CN205843930U - A kind of apparatus for measuring quality of laser beam - Google Patents
A kind of apparatus for measuring quality of laser beam Download PDFInfo
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- CN205843930U CN205843930U CN201620490223.5U CN201620490223U CN205843930U CN 205843930 U CN205843930 U CN 205843930U CN 201620490223 U CN201620490223 U CN 201620490223U CN 205843930 U CN205843930 U CN 205843930U
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- slide unit
- guide rail
- light path
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- laser
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Abstract
A kind of apparatus for measuring quality of laser beam disclosed in this utility model, include the position measurement guide rail slide unit system being arranged on substrate, Transflective system and detection system, also include the laser instrument being arranged at substrate side, and on the substrate, position measurement guide rail slide unit system is positioned at the top of Transflective system and detection system, position measurement guide rail slide unit system connects width measure guide rail slide unit system, Transflective system is positioned at the light output end of laser instrument, light path system can be formed after the light of the light output end injection of laser instrument propagates to Transflective system, detection system is positioned on this light path system.Apparatus for measuring quality of laser beam of the present utility model, can carry out fast and automatically and high-acruracy survey the space of laser beam and time response, solve the integrated measuring problem of superfine laser facula width and pulse characteristic.
Description
Technical field
This utility model belongs to laser beam measurement apparatus technical field, is specifically related to a kind of laser beam quality measuring dress
Put.
Background technology
At present, generally use knife-edge method or CCD method that the beam quality characteristic of laser measures analysis, however this two
The method of kind respectively has pluses and minuses in actual application.
Edge of a knife measuring method usually utilizes knife to pass through multimetering and obtains the laser facula width of correspondence position, then
Through calculating beam quality characterisitic parameters such as obtaining the beam quality M^2 factor, the angle of divergence；But, knife-edge method is generally by hands
Work measures, it is impossible to measure the pulse characteristic of beam quality simultaneously, and does not has ready-made measuring instrument available.
Along with the development of laser technology, laser facula width has arrived nanometer (nm) rank, and pulse laser
Repetition rate is the most on megahertz (MHz).From the point of view of the objective description angle to laser beam, superfine light beam and Gao Zhongying
Laser-quality brings challenges all to the measurement of practical laser.Therefore, for realizing high accuracy, the fast and automatically survey of change beam quality
The research of amount instrument is extremely the most urgent.
Utility model content
The purpose of this utility model is to provide a kind of apparatus for measuring quality of laser beam, can to the space of laser beam with
Time response is carried out fast and automatically and high-acruracy survey, solves the integrated test of superfine laser facula width and pulse characteristic
Amount problem.
This utility model be employed technical scheme comprise that, a kind of apparatus for measuring quality of laser beam, includes and is arranged at base
Position measurement guide rail slide unit system, trans-reflective system and detection system on plate, also includes and is arranged at swashing of substrate side
Light device, and on the substrate, position measurement guide rail slide unit system is positioned at the top of trans-reflective system and detection system, position
The guide rail slide unit system connection of measurement has width measure guide rail slide unit system, and trans-reflective system is positioned at the light output end of laser instrument,
Can form light path system after the light of the light output end injection of laser instrument propagates to trans-reflective system, detection system is positioned at this
On light path system.
Feature of the present utility model also resides in:
Position measurement guide rail slide unit system, includes set of rails a being horizontally placed on substrate, set of rails a coordinates frame
Being provided with and can connect leading screw a along the slide unit a, slide unit a that set of rails a is slided, one end of leading screw a is coaxially connected with motor a, and
Motor a is arranged at a side edge of substrate, leading screw a can be driven to rotate, thus drive slide unit a to enter during motor a work
Row is mobile, and slide unit a is also connected with width measure guide rail slide unit system, makes the mobile of slide unit a can drive width measure guide rail slide unit
System realizes lengthwise position and moves.
