CN206192274U - The sample surface illumination optical spot position monitoring light path - Google Patents
The sample surface illumination optical spot position monitoring light path Download PDFInfo
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- CN206192274U CN206192274U CN201620903538.8U CN201620903538U CN206192274U CN 206192274 U CN206192274 U CN 206192274U CN 201620903538 U CN201620903538 U CN 201620903538U CN 206192274 U CN206192274 U CN 206192274U
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- light
- sample surfaces
- speculum
- spot position
- reflected light
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Abstract
The utility model belongs to the technical field of optics, a the sample surface illumination optical spot position monitoring light path is disclosed, include: the light source, light source oblique incidence extremely the sample surface, part light certainly the sample surface forms the reverberation in penetrating the gas that makes the return trip empty, the speculum, the speculum is received the reverberation, and change the transmission direction of reverberation, position detector, position detector receives the speculum changes the reverberation behind the transmission direction. The utility model provides an among the prior art method through direct detection illumination area territory scattered light realize the sample surface illumination optical spot position prison time measuring, the detectable signal weakens the problem that maybe can't detect the signal. Through the indirect the sample surface illumination optical spot position that obtains in the position of surveying the the sample surface reverberation, weakening of detectable signal has been avoided to be applicable to the extremely weak condition of sample scattering.
Description
Technical field
The utility model is related to optical technical field, more particularly to a kind of sample surfaces illumination spot position monitoring light path.
Background technology
The monitoring of sample surfaces hot spot lighting position is the necessary component of many optical detecting instruments, lighting position monitoring
Should be according to instrument light path design realization in itself.The lighting position monitoring of major part instrument is main at present uses direct detection lighting area
The form of domain scattering light realizes that this mode has the following problems：The program directly collect emitted in illumination region dissipate
Light is penetrated, its position is measured using position sensor, penetrating light due to illumination region usually contains the flashlight for needing to collect, people
Generally separate portion collection light using laser beam splitter and carry out position sensing.This scheme can directly obtain illumination optical position,
But because it has taken out the part light that illumination region sends, the decrease of detectable signal may be caused；Even work as sample surfaces very
When smooth, the scattering light of illumination region is very weak, and photodetector cannot also be detected.Such as：It is brilliant for using light scattering measurement
Illumination region can be just sent compared with strong scattering when the optical detecting instrument of circular surfaces defect, and if only if illumination region existing defects
Light, according to this scheme, the position sensor most of the time will be detected less than any signal.
Utility model content
The embodiment of the present application is solved in the prior art by providing a kind of sample surfaces illumination spot position monitoring light path
By direct detection illumination region scatter light method realize sample surfaces illumination spot position monitoring when, detectable signal weaken or
The problem of signal cannot be detected.
The embodiment of the present application provides a kind of sample surfaces illumination spot position monitoring light path, including：Light source, the light source is oblique
The sample surfaces are incident to, part light is emitted back towards in air from the sample surfaces, form reflected light；Speculum, the reflection
Mirror receives the reflected light, and changes the transmission direction of the reflected light；Position sensor, the position sensor receives described
Speculum changes the reflected light after transmission direction.
Preferably, the speculum is multiple, and the multiple mirror parallel is placed；The multiple speculum is used for institute
The transmission direction for stating reflected light is varied multiple times, and the reflection luminous energy is transferred to the position specified in three dimensions.
Preferably, the speculum is total reflective mirror.
Preferably, the sample surfaces illumination spot position monitoring light path also includes：Reflected light recycling module；Beam splitter,
The beam splitter and the mirror parallel are placed；The beam splitter enters to the reflected light that the speculum changes after transmission direction
Row beam splitting, forms two-way light beam；, through the beam splitter back reflection to the position sensor, another road light beam is through institute for light beam all the way
The reflected light recycling module is transmitted through after stating beam splitter.
Preferably, the position sensor is received, and the power of the light beam from the beam splitter reflection is the first work(
Rate；What the reflected light recycling module was received, the power of the light beam from beam splitter transmission is the second power；Described
One power is less than second power.
Preferably, the reflected light recycling module is ligh trap.
Preferably, the light source is laser.
Preferably, when the light source exposes to sample surfaces in a converging fashion, the sample surfaces illumination spot position
Monitoring light path also includes convergent lens, after the convergent lens is arranged in the speculum；The convergent lens adjustment is incident to
The size of hot spot in the position sensor plane.
