CN205826560U - A kind of optics device for fast detecting of spherome surface slight flaws - Google Patents
A kind of optics device for fast detecting of spherome surface slight flaws Download PDFInfo
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- CN205826560U CN205826560U CN201620558640.9U CN201620558640U CN205826560U CN 205826560 U CN205826560 U CN 205826560U CN 201620558640 U CN201620558640 U CN 201620558640U CN 205826560 U CN205826560 U CN 205826560U
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- prism
- reflecting mirror
- amici prism
- light
- object lens
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A kind of optics device for fast detecting of spherome surface slight flaws, including polarization laser, the outbound course of described polarization laser arranges the first polaroid and Amici prism, the reflecting light side of described Amici prism is sequentially arranged 1/2 wave plate, Wo Shi prism and object lens, and described object lens are tested surface away from the opposite side of Wo Shi prism；The refraction light emission side of described Amici prism arranges reflecting mirror, the light direction of described reflecting mirror be sequentially arranged the second polaroid, the second converging lenses and for realize shear interference detection the first photodetector, described reflecting mirror, Amici prism, 1/2 wave plate, Wo Shi prism and object lens are positioned on same optical axis.This utility model provides the optics device for fast detecting of a kind of spherome surface slight flaws promoting detection efficiency, minimizing False Rate.
Description
Technical field
This utility model relates to spherome surface slight flaws detection field, the inspection of a kind of spherome surface slight flaws
Survey device.
Background technology
The detection of existing spherome surface slight flaws typically all uses human eye detection, and detection efficiency is low, False Rate is high.
Summary of the invention
In order to overcome the deficiency that detection efficiency is relatively low, False Rate is higher of existing spherome surface slight flaws detection mode,
This utility model provides the optics of a kind of spherome surface slight flaws promoting detection efficiency, minimizing False Rate quickly to detect dress
Put.
This utility model solves its technical problem and be the technical scheme is that
A kind of optics device for fast detecting of spherome surface slight flaws, including polarization laser, described polarization laser
Outbound course the first polaroid and Amici prism are set, the reflecting light side of described Amici prism is sequentially arranged 1/2 wave plate, wet
Family name's prism and object lens, described object lens are tested surface away from the opposite side of Wo Shi prism；The refraction light emission side cloth of described Amici prism
Putting reflecting mirror, the light direction of described reflecting mirror is sequentially arranged the second polaroid, the second converging lenses and for realizing shear interference
First photodetector of detection, described reflecting mirror, Amici prism, 1/2 wave plate, Wo Shi prism and object lens are positioned at same optical axis
On.
Further, described detection device also includes that the second converging lenses, described second converging lenses are positioned at reflecting mirror away from light splitting
The side of prism, the light direction of described second converging lenses and the second photodetector for realizing scattering detection, described the
Two converging lenses and Amici prism are positioned on same optical axis.
Preferably, the angle of reflection of described Amici prism is 90 °.
Described reflecting mirror is the reflecting mirror of 90 ° of angles of reflection.
Technology of the present utility model is contemplated that: the spherome surface slight flaws device for fast detecting of optically-based detection technique
Can be used for quickly detecting smooth sphere surface, detection resolution is up to micron order.According to low-angle shear interference for surface
The high-sensitivity detection effect of minute scratch marks, submicron order step etc., and surface blemish is to scattering of light effect, at a dress
In putting, and in the optical texture of a same light path, realize low-angle shear interference and scattering detection, can effectively detect spheroid table
The various slight flaws in face.
The beneficial effects of the utility model are mainly manifested in: promote detection efficiency, reduce False Rate.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the optics device for fast detecting of spherome surface slight flaws.
Fig. 2 is polarization theory figure.
Fig. 3 is the light path schematic diagram of Wo Shi prism.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is further described.
