CN206123949U - Fine cutting process system under ultrasonication of hard brittle material - Google Patents
Fine cutting process system under ultrasonication of hard brittle material Download PDFInfo
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- CN206123949U CN206123949U CN201621054222.2U CN201621054222U CN206123949U CN 206123949 U CN206123949 U CN 206123949U CN 201621054222 U CN201621054222 U CN 201621054222U CN 206123949 U CN206123949 U CN 206123949U
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Abstract
The utility model discloses an is fine cutting process system under ultrasonication of hard brittle material by machinery it constitutes through connecting to detect integration mechanism and control mechanism, machinery detecting integration mechanism and including the fuselage main part, the fuselage main part comprises frame and the stand that sets up on the frame, have X axle direction feed unit on the frame, X axle direction feed unit connects Y axle direction feed unit, has fine setting flat unit in XY plane on the Y axle direction feed unit, has the ultrasonic vibration platform on the flat unit of XY plane fine setting, has the workstation on the ultrasonic vibration platform, there are Z axle direction feed unit, spindle unit on the stand, X axle direction feed unit, Y axle direction feed unit, the flat unit of XY plane fine setting and ultrasonic vibration platform all are connected through tow chain b and control mechanism, and Z axle direction feed unit, spindle unit all are connected through tow chain an and control mechanism. The utility model discloses an under the ultrasonication fine cutting process system implementation the fine cutting process in hard fragile material plasticity territory.
Description
Technical field
This utility model belongs to materials processing technology field, and in particular to fine under a kind of ultrasonication of hard brittle material to cut
Cut system of processing.
Background technology
Hard brittle material is due to the property better than common material so as to answering in the high-precision pointed collar domain such as Aero-Space
With more and more extensive.
Common hard brittle material mainly has：Quartz glass, carborundum, silicon, ceramics etc..Compared with common material, hard crisp material
Material is with high rigidity, high heat conductance, wear-resistant, high temperature resistant, chemical stability is good, be difficult oxide etch and low thermal coefficient of expansion
Advantage.But, because hard brittle material itself has significantly hard fragility, cause conventional machining extremely difficult.
In the last few years, scholar's research confirms：The plastic region machining of these materials can be realized in miniature scale, and
Its machining surface quality can be greatly improved under ultrasonication, the part of preferable crudy is obtained, its principle is：
The bump cutting under supersonic vibration effect, can when critical cutting depth of the cutting depth less than the crisp transformation of modeling of the material
Realize that tool pressure is relatively low, cutting stress and heat in metal cutting are less, no similar to conventional metal material the same plasticity cutting processing
Can be deformed and burn, machining accuracy is higher, can reach ± 0.02mm～0.05mm, surface roughness up to Ra0.16 μm,
Substantially reduce surface defect.
Mould crisp transformation critical cutting depth be micron order, nanoscale, therefore, for these hard brittle materials ultrasound work
Go out micro-cutting system of processing under a kind of ultrasonication of hard brittle material with lower micro-cutting fabrication design extremely important.
Utility model content
The purpose of this utility model is to provide micro-cutting system of processing under a kind of ultrasonication of hard brittle material, is solved
The problem of hard brittle material plastic region micro-cutting processing difficulties, can realize to different hard brittle materials in the fine of its plastic region
Machining.
The technical scheme that this utility model is adopted is that micro-cutting processing under a kind of ultrasonication of hard brittle material is
System, is connected and composed by machinery-detection integrated mechanism and controlling organization Jing；Machinery-detection integrated mechanism, includes fuselage master
Body, fuselage main body is made up of horizontally disposed support and the column being vertically installed on frame upper surface；Set on the upper surface of seat
X-direction feed unit is equipped with, Y direction feed unit is connected with X-direction feed unit, on Y direction feed unit
The micro- leveling unit of X/Y plane is provided with, supersonic vibration platform is provided with the micro- leveling unit of X/Y plane, set on supersonic vibration platform
It is equipped with workbench；Z-direction feed unit, main axle unit, and Z-direction feed unit and main shaft list are respectively arranged with column
Unit's connection；X-direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and supersonic vibration platform are by dragging
Chain b is connected with controlling organization, and Z-direction feed unit, main axle unit are connected by drag chain a with controlling organization.
The characteristics of this utility model, also resides in：
Controlling organization, includes computer, and computer is fed respectively by wire with X-direction feed unit, Y direction
Unit, the connection of Z-direction feed unit；Computer is also respectively by wire and one-dimensional micro-nanometer mobile platform drive control electricity
Source, mechanical encapsulation formula drive power supply for piezoelectric ceramics, motor drive power supply and ultrasound control power supply connection；One-dimensional micro-nanometer movement is flat
Platform is connected by wire with drive control power supply with Z-direction feed unit, and mechanical encapsulation formula drive power supply for piezoelectric ceramics passes through
Wire is connected with the micro- leveling unit of X/Y plane, and motor drive power supply is respectively by wire and X-direction feed unit, Y direction
Feed unit, Z-direction feed unit and main axle unit connection, ultrasound control power supply is connected by wire with supersonic vibration platform
Connect；It is above-mentioned to use all wires and be divided into two parts：A part of wire is arranged in drag chain a, is entered with Z-direction as controlling organization
To unit and the connecting line of main axle unit, another part wire is arranged in drag chain b, is fed as controlling organization and X-direction
Connecting line between unit, Y direction feed unit, the micro- leveling unit of X/Y plane and supersonic vibration platform.
