CN204924186U - Wide measuring device of laser facula - Google Patents
Wide measuring device of laser facula Download PDFInfo
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- CN204924186U CN204924186U CN201520721094.1U CN201520721094U CN204924186U CN 204924186 U CN204924186 U CN 204924186U CN 201520721094 U CN201520721094 U CN 201520721094U CN 204924186 U CN204924186 U CN 204924186U
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- grating
- laser
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- moire fringe
- laser facula
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Abstract
The utility model relates to a wide measuring device of laser facula, characterized by: at least including the laser instrument of a measurand, the laser instrument passes through the optical unit and falls into two bundles with the output light of laser instrument, and the first bundle of beam that the optical unit was told shines at the power detector, the second that the optical unit was told is restrainted beam and is shone on the moire fringe generator input face of scale grating and indication grating constitution, and moire fringe generator output has photodetector unit, and the indication grating is fixed on the mechanical scanning ware, install the edge of a knife on the mechanical scanning ware, the optical unit include semitransparent mirror, be all -trans a mirror and a beam expanding lens. The device is easy and simple to handle, the practicality is strong, can go on fast the laser facula, automation, high precision measurement to have the wide advantage of measuring range, solved the automatic measure problem of superfine laser facula width.
Description
Technical field
The utility model relates to laser facula width method, particularly a kind of laser facula width of measuring device.The laser beam being applicable to be approximately light intensity space distribution Gaussian is measured, such as fundamental-mode gaussian beam, or the built-up pattern laser beam based on basic mode.
Background technology
As everyone knows, beam quality is the importance describing laser instrument combination property, the parameters such as usual employing spot width, the angle of divergence, beam quality factor describe beam quality, and the less angle of divergence and Laser Beam Quality Factor characterize a laser instrument and have good Space Collimation characteristic.In reality, generally in multiple position, laser facula width is measured, obtain the parameter such as the angle of divergence and Laser Beam Quality Factor by analytical calculation.Consider the difference of all kinds of laser application occasion, common laser facula width generally can between 0.1mm-10mm.According to current research report, laser facula width minimum in the world at present has arrived nm rank; Meanwhile, the appearance of tiny laser beam like this brings challenges also to the measurement problem of practical laser beam quality.
In the measurement of laser facula width, the method for the usual knife of researchist is carried out hand dipping or is adopted beam quality analysis instrument to analyze beam quality.For hand dipping, its measuring process is cumbersome, and the repeatability of measurement result is poor, knife self-regulation precision, detection components and parts response accuracy, and operating personnel think that factor all can produce a very large impact measurement result.
During current beam quality analysis apparatus measures spot width, usually servo step motor is only adopted to drive the mode of the edge of a knife, scanning survey is carried out to laser facula, its measuring accuracy can only reach a μm rank, the measurement range of its minimum beam width is also only about tens μm, cannot realize the effective measurement to superfine laser beam space characteristic.
And be limited by the technological level of mechanical rotation system machining precision, also produce a very large impact to the measuring error of laser beam width.It should be noted that in the accurate measurement of space displacement, the advantage that Moire fringe distance-finding method tool is very large, its measurement range can reach 1000mm, and measuring accuracy can reach 1nm.Can imagine, in the middle of measurement Moire fringe distance-finding method being incorporated into laser beam quality, the measurement problem of superfine light beam will be solved, make the change fast and automatically of laser beam quality, high-acruracy survey becomes possibility.
Summary of the invention
Technical problem to be solved in the utility model is for above-mentioned deficiency of the prior art, a kind of laser facula width of measuring device is provided, it is easy and simple to handle, practical, can carry out fast and automatically laser facula, high-acruracy survey, and there is the wide advantage of measurement range, solve the automatic measurement problem of superfine laser facula width.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of laser facula width of measuring device, it is characterized in that: at least comprise a measured laser instrument, the output light of laser instrument is divided into two bundles by optical unit by laser instrument, and the first bundle parallel beam that optical unit separates is radiated at power detector; The second bundle parallel beam that optical unit separates is radiated on the Moire fringe generator input face of scale grating and indication grating formation, and Moire fringe generator output has photodetector unit, and indication grating is fixed on mechanical scanner; Mechanical scanner is provided with the edge of a knife; Described optical unit comprises semi-transparent semi-reflecting lens, a total reflective mirror and beam expanding lens; Laser instrument forms reflected light by semi-transparent semi-reflecting lens and exports and transmitted light output, reflected light exports and transmitted light output is mutually angle, after reflected light is exported and is again totally reflected by total reflective mirror, make transmitted light export formation first and restraint parallel beam, make reflected light form the second bundle parallel beam; Second bundle parallel beam is radiated at Moire fringe generator input face after beam expanding lens; First bundle parallel beam is radiated on power detector window.
