CN105911072B - A kind of optics device for fast detecting of spherome surface slight flaws - Google Patents
A kind of optics device for fast detecting of spherome surface slight flaws Download PDFInfo
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- CN105911072B CN105911072B CN201610405113.9A CN201610405113A CN105911072B CN 105911072 B CN105911072 B CN 105911072B CN 201610405113 A CN201610405113 A CN 201610405113A CN 105911072 B CN105911072 B CN 105911072B
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- amici prism
- speculum
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- shi
- fast detecting
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- 238000001514 detection method Methods 0.000 claims abstract description 25
- 230000003287 optical effect Effects 0.000 claims abstract description 22
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 230000001737 promoting effect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/951—Balls
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Polarising Elements (AREA)
Abstract
A kind of optics device for fast detecting of spherome surface slight flaws, including polarization laser, the first polarizing film and Amici prism is arranged in the outbound course of the polarization laser, the reflecting light side of the Amici prism is sequentially arranged 1/2 wave plate, Wo Shi prisms and object lens, and the other side of the object lens far from Wo Shi prisms is tested surface；The refraction light emission side of the Amici prism arranges speculum, the light direction of the speculum is sequentially arranged the second polarizing film, the second converging lenses and the first photodetector detected for realizing shear interference, and the speculum, Amici prism, 1/2 wave plate, Wo Shi prisms and object lens are located in same optical axis.The present invention provides a kind of optics device for fast detecting for the spherome surface slight flaws for promoting detection efficiency, reducing False Rate.
Description
Technical field
The present invention relates to spherome surface slight flaws detection field, the detection of especially a kind of spherome surface slight flaws fills
It sets.
Background technology
Existing spherome surface slight flaws detection is generally used human eye detection, detection efficiency is low, False Rate is high,
Invention content
The detection efficiency of existing spherome surface slight flaws detection mode is relatively low, the higher deficiency of False Rate in order to overcome,
The present invention provides a kind of optics device for fast detecting for the spherome surface slight flaws for promoting detection efficiency, reducing False Rate.
The technical solution adopted by the present invention to solve the technical problems is：
A kind of optics device for fast detecting of spherome surface slight flaws, including polarization laser, the polarization laser
Outbound course the first polarizing film and Amici prism be set, the reflecting light side of the Amici prism is sequentially arranged 1/2 wave plate, wet
Family name's prism and object lens, the other side of the object lens far from Wo Shi prisms are tested surface；The refraction light emission side cloth of the Amici prism
Speculum is set, the light direction of the speculum is sequentially arranged the second polarizing film, the first converging lenses and for realizing shear interference
First photodetector of detection, the speculum, Amici prism, 1/2 wave plate, Wo Shi prisms and object lens are located at same optical axis
On.
Further, the detection device further includes the second converging lenses, and second converging lenses are located at speculum far from light splitting
The side of prism, the light direction of second converging lenses arranges the second photodetector for realizing scattering detection, described
Second converging lenses are located at Amici prism in same optical axis.
Preferably, the angle of reflection of the Amici prism is 90 °.
The speculum is the speculum of 90 ° of angles of reflection.
The present invention technical concept be：Spherome surface slight flaws device for fast detecting based on optical detective technology can be right
Smooth sphere surface is used for quickly detecting, and detection resolution is up to micron order.It is small for surface according to low-angle shear interference
The highly sensitive detection result and surface blemish of cut, submicron order step etc. are to the scattering effect of light, in a device
In, and realize that low-angle shear interference and scattering detect in the optical texture of a same light path, it can effectively detect spherome surface
Various slight flaws.
Beneficial effects of the present invention are mainly manifested in：It promotes detection efficiency, reduce False Rate.
Description of the drawings
Fig. 1 is the schematic diagram of the optics device for fast detecting of spherome surface slight flaws.
Fig. 2 is polarization theory figure.
Fig. 3 is the light path schematic diagram of Wo Shi prisms.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings.
Referring to Fig.1~Fig. 3, a kind of optics device for fast detecting of spherome surface slight flaws, including polarization laser 1,
The first polarizing film 2 and Amici prism 3, the reflecting light side of the Amici prism 3 is arranged in the outbound course of the polarization laser 1
1/2 wave plate 4, Wo Shi prisms 5 and object lens 6 are sequentially arranged, the other side of the object lens 6 far from Wo Shi prisms 5 is tested surface；It is described
The refraction light emission side of Amici prism 3 arranges speculum 7, and the light direction of the speculum 7 is sequentially arranged the second polarizing film 8, the
One converging lenses 9 and the first photodetector 10 detected for realizing shear interference, the speculum 7, Amici prism 3,1/2 wave
Piece 4, Wo Shi prisms 5 and object lens 6 are located in same optical axis.
