CN106441058B - Grating straight-line displacement sensor when a kind of single-column type two dimension - Google Patents
Grating straight-line displacement sensor when a kind of single-column type two dimension Download PDFInfo
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- CN106441058B CN106441058B CN201610815505.2A CN201610815505A CN106441058B CN 106441058 B CN106441058 B CN 106441058B CN 201610815505 A CN201610815505 A CN 201610815505A CN 106441058 B CN106441058 B CN 106441058B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
Abstract
The invention discloses grating straight-line displacement sensors when a kind of single-column type two dimension, including scale and dynamic ruler, scale includes scale matrix and the first, second excitation coil using rectangular wave coiling, and dynamic ruler includes dynamic ruler matrix and the first, second, third, fourth induction coil using semisinusoidal winding mode coiling；First, it is passed through exciting current in second excitation coil, when dynamic ruler is moved with respect to scale, first, second, third, 4th induction coil exports four road feel induction signals, it is superimposed to form X to travelling wave signal with the inductive signal of the second induction coil output after 90 ° of the inductive signal phase shift of first induction coil output, it is superimposed to form Y-direction travelling wave signal with the inductive signal of the 4th induction coil output after 90 ° of the inductive signal phase shift of third induction coil output, it is carried out again than phase with same frequency reference signal, phase difference is indicated by the high-frequency clock pulse number of interpolation, X is obtained after conversion, the straight-line displacement of Y-direction.The sensor structure is simple, and measurement resolution is high.
Description
Technical field
The invention belongs to accurate measurement sensor technical fields, and in particular to grating straight-line displacement passes when a kind of single-column type two dimension
Sensor.
Background technology
Straight-line displacement measurement is most basic geometric measurement, be largely present in using manufacturing industry as the industrial practice of representative and
In scientific practice, cathetus planar displacement measurement is typical case therein, is usually used in needing while measuring X-coordinate and Y seats
Target machine tool and planar working table.Currently, planar displacement measurement is broadly divided into two kinds of forms, one is in the side X
Linear displacement transducer is installed respectively to Y-direction, realizes that the measurement of planar displacement, another kind use integrated two dimension
Linear displacement transducer, such as two-dimensional grating sensor, two-dimentional magnetic induction sensor.First way is simple, but installs simultaneously
Two sensors, the consistency of installation accuracy are difficult to ensure, it will larger measurement error, and certain application environments are introduced,
Do not have while installing the condition of two sensors.The second way is current preferential scheme.Currently, common planar
Sensor is all to carry out counting to get displacement by the grid line for dividing equally space, and common feature is super using the space of grid line
Accurate groove meets the resolving power requirement of micro-displacement and accurate measurement requirement, it usually needs by complicated electronic fine-grained skill
Art is finely divided processing to the original signal of sensor output, keeps the structure of measuring system more complicated, and cost increases, and anti-
Interference performance is poor, is vulnerable to the influence of working environment interference.
Recent year has developed a kind of when grating straight-line displacement sensor using clock pulses as displacement measurement benchmark,
It does not depend on space precise groove, can realize high resolution and high-precision displacement measurement.Currently, developed two dimension when grid it is straight
Linear movement pick-up, layering is more, and excitation coil coiling is complicated, to keep sensor structure more complex, manufacture difficulty it is big and at
This height, and the measurement accuracy of sensor can also be activated the influence of coil turn and each circle coil distribution situation.
Invention content
The object of the present invention is to provide grating straight-line displacement sensors when a kind of single-column type two dimension, to reduce cell winding point
The number of plies and coiling complexity, simplify sensor structure, reduce manufacturing cost.
Grating straight-line displacement sensor when single-column type two dimension of the present invention, including scale and face parallel with scale and stay
There is the dynamic ruler in gap.
