CN102589405A - Motor rotor displacement measurement method - Google Patents

Motor rotor displacement measurement method Download PDF

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CN102589405A
CN102589405A CN2012100363788A CN201210036378A CN102589405A CN 102589405 A CN102589405 A CN 102589405A CN 2012100363788 A CN2012100363788 A CN 2012100363788A CN 201210036378 A CN201210036378 A CN 201210036378A CN 102589405 A CN102589405 A CN 102589405A
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sinusoidal
cosine
pulse signal
measurement
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CN102589405B (en
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胡金春
朱煜
尹文生
陈龙敏
杨开明
张鸣
徐登峰
穆海华
胡楚雄
刘召
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Tsinghua University
U Precision Tech Co Ltd
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Abstract

The invention discloses a motor rotor displacement measurement method. The method comprises the following steps of: arranging two magnetic induction intensity sensors on a rotor along a moving direction of the rotor, wherein a distance between the two sensors is 1/4 of a polar distance of a magnetic field; quantizing sampled signals of the two sensors through a signal processing circuit and performing n frequency multiplication operation after amplitude normalization; and performing zero-crossing point detection, generating a group of orthogonal pulse signals, and detecting the number of pulses of the pulse signals and phase difference of the group of orthogonal pulse signals. The polar distance tau of the magnetic field is subdivided to realize high-precision motor rotor displacement measurement according to sinusoidal magnetic field information of a magnetic steel array of the motor rotor in the moving direction of the rotor directly. By the method, the problems that a calculation method is complex, hardware is inconvenient to mount and a measurement device is high in cost due to the high-precision requirement of the motor rotor displacement measurement can be solved.

Description

A kind of electric mover displacement measurement method
Technical field
The present invention relates to a kind of one type of mover displacement measurement method such as dynamic coil linear motor, electric rotating machine, particularly a kind of segmentation Measurement Algorithm of long stroke of being used for motor of sinusoidal magnetic field model.
Background technology
The precisely and dynamically measuring technology is to realize the important step of dynamic accuracy control.In conventional application, sensors such as grating chi, laser interferometer, magnetic railings ruler are as the measuring method of the straight line and the angle displacement of dynamic coil linear motor, electric rotating machine.In the patent 200720002447.8, described and utilized stop position to detect scrambler to carry out position probing, in the patent 200610033455, described utilize grating encoder carry out the position in real time feedback position.These sensors need be arranged devices such as the special magnetic field that produces the displacement signal characteristic, grid on motor stator, on mover, arrange the electronic processing unit device that receives the displacement signal characteristic; Perhaps on mover, arrange to produce displacement signal characteristic device specially, and on stator arranging electronic processing unit device.Special generation displacement signal characteristic device and two kinds of devices of electronic processing unit device have increased the structural complexity of sensing system.Though these sensor measurement precision are higher in addition, comparatively complicated circuitry and optical device and cost are higher.And in the actual motion process, if directly carry out position measurement with Hall element, all can there be noise in measuring-signal itself and sampling process and cause the measuring accuracy loss.
For the such object of motor, its magnetic field itself is exactly the important channel that displacement signal detects.If can utilize the Magnetic Field of motor itself, realize the high precision position shift measurement, can reduce the complicacy of sensor installation and signal.Similar patent ZL201010034274.4 need find the solution the complex nonlinear equation, and this uses industrial real-time and brings difficulty; The signal to noise ratio (S/N ratio) that the measurement result of other similar patent describing methods is had relatively high expectations to measuring-signal itself proposes high requests such as complicacy, low noise to realizing circuit.Therefore, a kind of sensor that can reduce is installed the complicacy with signal, can realize simultaneously again that precision is high, insensitive to the original signal quality, signal Processing simply fast measuring method demand proposition urgently.
Summary of the invention
The object of the present invention is to provide a kind of measuring method of electric mover displacement, utilize the Magnetic Field of motor itself, realize the high precision position shift measurement of electric mover, need not special transfer algorithm, can directly export industrial control field orthogonal intersection code signal commonly used.