X-direction feed unit, includes traverse feed bracket；Traverse feed bracket, includes rectangle cross-brace plate,
And rectangle cross-brace plate is fixedly installed on the upper surface of support along X-direction；On the upper surface of rectangle cross-brace plate
One X-axis precise guide rail is respectively set near two relative long edge positions, on a long side surface of rectangle cross-brace plate X-axis side is provided with
To the scale grating in precision linear encoder, a bearing is respectively vertically arranged on two relative short edges on rectangle cross-brace plate upper surface
Seat a, is connected with X-direction precision ball screw between the axis hole of two bearing block a；One end of X-direction precision ball screw
Shaft coupling is fed by X-axis to be connected with X-axis servomotor, X-axis servomotor is connected with motor drive power supply, X-axis servomotor
It is fixed on motor base a, motor base a is fixed on the upper surface of support, and a motor base a and bearing block a is connected as a single entity；X-axis
Be socketed with X-direction ball-screw nut on the precision ball screw of direction, the nut seat of X-direction ball-screw nut with it is vertical
The X-axis planker of setting is connected as a single entity, and the top of X-axis planker is connected with Y direction feed unit, bottom and the slide block a of X-axis planker
Connect, and slide block a can slide in two X-axis precise guide rails, and X-axis grating reading head bearing a, X-axis side are provided with X-axis planker
It is arranged on X-axis grating reading head bearing a, and in X-direction precision linear encoder to the grating reading head in precision linear encoder
Grating reading head is connected with computer；Shaft coupling is fed by X-axis by X-axis servomotor rotation is passed to X-direction precision
Ball-screw is rotated together, and the rotation of X-direction precision ball screw is changed into X-axis and drags by X-direction ball-screw nut
Plate is along two X-axis precise guide rails in X-direction precision straight-line feed, the scale grating and grating in X-direction precision linear encoder
Read head cooperates, for realizing detecting the X-direction amount of feeding.
Y direction feed unit, includes length feed bracket；Length feed bracket, includes and is fixed on X-axis planker
The rectangle longitudinal supporting plate in portion, and rectangle longitudinal supporting plate is vertical with traverse feed bracket；In the upper table of rectangle longitudinal supporting plate
One Y-axis precise guide rail is respectively set near two relative long edge positions on face, on a long side surface of rectangle longitudinal supporting plate Y is provided with
Scale grating in direction of principal axis precision linear encoder；A bearing block b is respectively vertically arranged on the relative short edge of rectangle longitudinal supporting plate two,
Y direction precision ball screw is connected between the axis hole of two bearing block b；One end of Y direction precision ball screw passes through Y
Axle feeding shaft coupling is connected with Y-axis servomotor, and Y-axis servomotor is connected with motor drive power supply, and Y-axis servomotor is arranged
On motor base b, motor base b is arranged on rectangle longitudinal supporting plate and is connected as a single entity with a bearing block b；Y direction is accurate
Y direction ball-screw nut, the nut seat of Y direction ball-screw nut and the Y being vertically arranged are socketed with ball-screw
Axis carriage is connected as a single entity, and the top of Y-axis planker is provided with the micro- leveling unit of X/Y plane, and the bottom connection sliding block b of Y-axis planker is sliding
Block b can slide in two Y-axis precise guide rails；Grating reading head bearing b, Y direction precision linear encoder are provided with Y-axis planker
Interior grating reading head is arranged on grating reading head bearing b, and the grating reading head in Y direction precision linear encoder and calculating
Machine connects；Rotation is passed to Y direction precision ball screw by Y-axis feeding shaft coupling by Y-axis servomotor to rotate together,
The rotation of Y direction precision ball screw is changed into Y-axis planker and leads along two Y-axis precisions by Y direction ball-screw nut
Rail cooperates, uses in Y direction precision straight-line feed, the scale grating and grating reading head in Y direction precision linear encoder
The Y direction amount of feeding is detected in realization.
The micro- leveling unit of X/Y plane, includes leveling flexible hinge, and supersonic vibration platform is arranged on leveling flexible hinge；
Two mechanical encapsulation formula piezoelectric ceramics are provided with leveling flexible hinge, each mechanical encapsulation formula piezoelectric ceramics is and mechanical encapsulation
Formula drive power supply for piezoelectric ceramics connects, and drives two mechanical encapsulation formula piezoelectric ceramic energies to produce micrometric displacement respectively, to realize XY
Plane relative level.
Model PST150VS250 of mechanical encapsulation formula piezoelectric ceramics.
Workbench, includes workbench main body, and the upper surface of workbench main body keeps level, and in the upper of workbench main body
The fixture for clamping workpiece to be processed is provided with surface, the lower surface of workbench main body is connected with supersonic vibration platform, Jing
The control of computer and ultrasound control power supply, obtain supersonic vibration platform can drive workbench main body realize X, Y direction it is super
Sonic vibration, in micro-cutting processing ultrasonication is loaded, and improves machining quality.