The scale includes scale matrix, the first excitation coil of the dynamic ruler one side that is located at scale matrix face, is located at first
The second wiring layer on excitation coil and the second excitation coil being located in the second wiring layer, the projection of scale matrix can be by the
One, the second excitation coil is completely covered；Rectangular wave coiling, the amplitude of the rectangular wave are first excitation coil in X direction
L1, period W1, duty ratio 0.5, length N1W1；Second excitation coil is along the rectangular wave coiling of Y-direction, the rectangle
The amplitude of wave is L2, period W2, duty ratio 0.5, length N2W2；Wherein, L1=N2W2, L2=N1W1, N1Indicate that first swashs
Encourage the rectangular wave periodicity of coil, N2Indicate the rectangular wave periodicity of the second excitation coil, the initial position of the second excitation coil
It is aligned on the direction of scale matrix with the initial position of the first excitation coil.
The dynamic ruler includes dynamic ruler matrix and is located at the first, second, third, fourth sense of dynamic ruler matrix face scale one side
Coil is answered, the first, second, third, fourth induction coil can be completely covered for the projection of dynamic ruler matrix；First induction coil
It is W along the period1CurveCoiling forms the first induction coil coiling
Track, wherein i1Value 0 is to j successively1All integers in -1, j1For integer and(i.e. j1For 0 withBetween
Any integer), A1Indicate the amplitude of the first induction coil coiling track, and A1< L1；The coiling track of second induction coil
It is moved in X direction for the first induction coil coiling trackCurve afterwards, wherein m1For integer and j1≤m1< N1-
j1；The third induction coil is W along the period2CurveCoiling,
Form third induction coil coiling track, wherein i2Value 0 is to j successively2All integers in -1, j2For integer and(i.e. j2For 0 withBetween any integer), A2Indicate the amplitude of third induction coil coiling track, and A2<
L2；The coiling track of 4th induction coil is that third induction coil coiling track is moved along Y-directionSong afterwards
Line, wherein m2For integer and j2≤m2< N2-j2；First, second induction coil is parallel with the first excitation coil face, third,
Four induction coils are parallel with the second excitation coil face.
It is passed through sinusoidal excitation current in first, second excitation coil of scale, when dynamic ruler and scale generation relative motion,
First, second, third, fourth induction coil exports four road feel induction signals, the inductive signal phase shift that the first induction coil is exported
It 90 °, then is superimposed to form X to travelling wave signal with the inductive signal of the second induction coil output, third induction coil is exported
Then 90 ° of inductive signal phase shift is superimposed to form Y-direction travelling wave signal with the inductive signal of the 4th induction coil output, by the X to, Y
It is carried out respectively with same frequency reference signal to travelling wave signal than phase, phase difference is indicated by the high-frequency clock pulse number of interpolation, warp
Obtained after conversion dynamic ruler with respect to scale X-direction and Y-direction straight-line displacement.
The scale further includes the scale insulating layer being located on the second wiring layer；The dynamic ruler further include be located at first,
Second, third, the dynamic ruler insulating layer under the 4th induction coil.It is exhausted to move ruler for protecting the second excitation coil for scale insulating layer
Edge layer is for protecting the first, second, third, fourth induction coil, scale insulating layer and dynamic ruler insulating layer that can swash to avoid second
It encourages coil to contact with the first, second, third, fourth induction coil, avoids the generation for influencing inductive signal.
Preferably, the W1=W2、N1=N2、A1=A2, the j1、j2Value is 3, m1、m2Value is 3, second sense
It is that the first induction coil coiling track moves in X direction to answer the coiling track of coilCurve afterwards；4th sense
It is that third induction coil coiling track is moved along Y-direction to answer the coiling track of coilCurve afterwards.
After the X is shaped to square wave to travelling wave signal and the shaped circuit of same frequency reference signal, then carry out than phase；It is described
After Y-direction travelling wave signal is shaped to square wave with the shaped circuit of same frequency reference signal, then carry out than phase.
The first, second excitation coil uses rectangular wave winding mode, first, second, third, fourth line of induction in the present invention
Circle uses semisinusoidal winding mode, eliminates to electromagnetism square-wave signal using higher hamonic wave caused by harmonic analysis method
It influences, improves the accuracy of straight-line displacement measurement；And cell winding hierarchy number and coiling complexity are decreased, letter
Change sensor structure, reduces manufacturing cost.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the coiling schematic diagram of the first excitation coil in the present invention.