Described mechanical scanner comprises guide rail, slide block, leading screw, servo step motor, track base; Guide rail is parallel fixing along track base length direction; Leading screw is fixed on track base by left and right fixed mount; Leading screw is socketed slide block by screw thread; Leading screw one end is coaxially connected with servo step motor; During servo step motor work, drive screw turns; The slide block of screw thread socket moves left and right along leading screw.
Indication grating is fixed in described track base one end, slide block one end nonadjustable signal grating; Scale grating is parallel with indication grating, the grating of scale grating and indication grating forms angle, slide block moves when servo step motor works, and makes to restraint parallel beam by second of scale grating and indication grating and is radiated at after beam expanding lens on Moire fringe generator input face.
Described photodetector unit comprises optical power detector, photoelectric cell group; Described power detector is pyroelectric detector, has the edge of a knife in pyroelectric detector front end, blocks by the edge of a knife is mobile before pyroelectric detector.
Described photoelectric cell group number by 2 integral multiple be distributed in comprise a light and shade cycle Moire fringe in.
The utility model compared with prior art has the following advantages:
1. in the measurement of laser facula width, compared with traditional-handwork metering system, the utility model adopts motor-driven guide rail slide unit to realize measuring the mobile of the edge of a knife and controls, and has the advantage changing measurement fast and automatically, ensures that measurement result has fine repeatability simultaneously.
2. compared with existing laser facula width measure instrument, Moire fringe range measurement principle is applied in the middle of the measurement of laser beam quality by the utility model, be the displacement being obtained the edge of a knife by the feedback current of photoelectric cell group, avoid the impact that traditional physical construction mismachining tolerance is brought in automatic measuring process.
3. compared with existing laser facula width measure instrument, the utility model adopts grating pair arrangement, and Moire fringe interpolation technology carries out precision measurement to the moving displacement of the edge of a knife, the most eukodal 1nm magnitude of its laser spot test precision; Meanwhile, also the measurement range of spot width is fine to a μm magnitude, solves the automatic measurement problem of superfine type laser facula width.
4. the utility model adopts large area, fast response light battery automatically to measure as power detector, is easy to the alignment issues realizing optical path, and has the advantages such as easy and simple to handle, practical, be convenient to promote the use of.
In sum, the utility model scenario-frame is simple, easy to operate, have the advantage changing measurement fast and automatically, the Measurement and analysis that have accurate measuring accuracy, can realize to superfine spot width.
Below by drawings and Examples, the technical solution of the utility model is described in further detail.
Accompanying drawing explanation
Fig. 1 is the utility model example structure signal schematic diagram.
Fig. 2 is the mechanical scanner of Fig. 1.
Description of reference numerals: 1-laser instrument; 2-optical unit; 2-1-semi-transparent semi-reflecting lens; 2-2-total reflective mirror; 2-3-beam expanding lens; 3-mechanical scanner; 3-1-guide rail; 3-2-slide block; 3-3-leading screw; 3-4-servo step motor; 3-5-edge of a knife; 3-6-scale grating; 3-7-indication grating; 4-photodetector unit; 4-1-power detector; 4-2-photoelectric cell group; Moire fringe-4-3; 5-controlled processing unit.
Embodiment
As shown in Figure 1, a kind of Laser Beam Quality Factor measurement mechanism, it is characterized in that: at least comprise a measured laser instrument 1, the output light of laser instrument 1 is divided into two bundles by optical unit 2 by laser instrument 1, the first bundle parallel beam that optical unit 2 separates is radiated at power detector 4-1; The second bundle parallel beam that optical unit 2 separates is radiated on the Moire fringe generator input face of scale grating 3-6 and indication grating 3-7 formation, and Moire fringe generator output has photodetector unit, and indication grating 3-7 is fixed on mechanical scanner; Mechanical scanner 3 is provided with edge of a knife 3-5; Mechanical scanner drives indication grating 3-7 and edge of a knife 3-5 synchronizing moving under control module controls; Make the beginning, edge of edge of a knife 3-5 block power detector 4-1 and receive light window, the laser output power that power detector 4-1 obtains will reduce gradually or become large gradually, when power detector 4-1 measurement laser output power reaches 86% of peak power, photodetector unit obtains the initial position of edge of a knife 3-5 movement by the Moire fringe detecting Moire fringe generator; Along with edge of a knife 3-5 continues mobile, when power detector 4-1 measurement laser output power reaches 14% of peak power, photodetector unit obtains the end position of edge of a knife 3-5 movement; The Moire fringe number that controlled processing unit detects according to initial position, end position and photodetector unit, obtains the width of laser instrument 1 at diverse location.
