CN108571986A - Displacement sensor - Google Patents
Displacement sensor Download PDFInfo
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- CN108571986A CN108571986A CN201710131958.8A CN201710131958A CN108571986A CN 108571986 A CN108571986 A CN 108571986A CN 201710131958 A CN201710131958 A CN 201710131958A CN 108571986 A CN108571986 A CN 108571986A
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- receiving coil
- displacement sensor
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- excitation coil
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The present invention provides a kind of displacement sensor, including：Fixed module is equipped with excitation coil and receiving coil on fixed module；Wherein excitation coil is used to, by high frequency periodic alternating voltage and electric current, alternating electromagnetic field is generated in fixed module region；Receiving coil is arranged in the alternating electromagnetism field areas that excitation coil generates, and generates induced electromotive force；Mobile module is used to influence to swash the electromagnetic coupling strengths between excitation coil and receiving coil；Processing circuit is connect with fixed module, the voltage signal output position shifting signal that processing circuit processes are obtained from receiving coil.The present invention has the following advantages：Signal accuracy is improved, the receiving coil on fixed module has the characteristics that one or more particular geometric graphic structures being repeated cyclically.The receiving coil repetition period is smaller, and the reception number of signals obtained within the scope of ohject displacement is more, and the resolution ratio of output signal is higher, and encoded signal precision can be improved by doing so, while accelerate processing circuit calculating speed.
Description
Technical field
The present invention relates to a kind of novel induction displacement sensors, are more particularly without limitation, to a kind of for measuring
The induction displacement sensor of ohject displacement.
Background technology
Displacement by being converted to electricity by displacement sensor, to realize the detection to displacement.Displacement sensor is
The important technical basis of new technology revolution and information-intensive society is the important link realized test with automatically controlled.In Practical Project
In, displacement sensor has very important effect.It is mainly wrapped for the common displacement sensor of people institute on the market at present
It includes：
Wound potentiometer formula displacement sensor
Working method：Wound potentiometer is wound on by resistance wire in insulation framework, is drawn and sliding point resistance pair by brush
The input variation answered.Brush is dragged by displaced portion to be measured, exports the variation of the resistance or voltage directly proportional to displacement.
Defect：That there are physical frictions is fragile, precision is low.
Resistance-strain type displacement sensor
Working method：Resistance-strain type displacement sensor is using spring and cantilever beam series connection as elastic element, in rectangle
Interface cantilever beam root tow sides paste four foil gauges, form full-bridge circuit, and extension spring one end is connect with measuring rod, works as survey
It when gauge rod generates displacement with test specimen, drives spring that cantilever beam root is made to bend, is bent generated strain and measuring rod
Displacement is linear.
Defect：Range of displacement measurement is small, precision is low.
Capacitive displacement transducer
Working method：Capacitive displacement transducer is based on ideal capacity plate antenna, and two parallel plate electrodes are by sensing
Device gauge head and testee surface are constituted, and operational amplifier measuring circuit principle are based on, when the sinusoidal excitation current of constant frequency
When passing through sensor capacitance, the voltage magnitude relationship proportional to capacitor plate gap that is generated on sensor.
Defect：Capacitance type sensor leads to that range of displacement measurement is small, precision is low, deposits there are parasitic capacitance and distribution capacity
In nonlinearity erron.
Hall displacement transducer
Working method：The gradient magnetic and be located in magnetic field that hall displacement transducer is mainly made of two semi-circular magnet steel
Germanium material semiconductor Hall piece (sensing element) device of the heart is constituted.When Hall element passes through constant current, its perpendicular to
Just there is Hall voltage output on magnetic field and sense of current.When Hall element moves up and down in gradient magnetic, the Hall of output
Potential V depends on its displacement x in magnetic field.The stool and urine for measuring Hall voltage would know that the Static Correction of Hall element.
Defect：Signal varies with temperature, range of displacement measurement is small.
