CN205808675U - A kind of meter level yardstick many optical axises Parallel testing device - Google Patents

A kind of meter level yardstick many optical axises Parallel testing device Download PDF

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Publication number
CN205808675U
CN205808675U CN201620759146.9U CN201620759146U CN205808675U CN 205808675 U CN205808675 U CN 205808675U CN 201620759146 U CN201620759146 U CN 201620759146U CN 205808675 U CN205808675 U CN 205808675U
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CN
China
Prior art keywords
calibration portion
autocollimator
parallel
guide rail
optical axis
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Expired - Fee Related
Application number
CN201620759146.9U
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Chinese (zh)
Inventor
曹庭分
陈海平
熊召
袁晓东
刘长春
叶海仙
易聪之
罗欢
全旭松
魏春蓉
周海
王晓红
郑万国
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Laser Fusion Research Center China Academy of Engineering Physics
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Laser Fusion Research Center China Academy of Engineering Physics
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Priority to CN201620759146.9U priority Critical patent/CN205808675U/en
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Abstract

The utility model discloses a kind of meter level yardstick many optical axises Parallel testing device, it includes the first calibration portion, the second calibration portion, the 3rd calibration portion, the first translation mechanism and control system, described first calibration portion includes autocollimator one, fixed reference and the first support platform, described autocollimator one and fixed reference are sequentially arranged in described first support platform, described second calibration portion and the 3rd calibration portion are arranged on described first translation mechanism, and described second calibration portion and the 3rd calibration portion are connected with control system.This utility model device meets many plain shaft parallelisms detection demand, uses this detection device to carry out the detection of many plain shaft parallelisms, and detection region realizes automatization up to several meter Jian Fang, detection process.