Further, the detection device further includes the second converging lenses 11, and it is separate that second converging lenses 11 are located at speculum 7
The side of Amici prism, the light direction of second converging lenses 11 arrange the second photodetector for realizing scattering detection
12, second converging lenses 11 are located at Amici prism 3 in same optical axis.
Preferably, the angle of reflection of the Amici prism 3 is 90 °.The speculum 7 is the speculum of 90 ° of angles of reflection.
In the present embodiment, an Amici prism BS is incident on after polarizing film by a branch of collimated light that polarization laser is sent out
On, the effect of polarizing film is to further increase the linear polarization of the light sent out by polarization laser.
Amici prism BS will be incident on 1/2 wave plate after 50% 90 ° of the reflection of generation incident light, and 50% light intensity in addition penetrates
Optical system is left after BS.
The optical axis of 1/2 wave plate and the polarization direction of incident polarized light are at one 22.5 ° of angle.So light beam passes through
Its polarization direction will rotate 45o after 1/2 wave plate, and the absolute value with wave plate optical axis included angle is still 22.5 °, but in wave plate optical axis
Another side, as shown in Figure 2.
The light beam is again incident on a Wo Shi prism, and the o optical axises of the Wo Shi prisms and the polarization direction of incident light are at 45 °,
The light beam is after the Wo Shi prisms, and 50% light intensity will become o light beams, and in addition 50% light intensity will become e light beams,
The polarization direction of o light and e light is mutually perpendicular to.Wo Shi prisms will make this two beams o light and e light leave Wo Shi prisms be it is mutual it
Between generate a very little angle, as shown in Figure 3.
The focal length of angle and object lens between o light and e light is determined focuses the distance between latter two luminous point by object lens,
If the angle very little between o light and e light, can make the distance between two luminous points reach several microns.It is poly- by object lens
Defocused two luminous points (o light and e light) pass through the reflection and scattering of measured surface, and edge is with original opposite direction after object lens
Through Wo Shi prisms, 1/2 wave plate, using the second polarizing film 8 after a small-bore speculum reflection after BS.Second polarizing film
8 effect is will to be taken out along the component of 8 optical axis direction of the second polarizing film in o light and e light, and after first converging lenses 9
Interference is formed on photodetector.
Adjust the position of Wo Shi prisms in the horizontal direction, when can so that measured surface is a plane, o light and e light edge
The respective impact cancellation of second polarizing film, 8 optical axis direction so that the light intensity on photodetector realizes dark field detection item close to zero
Part.
When measured surface has small difference in height between two luminous points, such as cut, point, pit, spot etc., then o
The optical path difference of light and e light will change so that must interfere no longer cancellation on photodetector.The light of photodetector at this time
It is powerful in zero, generate photosignal.The power of photosignal depends on the optical path difference between two luminous points, reaches 1/ in optical path difference
When 4 wavelength or its odd-multiple, reach maximum.Slight flaws are obtained on smooth surface so as to delicately detect very much.
The light come is scattered back from measured surface, since the optical axis of angle deviating object lens will be bypassed when returning to optical system
Small reflector and reach the second converging lenses 11, through the second converging lenses 11 focusing after reach a highly sensitive photodetector APD
(photomultiplier or avalanche diode) can detect the flaw that shear interference is not easy to detect by the detection to scattering light
Defect, as worked as the case where optical path difference between two luminous points is the integral multiple of 1/2 wavelength.
When detection, rotate and be tested sphere, record on photodetector light intensity signal and APD it is upper light intensity signal, to believing
After number being handled, the position signal of sphere is synthesized to the flaw of tested spherome surface with shear interference signal and scattered light intensity signal
Defect figure completes detection.
The scheme of the present embodiment, using Wo Shi prisms, object lens, the second polarizing film, 1/2 wave plate, small-bore speculum and
One photodetector, which is realized, measures the shear interference of smooth surface, and the dissipating of part larger angle can be allowed by small-bore speculum
It penetrates light and enters the second photodetector around speculum, shear interference detection surface blemish and scattering detection surface can be achieved at the same time
Flaw.Furthermore sphere is tested by rotation, such as all standing spinning solution, it can be achieved that all standing to spherome surface flaw detects.