LVDT displacement sensors
Working method：LVDT is the abbreviation of linear variable difference transformer, belongs to linear displacement transducer, by iron core, rank
Iron, primary coil, secondary coil composition, when armature is in an intermediate position, the induced electromotive force phase of two secondary coils generation
It is 0 Deng, such output voltage；When armature is mobile in coil inside and deviates center, the induced electricity of two coils generation
Kinetic potentials etc. have voltage output, voltage swing to depend on the size of displacement.
Defect：It is complicated, of high cost, be unable to measure nonlinear displacement.
Above scheme has in various degree in precision, reliability, range of displacement measurement and measurement nonlinear displacement etc.
Defect.Therefore, nowadays there is an urgent need to a kind of new displacement sensors in market, to overcome the defect present in present scheme.
Invention content
For the defects in the prior art, present invention aims at a kind of solution said programs of offer in sensor rapid wear
The displacement sensor of bad, signal resolution, output form and mounting means etc. defect.
In order to solve the above technical problems, the present invention provides a kind of displacement sensor, including：Fixed module, in the fixation
Module is equipped with excitation coil and receiving coil；The wherein described excitation coil is used to pass through high frequency periodic alternating voltage and electricity
Stream, alternating electromagnetic field is generated in the fixed module region；The friendship generated in the excitation coil is arranged in the receiving coil
In Electromagnetic Field region, and generate induced electromotive force；Mobile module, the mobile module for influence swash the excitation coil and
Electromagnetic coupling strengths between the receiving coil；Processing circuit, the processing circuit are connect with the fixed module, the place
The voltage signal output position shifting signal that reason processing of circuit is obtained from the receiving coil.
Preferably, the mobile module includes metal derby, sheet metal or carrier and the conduction that is arranged on the carrier
Part.
Preferably, the conduct piece is metal, concentric closed rectangular plain conductor, closed helical shape plain conductor, is closed
Multi-turn plain conductor or rectangular conductive glue.
Preferably, the quantity of the mobile module is one or more.
Preferably, the gold of excitation coil coiling along the direction of the mobile module displacement path by a circle or multiturn
It is in series to belong to conducting wire.
Preferably, the receiving coil is made of one or more receiving units.
Preferably, the receiving unit includes class sinusoidal, diamond shape, triangle or the spiral shape figure in one or more periods
Shape.
Preferably, the processing circuit includes at least oscillating circuit and signal calculation circuit；The wherein described oscillating circuit is matched
It closes the excitation coil and generates high frequency periodic alternating voltage and electric current, the signal calculation circuit is for handling receiving coil
Coupled signal simultaneously exports orthogonal AB, linear analogue output, PWM or cosine and sine signal.
Compared with prior art, the present invention has the following advantages：
1) signal accuracy is improved, the receiving coil on fixed module has the particular geometric that one or more are repeated cyclically
Graphic structure feature, geometric figure include class sinusoidal, diamond shape, triangle, rectangle and spiral shape.The receiving coil repetition period
Smaller, the reception number of signals obtained within the scope of ohject displacement is more, and the resolution ratio of output signal is higher, and doing so can carry
High encoded signal precision, while accelerating processing circuit calculating speed.
2) reliability is not physically contacted between fixed module and mobile module, not will produce any friction, avoids object
The loss of material.Meanwhile mobile module uses the material (such as metal) of high mechanical strength, in the case where movement speed is too fast because of it
Material itself it is firm will not deform, fragmentation the case where.
3) range of displacement measurement, induction displacement sensor of the present invention, range of displacement measurement can be from
Micron order expand to 10 meters even it is farther, considerably beyond the measurement range of other types displacement sensor, and its precision is not by position
Move the influence apart from length.
4) nonlinear displacement is measured, induction displacement sensor according to the present invention not only can be adapted for straight line
Displacement can also be applied to nonlinear displacement by changing the figure of mobile module and fixed module.Flexible design feature
It ensure that induction displacement sensor according to the present invention can meet the needs of client's different application.
Description of the drawings
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature mesh of the invention
And advantage will become more apparent upon.