In order to achieve the above object, the technical scheme that the present invention adopted is following:
1) in the sinusoidal magnetic field that the motor stator magnetic steel array forms, on mover, arranges two magnetic induction density sensors: sinusoidal sensor and cosine sensor along mover direction of motion; Said sinusoidal sensor and cosine sensor are at a distance of τ/4; Said τ is the field pole distance of motor sinusoidal magnetic field, and the sampled signal of said sinusoidal sensor is quantized through signal processing circuit and carries out obtaining sinusoidal measurement signal S after amplitude normalization is handled 0, the sampled signal of said cosine sensor is quantized through said signal processing circuit and carries out obtaining cosine measuring-signal C after amplitude normalization is handled 0
2) through said signal processing circuit (8) with said sinusoidal measurement signal S 0With cosine measuring-signal C 0Do n frequency multiplication computing, promptly 2 nThe segmentation computing:
S 1=2*S 0*C 0,C 1=C 0*C 0-S 0*S 0
S 2=2*S 1*C 1,C 2=C 1*C 1-S 1*S 1
...,
S n=2*S n-1*C n-1,C n=C n-1*C n-1-S n-1*S n-1
Obtain sinusoidal segmentation signal S nWith cosine segmentation signal C n, wherein: S 1, C 1, S 2, C 2... S N-1And C N-1Be intermediate variable, n=1,2,3 ...;
3) to step 2) middle said sinusoidal segmentation signal S through obtaining after n the iterative computation nWith cosine segmentation signal C nCarry out zero crossing and detect, generate 1 group of orthogonal measuring pulse signal: sinusoidal pulse signal A of measurement and cosine are measured pulse signal B; Said sinusoidal segmentation signal S n>0, the then said sinusoidal pulse signal A output high level of measuring; Said sinusoidal segmentation signal S n<0, the then said sinusoidal pulse signal A output low level of measuring; Said cosine segmentation signal C n>0, then said cosine is measured pulse signal B output high level; Said cosine segmentation signal C n<0, then said cosine is measured pulse signal B output low level;
4) detect the umber of pulse that said sinusoidal pulse signal A of measurement or cosine are measured pulse signal B; And the sinusoidal phase differential of measuring pulse signal A and cosine measurement pulse signal B; Described sinusoidal pulse signal A of measurement or cosine are measured the pulse of pulse signal B and are represented a displacement resolution
Figure BDA0000136380950000021
n=1; 2; 3 ..., the phase place that the sinusoidal phase lag of measuring pulse signal A is measured pulse signal B in cosine is represented positive-displacement; The sinusoidal phase place of measuring pulse signal A falls and representes reverse displacement in the phase place of cosine measurement pulse signal B in advance, thereby realizes the displacement measurement of electric mover.
In the technique scheme, through after n the frequency multiplication computing, n=1,2,3 ..., described sinusoidal segmentation signal S nWith cosine segmentation signal C nCycle do Along with the increase of frequency multiplication operation times n, the said cycle
Figure BDA0000136380950000023
To progressively diminish.
The invention is characterized in step 2) in definite method of frequency multiplication operation times n following:
If B MThe magnetic induction density amplitude of the sinusoidal magnetic field that forms for said motor stator magnetic steel array, v xBe the sensor measurement noise, noise level does For guaranteeing to detect smoothly zero crossing, maximum frequency multiplication operation times n does
Figure BDA0000136380950000032
Step 2 of the present invention) the said frequency multiplication operation times n in is different, can realize different segmentation measurements.
Adopt above technical scheme can make that the present invention obtains beneficial effect; Promptly need not arrange special generation displacement signal feature device; Directly utilize the sinusoidal magnetic field information of motor stator; Reduced the structural complexity of sensing system; And, algorithm obtains more easily to measure fast because only relating to simple operation; Do not need simultaneously expensive electronic processing circuit and optics to make cost be minimized, guaranteeing to detect under the situation of said zero crossing, ensure and realize high accuracy mover displacement measurement.
Description of drawings
Fig. 1 is that to adopt dynamic coil linear motor be the mover displacement measuring device one-piece construction synoptic diagram of example in the present invention.