Fig. 3 is the coiling schematic diagram of the second excitation coil in the present invention.
Fig. 4 is the coiling schematic diagram of the first, second, third, fourth induction coil in the present invention.
Fig. 5 is the principles of signal processing block diagram of the present invention.
Specific implementation mode
It elaborates below in conjunction with the accompanying drawings to the present invention.
Grating straight-line displacement sensor when single-column type two dimension as shown in Figures 1 to 5, including scale 1 and it is parallel with scale 1 just
Pair and there are the dynamic rulers 2 in the gaps 0.2mm.
Scale 1 includes scale matrix 11, is arranged in 11 face of scale matrix move in the first wiring layer of ruler one side first
Excitation coil 12, the second wiring layer 14 being located on the first wiring layer, the second excitation line being arranged in the second wiring layer 14
Circle 13 and the scale insulating layer 15 being located on the second wiring layer 14, phase between the first excitation coil 12 and the second excitation coil 13
It mutually insulate and does not interfere with each other, the first, second excitation coil can be completely covered for the projection of scale matrix 11, and scale matrix 11 is thickness
Non-magnetic matrix of the degree equal to 2mm, is formed using ceramic material；The rectangular wave coiling in X direction of first excitation coil 12,
The amplitude of the rectangular wave is L1, period W1, duty ratio 0.5, length N1W1；Second excitation coil 13 is rectangular along Y-direction
The amplitude of wave coiling, the rectangular wave is L2, period W2, duty ratio 0.5, length N2W2；Wherein, L1=N2W2, L2=
N1W1, N1Indicate the rectangular wave periodicity of the first excitation coil, N2Indicate the rectangular wave periodicity of the second excitation coil, second swashs
The initial position for encouraging coil 13 is aligned with the initial position of the first excitation coil 12 on the direction of scale matrix 11；This
W in embodiment1=W2、N1=N2, i.e. the rectangle of the rectangle wave period, amplitude and the second excitation coil 13 of the first excitation coil 12
Wave period, amplitude are equal.In addition, the rectangle wave period W of the first excitation coil 121The second excitation coil 13 can not also be equal to
Rectangle wave period W2, the rectangle wave amplitude L of the first excitation coil 121The rectangle wave amplitude of the second excitation coil 13 can not also be equal to
Value L2, do not influence measurement result.
Dynamic ruler 2 include dynamic ruler matrix 21, be arranged in the same wiring layer of 21 face scale one side of dynamic ruler matrix first
It induction coil 22, the second induction coil 23, third induction coil 24, the 4th induction coil 25 and is located at dynamic under the wiring layer
The first, second, third, fourth induction coil can be completely covered for the projection of ruler insulating layer 26, dynamic ruler matrix 21, move ruler matrix 21
It is equal to the non-magnetic matrix of 2mm for thickness, is formed using ceramic material.First induction coil 22 is W along the period1CurveCoiling forms the first induction coil coiling track, wherein i1Successively
Value 0 is to j1All integers in -1, j1For integer andA1Indicate the amplitude of the first induction coil coiling track,
And A1< L1, j in the present embodiment1=3, then i1Value 0,1,2 successively；The coiling track of second induction coil 23 is the first induction
It moves in X direction coil-winding trackCurve afterwards, wherein m1For integer and j1≤m1< N1-j1, the present embodiment
Middle m1=3, then the coiling track of the second induction coil 23 is that the first induction coil coiling track moves in X directionAfterwards
Curve.Third induction coil 24 is W along the period2CurveAround
System forms third induction coil coiling track, wherein i2Value 0 is to j successively2All integers in -1, j2For integer andA2Indicate the amplitude of third induction coil coiling track, and A2< L2, A in the present embodiment1=A2、j2=3, then i2
Value 0,1,2 successively；The coiling track of 4th induction coil 25 is that third induction coil coiling track is moved along Y-directionCurve afterwards, wherein m2For integer and j2≤m2< N2-j2, m in the present embodiment2=3, then the 4th induction coil
25 coiling track is that third induction coil coiling track is moved along Y-directionCurve afterwards.First induction coil 22,
Second induction coil 23 is parallel with 12 face of the first excitation coil, and third induction coil 24, the 4th induction coil 25 and second swash
It is parallel to encourage 13 face of coil.