One or more technical schemes provided in the embodiment of the present application, at least have the following technical effect that or advantage：
In the embodiment of the present application, sample surfaces illumination spot is obtained indirectly by detecting the position of sample surfaces reflected light
Position, it is to avoid the decrease of detectable signal, and scatter extremely weak situation suitable for sample.
Further, in the embodiment of the present application, because the rougher sample intensity of reflected light in surface is also relatively strong therefore right
The requirement of sample surfaces roughness is relatively low.
Further, in the embodiment of the present application, position sensor can be located at sample lower section, make the spatial design of instrument more
Tool flexibility.
Further, in the embodiment of the present application, by sample surfaces illumination spot position monitoring and reflected light recycling module
It is combined, both saves instrument space, useful flashlight will not be lost again.
Brief description of the drawings
In order to illustrate more clearly of the technical scheme in the present embodiment, embodiment will be described below needed for be used
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are one embodiment of the present utility model, for this
For the those of ordinary skill of field, on the premise of not paying creative work, can also obtain other according to these accompanying drawings
Accompanying drawing.
Fig. 1 deviates for hot spot that position sensor that the utility model embodiment is provided is obtained deviates with sample surfaces hot spot
Corresponding relation；
A kind of structural representation of sample surfaces illumination spot position monitoring light path that Fig. 2 is provided for the utility model embodiment
Figure.
Wherein, 1- light sources, 2- speculums, 3- position sensors, 4- beam splitters, 5- reflected light recycling modules.
Specific embodiment
The embodiment of the present application is solved in the prior art by providing a kind of sample surfaces illumination spot position monitoring light path
Solve the method that light is scattered by direct detection illumination region in the prior art and realize sample surfaces illumination spot position monitoring
When, detectable signal weakens or cannot detect the problem of signal.
The technical scheme of the embodiment of the present application is in order to solve the above technical problems, general thought is as follows：
A kind of sample surfaces illumination spot position monitoring light path, including：Light source, the light source is oblique to be incident upon the sample table
Face, part light is emitted back towards in air from the sample surfaces, forms reflected light；Speculum, the speculum receives the reflected light,
And change the transmission direction of the reflected light；Position sensor, the position sensor receives the speculum and changes transmission side
Reflected light backward.
Because this programme position sensor is not direct detection sample surfaces facula position, therefore the BEAM SQUINT for detecting
It is not equal to sample surfaces BEAM SQUINT, it is necessary to find both corresponding relations.As shown in figure 1, specific method is：Set up two two
Dimension rectangular coordinate system (coordinate system 1 and coordinate system 2), wherein the center of coordinate system 1 be hot spot without skew time beam center point, be taken into
It is x-axis (reference axis x1) that plane is penetrated with sample surfaces boundary line, and its vertical direction is y-axis (reference axis y1)；Coordinate system 2 is located at position
Detector detection plane is put, center is the origin of coordinates, x-axis and the specific direction of y-axis such as Fig. 1 institutes when equally taking hot spot without skew
Show, and take speculum and beam splitter and acute angle is presented for θ with sample surfaces.
It is that 2 coordinates are (a2, b2) when position sensor detects spot center respective coordinates, then sample shows spot center
Respective coordinates are that 1 coordinate (a1, b1) meets relation：
When placed multiple speculums change reflected light light paths, corresponding relation above also needs to adjustment, should be using same
The method of sample, sets up two two-dimensional coordinate systems in sample surfaces and position sensor surface respectively, and defines hot spot without departing from being
Central point is origin, finds the corresponding relation that hot spot deviates the coordinate under two coordinate systems.
In order to be better understood from above-mentioned technical proposal, below in conjunction with Figure of description and specific embodiment to upper
Technical scheme is stated to be described in detail.
Embodiment 1：
A kind of sample surfaces illumination spot position monitoring light path, including light source 1, speculum 2, position sensor 3.
The light source 1 is laser；The speculum 2 is total reflective mirror.
The light source 1 is oblique to be incident upon the sample surfaces, and part light is emitted back towards in air from the sample surfaces, forms reflection
Light；The speculum 2 receives the reflected light, and changes the transmission direction of the reflected light；The position sensor 3 receives institute
State the reflected light after speculum changes transmission direction.
The present embodiment obtains sample surfaces illumination spot position indirectly by detecting the position of sample surfaces reflected light, it is to avoid
The decrease of detectable signal, and scatter extremely weak situation suitable for sample.Due to the rougher sample intensity of reflected light in surface
Relatively by force, the requirement therefore to sample surfaces roughness is relatively low.Position sensor can be located at sample lower section, make the spatial design of instrument
More flexibility.