Fig. 1 is that displacement sensor of the present invention uses schematic diagram；
Fig. 2 a are one structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 b are two structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 c are three structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 d are four structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 e are five structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 f are six structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 2 g are seven structural schematic diagram of displacement sensor mobile module example of the present invention；
Fig. 3 a are one structural schematic diagram of displacement sensor excitation coil example of the present invention；
Fig. 3 b are two structural schematic diagram of displacement sensor excitation coil example of the present invention；
Fig. 3 c are three structural schematic diagram of displacement sensor excitation coil example of the present invention；
Fig. 4 a are one structural schematic diagram of displacement sensor receiving coil example of the present invention；
Fig. 4 b are two structural schematic diagram of displacement sensor receiving coil example of the present invention；
Fig. 4 c are three structural schematic diagram of displacement sensor receiving coil example of the present invention；
Fig. 4 d are four structural schematic diagram of displacement sensor receiving coil example of the present invention；
Fig. 4 e are five structural schematic diagram of displacement sensor receiving coil example of the present invention；
Fig. 5 is that receiving coil example five uses schematic diagram；
Fig. 6 is displacement sensor processing circuit flow diagram of the present invention.
Specific implementation mode
With reference to specific embodiment, the present invention is described in detail.Following embodiment will be helpful to the technology of this field
Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill of this field
For personnel, without departing from the inventive concept of the premise, several changes and improvements can also be made.
According to Fig. 1, this is a common linear displacement transducer, and mobile module 1 is located at 2 top of fixed module,
It can be moved forward and backward to (being rectilinear direction in Fig. 1) along party to be detected.Include that a circle or multiturn are connected with high frequency week on fixed module 2
The excitation coil 4 of phase property alternating voltage and N number of have the characteristics that connecing for particular geometric graphic structure that one or more are repeated cyclically
Take-up circle 5.Excitation coil 4 and receiving coil 5 are connected to by through-hole on processing circuit 3.
According to Fig. 1, induction displacement sensor according to the present invention is non-contact displacement transducer,
It is not physically contacted between fixed module and mobile module, not will produce any friction, avoid the loss of material.
Induction displacement sensor according to the present invention can be adapted for straight-line displacement, can also be moved by changing
The figure of dynamic model block and fixed module is applied to nonlinear displacement.Flexible design feature ensure that electricity according to the present invention
Magnetic inductive displacement sensor can meet the needs of client's different application.
Fig. 2 is mobile module instance graph of the present invention.
Fig. 2 a-2g illustrate a variety of realization methods of mobile module and its design feature：
Fig. 2 a-2b are the spy being repeated cyclically with one or more that electromagnetic induction material (such as metal) is made
Determine patterned metal piece (block), figure includes rectangle, bending quadrangle or closed helical shape.
As shown in Figure 2 a, mobile module is rectangular patterns piece 6 made of being made by metal.
As shown in Figure 2 b, mobile module is bending quadrangle patterns block 7 made of being made by metal, the figure left and right sides
Smooth, upper and lower both sides curve inwardly.
Fig. 2 c-2f are that being repeated cyclically with one or more for electromagnetic induction material (such as conducting resinl) composition is specific
Geometric figure is covered on the carrier of non electromagnetic induction material (such as insulating materials) making, and figure includes rectangle, bending four
Side shape or closed helical shape.
As shown in Figure 2 c, mobile module by one piece of 9 uniform fold of rectangular conductive glue in the positive and negative of insulating materials carrier 8
On.
As shown in Figure 2 d, mobile module will be at a distance of 12 uniform fold of rectangular conductive glue 11 and rectangular conductive glue of specific range
In on insulating materials carrier 10.
As shown in Figure 2 e, mobile module by 14 uniform fold of multiple concentric closed rectangular plain conductor in insulating materials carrier
On 13.
As shown in figure 2f, mobile module is closed 16 uniform fold of plain conductor on insulating materials carrier 15 by one, is somebody's turn to do
It is put in the shape of a spiral inside plain conductor.
Fig. 2 e are that the conducting wire that electromagnetic induction material (such as metal) makes is wound in non electromagnetic induction material (such as insulation material
Material) on the particular geometric figure carrier being repeated cyclically with one or more that makes, figure includes rectangle, four sides of bending
Shape or closed helical shape.