Fig. 2 a, 2b, 2c, 2d are that the present invention is respectively the synoptic diagram of sine and cosine measuring-signal, sine and cosine subdividing signal and the sine and cosine measurement pulse signal of example with frequency multiplication operation times n=4 and n=8.
The sine and cosine that Fig. 3 a, 3b are is example with two kinds of different situations of mover displacement in the course of work of the present invention is measured the synoptic diagram of pulse signal.
Wherein, 1-stator; The 2-magnetic steel array; The 3-sinusoidal sensor; 4-cosine sensor; The 5-coil; The 6-mover; The 7-signal wire; The 8-signal processing circuit.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further explained.
Fig. 1 is the mounting structure synoptic diagram of sensor in the mover displacement measurement method of example for the present invention adopts dynamic coil linear motor; Comprise dynamic coil linear motor, sinusoidal sensor 3, cosine sensor 4 and signal processing circuit 8; Said dynamic coil linear motor comprises the stator 1 and the mover 6 that is provided with coil 5 with matching that is provided with magnetic steel array 2, and said signal processing circuit 8 links to each other with cosine sensor 4 with sinusoidal sensor 3 through signal wire 7.
A kind of electric mover displacement measurement method provided by the invention, this method may further comprise the steps:
1) in the sinusoidal magnetic field that motor stator 1 magnetic steel array forms, on mover 6, arranges two magnetic induction density sensors: sinusoidal sensor 3 and cosine sensor 4 along mover direction of motion; Said sinusoidal sensor and cosine sensor are at a distance of τ/4; Said τ is the field pole distance of motor sinusoidal magnetic field, and the sampled signal of said sinusoidal sensor is quantized through signal processing circuit 8 and carries out obtaining sinusoidal measurement signal S after amplitude normalization is handled 0, the sampled signal of said cosine sensor is quantized through said signal processing circuit 8 and carries out obtaining cosine measuring-signal C after amplitude normalization is handled 0
2) through said signal processing circuit 8 with said sinusoidal measurement signal S 0With cosine measuring-signal C 0Do n frequency multiplication computing:
S 1=2*S 0*C 0,C 1=C 0*C 0-S 0*S 0
S 2=2*S 1*C 1,C 2=C 1*C 1-S 1*S 1
...,
S n=2*S n-1*C n-1,C n=C n-1*C n-1-S n-1*S n-1
Obtain sinusoidal segmentation signal S nWith cosine segmentation signal C n, wherein: S 1, C 1, S 2, C 2... S N-1And C N-1Be intermediate variable, n=1,2,3 ...;
3) to said sinusoidal segmentation signal S nWith cosine segmentation signal C nCarry out zero crossing and detect, generate 1 group of orthogonal measuring pulse signal: sinusoidal pulse signal A of measurement and cosine are measured pulse signal B; Said sinusoidal segmentation signal S n>0, the then said sinusoidal pulse signal A output high level of measuring; Said sinusoidal segmentation signal S n<0, the then said sinusoidal pulse signal A output low level of measuring; Said cosine segmentation signal C n>0, then said cosine is measured pulse signal B output high level; Said cosine segmentation signal C n<0, then said cosine is measured pulse signal B output low level;
4) detect the umber of pulse that said sinusoidal pulse signal A of measurement or cosine are measured pulse signal B; And the said sinusoidal phase differential of measuring pulse signal A and said cosine measurement pulse signal B; Said sinusoidal pulse signal A of measurement or cosine are measured the pulse of pulse signal B and are represented a displacement resolution
Figure BDA0000136380950000041
n=1; 2; 3; ...; The phase place that the phase lag of said sinusoidal measurement pulse signal A is measured pulse signal B in said cosine is represented positive-displacement, and the said sinusoidal phase place of measuring pulse signal A is represented reverse displacement in the phase place of said cosine measurement pulse signal B in advance, thereby realizes the displacement measurement of electric mover.
Through after n the frequency multiplication computing, described sinusoidal segmentation signal S nWith cosine segmentation signal C nCycle do
Figure BDA0000136380950000042
Along with the increase of frequency multiplication operation times n, the said cycle
Figure BDA0000136380950000043
To progressively diminish.