Width measure guide rail slide unit system, includes the guide rail being fixed in position measurement guide rail slide unit system on slide unit a
Group b；Set of rails b is vertical with set of rails a, and the erection that set of rails b coordinates has the slide unit b, slide unit b that can slide along set of rails b
Connecting the edge of a knife, slide unit b connects leading screw b, and one end of leading screw b is coaxially connected with motor b, and motor b is arranged at substrate
Another side edge, leading screw b can be driven to rotate during motor b work, thus drive slide unit b to move, the movement of slide unit b
Drive the edge of a knife that laser facula is carried out partial occlusion.
Transflective system, includes the flat lens arranged near laser output, through the light output end of laser instrument
The light transmission flat lens of injection is formed through light path, through being provided with semi-transparent semi-reflecting prism in light path, and semi-transparent semi-reflecting prism
Will transmit through light path and be divided into transmitted light path, reflected light path, transmitted light path is disposed with in plus lens a and detection system
Pyroelectric detector, is provided with the prism that is all-trans on reflected light path, through the prismatic reflection that is all-trans luminous energy formed total reflection light path,
The PIN photodiode detector being disposed with in plus lens b, detection system in the total reflection light path formed；Detection system
System is made up of pyroelectric detector and PIN photodiode detector.
Semi-transparent semi-reflecting prism is the prism that inclined-plane is coated with semi-transparent semi-reflecting film.
The prism that is all-trans is the prism that inclined-plane is coated with the film that is all-trans.
The beneficial effects of the utility model are:
(1) in terms of the measurement of laser beam quality characteristic, compared with existing hand dipping mode: of the present utility model
Apparatus for measuring quality of laser beam uses motor to drive the move mode of guide rail slide unit, can be while Laser Measurement spot width
Realize, to the longitudinally controlled of width measurement location and measurement, there is change and the advantage of integrated measuring fast and automatically.
(2) compared with existing knife-edge method laser beam quality measuring instrument, laser beam quality measuring of the present utility model fills
Put, the measurement of laser beam quality spatial character is combined with the measurement of time response, while realizing continuous light measurement,
Obtain the measurement to pulsed light overall characteristic.
(3) compared with existing Laser Beam Quality Analysis instrument, apparatus for measuring quality of laser beam of the present utility model,
Use pyroelectric detector that laser power is measured, it is thus achieved that spot width information, use PIN photodiode Laser Measurement
Pulse characteristic, can realize the big energy, the measurement of Gao Zhongying laser instrument.
In sum, apparatus for measuring quality of laser beam of the present utility model tool does not only has simple in construction and easy to operate
Advantage, also there is the advantage changing both integrated measurings fast and automatically, can realize the big energy, Gao Zhongying laser instrument the most special
The measurement analysis of property.
Accompanying drawing explanation
The structural representation of Fig. 1 apparatus for measuring quality of laser beam of the present utility model.
In figure, 1. laser instrument, 2. position measurement guide rail slide unit system, 2-1. set of rails a, 2-2. motor a, 2-3. silk
Thick stick a, 2-4. slide unit a, 3. width measure guide rail slide unit system, 3-1. set of rails b, 3-2. motor b, 3-3. leading screw b, 3-4.
Slide unit b, the 3-5. edge of a knife, 4-1. flat lens, 4-2. plus lens a, the 4-3. semi-transparent semi-reflecting prism of plus lens b, 4-4., 4-5.
Be all-trans prism, 5-1. pyroelectric detector, 5-2.PIN photodiode detector, 6. substrate.
Detailed description of the invention
With detailed description of the invention, this utility model is described in detail below in conjunction with the accompanying drawings.
This utility model one apparatus for measuring quality of laser beam, as it is shown in figure 1, include the position being arranged on substrate 6
Put measurement guide rail slide unit system 2, trans-reflective system and detection system, also include the laser instrument 1 being arranged at substrate 6 side,
And on this substrate 6, position measurement guide rail slide unit system 2 is positioned at the top of trans-reflective system and detection system, position measurement
Guide rail slide unit system 2 connects width measure guide rail slide unit system 3, and trans-reflective system is positioned at the light output end of laser instrument 1,
Can form light path system after the light of the light output end injection of laser instrument 1 propagates to trans-reflective system, detection system is positioned at this
On light path system.
