CN206037929U - Bars linear displacement sensor during double row - Google Patents
Bars linear displacement sensor during double row Download PDFInfo
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- CN206037929U CN206037929U CN201621047257.3U CN201621047257U CN206037929U CN 206037929 U CN206037929 U CN 206037929U CN 201621047257 U CN201621047257 U CN 201621047257U CN 206037929 U CN206037929 U CN 206037929U
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Abstract
The utility model discloses a bars linear displacement sensor during double row, including scale and movable auxiliary scale, the scale includes scale base member and first, second excitation coil, and first, second excitation coil all follow direction of measurement and is the square wave coiling, and movable auxiliary scale includes movable auxiliary scale base member and first, the 2nd induction coil, and first, the 2nd induction coil adopts partly sinusoidal wire winding mode coiling, and first, the 2nd induction coil and first, second excitation coil are just to parallel, let in double -phase symmetrical excitation current in first, the second excitation coil, when the relative scale of movable auxiliary scale moved, first, two road feeling of the 2nd induction coil output answered the signal, formed the travelling wave signal through the stack of establishing ties, compared looks with same frequency reference signal again, and the phase difference is expressed by run -in high frequency clock pulse number, obtains linear displacement after the conversion. This sensor structure is simple, and measure and differentiate the dynamic height, easy batch manufacture, it is with low costs.
Description
Technical field
This utility model belongs to accurate measurement sensor technical field, and in particular to during a kind of double-row type, grating straight-line displacement is passed
Sensor.
Background technology
Straight-line displacement measurement is most basic geometric measurement, be present in a large number industrial practice with manufacturing industry as representative and
In scientific practice.Precision linear displacement measurement mainly adopts linear displacement transducer, such as grating, magnetic grid, capacitive grating etc., such sensing
Device is all that, by carrying out counting to get displacement to the grid line that space is divided equally, its common feature is empty using high density, ultraprecise
Between grid line reaching the resolving power requirement of micro-displacement.In order to further improve the measurement resolution of sensor with measurement essence
Degree, in addition to improving line density, it usually needs by complicated electronic fine-grained technology to passing by advanced scribing process
The primary signal of sensor output is finely divided process, so that the structure of sensor measuring system is more complicated, cost increases, and
Poor anti jamming capability, is vulnerable to the impact of working environment interference.
Recent year have developed a kind of when grating straight-line displacement sensor using clock pulses as displacement measurement benchmark,
Which is independent of high density spatial precision groove and realizes high resolution displacement measurement.When grating straight-line displacement sensor be based primarily upon electromagnetism
Principle of induction is measured, and its resolving power depends on the extremely right of the space equivalent and time-grating sensor of high frequency interpolator clock pulses
Number, number of pole-pairs are higher, and resolving power is higher.After the space equivalent of its interpolation clock pulse reaches certain limit, want further
Improve resolving power, can only by further increasing the number of pole-pairs of the sensor, its result be make sensing system complex structure and
Manufacturing cost is high.
At present, the when grating straight-line displacement sensor developed, in the form of machining wire casing with coiling, improves number of pole-pairs
Difficulty is big, high cost, and adopts harmonic analysis method to electromagnetism square-wave signal, and the main fundamental wave considered in electromagnetic signal is believed
Number effect, in electromagnetism square-wave signal, higher hamonic wave can affect the quality of induced signal, reduce the survey of linear displacement transducer
Amount degree of accuracy.
The content of the invention
Grating straight-line displacement sensor when the purpose of this utility model is to provide a kind of double-row type, to eliminate to electromagnetism square wave
Signal is affected using the higher hamonic wave brought by harmonic analysis method, improves the degree of accuracy of straight-line displacement measurement.
Grating straight-line displacement sensor during double-row type described in the utility model, including scale and it is parallel with scale just to and stay
There is the dynamic chi in gap.