Definite method of said frequency multiplication operation times n is following:
If B MThe magnetic induction density amplitude of the sinusoidal magnetic field that forms for said motor stator magnetic steel array, v xBe the sensor measurement noise, noise level does
Figure BDA0000136380950000044
For guaranteeing to detect smoothly zero crossing, maximum space frequency multiplication operation times n does n = [ Log 2 ( B M v x ) - 3 ] .
Said frequency multiplication operation times n is different, can realize different segmentation measurements.
Embodiment:
With reference to figure 1,3, the displacement measurement process of demonstration mover 6 is so that understand the present invention better.
Said field pole is apart from τ=35.35mm, and described sinusoidal sensor and cosine sensor are 8.8375mm at a distance of τ/4.Adopt 12 bit AD samples, noise level
Figure BDA0000136380950000051
calculates n=8 according to maximum frequency multiplication operation times computing formula.
1) according to aforementioned calculation; In the sinusoidal magnetic field that dynamic coil linear motor magnetic steel of stator array 2 forms, on mover, arranges two magnetic induction density sensors: i.e. sinusoidal sensor 3 and cosine sensor 4 along mover direction of motion; Said τ is the field pole distance of motor sinusoidal magnetic field; Said sinusoidal sensor 3 is 8.8375mm with cosine sensor 4 at a distance of τ/4, and the sampled signal of said sinusoidal sensor 3 is quantized through signal processing circuit 8 and carries out obtaining sinusoidal measurement signal S after amplitude normalization is handled 0, the sampled signal of said cosine sensor 4 is quantized through signal processing circuit (8) and carries out obtaining cosine measuring-signal C after amplitude normalization is handled 0
2) through 8 couples of said sinusoidal measurement signal S of said signal processing circuit 0With cosine measuring-signal C 0Do n i.e. 8 frequency multiplication computing, promptly 2 8The segmentation computing:
S 1=2*S 0*C 0,C 1=C 0*C 0-S 0*S 0
S 2=2*S 1*C 1,C 2=C 1*C 1-S 1*S 1
S 3=2*S 2*C 2,C 3=C 2*C 2-S 2*S 2
S 4=2*S 3*C 3,C 4=C 3*C 3-S 3*S 3
S 5=2*S 4*C 4,C 5=C 4*C 4-S 4*S 4
S 6=2*S 5*C 5,C 6=C 5*C 5-S 5*S 5
S 7=2*S 6*C 6,C 7=C 6*C 6-S 6*S 6
S 8=2*S 7*C 7,C 8=C 7*C 7-S 7*S 7
Obtain sinusoidal segmentation signal S 8With cosine segmentation signal C 8, wherein: S 1, C 1, S 2, C 2, S 3, C 3, S 4, C 4, S 5, C 5, S 6, C 6, S 7And C 7Be intermediate variable;
3) with reference to figure 2c, 2d; Fig. 2 c, 2d are that to be respectively with n=8 be the sinusoidal measurement signal of example, sinusoidal segmentation signal, the sinusoidal synoptic diagram of pulse signal and the synoptic diagram that cosine measuring-signal, cosine segmentation signal, cosine are measured pulse signal measured, with step 2) in segment signal S through the sine that promptly obtains after 8 iterative computation for n time 8With cosine segmentation signal C 8Carry out zero crossing and detect, generate 1 group of orthogonal measuring pulse signal: sinusoidal pulse signal A of measurement and cosine are measured pulse signal B; Described sinusoidal segmentation signal S 8>0, the then sinusoidal pulse signal A output high level of measuring, sinusoidal segmentation signal S 8<0, the then sinusoidal pulse signal A output low level of measuring; Described cosine segmentation signal C 8>0, then cosine is measured pulse signal B output high level, cosine segmentation signal C 8<0, then cosine is measured pulse signal B output low level.
