CN203259113U - String winding sensor for angle displacement measurement - Google Patents

Abstract

The utility model designs a string winding sensor for an angle displacement measurement. The sensor comprises a stator and a mover; a string plane winding is formed when an MEMS (Micro-electromechanical Systems) technology is used to carve lines in a sine manner and the string plane winding is arranged on a circumference plane of the stator; the string plane winding comprises an A phase winding, a B phase winding, and a C phase winding; the A phase winding, the B phase winding, and the C phase winding are arranged with a spacial mutual difference of 2 tau / 3 between each two of the three windings and serve as an induction winding of the sensor; each phase winding is formed a plurality of conductive windings with a polar distance of tau; a rectangular plane winding is formed when an MEMS technology is used to carve lines in a rectangular manner and the rectangular plane winding is arranged on a circumference plane of the mover; the rectangular plane winding has an equal polar distance, and the rectangular plane winding is in series connection to form a single phase winding serving as an excitation winding; the sensor generates an excitation magnetic field through the mover excitation winding; and a three phase induction potential signal is generated on a stator induction winding, wherein the three phase induction potential signal is provided with an accurate function relation with displacement and has a phase mutual difference of 120 DEG. The string winding sensor for the angle displacement measurement can increase the quantity of antipodes of the sensor, improve the induction signal quality, and improve the displacement measurement precision fundamentally.

Description

A kind of string of a musical instrument winding sensor for the angle displacement measurement

Technical field

The utility model belongs to the accurate displacement fields of measurement, is specifically related to a kind of precision measurement apparatus for angular displacement.

Background technology

Angular displacement sensor is the angle displacement measurement element.The displacement transducer that adopts at present extensively is take " space precise delineation " technology as basic grid formula displacement transducer, Typical Representative comprise grating, inductosyn, magnetic grid, appearance grid, ball bar and the time grid etc.This class sensor all utilizes various Precision Manufacturing Technologies to form smart and close grid line in the space as measuring basis, increases the space incisure density, and more to number of poles, the displacement measurement precision is higher.But in limited space, the groove number that traditional job operation improves sensor is very difficult.

Summary of the invention

The utility model is for the problems referred to above, proposes a kind of string of a musical instrument winding sensor of measuring for angle displacement, improve sensor to number of poles, improve the induced signal quality, improve the displacement measurement precision from the source.

The technical solution adopted in the utility model is as follows:

Be used for the string of a musical instrument winding sensor that angle displacement is measured, comprise stator and mover, have by the MEMS technology in the circumferential plane of stator and to be the string of a musical instrument plane winding that the sinusoidal shape groove forms, described string of a musical instrument plane winding is divided into A, B, C three phase windings, they are spatially arranged mutual deviation 2 τ/3, as the induction winding of sensor, every phase winding is that the conductive winding of τ consists of by some pole spans; Circumferential plane at mover has the rectangle plane winding that forms by MEMS technology rectangular shaped groove, and the pole spans such as described rectangle plane winding are connected into single-phase winding, as the excitation winding of sensor; The excitation field that described sensor produces by mover excitation winding produces the three-phase induction electric potential signal that is 120 ° of accurate funtcional relationship and phase place mutual deviations with displacement in the induction of stator induction winding.

The electromagnetic induction principle that the utility model utilizes the mutual inductance of sensor stator and two planar shaped windings of mover to change with the position, and three groups of induced signals (time, spatial modulation signal) demodulation principle under the impulsive magnetic field, draw the mechanical displacement accurate transformation between fixed, mover is become corresponding electric signal.

Compared with the prior art, the utility model has the advantages that:

(1) stator winding that adopts is three phase sine shape winding, and induction produces the three-phase induction electromotive force of 120 ° of output mutual deviations, and the higher hamonic wave of induced signal is had good inhibiting effect, has improved the induced signal quality from the source;

(2) adopt the MEMS photoetching technique to form the planar coil winding, increase sensor winding conducting wire density, improve Traverse Accuracy, increased number of poles, reduce sensor bulk, can eliminate the higher hamonic waves such as even number time, 3 and 5 subharmonic of induced potential, the displacement detecting precision is higher;

(3) by the electromagnetic-field simulation theoretical analysis, for novel string of a musical instrument displacement transducer physical construction, material and winding parameter etc., can set up the more mathematical model of precise displacement measurement.

In sum, the utility model proposes the electromagnetic induction principle that the mutual inductance that utilizes stator and two planar shaped windings of mover changes with the position, accurately convert displacement to electric signal.Adopt the MEMS photoetching technique, process in the plane the induction winding of mover excitation winding and sinusoidal shape, improve sensor to number of poles, improve the induced signal quality, improve the displacement measurement precision from the source.