As shown in Figure 2 g, multi-turn plain conductor 18 is wound on one piece of insulating materials carrier 17 by mobile module, the insulation
Material shape is customized according to ohject displacement route.
Induction displacement sensor according to the present invention, the appearance profile of mobile module is generally rectangular cross-section, such as
Fig. 2 a, 2c, 2d, 2e and 2f can also use the bending quadrangle patterns such as Fig. 2 b, be suitable for linear displacement transducer.
If object of which movement route is non-linear, the bending quadrangle patterns mobile module such as Fig. 2 f, the same object of shape may be used
Motion path direction is identical.
The electromagnetic induction material and non electromagnetic induction material of composition mobile module according to the present invention generally use machinery
The high material of intensity, because in practical applications, common material is be easy to cause (as printed in the case that mobile module movement is too fast
Printed circuit board) deform, fragmentation situations such as, cause the damage to sensor itself.And use the material of high mechanical strength (such as
Metal) can make mobile module in the case where rotating speed is too fast because itself material it is firm will not deform, the feelings of fragmentation
Condition.But if only changing printed circuit board material into solid metallic materials, although sensor mechanism intensity can be reinforced,
Influence of the vortex field generated in solid metal to receiving coil is uneven, can cause to connect voltage signal curve on induction coil by
To influence, the precision of output signal is reduced.So common material is changed into the material (such as metal) of high mechanical strength by the present invention
Meanwhile modifying to its shape (as being closed plain conductor) so that the geometric figure on mobile module that finally shapes and connect
The geometric figure of take-up circle is similar, and the vortex field that mobile module generates will uniformly influence receiving coil, make the electricity on receiving coil
It presses signal to keep stablizing, improves the precision of output signal.
Induction displacement sensor according to the present invention, mobile module are activated coil alternating electromagnetic field
It influences and generates vortex field, to weaken the electromagnetic field on excitation coil.Due to the geometry in particular of mobile module, vortex field
Along particular course, i.e. circumferencial direction changes excitation electromagnetic field.The induction that non-uniform excitation electromagnetic field will cause in receiving coil
Electromotive force changes, and its variation is different according to mobile module and the relative physical location of receiving coil.
Induction displacement sensor of the present invention, excitation coil are located on fixed module, by 1 circle or more
The pattern of circle plain conductor coiling forms, and pattern is generally rectangular cross-section, is bent quadrangle, can also change shape according to application.Figure
3a is one schematic diagram of excitation coil example.
As shown in Figure 3a, excitation coil can be placed on the outer ring of receiving coil.Excitation coil 21 is by 3 circle rectangular metal conducting wires
It is connected in series, is placed on 20 outside of receiving coil 19 and receiving coil, excitation coil 21 is connected to by through-hole 21-1 and 21-2
On processing circuit 3.
Fig. 3 b are two schematic diagram of excitation coil example.
As shown in Figure 3b, if installation space is restricted, excitation coil can be placed in parallel under receiving coil
To save the area of fixed module.Excitation coil 22 is formed by 3 circle rectangular graph plain conductor coilings, is placed in parallel and is being received line
Under circle 19 and receiving coil 20, excitation coil 22 is connected to by through-hole 21-1 and 21-2 on processing circuit 3.
Fig. 3 c are three schematic diagram of excitation coil example.
It as shown in Figure 3c, can be by the arbitrary shape of excitation coil at same quilt if it is nonlinear curve to be detected path
It is consistent to detect graphics path.Excitation coil 23 is connected in series by 2 circles bending quadrangle plain conductor, is placed on 19 He of receiving coil
20 outside of receiving coil, excitation coil 23 are connected to by through-hole 23-1 and 23-2 on processing circuit 3.
Induction displacement sensor of the present invention, excitation coil is connected with processing circuit, for passing through
High frequency periodic alternating voltage and electric current generate alternating electromagnetic field in fixed module region.