Reference Fig. 1～Fig. 3, the optics device for fast detecting of a kind of spherome surface slight flaws, including polarization laser 1,
The outbound course of described polarization laser 1 arranges the first polaroid 2 and Amici prism 3, the reflecting light side of described Amici prism 3
Being sequentially arranged 1/2 wave plate 4, Wo Shi prism 5 and object lens 6, described object lens 6 are tested surface away from the opposite side of Wo Shi prism 5；Described
The refraction light emission side of Amici prism 3 arranges reflecting mirror 7, the light direction of described reflecting mirror 7 be sequentially arranged the second polaroid 8, the
Two converging lenses 9 and for realize shear interference detection the first photodetector 10, described reflecting mirror 7, Amici prism 3,1/2 ripple
Sheet 4, Wo Shi prism 5 and object lens 6 are positioned on same optical axis.
Further, described detection device also include the second converging lenses 11, described second converging lenses 11 be positioned at reflecting mirror 7 away from
The side of Amici prism, the light direction of described second converging lenses 11 and the second photodetector for realizing scattering detection
12, described second converging lenses 11 is positioned on same optical axis with Amici prism 3.
Preferably, the angle of reflection of described Amici prism 3 is 90 °.Described reflecting mirror 7 is the reflecting mirror of 90 ° of angles of reflection.
In the present embodiment, polarization laser a branch of collimated light sent incides an Amici prism BS after polaroid
On, the effect of polaroid is the linear polarization of the light sent by polarization laser to be improved further.
Amici prism BS incides 1/2 wave plate after the incident illumination of 50% is reflected 90 °, and 50% light intensity additionally passes through
Optical system is left after BS.
The optical axis of 1/2 wave plate becomes the angle of 22.5 ° with the polarization direction of incident polarized light.So polarized beam passes through
After this 1/2 wave plate, its polarization direction will rotate 45 °, be still 22.5 ° with the absolute value of wave plate optical axis included angle, but at wave plate optical axis
Another side, as shown in Figure 2.
This light beam is again incident on a Wo Shi prism, and the o optical axis of this Wo Shi prism is at 45 ° with the polarization direction of incident illumination,
This polarized beam is after this Wo Shi prism, and the light good general of 50% becomes o light beam, and the light good general of other 50% becomes e light beam,
The polarization direction of o light and e light is mutually perpendicular to.Wo Shi prism will make this two bundle o light and e light leave Wo Shi prism be mutual it
Between produce a angle the least, as shown in Figure 3.
Angle and the focal length of object lens between O light and e light determine and focus on the distance between latter two luminous point through object lens,
If the angle between o light and e light is the least, then the distance between two photoelectricity can be made to reach several micron.Gather through object lens
Defocused two luminous points (o light and e light) through the reflection of measured surface and scattering, along with the most contrary direction through object lens
By Wo Shi prism, 1/2 wave plate, again through polaroid 2 after a small-bore reflecting mirror reflection after BS.The work of polaroid 2
With being that component along polaroid 2 optical axis direction in o light and e light is taken out, and after a converging lenses 2 again on photodetector
Formed and interfere.
Adjust Wo Shi prism position in the horizontal direction, during so that measured surface is a plane, o light and e light edge
The respective impact cancellation of polaroid 2 optical axis direction so that the light intensity on photodetector is close to zero, it is achieved dark field detection condition.
When measured surface has small difference in height between two luminous points, such as cut, pit, pit, spot etc., then o
The optical path difference of light and e light will change so that must interfere no longer cancellation on photodetector.The now light of photodetector
Powerful in zero, produce photosignal.The power of photosignal depends on the optical path difference between two luminous points, reaches 1/ in optical path difference
When 4 wavelength or its odd-multiple, reach maximum.Such that it is able to detect the most delicately and obtain slight flaws on smooth surface.