Description of drawings

Fig. 1 is the wiring synoptic diagram of circular flat string of a musical instrument displacement transducer;

Fig. 2 is the stator wiring diagram;

Fig. 3 is the mover wiring diagram.

Embodiment

Below in conjunction with Figure of description the technical solution of the utility model is described in further detail.

Referring to Fig. 2, the stator of sensor adopts string of a musical instrument winding, is comprised of A, B, C three phase windings, is sinusoidal flat shape, and the pole span of each phase winding is τ, and B phase winding and A phase winding differ 2 τ/3, and C phase winding and B phase winding differ 2 τ/3.Its line sequentially is: A phase 1-2-3-4; B phase 1-2-3-4; C phase 1-2-3-4.

Referring to Fig. 3, the mover of sensor is adopted as the plane winding of rectangular shape, and the rectangle that is τ by many pole spans with one fixed width is composed in series, and is the sensor excitation winding.

Above winding job operation is: adopt the MEMS processing technology to form the plane winding, and bonding silicon chip on the matrix end face of stator, mover, evenly groove forms conductive winding on silicon chip, and wherein the mover silicon chip is shaped as rectangle take pole span as the τ groove.The stator silicon chip is carved A, B, C three-phase conductive winding, and winding employing sinusoidal shape groove, and every phase winding is that the τ conductive winding consists of by some pole spans, and A, B, C three-phase conductive winding be mutual deviation 2 τ/3 spatially.τ can carve littlely by MEMS technique, and number of pole-pairs is more, and precision is higher.

Referring to Fig. 1, stator and mover form angular displacement sensor, and dotted line l is the mover wiring among the figure, and solid line is the stator wiring, and each differs from 2 τ/3 three phase windings of stator.The excitation winding of mover produces pumping signal, and the induction of stator string of a musical instrument winding produces the three-phase induction electric potential signal, and phase place becomes 120 °.

A on stator, B, three windings of C are because the effect of electromagnetic field produces induced potential

E _A=E _mωcos(nθ)sinωt

$E_B=E_m\mathrm{\ω}\cos (\mathrm{n\θ}-\frac{2\mathrm{\π}}{3})\sin \mathrm{\ωt}$

$E_B=E_m\mathrm{\ω}\cos (\mathrm{n\θ}-\frac{4\mathrm{\π}}{3})\sin \mathrm{\ωt}$

E wherein _mBe stator string of a musical instrument winding induced potential maximum amplitude, n is to number of poles.To E _A, E _B, E _CIn time phase shift is 0 °, 120 °, 240 respectively.And can get three signal plus:

$E_m\cos \left(\mathrm{n\θ}\right)\sin \mathrm{\ωt}+E_m\cos (\mathrm{n\θ}-\frac{2\mathrm{\π}}{3}))\sin (\mathrm{\ωt}-\frac{2\mathrm{\π}}{3})+E_m\cos (\mathrm{n\θ}-\frac{4\mathrm{\π}}{3}))\sin (\mathrm{\ωt}-\frac{2\mathrm{\π}}{3})$

$=\frac{3}{2}{E}_m\sin (\mathrm{\ωt}-\mathrm{n\θ})$

Therefore can by detecting the n θ phase place of induced signal, just can obtain space angle displacement θ.

The utility model adopts MEMS photolithographicallpatterned processing winding, can increase number of poles in the actual processing, and stator is realized the sinusoidal shape winding.Can improve the precision of original output signal, also can dwindle the volume of sensor.

By applying pumping signal at mover, produce impulsive magnetic field, the A on stator, B, C three strings wire-wound group are because the effect of electromagnetic field produces the three-phase induction electromotive force, set up the mathematical model of electromotive force, space, time, it is a kind of high precision displacement measure theory model.

Claims (1)

1. one kind is used for the string of a musical instrument winding sensor that angle displacement is measured, comprise stator and mover, it is characterized in that: have by the MEMS technology in the circumferential plane of stator to be the string of a musical instrument plane winding that the sinusoidal shape groove forms, described string of a musical instrument plane winding is divided into A, B, C three phase windings, they are spatially arranged mutual deviation 2 τ/3, as the induction winding of sensor, every phase winding is that the conductive winding of τ consists of by some pole spans; Circumferential plane at mover has the rectangle plane winding that forms by MEMS technology rectangular shaped groove, and the pole spans such as described rectangle plane winding are connected into single-phase winding, as the excitation winding of sensor; The excitation field that described sensor produces by mover excitation winding produces the three-phase induction electric potential signal that is 120 ° of accurate funtcional relationship and phase place mutual deviations with displacement in the induction of stator induction winding.

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