Position measurement guide rail slide unit system 2, includes set of rails a2-1 being horizontally placed on substrate 6, set of rails a2-1
Upper cooperation sets up to be had and can connect leading screw a2-3, the one of leading screw a2-3 along the slide unit a2-4, slide unit a2-4 that set of rails a2-1 is slided
Hold coaxially connected with motor a2-2, and motor a2-2 is arranged at a side edge of substrate 6, when motor a2-2 work
When making, leading screw a2-3 can be driven to rotate, thus drive slide unit a2-4 to move, slide unit a2-4 is also sliding with width measure guide rail
Platform system 3 connects, and makes slide unit a2-4 mobile that width measure guide rail slide unit system 3 can be driven to realize lengthwise position and moves.
Width measure guide rail slide unit system 3, includes and is fixed in position measurement guide rail slide unit system 2 on slide unit a2-4
Set of rails b3-1, this set of rails b3-1 is vertical with set of rails a2-1, and the erection that set of rails b3-1 coordinates has can be along set of rails
B3-1 slide slide unit b3-4, slide unit b3-4 connect edge of a knife 3-5, slide unit b3-4 connect leading screw b3-3, one end of leading screw b3-3 with
Motor b3-2 is coaxially connected, and motor b3-2 is arranged at another side edge of substrate 6, during motor b3-2 work
Leading screw b3-3 can be driven to rotate, thus drive slide unit b3-4 to move, the mobile drive edge of a knife 3-5 of slide unit b3-4 is to laser light
Speckle carries out partial occlusion.
In use:
Under the effect of position measurement guide rail slide unit system 2, mobile width measures the lengthwise position of guide rail slide unit system 3,
Obtain and measure position Z1, measure position Z2, measure position Z3And spot width d of the corresponding light for position1, hot spot width
Degree d2, spot width d3, measure position Z1、Z2、Z3With the corresponding light spot width d measured by each position1、d2、d3Between meet following public
Formula:
Use above formula solve A, B, C coefficient, then utilize formula to the beam quality M^2 factor, far field light
Beam divergence angle θ, beam waist position Z0, waist width d0Numerical value solve.
Trans-reflective system, includes the flat lens 4-1 arranged near laser instrument 1 outfan, through the light of laser instrument 1
The light transmission flat lens 4-1 of outfan injection is formed through light path, through being provided with semi-transparent semi-reflecting prism 4-4 in light path,
Semi-transparent semi-reflecting prism 4-4 will transmit through light path and is divided into transmitted light path, reflected light path, is disposed with plus lens on transmitted light path
Pyroelectric detector 5-1 in a4-2 and detection system, is provided with the prism 4-5 that is all-trans on reflected light path, through the prism 4-5 that is all-trans
The luminous energy of reflection forms total reflection light path, is disposed with plus lens b4-3, detection system in the total reflection light path formed
Interior PIN photodiode detector 5-2.
Pyroelectric detector 5-1 and PIN photodiode detector 5-2 constitutes detection system.
The light reflected through semi-transparent semi-reflecting prism 4-4 enters PIN light after prism 4-5 reflection of being all-trans after plus lens b4-3
Electric diode detector 5-2, by PIN photodiode detector 5-2 pulse to measured laser device after opto-electronic conversion
Characteristic measures.
Semi-transparent semi-reflecting prism 4-4 is the prism that inclined-plane is coated with semi-transparent semi-reflecting film.
The prism 4-5 that is all-trans is the prism that inclined-plane is coated with the film that is all-trans.