Embodiment 2：
A kind of sample surfaces illumination spot position monitoring light path, including light source 1, speculum 2, position sensor 3.
When the light source 1 exposes to sample surfaces in a converging fashion, the sample surfaces illumination spot position monitoring light
Road also includes convergent lens, after the convergent lens is arranged in the speculum 2.
The light source 1 is laser；The speculum 2 is total reflective mirror.
The light source 1 is oblique to be incident upon the sample surfaces, and part light is emitted back towards in air from the sample surfaces, forms reflection
Light；The speculum 2 receives the reflected light, and changes the transmission direction of the reflected light；The convergent lens adjustment is described
Speculum changes the spot size of the reflected light after transmission direction；The position sensor 3 is received to be adjusted by the convergent lens
Reflected light after whole.
The present embodiment obtains sample surfaces illumination spot position indirectly by detecting the position of sample surfaces reflected light, it is to avoid
The decrease of detectable signal, and scatter extremely weak situation suitable for sample.Due to the rougher sample intensity of reflected light in surface
Relatively by force, the requirement therefore to sample surfaces roughness is relatively low.Position sensor can be located at sample lower section, make the spatial design of instrument
More flexibility.
Embodiment 3：
A kind of sample surfaces illumination spot position monitoring light path, including light source 1, speculum 2, position sensor 3.
The light source 1 is laser；The speculum 2 is total reflective mirror.
The speculum 2 is multiple, and the multiple mirror parallel is placed.
The light source 1 is oblique to be incident upon sample surfaces, and part light is emitted back towards in air from the sample surfaces, forms reflected light；
The multiple speculum is varied multiple times to the transmission direction of the reflected light；The position sensor 3 receives the multiple
Speculum changes the reflected light after transmission direction.
The present embodiment obtains sample surfaces illumination spot position indirectly by detecting the position of sample surfaces reflected light, it is to avoid
The decrease of detectable signal, and scatter extremely weak situation suitable for sample.Due to the rougher sample intensity of reflected light in surface
Relatively by force, the requirement therefore to sample surfaces roughness is relatively low.Position sensor can be located at sample lower section, make the spatial design of instrument
More flexibility.Additionally, set multiple speculums can repeatedly be turned to reflected light, reflected light is transferred in three dimensions
Specified location, and other components and light path in instrument are bypassed, further increase the flexibility of instrument space design.
Embodiment 4：
As shown in Fig. 2 a kind of sample surfaces illumination spot position monitoring light path, including light source 1, speculum 2, position sensing
Device 3, beam splitter 4, reflected light recycling module 5.
The light source 1 is laser；The speculum 2 is total reflective mirror；The reflected light recycling module 5 is ligh trap.
The beam splitter 4 and the speculum 2 are placed in parallel.
The light source 1 is oblique to be incident upon the sample surfaces, and part light is emitted back towards in air from the sample surfaces, forms reflection
Light；The speculum 2 receives the reflected light, and changes the transmission direction of the reflected light；4 pairs of reflections of the beam splitter
The reflected light that mirror changes after transmission direction is split, and forms two-way light beam；Light beam is through the back reflection of the beam splitter 4 to institute all the way
Position sensor 3 is stated, another road light beam is transmitted through the reflected light recycling module 5 after the beam splitter 4.
What the position sensor 3 was received, the power of the light beam from the beam splitter reflection is the first power；It is described
What reflected light recycling module 5 was received, the power of the light beam from beam splitter transmission is the second power；First power
Less than second power.
The present embodiment obtains sample surfaces illumination spot position indirectly by detecting the position of sample surfaces reflected light, it is to avoid
The decrease of detectable signal, and scatter extremely weak situation suitable for sample.Due to the rougher sample intensity of reflected light in surface
Relatively by force, the requirement therefore to sample surfaces roughness is relatively low.Position sensor can be located at sample lower section, make the spatial design of instrument
More flexibility.Additionally, sample surfaces illumination spot position monitoring is combined with reflected light recycling module, instrument is both saved
Space, will not lose useful flashlight again.
A kind of sample surfaces illumination spot position monitoring light path that the utility model embodiment is provided at least includes following skill
Art effect：
1st, in the embodiment of the present application, sample surfaces illumination light is obtained indirectly by detecting the position of sample surfaces reflected light
Spot position, it is to avoid the decrease of detectable signal, and scatter extremely weak situation suitable for sample.