The scale includes scale matrix and is located at scale matrix just to moving what chi simultaneously and along measurement direction was parallel to each other
First excitation coil, the second excitation coil can be completely covered by first, second excitation coil, the projection of scale matrix；Described
First, the second excitation coil is all along the rectangular ripple coiling of measurement direction, and it L, cycle is that W, dutycycle are that the amplitude of the square wave is
0.5, the original position of the second excitation coil is differed with the original position of the first excitation coilWhen first, second excitation coil
In be passed through biphase symmetrical drive electric current after, two in a cycle of first, second excitation coil are vertical with measurement direction
The surrounding space of unit wire will form the ring seal magnetic line of force, (for the transient current of exciting current) in a flash in office,
Gradually weakened to opposite side by side in the magnetic induction formed by unit wire interval by a wherein root unit wire, and by
Another root unit wire is gradually weakened to this side by opposite side in the magnetic induction formed by unit wire interval, due to this
The sense of current in interval in two root unit wires conversely, therefore the magnetic line of force direction that produces in interval unanimously, ECDC is made into after
The interval forms an approaches uniformity magnetic field；Magnetic flux flashy spatial distribution in office is approximate rectangular ripple, and its amplitude is then
Changed with sinusoidal rule by the instantaneous value of exciting current, it is this fix in locus, and the time dependent magnetic field of size is
Change with the excitation for adding is changed by impulsive magnetic field, its magnetic induction；Equivalent to first, second excitation coil in excitation
Under effect, the magnetic field by sinusoidal rule change along measurement direction is produced.
The dynamic chi includes dynamic chi matrix and is located at first, second induction coil of the dynamic chi matrix just to scale one side, moves
First, second induction coil can be completely covered by the projection of chi matrix；First induction coil is along the curve that the cycle is WCoiling, the first induction coil coiling track of formation, described second
Induction coil is along the curve that the cycle is WCoiling, forms the second induction coil
Coiling track；Wherein, x directions are measurement direction, i all integers successively in value 0 to j-1, j be integer and 0 ＜ j ＜ n (i.e.
J is any integer between 0 and n), n represents the number of pole-pairs of sensor, and W is equal to the pole span of sensor, and b is constant, and b
The amplitude of first, second induction coil coiling track, and A ＜ L are represented in 0, A；First induction coil and the second induction coil string
Connection, just to parallel, the second induction coil is with the second excitation coil just to parallel for the first induction coil and the first excitation coil.
Biphase symmetrical drive electric current is passed through in first, second excitation coil of scale, when dynamic chi with scale along measurement direction
During generation relative motion, first, second induction coil output two-way induced signal is concatenated superposition and forms travelling wave signal, should
Travelling wave signal is carried out than phase with same frequency reference signal, and phase contrast is represented by the high-frequency clock pulse number of interpolation, Jing after conversion
Obtain straight-line displacement of the dynamic chi with respect to scale.
The scale also includes being located at the scale insulating barrier on first, second excitation coil；The dynamic chi also includes setting
Dynamic chi insulating barrier under first, second induction coil.Scale insulating barrier is used for protecting first, second excitation coil, moves chi
Insulating barrier is used for protecting first, second induction coil, scale insulating barrier and dynamic chi insulating barrier avoid first, second excitation line
Circle is contacted with first, second induction coil, it is to avoid affect the generation of induced signal.
After the travelling wave signal is shaped to square wave with the shaped circuit of same frequency reference signal, then carry out than phase.
In this utility model, first, second excitation coil adopts square wave winding mode, first, second induction coil to adopt
Semisinusoidal winding mode, which eliminates is affected using the higher hamonic wave brought by harmonic analysis method on square wave, is improve straight
The degree of accuracy of linear movement measuring；Advanced surface manufacturing process can be adopted, sensor number of pole-pairs, low cost is easily improved；And
The linear displacement transducer simple structure, measurement resolution are high, easy batch micro operations.
Description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the coiling schematic diagram of first, second excitation coil in this utility model.
Fig. 3 is the coiling schematic diagram of first, second induction coil in this utility model.
Fig. 4 is just right with first, second excitation coil respectively for first, second induction coil of a certain moment in this utility model
Location diagram.
Fig. 5 is principles of signal processing block diagram of the present utility model.
Specific embodiment
Below in conjunction with the accompanying drawings this utility model is elaborated.
