CN205846966U - One high accuracy sleeping the standing of high acceleration combines motion platform - Google Patents
One high accuracy sleeping the standing of high acceleration combines motion platform Download PDFInfo
- Publication number
- CN205846966U CN205846966U CN201620689976.9U CN201620689976U CN205846966U CN 205846966 U CN205846966 U CN 205846966U CN 201620689976 U CN201620689976 U CN 201620689976U CN 205846966 U CN205846966 U CN 205846966U
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- carrying platform
- electric motors
- platform
- linear electric
- high accuracy
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Abstract
The utility model discloses one high accuracy sleeping the standing of high acceleration and combine motion platform, including base, carrying platform and at least two the first linear electric motors, wherein, carrying platform is arranged on base with reciprocally moving along a straight line；At least two the first linear electric motors are for jointly driving carrying platform, at least one of which is positioned at the first end of carrying platform movement locus, remaining is positioned at the second end of carrying platform movement locus, and carrying platform movement locus the first end at least horizontal linear motor, the second end at least vertical straight line motor；Above-mentioned motion platform simultaneously drives carrying platform by least two the first linear electric motors from two ends, carrying platform can be made to obtain more high acceleration, faster reach required speed, its movement velocity can be increased simultaneously, by being divided into the horizontal of carrying platform two ends and vertical straight line motor, carrying platform can be made in horizontal plane and vertical plane to keep dynamic equilibrium, contribute to improving its dynamic property, improve reliability and stability.
Description
Technical field
This utility model relates to motion platform technical field, puts down particularly to the sleeping vertical combination motion of the highest acceleration of one
Platform.
Background technology
Along with the continuous progress in science and technology, need motion platform the most accurate, this driving structure to motion platform
Having higher requirement, and existing motion platform mainly has two kinds of type of drive, a kind of is to use traditional electric rotating machine
The mode driven, this type of drive is limited by factors such as machining accuracy, inertia, rigidity, abrasions, it is impossible to meet required height
Speed and high-precision requirement；Another kind is to drive motion platform to move, relative to above-mentioned electric rotating by linear electric motors
Machine type of drive, eliminates for by a series of drive mechanisms that convert rotational motion is linear motion, response speed, operation speed
Degree and precision have all had bigger lifting, improve the speed of motion platform under the above constitution, it is necessary to increase electric current, this meeting
Cause linear electric motors caloric value to rise, but restricted by problems such as linear electric motors heat radiation itself and structure designs, flat in motion
After the speed of platform arrives to a certain degree, continue to lift up, it will cause linear electric motors overheated, be easily caused linear electric motors and damage, very
To causing security incident, and when load, owing to frame for movement is asymmetric, stress point is positioned at the side of motion platform, causes fortune
Moving platform dynamic property, reliability and less stable, limit the development of high-speed motion platform.
Therefore, how a kind of motion platform is provided, improves its speed of service, improve its dynamic property, improve reliability and
Stability, becomes the important technological problems that those skilled in the art are urgently to be resolved hurrily.
Utility model content
In view of this, this utility model provides one high accuracy sleeping the standing of high acceleration and combines motion platform, to reach to improve
Its speed of service, improves its dynamic property, improves reliability and the purpose of stability.
For achieving the above object, the following technical scheme of this utility model offer:
One high accuracy sleeping the standing of high acceleration combines motion platform, including:
Base；
Reciprocally it is arranged at the carrying platform on described base linear motion；
For jointly driving at least two first linear electric motors of described carrying platform motion, described at least two, first is straight
At least first end being positioned at described carrying platform movement locus in line motor, remaining described first linear electric motors is positioned at
Second end of described carrying platform movement locus, and it is positioned at described first straight-line electric of described carrying platform movement locus the first end
In machine at least one be horizontal linear motor, be positioned at described first linear electric motors of described carrying platform movement locus the second end
In at least one be vertical straight line motor.
Described first linear electric motors being preferably located at described carrying platform movement locus the first end are horizontal linear electricity
Machine, described first linear electric motors being positioned at described carrying platform movement locus the second end are vertical straight line motor.
Preferably, described base being additionally provided with anticollision device, collision-prevention device, described anticollision device, collision-prevention device includes mounting seat and elastic component, institute
State mounting seat between described carrying platform and described first linear electric motors also on the position of described first linear electric motors,
Described elastic component is arranged at described mounting seat towards on the surface of described carrying platform.