Sinusoidal excitation current is passed through in first excitation coil 12 of scale 1 (to add at the both ends of the first excitation coil 12
Pumping signal u1=Um1sinω1T), sinusoidal excitation current is passed through in the second excitation coil 13 (i.e. in the second excitation coil 13
Both ends add pumping signal u2=Um2sinω2T), when relative motion occurs for dynamic ruler 2 and scale 1, the first induction coil 22, the
Two induction coils 23 are moved relative to the first excitation coil 12, and third induction coil 24, the 4th induction coil 25 are relative to second
Excitation coil 13 moves,
The magnetic flux of production (1) in first induction coil 22：
The magnetic flux of production (2) in second induction coil 23：
The magnetic flux of production (3) in third induction coil 24：
The magnetic flux of production (4) in 4th induction coil 25：
First induction coil 22 is by the inductive signal of output type (5)：
Second induction coil 23 is by the inductive signal of output type (6)：
Third induction coil 24 is by the inductive signal of output type (7)：
4th induction coil 25 is by the inductive signal of output type (8)：
By e1By 90 ° of phase-shift circuit phase shift, then with e2Superposition exports X to travelling wave signal exFor：
By e3By 90 ° of phase-shift circuit phase shift, then with e4Superposition, output Y-direction travelling wave signal eyFor：
Wherein：Um1For the amplitude of the pumping signal of the first excitation coil, Um2For the width of the pumping signal of the second excitation coil
Value, ω1For the frequency of the pumping signal of the first excitation coil, ω2For the frequency of the pumping signal of the second excitation coil, k1、k2For
Proportionality coefficient, kx、kyFor potential induction coefficient,X is 2 opposite scale 1 of dynamic ruler in the side X
To straight-line displacement, y is the straight-line displacement of the opposite scale of dynamic ruler 21 in the Y direction.
As shown in figure 5, with scale 1 relative motion occurs for dynamic ruler 2, the phase angle of inductive signal changes generating period,
Dynamic ruler 2 moves a pole span relative to scale 1, and the phase angle of inductive signal is (i.e. in formula (9), formula (10)) become
Change a cycle.By X to travelling wave signal ex, Y-direction travelling wave signal eyRespectively with the fixed same frequency reference signal u of phasex、uyIt connects
Enter shaping circuit processing, be converted to and be sent into signal processing module after square-wave signal and carry out than phase, phase difference by interpolation high frequency when
Clock number indicates, straight-line displacement of the opposite scale 1 of dynamic ruler 2 in X-direction and Y-direction is can be obtained after conversion.
Claims (3)
1. grating straight-line displacement sensor when a kind of single-column type two dimension, including scale (1) and face parallel with scale and there are gaps
Dynamic ruler (2), it is characterised in that：
The scale (1) includes scale matrix (11), the first excitation coil (12) for the dynamic ruler one side that is located at scale matrix face, is set
The second wiring layer (14) on the first excitation coil and the second excitation coil (13) being located in the second wiring layer (14)；Institute
The first excitation coil (12) rectangular wave coiling in X direction is stated, the amplitude of the rectangular wave is L1, period W1, duty ratio 0.5,
Length is N1W1；For second excitation coil (13) along the rectangular wave coiling of Y-direction, the amplitude of the rectangular wave is L2, the period be
W2, duty ratio 0.5, length N2W2；Wherein, L1=N2W2, L2=N1W1, N1Indicate the rectangle wave period of the first excitation coil
Number, N2Indicate the rectangular wave periodicity of the second excitation coil, initial position and the first excitation coil of the second excitation coil (13)
(12) initial position is aligned on the direction of scale matrix；
The dynamic ruler (2) includes dynamic ruler matrix (21) and is located at the first, second, third of dynamic ruler matrix face scale one side, the
Four induction coils (22,23,24,25)；First induction coil (22) is W along the period1CurveCoiling forms the first induction coil coiling track, wherein i1Successively
Value 0 is to j1All integers in -1, j1For integer andA1Indicate the amplitude of the first induction coil coiling track,