Z-direction feed unit, includes two Z axis precise guide rails, and two Z axis precise guide rails are individually fixed in column
Two relative side edge on one side, the scale grating in Z-direction precision linear encoder is arranged near a Z axis precise guide rail；
Parallel erection between two Z axis precise guide rails has a Z-direction precision ball screw, Z-direction precision ball screw
One end feeds shaft coupling and connects Z axis servomotor by Z axis, and Z axis servomotor is connected with motor drive power supply, Z axis servo electricity
Machine is arranged on motor base c, and motor base c is fixed on column；Z-direction ball is socketed with Z-direction precision ball screw
Feed screw nut, the nut seat of Z-direction ball-screw nut is connected with the Z axis planker being vertically arranged, the bottom connection of Z axis planker
Slide block c, and slide block c can slide in two Z axis precise guide rails；Grating reading head bearing c, Z-direction are provided with Z axis planker
Grating reading head in precision linear encoder is arranged on grating reading head bearing c, and the grating in Z-direction precision linear encoder is read
Several are connected with computer；Z axis servomotor feeds shaft coupling and torque is passed to Z-direction precision ball screw by Z axis,
The rotation of Z-direction precision ball screw is changed into Z of the Z axis planker along Z axis precise guide rail by Z-direction ball-screw nut
The accurate rectilinear movement feeding of direction of principal axis；Extension block is provided with Z axis planker, and one-dimensional micro-nanometer movement is provided with extension block
Platform, the scale grating and grating reading head phase interworking for realizing the micro-nano feeding of Z-direction, in Z axis precision linear encoder
Share in detecting to the Z-direction amount of feeding；One-dimensional micro-nanometer mobile platform is moved respectively with main axle unit, one-dimensional micro-nanometer
Platform is connected with drive control power supply.
Main axle unit, includes spindle motor installing rack, and a side end face and the one-dimensional micro-nanometer of spindle motor installing rack are moved
Moving platform connects, and spindle motor is provided with the upper surface of spindle motor installing rack, the lower surface of spindle motor installing rack
Central authorities connect cutter by handle of a knife, and spindle motor is connected by drive shaft with handle of a knife, and spindle motor can be by handle of a knife torque
Pass to cutter.
The beneficial effects of the utility model are：
(1) micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model, can realize without ultrasound
Plastic region machining of the lower hard brittle material of effect in its micro-nano-scale.
(2) micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model, can realize traditional micro-
Nano impress, scratch test.
(3) micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model, can be height NC postprocessing
The good theoretical basiss of processing hard brittle material offer and test platform.
Description of the drawings
Fig. 1 is the structural representation of micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model；
Fig. 2 is the circuit connection under a kind of ultrasonication of hard brittle material of this utility model inside micro-cutting system of processing
Schematic diagram；
Fig. 3 is X-direction feeding in micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model
The structural representation of unit and Y direction feed unit；
Fig. 4 is Z-direction feeding in micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model
The structural representation of unit.
In figure, 1. computer, 2. one-dimensional micro-nanometer mobile platform drive control power supply, 3. mechanical encapsulation formula piezoelectric ceramics
Driving power supply, 4. motor drive power supply, 5. ultrasonic to control power supply, 6. support, 7.X axle servomotors, 8.X axles feeding shaft coupling,
9. traverse feed bracket, 10.Y axle servomotors, 11.X direction of principal axis precision linear encoders, 12.X axis carriages, 13.X direction of principal axis balls
Feed screw nut, 14.X axle precise guide rails, 15.X direction of principal axis precision ball screws, 16.Y axles feeding shaft coupling, 17.Y axle precisions are led
Rail, 18.Y direction of principal axis precision ball screws, 19.Y direction of principal axis ball-screw nuts, 20.Y direction of principal axis precision linear encoders, 21. longitudinal directions
Feeding carriage, 22.Y axis carriages, 23. leveling flexible hinges, 24. mechanical encapsulation formula piezoelectric ceramics, 25. supersonic vibration platforms, 26.
Workbench main body, 27. fixtures, 28. workpieces to be processed, 29. drag chain a, 30.Z axle precise guide rails, 31.Z axle servomotors, 32. stand
Post, 33.Z axles feeding shaft coupling, 34.Z direction of principal axis precision ball screws, 35.Z direction of principal axis ball-screw nuts, 36.Z direction of principal axis
Precision linear encoder, 37.Z axis carriages, 38. extension blocks, 39. one-dimensional micro-nanometer mobile platforms, 40. spindle motors, 41. main shafts are installed
Frame, 42. handle of a knifes, 43. cutters, 44. grating reading head bearing a, 45. grating reading head bearing b, 46. motor base a, 47. motor bases
The grating reading head bearing c of b, 48. slide block a, 49. slide block b, 50. bearing block a, 51. bearing block b, 52. motor base c, 53., 54. slide
Block c, 55. drag chain b.
Specific embodiment
This utility model is described in detail with reference to the accompanying drawings and detailed description.
Micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model, its structure as shown in figure 1, by
Machinery-detection integrated mechanism and controlling organization Jing drag chain a29, drag chain b55 are connected and composed.
Machinery-detection integrated mechanism, includes fuselage main body, and fuselage main body is by horizontally disposed support 6 and vertically sets
The column 32 being placed on the upper surface of support 6 is constituted；X-direction feed unit is provided with the upper surface of support 6, X-direction is entered
To Y direction feed unit is connected with unit, the micro- leveling unit of X/Y plane, X/Y plane are provided with Y direction feed unit
Supersonic vibration platform 25 is provided with micro- leveling unit, on supersonic vibration platform 25 workbench is provided with；Set respectively on column 32
Z-direction feed unit, main axle unit are equipped with, and Z-direction feed unit is connected with main axle unit；X-direction feed unit,
The micro- leveling unit of Y direction feed unit, X/Y plane and supersonic vibration platform 25 are connected by drag chain b55 with controlling organization, Z
Direction of principal axis feed unit, main axle unit are connected by drag chain a29 with controlling organization.
X-direction feed unit is removably connected with support 6, and Y direction feed unit is with dismountable side
Formula is connected with X-direction feed unit.Z-direction feed unit and main axle unit removably connect with column 32
Connect.