The light returned from measured surface scattering, due to the optical axis of angle deviating object lens, when returning optical system, will walk around
Small reflector and arrive converging lenses 1, through converging lenses 1 focus on after reach a high-sensitive photodetector APD (photomultiplier tube
Or avalanche diode), by the detection to scattered light, can detect that shear interference is difficult to the flaw detected, as when two light
Optical path difference between point is the situation of the integral multiple of 1/2 wavelength.
During detection, rotate tested spheroid, on recording light electric explorer on light intensity signal and APD light intensity signal, to letter
After number processing, by the position signalling of spheroid and shear interference signal and the flaw of the tested spherome surface of scattered light intensity signal syntheses
Defect figure, completes detection.
The scheme of the present embodiment, uses Wo Shi prism, object lens, the second polaroid, 1/2 wave plate, small-bore reflecting mirror and the
One photodetector realizes measuring the shear interference of smooth surface, can allow part larger angle by small-bore reflecting mirror
Scattered light is walked around reflecting mirror and is entered the second photodetector, can realize shear interference detection surface blemish and scattering detection table simultaneously
Face flaw.Furthermore, by rotating tested spheroid, such as all standing spinning solution, the inspection of all standing to spherome surface flaw can be realized
Survey.
Claims (4)
1. the optics device for fast detecting of a spherome surface slight flaws, it is characterised in that: described detection device includes polarization
Laser instrument, the outbound course of described polarization laser arranges the first polaroid and Amici prism, reflecting of described Amici prism
Light side is sequentially arranged 1/2 wave plate, Wo Shi prism and object lens, and described object lens are tested surface away from the opposite side of Wo Shi prism；Described
The refraction light emission side of Amici prism arranges reflecting mirror, and the light direction of described reflecting mirror is sequentially arranged the second polaroid, the second remittance
Poly-mirror and for realize shear interference detection the first photodetector, described reflecting mirror, Amici prism, 1/2 wave plate, Wo Shi rib
Mirror and object lens are positioned on same optical axis.
2. the optics device for fast detecting of spherome surface slight flaws as claimed in claim 1, it is characterised in that: described detection
Device also includes that the second converging lenses, described second converging lenses are positioned at the reflecting mirror side away from Amici prism, and described second converges
The light direction of mirror and the second photodetector for realizing scattering detection, described second converging lenses and Amici prism be positioned at
On one optical axis.
3. the optics device for fast detecting of spherome surface slight flaws as claimed in claim 1 or 2, it is characterised in that: described
The angle of reflection of Amici prism is 90 °.
4. the optics device for fast detecting of spherome surface slight flaws as claimed in claim 1 or 2, it is characterised in that: described
Reflecting mirror is the reflecting mirror of 90 ° of angles of reflection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620558640.9U CN205826560U (en) | 2016-06-08 | 2016-06-08 | A kind of optics device for fast detecting of spherome surface slight flaws |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620558640.9U CN205826560U (en) | 2016-06-08 | 2016-06-08 | A kind of optics device for fast detecting of spherome surface slight flaws |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205826560U true CN205826560U (en) | 2016-12-21 |
Family
ID=57569156
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620558640.9U Withdrawn - After Issue CN205826560U (en) | 2016-06-08 | 2016-06-08 | A kind of optics device for fast detecting of spherome surface slight flaws |
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| Country | Link |
|---|---|
| CN (1) | CN205826560U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911072A (en) * | 2016-06-08 | 2016-08-31 | 浙江工业大学 | Optical rapid detection device for minor flaws on surfaces of spheres |
-
2016
- 2016-06-08 CN CN201620558640.9U patent/CN205826560U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105911072A (en) * | 2016-06-08 | 2016-08-31 | 浙江工业大学 | Optical rapid detection device for minor flaws on surfaces of spheres |
| CN105911072B (en) * | 2016-06-08 | 2018-09-07 | 浙江工业大学 | A kind of optics device for fast detecting of spherome surface slight flaws |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161221 Effective date of abandoning: 20180907 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20161221 Effective date of abandoning: 20180907 |