Preferably, during the primary of described first linear electric motors is arranged at described base and described carrying platform
On, secondary is arranged on another in described base and described carrying platform.
Preferably, also include being arranged at the workbench on described carrying platform with reciprocally moving along a straight line and for driving
Second linear electric motors of described working table movement.
Preferably, the primary of described second linear electric motors is arranged in described base and described carrying platform,
Secondary is arranged on described workbench, or, the secondary of described second linear electric motors is arranged at described base and described carrying is put down
On in platform one, primary is arranged on described workbench.
Preferably, the primary outer of primary outer and described second linear electric motors of described first linear electric motors is all covered with magnetic
Shielding case body.
Preferably, described magnetic shield casing offers louvre.
Preferably, the first displacement detector for detecting described carrying platform displacement is also included and for detecting
State the second displacement detector of worktable displacement.
Preferably, described first displacement detector includes the first scale grating and the first grating reading head, described
One scale grating is arranged in described base and described carrying platform, and described first grating reading head is arranged at institute
State in base and described carrying platform another on；Described second displacement detector includes the second scale grating and
Two grating reading heads, described second scale grating is arranged in described carrying platform and described workbench, described
Second grating reading head is arranged on another in described carrying platform and described workbench.
From technique scheme it can be seen that the high accuracy height that this utility model provides accelerates sleeping standing combines motion platform,
Including base, carrying platform and at least two the first linear electric motors, wherein, base acts primarily as support and carries its upper-part
Effect；Carrying platform is arranged on base with reciprocally moving along a straight line；At least two the first linear electric motors hold for common driving
Carrying platform moves, at least first end being positioned at carrying platform movement locus at least two the first linear electric motors, remaining
The first linear electric motors be positioned at the second end of carrying platform movement locus, and be positioned at the first of carrying platform movement locus the first end
In linear electric motors at least one be horizontal linear motor, be positioned in the first linear electric motors of carrying platform movement locus the second end
At least one is vertical straight line motor；
As can be seen here, the high accuracy height that this utility model provides accelerates sleeping standing and combines motion platform, moves at carrying platform
The two ends of track are respectively arranged with at least one first linear electric motors, simultaneously drive carrying platform motion from two ends, with existing skill
The structure that in art, single linear electric motors drive is compared, on the premise of inputting equal electric current, it is possible to make carrying platform obtain bigger
Acceleration, reach required speed faster, while increasing its movement velocity, it is to avoid linear electric motors are overheated；Carrying platform two
End all has a stress point, and the first end of carrying platform movement locus is provided with at least one horizontal linear motor, the second end
Be provided with at least one vertical straight line motor, by the cooperation of horizontal linear motor and vertical straight line motor can horizontal plane with
And in vertical plane, make carrying platform keep dynamic equilibrium, contribute to improving its dynamic property, improve reliability and stability.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiments more of the present utility model, for those of ordinary skill in the art, in the premise not paying creative work
Under, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 accelerates sleeping standing for the high accuracy height that this utility model embodiment provides and combines motion platform under a kind of visual angle
Structural representation；
Fig. 2 is the partial structurtes schematic diagram of Fig. 1；
Fig. 3 accelerates the sleeping vertical motion platform that combines under another kind of visual angle for the high accuracy height that this utility model embodiment provides
Structural representation.
Detailed description of the invention
This utility model provides one sleeping the standing of the highest acceleration and combines motion platform, to reach to improve its operation speed
Degree, improves its dynamic property, improves reliability and the purpose of stability.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
Sleeping the standing of high accuracy height acceleration that referring to Fig. 1-Fig. 3, Fig. 1 provides for this utility model embodiment combines motion platform
Structural representation under a kind of visual angle, Fig. 2 is the partial structurtes schematic diagram of Fig. 1, and Fig. 3 provides for this utility model embodiment
High accuracy is high accelerates the sleeping structural representation standing and combining motion platform under another kind of visual angle.
One high accuracy sleeping the standing of high acceleration that this utility model embodiment provides combines motion platform, including base 1, carrying
Platform 3 and at least two the first linear electric motors 2.