Grating straight-line displacement sensor during double-row type as shown in Figures 1 to 5, including scale 1 and it is parallel with scale 1 just to and
Leave the dynamic chi 2 in 0.2mm gaps.
Scale 1 includes scale matrix 11, is arranged in scale matrix 11 just to the first excitation in the wiring layer of dynamic chi one side
Coil 12, the second excitation coil 13 and the scale insulating barrier 14 being located on the wiring layer, the first excitation coil 12 and second swash
Encourage coil 13 to be parallel to each other along measurement direction, the projection of scale matrix 11 can be by the first excitation coil 12, the second excitation coil 13
It is completely covered, scale matrix 11 is non-magnetic matrix of the thickness equal to (can also be greater than) 2mm, using ceramic material
Into；, all along the rectangular ripple coiling of measurement direction, the amplitude of the square wave is L, week for first excitation coil 12, the second excitation coil 13
Phase be W, dutycycle be 0.5, the original position of the second excitation coil 13 is differed with the original position of the first excitation coil 12
Dynamic chi 2 includes dynamic chi matrix 21, is arranged in dynamic chi matrix 21 just to the first induction coil in the wiring layer of scale one side
22nd, the second induction coil 23 and the dynamic chi insulating barrier 24 being located under the wiring layer, the projection for moving chi matrix 21 can be by the first induction coil
22nd, the second induction coil 23 is completely covered, and it is non-magnetic matrix of the thickness equal to (can also be greater than) 2mm to move chi matrix 21, using pottery
Ceramic material is made；First induction coil 22 is along the curve that the cycle is W
Coiling, forms the first induction coil coiling track, and the second induction coil 23 is along the curve that the cycle is WCoiling, forms the second induction coil coiling track；Wherein, x directions are survey
Amount direction, i all integers successively in value 0 to j-1, j is integer and 0 ＜ j ＜ n (i.e. j is any integer between 0 and n),
N represents the number of pole-pairs of sensor, and W is equal to the pole span of sensor, and b is constant, and b is not equal to 0, A and represents first, second line of induction
The amplitude of circle coiling track, and A ＜ L, in this embodiment j=6, then i value 0,1,2,3,4,5 successively, form first and sense
The original position (i.e. Q points in Fig. 3) of coil 22 is alignd with the original position (i.e. P points in Fig. 3) of the second induction coil 23；The
One induction coil 22 is connected with the second induction coil 23, the first induction coil 22 and the first excitation coil 12 just to parallel, second
Induction coil 23 is with the second excitation coil 13 just to parallel.
Sinusoidal excitation current is passed through in first excitation coil 12 of scale 1 (to add at the two ends of the first excitation coil 12
Pumping signal u1=UmSin ω t), cosine exciting current is passed through in the second excitation coil 13 (i.e. the two of the second excitation coil 13
End is plus pumping signal u2=UmCos ω t), when there is relative motion with scale 1 along measurement direction in dynamic chi 2, first line of induction
Circle 22 is moved relative to the first excitation coil 12, and the second induction coil 23 is moved relative to the second excitation coil 13, the first sensing
By the magnetic flux of production (1) in coil 22
By the magnetic flux of production (2) in second induction coil 23
First induction coil 22 is by the induced signal of output type (3)：
Second induction coil 23 is by the induced signal of output type (4)：
First, second induction coil overlapped in series exports travelling wave signal e (moving total induction electromotive force of chi 2)：
Wherein：UmFor the amplitude of pumping signal, frequencies of the ω for pumping signal, k1For proportionality coefficient, k is potential sensing system
Number,X is the straight-line displacement of 2 relative scale 1 of chi.
As shown in figure 5, dynamic chi 2 occurs relative motion with scale 1 along measurement direction, the phase angle of induced signal will occur week
Phase property changes, and moves chi 2 and moves a pole span relative to scale 1, and the phase angle of induced signal is (i.e. in formula (5)) change
The individual cycle.Travelling wave signal e is accessed shaping circuit with same frequency reference signal u that phase place is fixed to process, two-way square wave is converted to
Sending into signal processing module after signal is carried out than phase, and phase contrast is represented by the high-frequency clock pulse number of interpolation, Jing after conversion i.e.