The use process of a kind of apparatus for measuring quality of laser beam of this utility model is specific as follows:
Step 1, make the center of the output beam vertical incidence power planes eyeglass 4-1 of measured laser device 1；
Step 2, unlatching measuring instrument, motor Ah 2-2 drive width measure guide rail slide unit system 3 to return initial measurement
Position, maximum relative power when now pyroelectric detector 5-1 obtains laser beam without blocking；
Function is measured in step 3, startup, and motor a2-2 starts working, and slide unit b3-4 is at the rotary action of leading screw b3-3
Under start mobile, drive edge of a knife 3-5 to move, along with measured laser bundle, pyroelectric detector are blocked in beginning, edge of a knife 3-5 edge
The laser power that 5-1 obtains will be gradually reduced, at the beginning of obtaining when pyroelectric detector 5-1 measures 86% that power is peak power
Beginning position；
Along with edge of a knife 3-5 continues to move to, obtain when pyroelectric detector 5-1 measures the 14% of power peak power and terminate
Position, end position is d with the difference of initial position1, its concrete numerical value can be carried out by the driving pulse of motor a2-2
Calculating and obtain, this is one-shot measurement；
Step 4, under the effect of position measurement guide rail slide unit system 2, drive width measure guide rail slide unit system 3 move vertical
To measuring position, repeat step 3, it is thus achieved that measure position Z2And corresponding light spot width d2, this is double measurement.
Step 5, repetition step 4, it is thus achieved that measure position Z3And corresponding light spot width d3, this is to measure for three times；
Step 6, step 2, step 3, step 4 and step 5 measure while, PIN photodiode detector 5-2 is through light
After electricity conversion, time pulse characteristic and the repetition rate characteristic of measured laser device 1 can be obtained.
Step 7, three groups of fore-and-aft distances and spot width measure complete after, through calculating, provide measured laser output
Power, the beam quality M^2 factor, beam divergence angle, beam waist position, waist width, pulse characteristic and frequency characteristic.
This utility model one apparatus for measuring quality of laser beam, can be carried out the space of laser beam and time response soon
Speed, automatic and high-acruracy survey, solve the integrated measuring problem of superfine laser facula width and pulse characteristic.This practicality
Novel a kind of apparatus for measuring quality of laser beam has simple to operate and practical advantage, it is adaptable to light intensity spatial distribution
Laser beam for Gaussian carries out space and time response measurement, especially measures basic mode or the multi-mode laser light based on basic mode
Bundle.
Claims (6)
1. an apparatus for measuring quality of laser beam, it is characterised in that include the position measurement guide rail being arranged on substrate (6)
Slide unit system (2), trans-reflective system and detection system, also include the laser instrument (1) being arranged at substrate (6) side, and
On described substrate (6), position measurement guide rail slide unit system (2) is positioned at the top of trans-reflective system and detection system, institute's rheme
Putting measurement guide rail slide unit system (2) connection has width measure guide rail slide unit system (3), described trans-reflective system to be positioned at laser
The light output end of device (1), can form light path after the light of the light output end injection of laser instrument (1) propagates to trans-reflective system
System, described detection system is positioned on described light path system.
A kind of apparatus for measuring quality of laser beam the most according to claim 1, it is characterised in that institute's position measurement guide rail
Slide unit system (2), includes set of rails a (2-1) being horizontally placed on substrate (6), described set of rails a (2-1) coordinates frame
Being provided with the slide unit a (2-4) that can slide along set of rails a (2-1), described slide unit a (2-4) connects leading screw a (2-3), described leading screw a
(2-3) one end is coaxially connected with motor a (2-2), and motor a (2-2) is arranged at a side edge of substrate (6),
Leading screw a (2-3) can be driven to rotate during motor a (2-2) work, thus drive slide unit a (2-4) to move, described slide unit a
(2-4) also it is connected with width measure guide rail slide unit system (3), makes the mobile of slide unit a (2-4) that width measure guide rail slide unit can be driven
System (3) realizes lengthwise position and moves.