Induction displacement sensor of the present invention, receiving coil are located on fixed module, receiving coil packet
One or more independent receiving coils are included, receiving coil keeps specific phase difference distance between each other.Each receiving coil tool
It includes class sinusoidal, diamond shape, triangle to have the particular geometric graphic structure feature that one or more are repeated cyclically, geometric figure
Shape or spiral shape.
Fig. 4 a are one schematic diagram of receiving coil example.
As shown in fig. 4 a, include 2 receiving coils 25 and receiving coil 26 on fixed module, be placed on excitation coil 24
Inside.Specific phase difference distance is kept between 2 receiving coils.Each receiving coil is along 3 water chestnuts of displacement path direction coiling
Shape is closed plain conductor.Receiving coil 25 accesses processing circuit 3 by through-hole 25-1 and 25-2, forms closed circuit.Receive line
Circle 26 accesses processing circuit 3 by through-hole 26-1 and 26-2, forms closed circuit.It can be in specific survey using above-mentioned receiving coil
2 groups of reception signals that there is specific range phase difference between each other are obtained in amount range.
Fig. 4 b are two schematic diagram of receiving coil example.
As shown in Figure 4 b, include 3 receiving coils 27, receiving coil 28 and receiving coil 29 on fixed module, place
In 24 inside of excitation coil.Specific phase range difference is kept between 3 receiving coils.Each receiving coil is along displacement path side
To 2 triangular closed plain conductors of coiling.Receiving coil 27 accesses processing circuit 3 by through-hole 27-1 and 27-2, and formation is closed
Close circuit.Receiving coil 28 accesses processing circuit 3 by through-hole 28-1 and 28-2, forms closed circuit.Receiving coil 29 passes through
Through-hole 29-1 and 29-2 access processing circuit 3, form closed circuit.It can be within the scope of particular measurement using above-mentioned receiving coil
Obtain 3 groups of reception signals that there is specific range phase difference between each other.
Fig. 4 c are three schematic diagram of receiving coil example.
As illustrated in fig. 4 c, include 2 receiving coils 30 and receiving coil 31 on fixed module, be placed on excitation coil 24
Inside.Specific phase range difference is kept between 2 receiving coils.Each receiving coil is along 2 classes of displacement path direction coiling
Sinusoidal is closed plain conductor.Receiving coil 30 accesses processing circuit 3 by through-hole 30-1 and 30-2, forms closed circuit.It connects
Take-up circle 31 accesses processing circuit 3 by through-hole 31-1 and 31-2, forms closed circuit.It can be in spy using above-mentioned receiving coil
Determine to obtain 2 groups of reception signals that there is specific range phase difference between each other in measurement range.
Fig. 4 d are four schematic diagram of receiving coil example.
As shown in figure 4d, include 1 receiving coil 32 on fixed module, be placed on 24 inside of excitation coil.Receive line
Circle 32 is closed plain conductor along 2 rectangular coil shapes of displacement path direction coiling.Receiving coil 32 passes through through-hole 32-1 and 32-2
Processing circuit 3 is accessed, closed circuit is formed.Using above-mentioned receiving coil can be obtained within the scope of specific period 1 group it is mutual it
Between there are the reception signals of specific range phase difference.
Fig. 4 e are five schematic diagram of receiving coil example.
As shown in fig 4e, on fixed module include two groups of receiving coils, receiving coil shown in solid is example shown in Fig. 4 a
One receiving coil 25 and receiving coil 26, receiving coil shown in dotted line are receiving coil 33 and receiving coil 34.Receiving coil
33 and receiving coil 34 be placed in parallel in receiving coil 25 and the downside of receiving coil 26.Two groups of receiving coils are both placed in excitation line
24 inside of circle.Receiving coil 33 and receiving coil 34 are closed plain conductor along 2 diamond shapes of displacement path direction coiling respectively.It receives
Specific phase range difference is kept between coil 33 and receiving coil 34.Receiving coil 33 by through-hole 33-1 and 33-2 access at
Circuit 3 is managed, closed circuit is formed.Receiving coil 34 accesses processing circuit 3 by through-hole 34-1 and 34-2, forms closed circuit.