The straight-line displacement of 2 relative scale 1 of dynamic chi can be obtained.
Claims (3)
1. grating straight-line displacement sensor during a kind of double-row type, including scale (1) and it is parallel with scale just to and leave gap and move
Chi (2), it is characterised in that：
Described scale (1) includes scale matrix (11) and is located at scale matrix just to dynamic chi one side and is parallel to each other along measurement direction
First, second excitation coil (12,13)；First, second excitation coil (12,13) all along the rectangular ripple of measurement direction around
System, the amplitude of the square wave be L, cycle be W, dutycycle be 0.5, the original position of the second excitation coil (13) and the first excitation
The original position difference of coil (12)
Described dynamic chi (2) include dynamic chi matrix (21) and be located at first, second induction coil of the dynamic chi matrix just to scale one side (22,
23)；First induction coil (22) are along the curve that the cycle is W
Coiling, forms the first induction coil coiling track, and the second induction coil (23) are along the curve that the cycle is WCoiling, forms the second induction coil coiling track；Wherein, x directions are survey
Amount direction, i all integers successively in value 0 to j-1, j are integer and 0 ＜ j ＜ n, n represent the number of pole-pairs of sensor, and W is equal to
The pole span of sensor, b are constant, and b is not equal to the amplitude that 0, A represents first, second induction coil coiling track, and A ＜ L；
First induction coil (22) is connected with the second induction coil (23), and the first induction coil (22) is just right with the first excitation coil (12)
Parallel, the second induction coil (23) is with the second excitation coil (13) just to parallel；
Biphase symmetrical drive electric current is passed through in first, second excitation coil (12,13) of scale (1), when dynamic chi (2) and scale
(1), when there is relative motion along measurement direction, first, second induction coil (22,23) output two-way induced signal is concatenated folding
Plus travelling wave signal is formed, the travelling wave signal and same frequency reference signal are carried out than phase, high frequency clock arteries and veins of the phase contrast by interpolation
Rush number to represent, obtain the straight-line displacement of the relative scale of dynamic chi Jing after conversion.
2. grating straight-line displacement sensor during double-row type according to claim 1, it is characterised in that：Scale (1) also wraps
Include the scale insulating barrier (14) being located on first, second excitation coil (12,13)；Dynamic chi (2) also include being located at first,
Dynamic chi insulating barrier (24) under second induction coil (22,23).
3. grating straight-line displacement sensor during double-row type according to claim 1 and 2, it is characterised in that：The travelling wave signal
It is shaped to after square wave with the shaped circuit of same frequency reference signal, then carries out than phase.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621047257.3U CN206037929U (en) | 2016-09-09 | 2016-09-09 | Bars linear displacement sensor during double row |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621047257.3U CN206037929U (en) | 2016-09-09 | 2016-09-09 | Bars linear displacement sensor during double row |
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| Publication Number | Publication Date |
|---|---|
| CN206037929U true CN206037929U (en) | 2017-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621047257.3U Withdrawn - After Issue CN206037929U (en) | 2016-09-09 | 2016-09-09 | Bars linear displacement sensor during double row |
Country Status (1)
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338234A (en) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | Double-column-type time-grating linear displacement sensor |
| CN114608431A (en) * | 2022-03-29 | 2022-06-10 | 重庆理工大学 | Double-layer sinusoidal time grating linear displacement sensor |
-
2016
- 2016-09-09 CN CN201621047257.3U patent/CN206037929U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106338234A (en) * | 2016-09-09 | 2017-01-18 | 重庆理工大学 | Double-column-type time-grating linear displacement sensor |
| CN106338234B (en) * | 2016-09-09 | 2018-11-13 | 重庆理工大学 | Grating straight-line displacement sensor when a kind of double-row type |
| CN114608431A (en) * | 2022-03-29 | 2022-06-10 | 重庆理工大学 | Double-layer sinusoidal time grating linear displacement sensor |
| CN114608431B (en) * | 2022-03-29 | 2023-06-09 | 重庆理工大学 | Double-layer sine time grating linear displacement sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20170322 Effective date of abandoning: 20181113 |
|
| AV01 | Patent right actively abandoned |