4) with reference to figure 3a, 3b; It is 3 from 0 moment meter that Fig. 3 a detects in the sinusoidal constantly umber of pulse of measuring pulse signal A of t; The shift length of representative ; Sine is measured the phase lag of pulse signal A and is represented positive-displacement in the phase place of cosine measurement pulse signal B, so Fig. 3 a representes t with respect to 0 displacement constantly is+0.4143mm constantly; Fig. 3 b detects and counts constantly from 0 in the umber of pulse of t cosine measurement constantly pulse signal B is 4; The shift length of representative ; The phase place of sinusoidal measurement pulse signal A is represented reverse displacement in the phase place of cosine measurement pulse signal B in advance, so Fig. 3 b representes t with respect to 0 displacement constantly is-0.5523mm constantly.
Through above-mentioned steps, directly utilize the sinusoidal magnetic field information of motor itself, reduced system complexity; Hardware is easy for installation; Computing method are simply quick, do not need the high optical device of cost, practiced thrift cost; Guaranteeing to detect under the situation of zero crossing, ensureing and realize high resolving power electric mover displacement measurement.

Claims (2)

1. an electric mover displacement measurement method is characterized in that, said method comprises:
1) in the sinusoidal magnetic field that motor stator (1) magnetic steel array forms, goes up two magnetic induction density sensors of layout at mover (6): sinusoidal sensor (3) and cosine sensor (4) along mover direction of motion; Said sinusoidal sensor and cosine sensor are at a distance of τ/4; Said τ is the field pole distance of motor sinusoidal magnetic field, and the sampled signal of said sinusoidal sensor is quantized through signal processing circuit (8) and carries out obtaining sinusoidal measurement signal S after amplitude normalization is handled 0, the sampled signal of said cosine sensor is quantized through said signal processing circuit (8) and carries out obtaining cosine measuring-signal C after amplitude normalization is handled 0
2) through said signal processing circuit (8) with said sinusoidal measurement signal S 0With cosine measuring-signal C 0Do n frequency multiplication computing:
S 1=2*S 0*C 0,C 1=C 0*C 0-S 0*S 0
S 2=2*S 1*C 1,C 2=C 1*C 1-S 1*S 1
...,
S n=2*S n-1*C n-1,C n=C n-1*C n-1-S n-1*S n-1
Obtain sinusoidal segmentation signal S nWith cosine segmentation signal C n, wherein: S 1, C 1, S 2, C 2... S N-1And C N-1Be intermediate variable, n=1,2,3 ...;
3) to said sinusoidal segmentation signal S nWith cosine segmentation signal C nCarry out zero crossing and detect, generate one group of orthogonal measuring pulse signal: sinusoidal pulse signal A of measurement and cosine are measured pulse signal B; Said sinusoidal segmentation signal S n>0, the then said sinusoidal pulse signal A output high level of measuring; Said sinusoidal segmentation signal S n<0, the then said sinusoidal pulse signal A output low level of measuring; Said cosine segmentation signal C n>0, then said cosine is measured pulse signal B output high level; Said cosine segmentation signal C n<0, then said cosine is measured pulse signal B output low level;
4) detect the umber of pulse that said sinusoidal pulse signal A of measurement or cosine are measured pulse signal B; And the said sinusoidal phase differential of measuring pulse signal A and said cosine measurement pulse signal B; Said sinusoidal pulse signal A of measurement or cosine are measured the pulse of pulse signal B and are represented a displacement resolution
Figure FDA0000136380940000011
n=1; 2; 3; ...; The phase place that the phase lag of said sinusoidal measurement pulse signal A is measured pulse signal B in said cosine is represented positive-displacement, and the said sinusoidal phase place of measuring pulse signal A is represented reverse displacement in the phase place of said cosine measurement pulse signal B in advance, thereby realizes the displacement measurement of electric mover.