Wherein, support 6 and column 32 are processed using granite.
Controlling organization, as shown in Figures 1 and 2, includes computer 1, and computer 1 is entered respectively by wire with X-direction
To unit, Y direction feed unit, the connection of Z-direction feed unit；Computer 1 is also respectively by wire and one-dimensional micro-nanometer
Mobile platform drive control power supply 2, mechanical encapsulation formula drive power supply for piezoelectric ceramics 3, motor drive power supply 4 and ultrasound control electricity
Source 5 connects；One-dimensional micro-nanometer mobile platform is connected by wire with drive control power supply 2 with Z-direction feed unit, machinery envelope
Dress formula drive power supply for piezoelectric ceramics 3 is connected by wire with the micro- leveling unit of X/Y plane, and motor drive power supply 4 passes through respectively wire
It is connected with X-direction feed unit, Y direction feed unit, Z-direction feed unit and main axle unit, ultrasound control power supply 5
It is connected with supersonic vibration platform 25 by wire；It is above-mentioned to use all wires and be divided into two parts：A part of wire is arranged at drag chain
In a29, used as controlling organization and the connecting line of Z-direction feed unit and main axle unit, another part wire is arranged at drag chain
In b55, shake with X-direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and ultrasound as controlling organization
Connecting line between moving platform 25.
X-direction feed unit, as shown in Figures 1 and 3, includes traverse feed bracket 9；Traverse feed bracket 9, including
There is rectangle cross-brace plate, and rectangle cross-brace plate is fixedly installed on the upper surface of support 6 along X-direction；It is horizontal in rectangle
One X-axis precise guide rail 14 is respectively set near two relative long edge positions on the upper surface of gripper shoe, rectangle cross-brace plate
The scale grating being provided with one long side surface in X-direction precision linear encoder 11, two is relative on rectangle cross-brace plate upper surface
A bearing block a50 is respectively vertically arranged on minor face, X-direction precise ball silk is connected between the axis hole of two bearing block a50
Thick stick 15, one end of X-direction precision ball screw 15 feeds shaft coupling 8 and is connected with X-axis servomotor 7 by X-axis, X-axis servo
Motor 7 is connected with motor drive power supply 4, and X-axis servomotor 7 is fixed on motor base a46, and motor base a46 is fixed on support 6
Upper surface, and a motor base a46 and bearing block a50 is connected as a single entity；X-axis side is socketed with X-direction precision ball screw 15
To ball-screw nut 13, the nut seat of X-direction ball-screw nut 13 is connected as a single entity with the X-axis planker 12 being vertically arranged, X
The top of axis carriage 12 is connected with Y direction feed unit, and the bottom of X-axis planker 12 is connected with slide block a48, and slide block a48 energy
Slide in two X-axis precise guide rails 14, X-axis grating reading head bearing a44, X-direction precise light are provided with X-axis planker 12
Grating reading head in grid chi 11 is arranged on X-axis grating reading head bearing a44, and the light in X-direction precision linear encoder 11
Grid read head is connected with computer 1；Shaft coupling 8 is fed by X-axis by X-axis servomotor 7 rotation is passed to X-direction precision
Ball-screw 15 is rotated together, and the rotation of X-direction precision ball screw 15 is changed into by X-direction ball-screw nut 13
X-axis planker 12 is along two X-axis precise guide rails 14 in X-direction precision straight-line feed, the scale in X-direction precision linear encoder 11
Grating and grating reading head cooperate, for realizing detecting the X-direction amount of feeding.
As shown in Figures 1 and 3, motor base a46 is in cubic frame-like, and lighter weight, the bottom energy of motor base a46
It is fixed on the upper surface of support 6, motor base a46 inside feeds shaft coupling 8 and can consolidate X-axis servomotor 7 for accommodating X-axis
Live calmly.
X-direction precision linear encoder 11 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and it is provided with indication grating in the grating reading head.
Y direction feed unit, as shown in Figures 1 and 3, includes length feed bracket 21；Length feed bracket 21, bag
The rectangle longitudinal supporting plate for being fixed on the top of X-axis planker 12 is included, and rectangle longitudinal supporting plate is vertical with traverse feed bracket 9；
One Y-axis precise guide rail 17, rectangle longitudinal direction are respectively set near two relative long edge positions on the upper surface of rectangle longitudinal supporting plate
The scale grating being provided with one long side surface of gripper shoe in Y direction precision linear encoder 20；Rectangle longitudinal supporting plate two is relative
A bearing block b51 is respectively vertically arranged on minor face, Y direction precise ball silk is connected between the axis hole of two bearing block b51
Thick stick 18, one end of Y direction precision ball screw 18 feeds shaft coupling 16 and is connected with Y-axis servomotor 10 by Y-axis, and Y-axis is watched
Take motor 10 to be connected with motor drive power supply 4, and Y-axis servomotor 10 is arranged on motor base b47, motor base b47 is arranged at
It is connected as a single entity on rectangle longitudinal supporting plate and with a bearing block b51；Y-axis side is socketed with Y direction precision ball screw 18
To ball-screw nut 19, the nut seat of Y direction ball-screw nut 19 is connected as a single entity with the Y-axis planker 22 being vertically arranged, Y
The top of axis carriage 22 is provided with the micro- leveling unit of X/Y plane, the bottom connection sliding block b49 of Y-axis planker 22, and slide block b49 can be two
Slide in bar Y-axis precise guide rail 17；Grating reading head bearing b45, Y direction precision linear encoder 20 are provided with Y-axis planker 22
Interior grating reading head is arranged on grating reading head bearing b45, and the grating reading head in Y direction precision linear encoder 20 with
Computer 1 connects；Shaft coupling 16 is fed by Y-axis by Y-axis servomotor 10 rotation is passed to Y direction precision ball screw
18 rotate together, and the rotation of Y direction precision ball screw 18 is changed into Y-axis planker by Y direction ball-screw nut 19
22 along two Y-axis precise guide rails 17 Y direction precision straight-line feed, the scale grating in Y direction precision linear encoder 20 and
Grating reading head cooperates, for realizing detecting the Y direction amount of feeding.