A kind of apparatus for measuring quality of laser beam the most according to claim 1 and 2, it is characterised in that described width measure
Guide rail slide unit system (3), includes the set of rails b (3-being fixed in position measurement guide rail slide unit system (2) interior slide unit a (2-4)
1)；
Described set of rails b (3-1) is vertical with set of rails a (2-1), and the upper erection coordinated of described set of rails b (3-1) has can be along
The slide unit b (3-4) that set of rails b (3-1) is slided, described slide unit b (3-4) connects the edge of a knife (3-5), described slide unit b (3-4) connecting filament
Thick stick b (3-3), one end of described leading screw b (3-3) is coaxially connected with motor b (3-2), and motor b (3-2) is arranged at
Another side edge of substrate (6), can drive leading screw b (3-3) to rotate during the work of described motor b (3-2), thus drive slide unit
B (3-4) moves, and the mobile drive edge of a knife (3-5) of described slide unit b (3-4) carries out partial occlusion to laser facula.
A kind of apparatus for measuring quality of laser beam the most according to claim 1, it is characterised in that described trans-reflective system
System, includes the flat lens (4-1) arranged near laser instrument (1) outfan, through the light of the light output end injection of laser instrument (1)
Formed through light path through flat lens (4-1), described through being provided with semi-transparent semi-reflecting prism (4-4) in light path, described half
Saturating half anti-prism (4-4) will transmit through light path and is divided into transmitted light path, reflected light path, is disposed with convergence on described transmitted light path
Pyroelectric detector (5-2) in lens a (4-2) and detection system, is provided with the prism that is all-trans (4-5), warp on reflected light path
The luminous energy that the prism (4-5) that is all-trans reflects forms total reflection light path, is disposed with plus lens b in the total reflection light path formed
(4-3), the PIN photodiode detector (5-2) in detection system；
Described detection system is made up of described pyroelectric detector (5-1) and PIN photodiode detector (5-2).
A kind of apparatus for measuring quality of laser beam the most according to claim 4, it is characterised in that described semi-transparent semi-reflecting prism
(4-4) it is the inclined-plane prism that is coated with semi-transparent semi-reflecting film.
A kind of apparatus for measuring quality of laser beam the most according to claim 4, it is characterised in that described in be all-trans prism (4-
5) it is the inclined-plane prism that is coated with the film that is all-trans.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620490223.5U CN205843930U (en) | 2016-05-26 | 2016-05-26 | A kind of apparatus for measuring quality of laser beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620490223.5U CN205843930U (en) | 2016-05-26 | 2016-05-26 | A kind of apparatus for measuring quality of laser beam |
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| Publication Number | Publication Date |
|---|---|
| CN205843930U true CN205843930U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620490223.5U Expired - Fee Related CN205843930U (en) | 2016-05-26 | 2016-05-26 | A kind of apparatus for measuring quality of laser beam |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991061A (en) * | 2018-01-16 | 2018-05-04 | 南京理工大学 | High-capacity optical fiber laser QBH optical cable beam quality detecting systems and its detection method |
| CN108287059A (en) * | 2018-01-16 | 2018-07-17 | 南京理工大学 | High-precision near-infrared laser beam quality measurement analysis device |
| CN108387366A (en) * | 2018-04-19 | 2018-08-10 | 南昌航空大学 | A kind of system and device for measuring Gaussian beam and transmitting the angle of divergence in water |
| CN109084954A (en) * | 2018-06-08 | 2018-12-25 | 国科世纪激光技术（天津）有限公司 | A kind of laser core parameter method for fast measuring |
-
2016
- 2016-05-26 CN CN201620490223.5U patent/CN205843930U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107991061A (en) * | 2018-01-16 | 2018-05-04 | 南京理工大学 | High-capacity optical fiber laser QBH optical cable beam quality detecting systems and its detection method |
| CN108287059A (en) * | 2018-01-16 | 2018-07-17 | 南京理工大学 | High-precision near-infrared laser beam quality measurement analysis device |
| CN108387366A (en) * | 2018-04-19 | 2018-08-10 | 南昌航空大学 | A kind of system and device for measuring Gaussian beam and transmitting the angle of divergence in water |
| CN109084954A (en) * | 2018-06-08 | 2018-12-25 | 国科世纪激光技术（天津）有限公司 | A kind of laser core parameter method for fast measuring |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161228 Termination date: 20170526 |