2nd, in the embodiment of the present application, because the rougher sample intensity of reflected light in surface is also relatively strong, therefore to sample table
The requirement of surface roughness is relatively low.
3rd, in the embodiment of the present application, position sensor can be located at sample lower section, make the spatial design of instrument more flexible
Property.
4th, in the embodiment of the present application, sample surfaces illumination spot position monitoring is combined with reflected light recycling module,
Both instrument space is saved, useful flashlight will not be lost again.
It should be noted last that, above specific embodiment is only used to illustrate the technical solution of the utility model rather than limit
System, although being described in detail to the utility model with reference to example, it will be understood by those within the art that, can be right
The technical solution of the utility model is modified or equivalent, without deviating from the spirit and model of technical solutions of the utility model
Enclose, it all should cover in the middle of right of the present utility model.
Claims (8)
1. a kind of sample surfaces illumination spot position monitoring light path, it is characterised in that the sample surfaces illumination spot position prison
Light-metering road includes：
Light source, the light source is oblique to be incident upon the sample surfaces, and part light is emitted back towards in air from the sample surfaces, forms reflection
Light；
Speculum, the speculum receives the reflected light, and changes the transmission direction of the reflected light；
Position sensor, the position sensor receives the reflected light after the speculum changes transmission direction.
2. sample surfaces illumination spot position monitoring light path as claimed in claim 1, it is characterised in that the speculum is many
Individual, the multiple mirror parallel is placed；
The multiple speculum is used to that the transmission direction of the reflected light to be varied multiple times, and is transferred to the reflection luminous energy
The position specified in three dimensions.
3. sample surfaces illumination spot position monitoring light path as claimed in claim 1, it is characterised in that the speculum is complete
Anti- mirror.
4. sample surfaces illumination spot position monitoring light path as claimed in claim 1, it is characterised in that the sample surfaces shine
Bright Photon beam position monitoring light path also includes：
Reflected light recycling module；
Beam splitter, the beam splitter and the mirror parallel are placed；The beam splitter changes transmission direction to the speculum
Reflected light afterwards is split, and forms two-way light beam；Light beam is through the beam splitter back reflection to the position sensor all the way, separately
Light beam is transmitted through the reflected light recycling module after the beam splitter all the way.
5. sample surfaces illumination spot position monitoring light path as claimed in claim 4, it is characterised in that the position sensor
Receive, the power of the light beam from the beam splitter reflection is the first power；What the reflected light recycling module was received,
The power of the light beam from beam splitter transmission is the second power；
First power is less than second power.
6. sample surfaces illumination spot position monitoring light path as claimed in claim 4, it is characterised in that the reflected light is reclaimed
Module is ligh trap.
7. sample surfaces illumination spot position monitoring light path as claimed in claim 1, it is characterised in that the light source is laser
Device.
8. sample surfaces illumination spot position monitoring light path as claimed in claim 1, it is characterised in that the light source is assembling
Mode when exposing to sample surfaces, the sample surfaces illumination spot position monitoring light path also includes convergent lens, the meeting
After poly- lens are arranged in the speculum；
The convergent lens adjustment is incident to the size of hot spot in the position sensor plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620903538.8U CN206192274U (en) | 2016-08-18 | 2016-08-18 | The sample surface illumination optical spot position monitoring light path |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620903538.8U CN206192274U (en) | 2016-08-18 | 2016-08-18 | The sample surface illumination optical spot position monitoring light path |
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| CN206192274U true CN206192274U (en) | 2017-05-24 |
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| CN201620903538.8U Active CN206192274U (en) | 2016-08-18 | 2016-08-18 | The sample surface illumination optical spot position monitoring light path |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645895A (en) * | 2018-06-27 | 2020-01-03 | 中国航发商用航空发动机有限责任公司 | System and method for measuring width of nose cone of fan blade front edge reinforcing edge |
-
2016
- 2016-08-18 CN CN201620903538.8U patent/CN206192274U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645895A (en) * | 2018-06-27 | 2020-01-03 | 中国航发商用航空发动机有限责任公司 | System and method for measuring width of nose cone of fan blade front edge reinforcing edge |
| CN110645895B (en) * | 2018-06-27 | 2021-05-14 | 中国航发商用航空发动机有限责任公司 | System and method for measuring width of nose cone of fan blade front edge reinforcing edge |
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