The structure of motor base b47 is identical with the structure of motor base a46, and in cube frame shape, motor base b47 can be fixed
In the upper of rectangle longitudinal supporting plate, motor base b47 inside is for accommodating Y-axis feeding shaft coupling 16 and can be by Y-axis servomotor 10
Fix.
Y direction precision linear encoder 20 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and it is provided with indication grating in the grating reading head.
The micro- leveling unit of X/Y plane, as shown in Figures 2 and 3, includes leveling flexible hinge 23, and supersonic vibration platform 25 sets
It is placed on leveling flexible hinge 23；Two mechanical encapsulation formula piezoelectric ceramics 24 are provided with leveling flexible hinge 23, each machinery
Packaged type piezoelectric ceramics 24 is connected with mechanical encapsulation formula drive power supply for piezoelectric ceramics 3, and two mechanical encapsulation formula pressures are driven respectively
Electroceramics 24 can produce micrometric displacement, to realize X/Y plane relative level.
Model core PST150VS250 tomorrow of mechanical encapsulation formula piezoelectric ceramics 24.
Workbench, as shown in figure 3, workbench main body 26 is included, the upper surface holding level of workbench main body 26, and
The fixture 27 for clamping workpiece to be processed 28, the lower surface of workbench main body 26 are provided with the upper surface of workbench main body 26
It is connected with supersonic vibration platform 25, the control of Jing computers 1 and ultrasound control power supply 5, supersonic vibration platform 25 can drive work
Platform main body 26 realizes the supersonic vibration of X, Y direction, so as to load ultrasonication in processing in micro-cutting, improves machining
Quality.
Z-direction feed unit, as shown in Fig. 1 and Fig. 4, includes two Z axis precise guide rails 30, and two Z axis precisions
Guide rail 30 is individually fixed in two relative side edges on the one side of column 32, the scale grating in Z-direction precision linear encoder 36
Arrange near a Z axis precise guide rail 30；Parallel erection between two Z axis precise guide rails 30 has the accurate rolling of a Z-direction
Ballscrew 34, one end of Z-direction precision ball screw 34 feeds shaft coupling 33 and connects Z axis servomotor 31, Z axis by Z axis
Servomotor 31 is connected with motor drive power supply 4, and Z axis servomotor 31 is arranged on motor base c52, and motor base c52 is fixed on
On column 32；Z-direction ball-screw nut 35, Z-direction ball-screw spiral shell are socketed with Z-direction precision ball screw 34
Female 35 nut seat is connected with the Z axis planker 37 being vertically arranged, the bottom connection sliding block c54 of Z axis planker 37, and slide block c54 energy
Slide in two Z axis precise guide rails 30；Grating reading head bearing c53, Z-direction precise grating are provided with Z axis planker 37
Grating reading head in chi 36 is arranged on grating reading head bearing c53, and the grating reading in Z-direction precision linear encoder 36
Head is connected with computer 1；Z axis servomotor 31 feeds shaft coupling 33 and torque is passed to Z-direction precise ball silk by Z axis
Thick stick 34, the rotation of Z-direction precision ball screw 34 is changed into Z axis planker 37 along Z axis by Z-direction ball-screw nut 35
The accurate rectilinear movement feeding of the Z-direction of precise guide rail 30；Extension block 38 is provided with Z axis planker 37, and on extension block 38
One-dimensional micro-nanometer mobile platform 39 is provided with, for realizing the micro-nano feeding of Z-direction, the mark in Z axis precision linear encoder 36
Chi grating and grating reading head cooperate for detecting to the Z-direction amount of feeding, 39 points of one-dimensional micro-nanometer mobile platform
It is not connected with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply 2.
Z-direction precision linear encoder 36 is KA300 Series Precision grating scales, mainly by scale grating and grating reading head group
Into, and it is provided with indication grating in the grating reading head.
Arranging the main purpose of extension block 38 is：Can be used to adjust the locus of one-dimensional micro-nanometer mobile platform 39, with
Adapt to the process requirements main axle unit of workpiece.
As shown in figure 4, the plate-like structures of motor base c52, light weight, the bottom of motor base c52 can be fixed on column 32,
For supporting Z axis servomotor 31.
Main axle unit, as shown in Fig. 1 and Fig. 4, includes spindle motor installing rack 41, the side of spindle motor installing rack 41
End face is connected with one-dimensional micro-nanometer mobile platform 39, and spindle motor 40 is provided with the upper surface of spindle motor installing rack 41,
The central authorities of the lower surface of spindle motor installing rack 41 connect cutter 43, and spindle motor 40 by drive shaft and knife by handle of a knife 42
Handle 42 connects, and spindle motor 40 can pass to cutter 43 by handle of a knife 42 torque.