And A1< L1；The coiling track of second induction coil (23) is that the first induction coil coiling track moves in X directionCurve afterwards, wherein m1For integer and j1≤m1< N1-j1；The third induction coil (24) is W along the period2's
CurveCoiling forms third induction coil coiling track, wherein i2
Value 0 is to j successively2All integers in -1, j2For integer andA2Indicate the width of third induction coil coiling track
Value, and A2< L2；The coiling track of 4th induction coil (25) is that third induction coil coiling track is moved along Y-directionCurve afterwards, wherein m2For integer and j2≤m2< N2-j2；First, second induction coil (22,23) and first
Excitation coil (12) face is parallel, and third, the 4th induction coil (24,25) are parallel with the second excitation coil (13) face；
The scale (1) further includes the scale insulating layer (15) being located on the second wiring layer (14)；The dynamic ruler (2) further includes
The dynamic ruler insulating layer (26) being located under the first, second, third, fourth induction coil (22,23,24,25)；
It is passed through sinusoidal excitation current in the first, second excitation coil (12,13) of scale (1), when dynamic ruler (2) and scale (1) are sent out
When raw relative motion, the first, second, third, fourth induction coil (22,23,24,25) exports four road feel induction signals, by first
Then 90 ° of the inductive signal phase shift of induction coil (22) output is superimposed shape with the inductive signal of the second induction coil (23) output
At X to travelling wave signal, 90 ° of the inductive signal phase shift that third induction coil (24) is exported, then with the 4th induction coil (25)
The inductive signal of output is superimposed to form Y-direction travelling wave signal, which is carried out with same frequency reference signal respectively to, Y-direction travelling wave signal
Than phase, phase difference is indicated by the high-frequency clock pulse number of interpolation, and dynamic ruler is obtained after conversion with respect to scale in X-direction and the side Y
To straight-line displacement.
2. grating straight-line displacement sensor when single-column type two dimension according to claim 1, it is characterised in that：The W1=W2、N1
=N2、A1=A2, the j1、j2Value is 3, m1、m2Value is 3, and the coiling track of second induction coil (23) is first
Induction coil coiling track moves in X directionCurve afterwards；The coiling track of 4th induction coil (25) is
Third induction coil coiling track is moved along Y-directionCurve afterwards.
3. grating straight-line displacement sensor when single-column type two dimension according to claim 1 or 2, it is characterised in that：The X is to row
After wave signal is shaped to square wave with the shaped circuit of same frequency reference signal, then carry out than phase；The Y-direction travelling wave signal and same frequency
After the shaped circuit of rate reference signal is shaped to square wave, then carry out than phase.
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| CN109631735B (en) * | 2019-01-04 | 2020-09-11 | 重庆理工大学 | Planar two-dimensional time grating displacement sensor based on alternating electric field |
| CN109631736B (en) * | 2019-01-04 | 2020-09-15 | 重庆理工大学 | Columnar two-dimensional time grating displacement sensor based on alternating electric field |
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| CN103278082A (en) * | 2013-06-20 | 2013-09-04 | 重庆理工大学 | Plane chord linear displacement sensor |
| CN104019734A (en) * | 2014-06-19 | 2014-09-03 | 重庆理工大学 | Planar two-dimensional time grating displacement sensor |
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| JPS52150059A (en) * | 1976-06-08 | 1977-12-13 | Mitsubishi Electric Corp | Length measuring apparatus |
| DE102013218768A1 (en) * | 2013-09-19 | 2015-03-19 | Dr. Johannes Heidenhain Gmbh | Inductive position measuring device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103278082A (en) * | 2013-06-20 | 2013-09-04 | 重庆理工大学 | Plane chord linear displacement sensor |
| CN104019734A (en) * | 2014-06-19 | 2014-09-03 | 重庆理工大学 | Planar two-dimensional time grating displacement sensor |
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| 基于二维细分技术的时栅信号处理系统设计;王淑娴等;《计算机测量与控制》;20150531;第23卷(第5期);第1721-1723页 * |
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