Wherein, base 1 acts primarily as the effect supporting and carrying its upper-part；Carrying platform 3 sets with reciprocally moving along a straight line
It is placed on base 1；At least two the first linear electric motors 2 drive carrying platform 3 to move for common, at least two the first straight-line electric
At least first end being positioned at carrying platform 3 movement locus in machine 2, remaining first linear electric motors 2 is positioned at carrying platform 3
Second end of movement locus, and be positioned in the first linear electric motors 2 of carrying platform 3 movement locus the first end at least one be sleeping
Formula linear electric motors, be positioned in the first linear electric motors 2 of carrying platform 3 movement locus the second end at least one for vertical straight line electricity
Machine.
Compared with prior art, the high accuracy height that this utility model embodiment provides accelerates sleeping standing and combines motion platform,
The two ends of carrying platform 3 movement locus are respectively arranged with at least one first linear electric motors 2, simultaneously drive carrying platform from two ends
3 motions, on the premise of inputting equal electric current, it is possible to make carrying platform 3 obtain bigger acceleration, reach required speed faster
Degree, while increasing its movement velocity, it is to avoid linear electric motors are overheated；All there is stress point at carrying platform 3 two ends, and flat in carrying
First end of platform 3 movement locus is provided with at least one horizontal linear motor, and the second end is provided with at least one vertical straight line electricity
Machine, can make carrying platform 3 protect by the cooperation of horizontal linear motor and vertical straight line motor in horizontal plane and vertical plane
Hold dynamic equilibrium, contribute to improving its dynamic property, improve reliability and stability.
Above-mentioned horizontal linear motor is the linear electric motors that primary and secondary is all parallel with base 1, and vertical linear electric motors
For the linear electric motors that primary and secondary is all vertical with base 1.
Owing to horizontal linear motor is different from vertical straight line electric machine structure, its attachment structure with carrying platform 3 is also
To change accordingly, therefore, to accelerate the sleeping vertical manufacture combining motion platform for the ease of high accuracy is high, be positioned at carrying platform
First linear electric motors 2 of 3 movement locus the first ends are horizontal linear motor, are positioned at carrying platform 3 movement locus the second end
First linear electric motors 2 are vertical straight line motor, and in the embodiment shown in fig. 1, carrying platform 3 movement locus the first end is arranged
Having a horizontal linear motor, the second end is provided with a vertical straight line motor.
Due to carrying platform 3 speed, once collide with linear electric motors, not only can cause linear electric motors and carrying
The damage of platform 3, produces bigger noise, is also easy to make the processing workpiece of carrying on carrying platform 3 be affected, therefore,
In this utility model embodiment, base 1 being additionally provided with anticollision device, collision-prevention device 9, anticollision device, collision-prevention device 9 includes mounting seat 91 and elastic component
92, mounting seat 91 between carrying platform 3 and the first linear electric motors 2 and near the first linear electric motors 2 position on, elastic component
92 are arranged at mounting seat 91 towards on the surface of carrying platform 3, when carrying platform 3 moves to the position near the first linear electric motors 2
When putting, first can contact and stop motion with the elastic component 92 on anticollision device, collision-prevention device 9, thus avoid carrying platform 3 and the first straight line
Motor 2 collides, and protects the first linear electric motors 2 from damage, and elastic component 92 can protect carrying platform 3 simultaneously, and reduces
Noise.Preferably, elastic component 92 can be rubber blanket, compression spring or a combination of both etc..
The primary of linear electric motors can also be referred to as stator, and secondary can also be referred to as mover, implements at this utility model
In example, the primary 21 of the first linear electric motors 2 is arranged in base 1 and carrying platform 3, and secondary 22 are arranged at base
1 and carrying platform 3 in another on.In the embodiment shown in fig. 1, the primary 21 of the first linear electric motors 2 is arranged at the end
On seat 1, secondary 22 are connected with carrying platform 3.
High accuracy is high to be accelerated the sleeping vertical motion platform that combines and only supports that the motion on a direction cannot meet needs, therefore,
In this utility model embodiment, high accuracy is high to be accelerated sleeping vertical to combine motion platform and also include being arranged at reciprocally moving along a straight line
Workbench 4 on carrying platform 3 and for the second linear electric motors 7 driving workbench 4 to move.In such manner, it is possible to make workbench 4
Realize two dimensional motion planar, meet more requirement.
Second linear electric motors 7 can be one, it is also possible to arranges multiple, both can be entirely located in one end of workbench 4, also
Can lay respectively at the two ends of workbench 4, in this utility model embodiment, the second linear electric motors 7 are provided with one.