4 groups of reception signals can be obtained within the scope of particular measurement using above-mentioned receiving coil, wherein receiving coil 25 and receiving coil
Reception signal on 26 is that fine tuning receives signal；Reception signal on receiving coil 33 and receiving coil 34 is that coarse adjustment receives letter
Number.
Fig. 5 is five application drawing of receiving coil example.
As shown in figure 5, mobile module 1a is located at the upside of fixed module 2, mobile module 1b is located under fixed module 2
Side.Include 2 groups of receiving coils on fixed module 2.Receiving coil shown in solid is receiving coil 25 and receiving coil 26, dotted line institute
Show that receiving coil is receiving coil 33 and receiving coil 34.2 groups of receiving coils are placed in 24 inside of excitation coil.When mobile mould
Block 1a along displacement path occur change in location when, can be generated on receiving coil 25 and receiving coil 26 one group it is periodically variable
Voltage curve signal receives signal for fine tuning；When along displacement path change in location occurs for mobile module 1b, line can received
One group of periodically variable voltage curve signal is generated on circle 33 and receiving coil 34, signal is received for coarse adjustment.
Induction displacement sensor of the present invention, receiving coil are located at the alternating electromagnetism of excitation coil generation
It, can be in closing coil according to Faraday's electromagnetic induction law it is found that the magnetic flux by closing coil changes in field areas
Upper generation induced electromotive force.Therefore, corresponding induced electromotive force will be generated on receiving coil, then input processing circuit is counted
It calculates.
The geometric figure drawn on fixed module in order to facilitate signal test and evaluation and repetition period generally with receive line
The geometric figure of circle and repetition period are consistent, but can also be different in practical application.
Induction displacement sensor of the present invention, the receiving coil on fixed module have one or more
The particular geometric graphic structure feature being repeated cyclically, geometric figure include class sinusoidal, diamond shape, triangle or spiral shape.
The receiving coil repetition period is smaller, and the reception number of signals obtained within the scope of ohject displacement is more, the resolution ratio of output signal
Higher, encoded signal precision can be improved by doing so, while accelerate processing circuit calculating speed.
Induction displacement sensor of the present invention, can include simultaneously on fixed module 2 groups or it is multigroup not
The same period, different geometries receiving coil.If fixed module includes 2 groups or multigroup different cycles, different geometries
When receiving coil, 1 mobile module can be coordinated, the movement that multiple periods, geometry are identical or different can also be coordinated
Module.
Induction displacement sensor of the present invention, range of displacement measurement can expand to 10 meters from micron order
Even farther, considerably beyond the measurement range of other types displacement sensor, and its precision is not influenced by shift length length.
Induction displacement sensor of the present invention, receiving coil and excitation coil are placed on one piece of non-electrical
In magnetic induction plate of material, such as printed circuit board (PCB).
Electromagnetic induction type encoder of the present invention, processing circuit can be placed in non electromagnetic induction plate of material,
It can also be placed on elsewhere.Processing circuit can be the peripheral circuit built by discrete device, can also be an ASIC special
Use processing chip.
Electromagnetic induction type encoder of the present invention, internal includes an oscillating circuit and signal processing circuit.
Electromagnetic induction type encoder of the present invention, oscillating circuit generate high frequency week for generating cooperation excitation coil
Phase property alternating voltage and electric current.
As shown in fig. 6, induction displacement sensor of the present invention, signal processing circuit is received for handling
The voltage signal generated on coil, after being handled by demodulation, amplifier and other computing modules, the orthogonal AB of final output, linear mould
Quasi- output, PWM or cosine and sine signal.
Based on above-mentioned induction displacement sensor framework, measures ohject displacement mode and feature is as follows：
1) after power supply is powered to induction displacement sensor, processing circuit coordinates excitation coil to generate high frequency period
Property alternating voltage and electric current, alternating electromagnetic field will be formed in fixed module region by flowing through the alternating current of excitation coil.