The displacement that X-axis precision linear encoder 11, Y-axis precision linear encoder 20, Z axis precision linear encoder 36 are measured is sent to calculating
In machine 1, computer 1 drives respectively X-axis servomotor 7, Y-axis servo electricity according to processing request controlled motor driving power supply 4 respectively
Machine 10 and Z axis servomotor 31, finally realize X-axis, Y-axis, the feeding of three directions of Z axis, and the micro-nano feeding of Z-direction is by calculating
The control one-dimensional micro-nanometer mobile platform of machine 1 drive control power supply 2 drives one-dimensional micro-nanometer mobile platform 39 to realize, spindle motor
40 control realizes that the work of supersonic vibration platform 25 is by ultrasound according to processing request by the controlled motor driving power supply 4 of computer 1
Control power supply 5 is controlled.
Machining is carried out to hard brittle material using micro-cutting system of processing under a kind of ultrasonication of hard brittle material
Method, specifically implements according to following steps：
Step 1, it is respectively started computer 1, motor drive power supply 4, one-dimensional micro-nanometer mobile platform drive control power supply 2
And ultrasound control power supply 5；
Step 2, the size according to workpiece to be processed 28 and processing dimension require to write cutter 43 relative to workpiece to be processed
28 walking feeding track processor and loading ultrasonication code；
Step 3, by workpiece to be processed 28 be arranged on fixture 27 on；
Step 4, X-axis servomotor 7, Y-axis servomotor 10 and Z are driven respectively with the controlled motor driving power supply 4 of computer 1
Axle servomotor 31 works, and it is right to be realized relative to the position of cutter 43 according to workpiece size processing request adjustment workpiece to be processed 28
Knife；
Step 5, the program code controlled motor driving power supply 4 of the processing workpiece write according to step 2 with computer 1 are distinguished
X-axis servomotor 7, Y-axis servomotor 10, Z axis servomotor 31 and spindle motor 40 are driven, while control one-dimensional micro-nanometer moving
Moving platform drive control power supply 2 drives one-dimensional micro-nanometer mobile platform 39 to realize micro-nano feeding, control ultrasound control power supply 5
Drive supersonic vibration platform 25 to realize the supersonic vibration of X, Y both direction, be finally completed workpiece profile surface micro-cutting；
Step 6, close electric computer 1, motor drive power supply 4, one-dimensional micro-nanometer mobile platform drive control power supply 2 and
Ultrasound control power supply 5, finally removes the workpiece for processing, and clears up lathe.
Micro-cutting system of processing under a kind of ultrasonication of hard brittle material of this utility model, solves and hard brittle material is moulded
Property domain micro-cutting processing difficulties problem, the micro-cutting for realizing different hard brittle materials in its plastic region processes.
Claims (9)
1. micro-cutting system of processing under a kind of ultrasonication of hard brittle material, it is characterised in that by machinery-detection integral machine
Structure and controlling organization Jing are connected and composed；
The machinery-detection integrated mechanism, includes fuselage main body, the fuselage main body by horizontally disposed support (6) and
The column (32) being vertically installed on support (6) upper surface is constituted；
X-direction feed unit is provided with the upper surface of the seat (6), on the X-direction feed unit Y-axis side is connected with
To feed unit, the micro- leveling unit of X/Y plane is provided with the Y direction feed unit, on the micro- leveling unit of the X/Y plane
Supersonic vibration platform (25) is provided with, on the supersonic vibration platform (25) workbench is provided with；On the column (32) respectively
Z-direction feed unit, main axle unit are provided with, and the Z-direction feed unit is connected with main axle unit；The X-axis side
Pass through drag chain b (55) to feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and supersonic vibration platform (25)
It is connected with controlling organization, the Z-direction feed unit, main axle unit are connected by drag chain a (29) with controlling organization.
2. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 1, it is characterised in that
The controlling organization, includes computer (1), and the computer (1) is respectively by wire and X-direction feed unit, Y-axis side
Connect to feed unit, Z-direction feed unit；
The computer (1) is also respectively by wire and one-dimensional micro-nanometer mobile platform drive control power supply (2), mechanical encapsulation
Formula drive power supply for piezoelectric ceramics (3), motor drive power supply (4) and ultrasound control power supply (5) connection；
The one-dimensional micro-nanometer mobile platform is connected by wire with drive control power supply (2) with Z-direction feed unit, described
Mechanical encapsulation formula drive power supply for piezoelectric ceramics (3) is connected by the micro- leveling unit of wire and X/Y plane, the motor drive power supply
(4) respectively by wire and X-direction feed unit, Y direction feed unit, Z-direction feed unit and main axle unit company
Connect, ultrasound control power supply (5) is connected by wire with supersonic vibration platform (25)；
It is above-mentioned to use all wires and be divided into two parts：A part of wire is arranged in drag chain a (29), as the controlling organization with
The connecting line of the Z-direction feed unit and main axle unit, another part wire is arranged in drag chain b (55), as described
Controlling organization and the X-direction feed unit, Y direction feed unit, the micro- leveling unit of X/Y plane and supersonic vibration platform
(25) connecting line between.
3. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 1 and 2, its feature exists
In the X-direction feed unit includes traverse feed bracket (9)；Traverse feed bracket (9), includes rectangle and laterally props up
Fagging, and the rectangle cross-brace plate is fixedly installed on the upper surface of support (6) along X-direction；It is horizontal in the rectangle
One X-axis precise guide rail (14), the rectangle cross-brace are respectively set near two relative long edge positions on the upper surface of gripper shoe
The scale grating being provided with one long side surface of plate in X-direction precision linear encoder (11), the rectangle cross-brace plate upper table
A bearing block a (50) is respectively vertically arranged on face on two relative short edges, is connected between the axis hole of two bearing block a (50)
X-direction precision ball screw (15)；
One end of the X-direction precision ball screw (15) feeds shaft coupling (8) with X-axis servomotor (7) even by X-axis
Connect, the X-axis servomotor (7) is connected with motor drive power supply (4), the X-axis servomotor (7) is fixed on motor base a
(46) on, the motor base a (46) is fixed on the upper surface of support (6), and the motor base a (46) and bearing block a
(50) it is connected as a single entity；X-direction ball-screw nut (13), the X are socketed with the X-direction precision ball screw (15)
The nut seat of direction of principal axis ball-screw nut (13) is connected as a single entity with the X-axis planker (12) being vertically arranged, the X-axis planker (12)
Top be connected with Y direction feed unit, the bottom of the X-axis planker (12) is connected with slide block a (48), and the slide block a
(48) can slide on two X-axis precise guide rails (14), X-axis grating reading head bearing a is provided with the X-axis planker (12)
(44), the grating reading head in the X-direction precision linear encoder (11) is arranged in X-axis grating reading head bearing a (44), and
Grating reading head in the X-direction precision linear encoder (11) is connected with computer (1)；
Shaft coupling (8) is fed by X-axis by the X-axis servomotor (7) rotation is passed to X-direction precision ball screw
(15) rotate together, the rotation of the X-direction precision ball screw (15) is changed by X-direction ball-screw nut (13)
For X-axis planker (12) along two X-axis precise guide rails (14) in X-direction precision straight-line feed, the X-direction precision linear encoder
(11) the scale grating and grating reading head in cooperates, for realizing detecting the X-direction amount of feeding.
4. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 3, it is characterised in that
The Y direction feed unit, includes length feed bracket (21)；The length feed bracket (21), includes and is fixed on X
The rectangle longitudinal supporting plate on axis carriage (12) top, and the rectangle longitudinal supporting plate is vertical with traverse feed bracket (9)；Institute
State and one Y-axis precise guide rail (17), the square are respectively set near two relative long edge positions on the upper surface of rectangle longitudinal supporting plate
The scale grating being provided with one long side surface of shape longitudinal supporting plate in Y direction precision linear encoder (20)；The rectangle longitudinal direction
A bearing block b (51) is respectively vertically arranged on the relative short edge of gripper shoe two, is connected between the axis hole of two bearing block b (51)
There is Y direction precision ball screw (18)；
One end of the Y direction precision ball screw (18) feeds shaft coupling (16) with Y-axis servomotor (10) even by Y-axis
Connect, the Y-axis servomotor (10) is connected with motor drive power supply (4), and the Y-axis servomotor (10) is arranged at motor base
On b (47), the motor base b (47) is arranged on rectangle longitudinal supporting plate and is connected as a single entity with a bearing block b (51)；It is described
Y direction ball-screw nut (19), the Y direction ball-screw spiral shell are socketed with Y direction precision ball screw (18)
The nut seat of female (19) is connected as a single entity with the Y-axis planker (22) being vertically arranged, and the top of the Y-axis planker (22) is provided with XY and puts down
The micro- leveling unit in face, bottom connection sliding block b (49) of the Y-axis planker (22), the slide block b (49) can be in two Y-axis precisions
Slide on guide rail (17)；Grating reading head bearing b (45), the Y direction precise grating are provided with the Y-axis planker (22)
Grating reading head in chi (20) is arranged on grating reading head bearing b (45), and the light in Y direction precision linear encoder (20)
Grid read head is connected with computer (1)；
Shaft coupling (16) is fed by Y-axis by the Y-axis servomotor (10) rotation is passed to Y direction precision ball screw
(18) rotate together, the rotation of the Y direction precision ball screw (18) is changed by Y direction ball-screw nut (19)
For Y-axis planker (22) along two Y-axis precise guide rails (17) in Y direction precision straight-line feed, the Y direction precision linear encoder
(20) the scale grating and grating reading head in cooperates, for realizing detecting the Y direction amount of feeding.
5. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 4, it is characterised in that
The micro- leveling unit of the X/Y plane, includes leveling flexible hinge (23), and it is soft that supersonic vibration platform (25) is arranged at the leveling
In property hinge (23)；
Two mechanical encapsulations formula piezoelectric ceramics (24) are provided with the leveling flexible hinge (23), each described mechanical encapsulation formula
Piezoelectric ceramics (24) is connected with mechanical encapsulation formula drive power supply for piezoelectric ceramics (3), and two mechanical encapsulation formulas are driven respectively
Piezoelectric ceramics (24) can produce micrometric displacement, to realize X/Y plane relative level.
6. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 5, it is characterised in that
Model PST150VS250 of the mechanical encapsulation formula piezoelectric ceramics (24).
7. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 4, it is characterised in that
The workbench, includes workbench main body (26), and the upper surface of workbench main body (26) keeps level, and described in workbench
The fixture (27) for clamping workpiece to be processed (28) is provided with the upper surface of main body (26), the workbench main body (26)
Lower surface is connected with supersonic vibration platform (25), the control of Jing computers (1) and ultrasound control power supply (5), obtains supersonic vibration
Platform (25) can drive workbench main body (26) to realize the supersonic vibration of X, Y direction, the loading ultrasound in micro-cutting processing
Effect, improves machining quality.
8. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 1 and 2, its feature exists
In the Z-direction feed unit includes two Z axis precise guide rails (30), and two Z axis precise guide rails (30) point
It is not fixed on two relative side edges on column (32) one side, the scale grating in the Z-direction precision linear encoder (36)
Arrange near a Z axis precise guide rail (30)；
Parallel erection between two Z axis precise guide rails (30) has a Z-direction precision ball screw (34), the Z
One end of direction of principal axis precision ball screw (34) feeds shaft coupling (33) and connects Z axis servomotor (31) by the Z axis, described
Z axis servomotor (31) is connected with motor drive power supply (4), and the Z axis servomotor (31) is arranged on motor base c (52),
The motor base c (52) is fixed on column (32)；Z-direction rolling is socketed with the Z-direction precision ball screw (34)
Screw nut (35), the nut seat of the Z-direction ball-screw nut (35) is with the Z axis planker (37) being vertically arranged even
Connect, bottom connection sliding block c (54) of the Z axis planker (37), and the slide block c (54) can be in two Z axis precise guide rails (30)
Upper slip；It is provided with the Z axis planker (37) in grating reading head bearing c (53), the Z-direction precision linear encoder (36)
Grating reading head be arranged on grating reading head bearing c (53), and grating in the Z-direction precision linear encoder (36) is read
Several are connected with computer (1)；
The Z axis servomotor (31) feeds shaft coupling (33) and torque is passed to Z-direction precision ball screw by Z axis
(34), the rotation of the Z-direction precision ball screw (34) is changed into Z axis and drags by Z-direction ball-screw nut (35)
Z-direction accurate rectilinear movement feeding of the plate (37) along Z axis precise guide rail (30)；Extension is provided with the Z axis planker (37)
Block (38), and one-dimensional micro-nanometer mobile platform (39) is provided with the extension block (38), for realizing the micro-nano of Z-direction
Rice feeding, the scale grating and grating reading head in the Z axis precision linear encoder (36) cooperates for feeding to Z-direction
Amount is detected；
The one-dimensional micro-nanometer mobile platform (39) respectively with main axle unit, one-dimensional micro-nanometer mobile platform drive control power supply
(2) connect.
9. micro-cutting system of processing under a kind of ultrasonication of hard brittle material according to claim 8, it is characterised in that
The main axle unit, includes spindle motor installing rack (41), a side end face of the spindle motor installing rack (41) with it is one-dimensional
Micro-nano mobile platform (39) connection, and spindle motor (40) is provided with the upper surface of the spindle motor installing rack (41),
The central authorities of the lower surface of the spindle motor installing rack (41) connect cutter (43), and the spindle motor by handle of a knife (42)
(40) it is connected with handle of a knife (42) by drive shaft, the spindle motor (40) can pass to cutter by handle of a knife (42) torque
(43)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621054222.2U CN206123949U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system under ultrasonication of hard brittle material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621054222.2U CN206123949U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system under ultrasonication of hard brittle material |
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| Publication Number | Publication Date |
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| CN206123949U true CN206123949U (en) | 2017-04-26 |
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| CN201621054222.2U Expired - Fee Related CN206123949U (en) | 2016-09-14 | 2016-09-14 | Fine cutting process system under ultrasonication of hard brittle material |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107263206A (en) * | 2017-07-27 | 2017-10-20 | 安庆市鼎立汽车配件有限公司 | A kind of cutter device for internal combustion engine air-exhausting air-entering door |
| CN107775722A (en) * | 2017-11-07 | 2018-03-09 | 华侨大学 | A kind of big aspect ratio of hard brittle material, the precision ultrasonic puncher of small irregularly-shaped hole |
| CN108417508A (en) * | 2018-01-22 | 2018-08-17 | 西安理工大学 | A kind of micro-arc discharge cutter device for semiconductor |
| CN108969187A (en) * | 2018-08-02 | 2018-12-11 | 厦门大学 | The micro- ring cutting system of cornea ultrasound |
| CN113334137A (en) * | 2021-07-02 | 2021-09-03 | 吉林大学 | Three-dimensional ultrasonic vibration machining tool and control method thereof |
| CN114441255A (en) * | 2021-12-20 | 2022-05-06 | 西安理工大学 | Automatic metal sample hot melting loss test device |
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2016
- 2016-09-14 CN CN201621054222.2U patent/CN206123949U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107263206A (en) * | 2017-07-27 | 2017-10-20 | 安庆市鼎立汽车配件有限公司 | A kind of cutter device for internal combustion engine air-exhausting air-entering door |
| CN107775722A (en) * | 2017-11-07 | 2018-03-09 | 华侨大学 | A kind of big aspect ratio of hard brittle material, the precision ultrasonic puncher of small irregularly-shaped hole |
| CN108417508A (en) * | 2018-01-22 | 2018-08-17 | 西安理工大学 | A kind of micro-arc discharge cutter device for semiconductor |
| CN108417508B (en) * | 2018-01-22 | 2020-12-18 | 西安理工大学 | Micro-arc discharge cutting device for semiconductor |
| CN108969187A (en) * | 2018-08-02 | 2018-12-11 | 厦门大学 | The micro- ring cutting system of cornea ultrasound |
| CN113334137A (en) * | 2021-07-02 | 2021-09-03 | 吉林大学 | Three-dimensional ultrasonic vibration machining tool and control method thereof |
| CN113334137B (en) * | 2021-07-02 | 2022-09-02 | 吉林大学 | Three-dimensional ultrasonic vibration machining tool and control method thereof |
| CN114441255A (en) * | 2021-12-20 | 2022-05-06 | 西安理工大学 | Automatic metal sample hot melting loss test device |
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