Optimizing technique scheme further, the primary 71 of the second linear electric motors 7 is arranged in base 1 and carrying platform 3
One on, secondary 72 are arranged on workbench 4, or, the secondary 72 of the second linear electric motors 7 is arranged at base 1 and carrying is flat
On in platform 3 one, primary 71 are arranged on workbench 4.
If the primary 71 or secondary 72 of the second linear electric motors 7 be arranged on carrying platform 3, carrying platform 3 can be caused
Weight increases, thus affects acceleration and precision that carrying platform 3 obtains, therefore, in the embodiment shown in fig. 1, second
The primary 71 of linear electric motors 7 is arranged on base 1, and secondary 72 are arranged on workbench 4, further, owing to carrying platform 3 is transported
Time dynamic, workbench 4 also can move back and forth, in order to avoid the second straight line therewith between first linear electric motors 2 at carrying platform 3 two ends
Primary and the secondary of motor 7 interfere in above-mentioned motion, and in this utility model embodiment, the second linear electric motors 7 are sleeping
Formula linear electric motors, and the width that the width of its primary 71 is more than secondary 72.
In use, around can there is magnetic field in the primary of linear electric motors, moves when high accuracy height accelerates sleeping vertical combination
Platform is when the semiconductor device fabrication of the precisions such as wafer, and this magnetic field can produce impact, in order to keep away to the performance of processing workpiece
Exempting from the motor-field impact on processing workpiece, in this utility model embodiment, the primary of the first linear electric motors 2 21 is outer and the
The primary 71 of two linear electric motors 7 is outer is all covered with magnetic shield casing 8, sets magnetic shield casing by the primary outer housing at linear electric motors
8, it is possible to effectively shield the magnetic field of linear electric motor primary, it is to avoid linear electric motors leakage field produces harmful effect to processing workpiece, enters one
Step ground, in order to avoid the first linear electric motors 2 and the second linear electric motors 7 are due to overheated and cannot normally work, on magnetic shield casing 8
Offer louvre.
In order to high acceleration of high accuracy sleeping vertical is combined motion platform accurately control, improve its precision, at this
In utility model embodiment, high accuracy is high accelerate sleeping vertical combine motion platform also include for detect carrying platform 3 displacement the
One displacement detector 5 and for detecting the second displacement detector 6 of workbench 4 displacement.
Optimizing technique scheme further, the first displacement detector 5 includes the first scale grating 52 and the first light
Grid read head 51, the first scale grating 52 is arranged in base 1 and carrying platform 3, the first grating reading head 51
It is arranged on another in base 1 and carrying platform 3.Second displacement detector 6 include the second scale grating 62 and
Second grating reading head 61, the second scale grating 62 is arranged in carrying platform 3 and workbench 4, the second grating
Read head 61 is arranged on another in carrying platform 3 and workbench 4.
Certainly, grating scale displacement detector is only a kind of preferred implementation that this utility model provides, and not only
Being only limitted to this, displacement detector can also use other structures, such as inductive displacement transducer, electric vortex type displacement sensing
Device etc., as long as displacement can be detected.
In actual application, the first above-mentioned displacement detector 5 and the second displacement detector 6 can be with controls
The input of device processed is connected, and the outfan of controller is connected with the first linear electric motors 2 and the second linear electric motors 7, first
Moving detection device 5 and the displacement information detected is sent to controller by the second displacement detector 6, controller is according to above-mentioned
Displacement information controls the first linear electric motors 2 according to predetermined instruction and/or the second linear electric motors 7 move, and makes workbench 4 arrive predetermined
Position.
Controller can according to load and load change in location situation distribute each linear electric motors carrying, thus reduce due to
Structure configuration or load change the dynamic error caused, and sleeping the standing of high acceleration of improvement high accuracy further combines the dynamic of motion platform
Performance.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment, identical similar portion sees mutually.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses this practicality new
Type.Multiple amendment to these embodiments will be apparent from for those skilled in the art, is determined herein
The General Principle of justice can realize in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest scope consistent with features of novelty.
Claims (10)
1. high accuracy sleeping the standing of high acceleration combines motion platform, it is characterised in that including:
Base (1)；
The carrying platform (3) being reciprocally arranged on described base (1) linear motion；
For the common at least two the first linear electric motors (2) driving described carrying platform (3) to move, described at least two first
At least first end being positioned at described carrying platform (3) movement locus, remaining described first straight line in linear electric motors (2)
Motor (2) is positioned at the second end of described carrying platform (3) movement locus, and is positioned at described carrying platform (3) movement locus first
End described first linear electric motors (2) at least one be horizontal linear motor, be positioned at described carrying platform (3) movement locus
In described first linear electric motors (2) of the second end at least one be vertical straight line motor.