2. a kind of electric mover displacement measurement method according to claim 1 is characterized in that step 2) in definite method of frequency multiplication operation times n following:
If B MThe magnetic induction density amplitude of the sinusoidal magnetic field that forms for said motor stator magnetic steel array, v xBe the sensor measurement noise, noise level does
Figure FDA0000136380940000021
For guaranteeing to detect smoothly zero crossing, maximum frequency multiplication operation times n does
Figure FDA0000136380940000022
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CN106849520A (en) * 2016-11-29 2017-06-13 广东德康威尔科技有限公司 A kind of linear electric motors track encoder, linear electric motors and its method for detecting position
CN107024170A (en) * 2017-04-01 2017-08-08 清华大学 A kind of maglev planar motor mover hoverheight measuring system and method
CN107063064A (en) * 2017-04-01 2017-08-18 清华大学 A kind of Three Degree Of Freedom position measuring method of large area levitation planar motor mover
CN107152904A (en) * 2016-03-02 2017-09-12 深圳市祈飞科技有限公司 A kind of magnetic railings ruler digital readout system
CN107576295A (en) * 2017-09-21 2018-01-12 北京机械设备研究所 A kind of electric mover high-speed straight-line displacement sensing detection means
CN108233816A (en) * 2017-12-20 2018-06-29 湖南省军民融合装备技术创新中心 A kind of method and apparatus for the processing of rotor position signal synthesis
CN109470133A (en) * 2018-11-05 2019-03-15 浙江大学 Electrostatic self energizing strains grid sensor
CN109708673A (en) * 2019-01-17 2019-05-03 北京金钢科技有限公司 Separate type magnetic coder based on pattern
CN109916287A (en) * 2019-01-30 2019-06-21 西安维控自动化科技有限公司 A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction
CN110530250A (en) * 2019-09-24 2019-12-03 天津捷力自动化设备有限公司 A kind of novel sense grid and its working method for displacement measurement
CN113029211A (en) * 2021-03-25 2021-06-25 浙江锐鹰传感技术有限公司 Implementation method of high-precision encoder with cable-free rotor
CN115930763A (en) * 2022-12-08 2023-04-07 楚瑞智能科技(苏州)有限公司 Displacement measurement method and device based on magnetic grid ruler

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CN107152904A (en) * 2016-03-02 2017-09-12 深圳市祈飞科技有限公司 A kind of magnetic railings ruler digital readout system
CN106849520A (en) * 2016-11-29 2017-06-13 广东德康威尔科技有限公司 A kind of linear electric motors track encoder, linear electric motors and its method for detecting position
CN107024170A (en) * 2017-04-01 2017-08-08 清华大学 A kind of maglev planar motor mover hoverheight measuring system and method
CN107063064A (en) * 2017-04-01 2017-08-18 清华大学 A kind of Three Degree Of Freedom position measuring method of large area levitation planar motor mover
CN107063064B (en) * 2017-04-01 2018-11-30 清华大学 A kind of Three Degree Of Freedom position measurement method of large area levitation planar motor mover
CN107576295A (en) * 2017-09-21 2018-01-12 北京机械设备研究所 A kind of electric mover high-speed straight-line displacement sensing detection means
CN108233816A (en) * 2017-12-20 2018-06-29 湖南省军民融合装备技术创新中心 A kind of method and apparatus for the processing of rotor position signal synthesis
CN109470133A (en) * 2018-11-05 2019-03-15 浙江大学 Electrostatic self energizing strains grid sensor
CN109708673A (en) * 2019-01-17 2019-05-03 北京金钢科技有限公司 Separate type magnetic coder based on pattern
CN109916287A (en) * 2019-01-30 2019-06-21 西安维控自动化科技有限公司 A kind of in-plane displancement sensor, displacement detecting method and system based on magnetic induction
CN109916287B (en) * 2019-01-30 2020-11-27 西安维控自动化科技有限公司 Planar displacement sensor based on magnetic induction, displacement detection method and system
CN110530250A (en) * 2019-09-24 2019-12-03 天津捷力自动化设备有限公司 A kind of novel sense grid and its working method for displacement measurement
CN113029211A (en) * 2021-03-25 2021-06-25 浙江锐鹰传感技术有限公司 Implementation method of high-precision encoder with cable-free rotor
CN113029211B (en) * 2021-03-25 2021-11-19 浙江锐鹰传感技术有限公司 Implementation method of high-precision encoder with cable-free rotor
CN115930763A (en) * 2022-12-08 2023-04-07 楚瑞智能科技(苏州)有限公司 Displacement measurement method and device based on magnetic grid ruler
CN115930763B (en) * 2022-12-08 2023-12-05 楚瑞智能科技(苏州)有限公司 Displacement measurement method and device based on magnetic grating ruler

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