microwave antenna.By applying polarity formed objects not to cantilever beam homonymy pull-down electrode
Same voltage, such MEMS cantilever beams just have different degrees of bending, so as to realize the little reconstruct to microwave antenna directivity；
By applying opposite polarity voltage to cantilever beam left and right sides pull-down electrode, such MEMS cantilever beams will produce in opposite direction
Bending, so as to realize the big reconstruct to microwave antenna directivity.Finally, realize adjusting weighing for the directivity of microwave antenna
Structure.
The preparation method of the reconfigurable microelectron-mechanical antenna of directivity of this utility model design is：
1) gallium arsenide substrate is prepared：From be unadulterated semi-insulating GaAs substrate；
2) photoetching：Remove at cantilever beam pull-down electrode, microstrip antenna feeder line and hub-and-spoke configuration microstrip antenna radiation element
Photoresist；
3) gold is sputtered：Cantilever beam pull-down electrode, microstrip antenna feeder line and hub-and-spoke configuration microstrip antenna radiation element are formed, its
In, the thickness of gold is 0.3 μm；
4) in the top deposit silicon nitride dielectric layer of cantilever beam pull-down electrode：Use plasma enhanced CVD method
Technique growsSilicon nitride medium layer；
5) photoetching and etch nitride silicon dielectric layer；Retain the silicon nitride medium being located between cantilever beam and its pull-down electrode
Layer；
6) deposit and photoetching polyimide sacrificial layer：The polyimide sacrificial layer of 1.6 μ m-thicks is coated in gallium arsenide substrate,
Pit is filled up in requirement, and the thickness of polyimide sacrificial layer determines the height between cantilever beam and silicon nitride medium layer, and photoetching gathers
Acid imide sacrifice layer, only retains the sacrifice layer under cantilever beam；
7) sputtered titanium/gold/titanium：Sputter titanium/gold/titanium=500/1500/300 for cantilever beam and its bridge pier；
8) photoetching：Remove cantilever beam and its photoresist at bridge pier；
9) gold is electroplated：Plating cantilever beam and its bridge pier, the thickness of gold is 2 μm；
10) releasing sacrificial layer：The polyimide sacrificial layer below cantilever beam structure is discharged with developer solution, and uses dehydrated alcohol
Dehydration, forms the cantilever beam structure for suspending.
Distinguish be whether the structure standard it is as follows：
The microstrip antenna structure is using hub-and-spoke configuration microstrip antenna radiation element and four identical MEMS cantilever beam structures.Work
It is as principle：By applying the different voltage of polarity formed objects to cantilever beam homonymy pull-down electrode, such MEMS cantilever beams are just
Different degrees of bending is had, so as to realize the little reconstruct to microwave antenna directivity；By drop-down to the cantilever beam left and right sides
Electrode applies opposite polarity voltage, and such MEMS cantilever beams both sides will produce bending in opposite direction, so as to realize to micro-
The big reconstruct of wave antenna directivity.It is micro- so as to realize because both sides are respectively arranged pull-down electrode below MEMS cantilever beam structures
The restructural of the directivity of wave antenna.The structure for meeting conditions above is considered as the reconfigurable microelectronics machine of directivity of the present invention
Tool antenna.
The above, the only specific embodiment in this utility model, but protection domain of the present utility model not office
It is limited to this, it is any to be familiar with the people of the technology in the technical scope disclosed by this utility model, it will be appreciated that the conversion expected is replaced
Change, all should cover within the scope of of the present utility model including, therefore, protection domain of the present utility model should be with claim
The protection domain of book is defined.
Claims (6)
1. the reconfigurable microelectron-mechanical antenna of directivity, it is characterised in that the microelectron-mechanical antenna with GaAs substrate,
Microstrip antenna feeder line, hub-and-spoke configuration microstrip antenna radiation element, MEMS cantilever beams, cantilever beam bridge pier are provided with substrate；The star
Wantonly four spoke sides of type structure microstrip antenna radiation element are connected respectively with a cantilever beam bridge pier, each cantilever beam bridge pier connection
One MEMS cantilever beam, wherein, one cantilever beam is respectively set in the both sides of cantilever beam bridge pier in the lower section of each MEMS cantilever beam
Pull-down electrode, each cantilever beam pull-down electrode is provided with dielectric layer, the dielectric layer in each cantilever beam pull-down electrode with it is corresponding
Sacrifice layer is provided between MEMS cantilever beams；The spoke side of the hub-and-spoke configuration microstrip antenna radiation element of not connected cantilever beam bridge pier with it is micro-
Band feeder connection.
2. the reconfigurable microelectron-mechanical antenna of directivity according to claim 1, it is characterised in that under each cantilever beam
Pulling electrode, cantilever beam bridge pier are connected with substrate.
3. the reconfigurable microelectron-mechanical antenna of directivity according to claim 1, it is characterised in that the dielectric layer is
SiN。
4. the reconfigurable microelectron-mechanical antenna of directivity according to claim 1, it is characterised in that four cantilevers
Beam bridge pier is identical.
5. the reconfigurable microelectron-mechanical antenna of directivity according to claim 1, it is characterised in that the sacrifice layer is
Polyimide sacrificial layer.
6. the reconfigurable microelectron-mechanical antenna of directivity according to claim 1, it is characterised in that four MEMS
Cantilever beam is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621263031.7U CN206163710U (en) | 2016-11-24 | 2016-11-24 | Directionality reconfigurable microelectronics machinery antenna |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621263031.7U CN206163710U (en) | 2016-11-24 | 2016-11-24 | Directionality reconfigurable microelectronics machinery antenna |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206163710U true CN206163710U (en) | 2017-05-10 |
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ID=58660980
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621263031.7U Active CN206163710U (en) | 2016-11-24 | 2016-11-24 | Directionality reconfigurable microelectronics machinery antenna |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106532265A (en) * | 2016-11-24 | 2017-03-22 | 南京邮电大学 | Directional reconfigurable microelectromechanical antenna and preparation method thereof |
-
2016
- 2016-11-24 CN CN201621263031.7U patent/CN206163710U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106532265A (en) * | 2016-11-24 | 2017-03-22 | 南京邮电大学 | Directional reconfigurable microelectromechanical antenna and preparation method thereof |
| CN106532265B (en) * | 2016-11-24 | 2023-04-07 | 南京邮电大学 | Directional reconfigurable microelectronic mechanical antenna and preparation method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221214 Address after: Room 1284, Block D, Tengfei Building, No. 88, Jiangmiao Road, Yanchuangyuan, Nanjing District, China (Jiangsu) Pilot Free Trade Zone, 211800, Jiangsu Province Patentee after: Nanjing Erxin Electronic Co.,Ltd. Address before: 210023 9 Wen Yuan Road, Ya Dong new town, Nanjing, Jiangsu. Patentee before: NANJING University OF POSTS AND TELECOMMUNICATIONS |
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| TR01 | Transfer of patent right |