High accuracy height the most according to claim 1 accelerates sleeping standing and combines motion platform, it is characterised in that be positioned at described carrying
Described first linear electric motors (2) of platform (3) movement locus the first end are horizontal linear motor, are positioned at described carrying platform
(3) described first linear electric motors (2) of movement locus the second end are vertical straight line motor.
High accuracy height the most according to claim 1 accelerates sleeping standing and combines motion platform, it is characterised in that described base (1)
On be additionally provided with anticollision device, collision-prevention device (9), described anticollision device, collision-prevention device (9) includes mounting seat (91) and elastic component (92), described mounting seat
(91) it is positioned between described carrying platform (3) and described first linear electric motors (2) and near the position of described first linear electric motors (2)
Putting, described elastic component (92) is arranged at described mounting seat (91) towards on the surface of described carrying platform (3).
High accuracy height the most according to claim 1 accelerates sleeping standing and combines motion platform, it is characterised in that described first straight line
The primary (21) of motor (2) is arranged in described base (1) and described carrying platform (3), and secondary (22) are arranged
On another in described base (1) and described carrying platform (3).
High accuracy height the most according to claim 1 accelerates sleeping standing and combines motion platform, it is characterised in that also include reciprocally
Linear motion the workbench (4) that is arranged on described carrying platform (3) and being used for drive that described workbench (4) moves the
Two linear electric motors (7).
High accuracy height the most according to claim 5 accelerates sleeping standing and combines motion platform, it is characterised in that described second straight line
The primary (71) of motor (7) is arranged in described base (1) and described carrying platform (3), and secondary (72) are arranged at
On described workbench (4), or, the secondary (72) of described second linear electric motors (7) is arranged at described base (1) and described carrying
On in platform (3) one, primary (71) are arranged on described workbench (4).
High accuracy height the most according to claim 6 accelerates sleeping standing and combines motion platform, it is characterised in that described first straight line
The primary (21) of motor (2) is outward and the primary (71) of described second linear electric motors (7) is the most all covered with magnetic shield casing (8).
High accuracy height the most according to claim 7 accelerates sleeping standing and combines motion platform, it is characterised in that described magnetic shield case
Body offers louvre on (8).
High accuracy height the most according to claim 5 accelerates sleeping standing and combines motion platform, it is characterised in that also include for examining
Survey first displacement detector (5) of described carrying platform (3) displacement and be used for detecting the second of described workbench (4) displacement
Displacement detector (6).
High accuracy height the most according to claim 9 accelerates sleeping standing and combines motion platform, it is characterised in that described first
Move detection device (5) and include the first scale grating (52) and the first grating reading head (51), described first scale grating (52)
Being arranged in described base (1) and described carrying platform (3), described first grating reading head (51) is arranged at institute
State in base (1) and described carrying platform (3) another on；Described second displacement detector (6) includes the second scale
Grating (62) and the second grating reading head (61), described second scale grating (62) be arranged at described carrying platform (3) and
On in described workbench (4) one, described second grating reading head (61) is arranged at described carrying platform (3) and described work
On another in station (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620689976.9U CN205846966U (en) | 2016-06-30 | 2016-06-30 | One high accuracy sleeping the standing of high acceleration combines motion platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620689976.9U CN205846966U (en) | 2016-06-30 | 2016-06-30 | One high accuracy sleeping the standing of high acceleration combines motion platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205846966U true CN205846966U (en) | 2016-12-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620689976.9U Withdrawn - After Issue CN205846966U (en) | 2016-06-30 | 2016-06-30 | One high accuracy sleeping the standing of high acceleration combines motion platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205846966U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106026512A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | High-precision and high-acceleration horizontal-vertical combinative motion platform |
-
2016
- 2016-06-30 CN CN201620689976.9U patent/CN205846966U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106026512A (en) * | 2016-06-30 | 2016-10-12 | 广东工业大学 | High-precision and high-acceleration horizontal-vertical combinative motion platform |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161228 Effective date of abandoning: 20180323 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20161228 Effective date of abandoning: 20180323 |