Claims (4)
1. a kind of optics device for fast detecting of spherome surface slight flaws, it is characterised in that：The detection device includes polarization
The first polarizing film is arranged for the outbound course of laser, the polarization laser and Amici prism, the Amici prism reflect
Light side is sequentially arranged 1/2 wave plate, Wo Shi prisms and object lens, and the other side of the object lens far from Wo Shi prisms is tested surface；It is described
The refraction light emission side of Amici prism arranges that speculum, the light direction of the speculum are sequentially arranged the second polarizing film, the first remittance
Poly- mirror and the first photodetector detected for realizing shear interference, the speculum, Amici prism, 1/2 wave plate, Wo Shi ribs
Mirror and object lens are located in same optical axis.
2. the optics device for fast detecting of spherome surface slight flaws as described in claim 1, it is characterised in that：The detection
Device further includes the second converging lenses, and second converging lenses are located at side of the speculum far from Amici prism, second convergence
The light direction of mirror arranges that the second photodetector for realizing scattering detection, second converging lenses are located at Amici prism
In same optical axis.
3. the optics device for fast detecting of spherome surface slight flaws as claimed in claim 1 or 2, it is characterised in that：It is described
The angle of reflection of Amici prism is 90 °.
4. the optics device for fast detecting of spherome surface slight flaws as claimed in claim 1 or 2, it is characterised in that：It is described
Speculum is the speculum of 90 ° of angles of reflection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610405113.9A CN105911072B (en) | 2016-06-08 | 2016-06-08 | A kind of optics device for fast detecting of spherome surface slight flaws |
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| CN201610405113.9A CN105911072B (en) | 2016-06-08 | 2016-06-08 | A kind of optics device for fast detecting of spherome surface slight flaws |
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| CN105911072A CN105911072A (en) | 2016-08-31 |
| CN105911072B true CN105911072B (en) | 2018-09-07 |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI705244B (en) * | 2018-07-31 | 2020-09-21 | 由田新技股份有限公司 | Semiconductor defects inspection apparatus |
| CN109490313B (en) * | 2018-11-09 | 2022-08-23 | 中国科学院光电技术研究所 | Automatic detection device and method for surface defects of large-caliber curved surface optical element |
| CN112229854B (en) * | 2020-09-03 | 2022-10-11 | 中国科学院上海光学精密机械研究所 | Device and method for measuring surface defects of spherical optical element |
| CN112903713A (en) * | 2021-03-09 | 2021-06-04 | 哈尔滨工业大学 | Dark field imaging and spatial phase-shifting interference combined microsphere defect detection device and method |
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|---|---|---|---|---|
| US4464050A (en) * | 1981-02-07 | 1984-08-07 | Olympus Optical Co., Ltd. | Apparatus for detecting optically defects |
| CN200969000Y (en) * | 2006-06-21 | 2007-10-31 | 中国科学院力学研究所 | Long working distance interference microscope |
| CN201622124U (en) * | 2010-04-09 | 2010-11-03 | 中国科学院上海光学精密机械研究所 | Polarization lateral shearing interferometer |
| CN102707452A (en) * | 2012-07-02 | 2012-10-03 | 北京理工大学 | Double separation wollaston prism high-resolution simultaneous polarization-imaging system |
| CN204536217U (en) * | 2015-04-13 | 2015-08-05 | 无锡迈福光学科技有限公司 | A kind of surface blemish optical detection apparatus |
| CN205826560U (en) * | 2016-06-08 | 2016-12-21 | 浙江工业大学 | A kind of optics device for fast detecting of spherome surface slight flaws |
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| JP4931502B2 (en) * | 2006-07-13 | 2012-05-16 | 株式会社日立ハイテクノロジーズ | Surface inspection method and inspection apparatus |
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| US4464050A (en) * | 1981-02-07 | 1984-08-07 | Olympus Optical Co., Ltd. | Apparatus for detecting optically defects |
| CN200969000Y (en) * | 2006-06-21 | 2007-10-31 | 中国科学院力学研究所 | Long working distance interference microscope |
| CN201622124U (en) * | 2010-04-09 | 2010-11-03 | 中国科学院上海光学精密机械研究所 | Polarization lateral shearing interferometer |
| CN102707452A (en) * | 2012-07-02 | 2012-10-03 | 北京理工大学 | Double separation wollaston prism high-resolution simultaneous polarization-imaging system |
| CN204536217U (en) * | 2015-04-13 | 2015-08-05 | 无锡迈福光学科技有限公司 | A kind of surface blemish optical detection apparatus |
| CN205826560U (en) * | 2016-06-08 | 2016-12-21 | 浙江工业大学 | A kind of optics device for fast detecting of spherome surface slight flaws |
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