2) according to Faraday's electromagnetic induction law it is found that the magnetic flux by closing coil changes, meeting is in closed line
Induced electromotive force is generated on circle.When the alternating electromagnetic field generated on excitation coil, which passes through, is closed receiving coil, due to by closing
Alternation occurs for the magnetic flux for closing receiving coil, and the identical alternation induced electromotive force of frequency is generated on each receiving coil.
3) mobile module is used to influence the coupled relation between excitation coil and receiving coil, when mobile module moves,
The alternating electromagnetic field of excitation coil makes mobile module generate vortex field, to weaken the electromagnetic field of excitation coil.It is non-uniform
Electromagnetic field will cause the induced electromotive force on receiving coil to change.When the position of mobile module and fixed module occurs relatively
When variation, the periodically variable voltage signal curve of N groups is obtained on receiving coil, is exported after being calculated by processing circuit orthogonal
AB, linear analogue output, PWM or cosine and sine signal.
Specific embodiments of the present invention are described above.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make a variety of changes or change within the scope of the claims, this not shadow
Ring the substantive content of the present invention.In the absence of conflict, the feature in embodiments herein and embodiment can arbitrary phase
Mutually combination.
Claims (8)
1. a kind of displacement sensor, which is characterized in that including：
Fixed module is equipped with excitation coil and receiving coil on the fixed module；Wherein
The excitation coil is used to, by high frequency periodic alternating voltage and electric current, alternation is generated in the fixed module region
Electromagnetic field；
The receiving coil is arranged in the alternating electromagnetism field areas that the excitation coil generates, and generates induced electromotive force；
Mobile module, the electromagnetic coupling that the mobile module is used to influence to swash between the excitation coil and the receiving coil are strong
Degree；
Processing circuit, the processing circuit are connect with the fixed module, and the processing circuit processes are from the receiving coil
Obtained voltage signal output position shifting signal.
2. displacement sensor according to claim 1, which is characterized in that the mobile module includes metal derby, sheet metal
Or carrier and the conduct piece that is arranged on the carrier.
3. displacement sensor according to claim 2, which is characterized in that the conduct piece is metal, concentric closed rectangular
Plain conductor, is closed multi-turn plain conductor or rectangular conductive glue at closed helical shape plain conductor.
4. displacement sensor according to claim 1, which is characterized in that the quantity of the mobile module is one or more
It is a.
5. displacement sensor according to claim 1, which is characterized in that the excitation coil is by a circle or multiturn described in
The plain conductor of coiling is in series on the direction of mobile module displacement path.
6. displacement sensor according to claim 1, which is characterized in that the receiving coil is received single by one or more
Member composition.
7. displacement sensor according to claim 6, which is characterized in that the receiving unit includes one or more periods
Class sinusoidal, diamond shape, triangle or spiral patterns.
8. displacement sensor according to claim 1, which is characterized in that the processing circuit include at least oscillating circuit and
Signal calculation circuit；Wherein
The oscillating circuit coordinates the excitation coil to generate high frequency periodic alternating voltage and electric current, the signal calculation circuit
Coupled signal for handling receiving coil simultaneously exports orthogonal AB, linear analogue output, PWM or cosine and sine signal.
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| CN201710131958.8A CN108571986A (en) | 2017-03-07 | 2017-03-07 | Displacement sensor |
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| CN201710131958.8A CN108571986A (en) | 2017-03-07 | 2017-03-07 | Displacement sensor |
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| CN111637831A (en) * | 2019-03-01 | 2020-09-08 | 瑞萨电子美国有限公司 | Method for improving the accuracy of position measurement using an inductive position sensor |
| CN115307719A (en) * | 2022-08-18 | 2022-11-08 | 东北林业大学 | Electromagnetic vibration sensor of flexible Archimedes spiral coil and vibration measurement method |
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| WO2024055672A1 (en) * | 2022-09-13 | 2024-03-21 | Oppo广东移动通信有限公司 | Measurement apparatus and electronic device |
| WO2024216748A1 (en) * | 2023-04-21 | 2024-10-24 | 王元西 | High-precision linear displacement and angular displacement system |
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