Described optical unit 2 comprises semi-transparent semi-reflecting lens 2-1, a total reflective mirror 2-2 and beam expanding lens 2-3; Laser instrument 1 forms reflected light by semi-transparent semi-reflecting lens 2-1 and exports and transmitted light output, reflected light exports and transmitted light output is mutually angle, after reflected light is exported and is again totally reflected by total reflective mirror 2-2, make transmitted light export formation first and restraint parallel beam, make reflected light form the second bundle parallel beam; Second bundle parallel beam is radiated at Moire fringe generator input face after beam expanding lens 2-3; First bundle parallel beam is radiated on power detector 4-1 window.
As shown in Figure 2, described mechanical scanner 3 comprises guide rail 3-1, slide block 3-2, leading screw 3-3, servo step motor 3-4, track base 3-5; Guide rail 3-1 is parallel fixing along track base 3-5 length direction; Leading screw 3-3 is fixed on track base 3-5 by left and right fixed mount; Leading screw 3-3 is by screw thread socket slide block 3-2; Leading screw 3-3 one end is coaxially connected with servo step motor 3-4; When servo step motor 3-4 works, leading screw 3-3 is driven to rotate; The slide block 3-2 of screw thread socket moves left and right along leading screw 3-3.
Track base 3-5 fixes indication grating 3-7 in one end, slide block 3-2 one end nonadjustable signal grating 3-6; Scale grating 3-6 is parallel with indication grating 3-7, the grating of scale grating 3-6 and indication grating 3-7 forms angle, slide block 3-2 moves when servo step motor 3-4 works, and makes to restraint parallel beam by second of scale grating 3-6 and indication grating 3-7 and is radiated at after beam expanding lens 2-3 on Moire fringe generator input face.
Described photodetector unit 4 comprises optical power detector 4-1, photoelectric cell group 4-2; Described power detector 4-1 is pyroelectric detector, is used for measurement first to restraint the laser output power of parallel beam, has edge of a knife 3-5, block, in order to calculate spot width by edge of a knife 3-5 is mobile before pyroelectric detector in pyroelectric detector front end.
Described photoelectric cell group 4-2 number by 2 integral multiple be distributed in comprise a light and shade cycle Moire fringe in, as 2,4,6,8 ... Deng.Embodiment adopt 4 photoelectric cells realize Si'an Capsule sentence to, have the phase differential of pi/2 between 4 photocurrents that described photoelectric cell group 4-2 responds, 4 photocurrents carry out two-way counting again after differential amplify, shaping, discriminating direction.
Described controlled processing unit includes the processor of band A/D converter, a servo step motor 3-4 driving circuit, processor and servo step motor 3-4 driving circuit adopt existing technology, and power detector 4-1 and photoelectric cell group 4-2 is electrically connected with the A/D converter input end of processor respectively; Processor is electrically connected with servo step motor 3-4 driving circuit control end simultaneously; Described controlled processing unit, by the unlatching to servo step motor 3-4, closedown, reset, realizes the measurement to laser facula width by the Electric signal processing received power detector 4-1 and photoelectric cell group 4-2.
The use procedure of the utility model method is:
(1) by the centre of surface position of the output facula vertical incidence power detector 4-1 of measured laser device 1, the fore-and-aft distance Z1 on hand dipping measured laser device 1 exiting surface and power detector 4-1 surface, and the power passing through the first bundle parallel beam of the laser instrument 1 that controlled processing unit automatic output power detector 4-1 detects;
(2) power-on, under the effect of servo step motor 3-4, slide block 3-2 on guide rail 3-1 returns initial position, now power detector 4-1 obtains laser beam without result power when blocking, and is peak power;
(3) start measurement function, servo step motor 3-4 starts working, and the slide block 3-2 on guide rail 3-1 starts mobile under the rotary action of leading screw 3-3, is with the edge of a knife 3-5 grating on movable slider 3-2 and indication grating 3-7 to move horizontally simultaneously;
(4) along with measured laser bundle is blocked in beginning, edge of a knife 3-5 edge, the laser power that power detector 4-1 obtains will reduce gradually, when power detector 4-1 measurement power is 86% of peak power, photoelectric cell group 4-2 obtains the initial position of edge of a knife 3-5 movement by Moire fringe 4-3.Along with edge of a knife 3-5 continues mobile, when power detector 4-1 measures 14% of power peak power, photoelectric cell group 4-2 obtains the end position of edge of a knife 3-5 movement, and the difference of end position and initial position is D1, and the step-by-step counting specifically by system obtains.
(5) repetitive process (1)-(4), can obtain the spot width university at multiple fore-and-aft distance place, provide data for analyzing laser beam quality characteristic further.
The above; it is only preferred embodiment of the present utility model; not the utility model is imposed any restrictions, every above embodiment is done according to the utility model technical spirit any simple modification, change or equivalent structure change, all in the protection domain of technical solutions of the utility model.
Claims (5)
1. a laser facula width of measuring device, it is characterized in that: at least comprise a measured laser instrument (1), the output light of laser instrument (1) is divided into two bundles by optical unit (2) by laser instrument (1), and the first bundle parallel beam that optical unit (2) separates is radiated at power detector (4-1); The second bundle parallel beam that optical unit (2) separates is radiated on the Moire fringe generator input face that scale grating (3-6) and indication grating (3-7) form, Moire fringe generator output has photodetector unit (4), and indication grating (3-7) is fixed on mechanical scanner; Mechanical scanner (3) is provided with the edge of a knife (3-5); Described optical unit (2) comprises semi-transparent semi-reflecting lens (2-1), a total reflective mirror (2-2) and beam expanding lens (2-3); Laser instrument (1) forms reflected light by semi-transparent semi-reflecting lens (2-1) and exports and transmitted light output, reflected light exports and transmitted light output is mutually angle, after reflected light is exported and is again totally reflected by total reflective mirror (2-2), make transmitted light export formation first and restraint parallel beam, make reflected light form the second bundle parallel beam; Second bundle parallel beam is radiated at Moire fringe generator input face after beam expanding lens (2-3); First bundle parallel beam is radiated on power detector (4-1) window.
2. a kind of laser facula width of measuring device according to claim 1, is characterized in that: described mechanical scanner (3) comprises guide rail (3-1), slide block (3-2), leading screw (3-3), servo step motor (3-4), track base (3-5); Guide rail (3-1) is parallel fixing along track base (3-5) length direction; Leading screw (3-3) is fixed on track base (3-5) by left and right fixed mount; Leading screw (3-3) is socketed slide block (3-2) by screw thread; Leading screw (3-3) one end is coaxially connected with servo step motor (3-4); When servo step motor (3-4) works, leading screw (3-3) is driven to rotate; The slide block (3-2) of screw thread socket moves left and right along leading screw (3-3).
3. a kind of laser facula width of measuring device according to claim 2, is characterized in that: indication grating (3-7) is fixed in described track base (3-5) one end, slide block (3-2) one end nonadjustable signal grating (3-6); Scale grating (3-6) is parallel with indication grating (3-7), the grating of scale grating (3-6) and indication grating (3-7) forms angle, slide block (3-2) moves when servo step motor (3-4) works, and makes to restraint parallel beam by scale grating (3-6) with second of indication grating (3-7) and is radiated on Moire fringe generator input face after beam expanding lens (2-3).
4. a kind of laser facula width of measuring device according to claim 1, is characterized in that: described photodetector unit (4) comprises optical power detector (4-1), photoelectric cell group (4-2); Described power detector (4-1) is pyroelectric detector, has the edge of a knife (3-5) in pyroelectric detector front end, blocks by the edge of a knife (3-5) is mobile before pyroelectric detector.
5. a kind of laser facula width of measuring device according to claim 4, is characterized in that: described photoelectric cell group (4-2) number by 2 integral multiple be distributed in comprise a light and shade cycle Moire fringe in.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520721094.1U CN204924186U (en) | 2015-09-17 | 2015-09-17 | Wide measuring device of laser facula |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520721094.1U CN204924186U (en) | 2015-09-17 | 2015-09-17 | Wide measuring device of laser facula |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106500604A (en) * | 2016-11-10 | 2017-03-15 | 西安科技大学 | Flat bump height measuring device and method based on shadow |
| CN106769735A (en) * | 2017-01-18 | 2017-05-31 | 西安科技大学 | A kind of apparatus for measuring dust concentration |
| CN107063174A (en) * | 2017-05-05 | 2017-08-18 | 杭州欧镭激光技术有限公司 | A kind of laser measuring device for measuring and its application process |
| CN109193322A (en) * | 2018-10-19 | 2019-01-11 | 无锡市大华激光设备有限公司 | A kind of multichannel solid state laser light path calibration system |
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2015
- 2015-09-17 CN CN201520721094.1U patent/CN204924186U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106500604A (en) * | 2016-11-10 | 2017-03-15 | 西安科技大学 | Flat bump height measuring device and method based on shadow |
| CN106769735A (en) * | 2017-01-18 | 2017-05-31 | 西安科技大学 | A kind of apparatus for measuring dust concentration |
| CN106769735B (en) * | 2017-01-18 | 2022-08-12 | 西安科技大学 | Dust concentration measuring device |
| CN107063174A (en) * | 2017-05-05 | 2017-08-18 | 杭州欧镭激光技术有限公司 | A kind of laser measuring device for measuring and its application process |
| WO2018201566A1 (en) * | 2017-05-05 | 2018-11-08 | 杭州欧镭激光技术有限公司 | Laser detection device, and application method thereof |
| CN109193322A (en) * | 2018-10-19 | 2019-01-11 | 无锡市大华激光设备有限公司 | A kind of multichannel solid state laser light path calibration system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151230 Termination date: 20160917 |
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| CF01 | Termination of patent right due to non-payment of annual fee |