Description

A kind of meter level yardstick many optical axises Parallel testing device
Technical field
This utility model relates to engineering optics detection field, is specifically related to a kind of meter level yardstick many optical axises Parallel testing dress Put.
Background technology
In the optical system of some meter level yardsticks, there is many plain shaft parallelisms testing requirement, need suitably to detect equipment And detection method.Conventional detection method includes projecting target plate method, heavy caliber collimator method and pentaprism method.Projection target plate method Major advantage be cheap, can use in the wild, precision is higher.Major defect is that optical axis set-up procedure is complicated, operator Member is more.Traditional heavy caliber collimator can meet many plain shaft parallelisms detection demand of some scale scope, and advantage is Error link is few, and shortcoming is when bore is bigger, and its volume and weight is the biggest, needs to form fixing detection platform and examines Surveying, detection motility is poor.The maximum shortcoming of pentaprism method be pentaprism in test moving process, its characteristic direction any Change all can cause optical axis deviation, produces and measures additive error, affects final certainty of measurement.
In order to adapt to existing optical system many plain shaft parallelisms accuracy of detection and simplicity demand, need a kind of digitized Detection method.It is strong, simple to operate that it has the suitability, is independent of human eye subjective judgment, it is possible to provides high accuracy data objectively Etc. advantage.
Utility model content
For above-mentioned problems of the prior art, this utility model provides a kind of meter level yardstick many optical axises Parallel testing Device, meets many plain shaft parallelisms detection demand, uses this device to carry out the detection of many plain shaft parallelisms, and detection region is up to several meters Square, detection process realizes automatization.
For achieving the above object, the following technical scheme of this utility model offer: a kind of meter level yardstick many optical axises Parallel testing Device, it includes the first calibration portion, the second calibration portion, the 3rd calibration portion, the first translation mechanism and control system, described second school Quasi-portion and the 3rd calibration portion are arranged on described first translation mechanism, described second calibration portion and the 3rd calibration portion and control system Connect;
The optical axis one that first calibration portion sends is perpendicular to the optical axis two that the second calibration portion sends, the light that the second calibration portion sends Axle two is perpendicular to the optical axis three that the 3rd calibration portion sends.
Further, described first calibration portion includes autocollimator one, fixed reference and the first support platform, described auto-collimation Instrument one and fixed reference are sequentially arranged in described first support platform;Described second calibration portion includes the first wedge mirror, auto-collimation Instrument two and the first parallel microrobotics mechanism, described first wedge mirror, autocollimator the two, first parallel microrobotics mechanism are fixing to be connected;Described 3rd calibration portion includes the second wedge mirror, autocollimator the three, second parallel microrobotics mechanism, described second wedge mirror, autocollimator three, Two parallel microrobotics mechanism are fixing to be connected.
Further, described first translation mechanism is provided with the first guide rail, the second guide rail, crossbeam and longeron, and described longeron is led To being assemblied on described first guide rail, described crossbeam guides and is assemblied on described second guide rail, and described first guide rail is perpendicular to institute Stating the second guide rail, described second calibration portion is arranged on described longeron, and described 3rd calibration portion is arranged on described crossbeam.
Further, also include the 4th calibration portion, the 5th calibration portion, the 6th calibration portion and the second translation mechanism, the described 4th Calibration portion is provided with autocollimator four and the second support platform, and described autocollimator four is arranged in described second support platform, Described 5th calibration portion and the 6th calibration portion are arranged on described second translation mechanism.
Further, the optical axis four that the 4th calibration portion sends is perpendicular to the optical axis five that the 5th calibration portion sends.
Further, described 4th calibration portion is provided with autocollimator four, and described 5th calibration portion includes the 3rd wedge mirror, autocollimatic Straight instrument the five and the 3rd parallel microrobotics mechanism, described 3rd wedge mirror, autocollimator the five and the 3rd parallel microrobotics mechanism are fixing to be connected, institute The 6th calibration portion that states includes the 4th wedge mirror, guide light reflection mirror and the 4th parallel microrobotics mechanism, described 4th wedge mirror, guide light reflection mirror Connection fixing with the 4th parallel microrobotics mechanism.
Further, described guide light reflection mirror is positioned at bottom or the top in the 3rd calibration portion, is reflected back by guide light reflection mirror Optical axis and the optical axis three that sends of the 3rd calibration portion consistent.
Further, described second translation mechanism is provided with the 3rd guide rail and the 4th guide rail, and described 3rd guide rail is perpendicular to Four guide rails, described 5th calibration portion and the 6th calibration portion are installed on described 3rd guide rail.
The beneficial effects of the utility model are as follows:
This utility model provide a kind of high-precision meter level yardstick many plain shaft parallelisms detection device, its simple in construction, The suitability is strong, simple to operate, data precision is high, motility high level error link is few, meets many plain shaft parallelisms detection demand;Autocollimatic Wedge mirror is installed on straight instrument, and micromotion mechanism adjusts the angle of wedge mirror in parallel, in conjunction with control system so that detection region up to Number meter Jian Fang, it is achieved that the automatization of alignment procedure.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present embodiment 1;
Fig. 2 is the structural representation of the present embodiment 2;
In figure: 1 array mirror, 2 first calibration portions, 3 fixed references, 4 second calibration portions, 5 the 3rd schools Quasi-portion, 6 first support platforms, 7 first translation mechanisms, 71 first guide rails, 72 second guide rails, 8 the 6th calibration portions, 9 the 5th calibration portions, 10 the 4th calibration portions, 11 second support platforms, 12 second translation mechanisms, 121 the 3rd guide rails, 122 the 4th guide rails, 13 optical axises one, 14 optical axises two, 15 optical axises three, 16 optical axises four, 17 optical axises five.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the technical solution of the utility model, below in conjunction with of the present utility model Accompanying drawing, carries out clear, complete description to the technical solution of the utility model, and based on the embodiment in the application, this area is general Other similar embodiment that logical technical staff is obtained on the premise of not making creative work, all should belong to the application The scope of protection.
A kind of meter level yardstick many optical axises Parallel testing device, it includes the 2, second calibration portion the 4, the 3rd calibration of the first calibration portion Portion's the 5, first translation mechanism 7 and control system, wherein: described first calibration portion 2 includes autocollimator one, fixed reference and first Support platform 6, described autocollimator one and fixed reference 3 are sequentially arranged in described first support platform 6;Described second calibration Portion 4 includes the first wedge mirror, autocollimator two and the first parallel microrobotics mechanism, and described first wedge mirror, autocollimator two, first are in parallel Micromotion mechanism is fixing to be connected;Described 3rd calibration portion 5 includes the second wedge mirror, autocollimator the three, second parallel microrobotics mechanism, described Second wedge mirror, autocollimator the three, second parallel microrobotics mechanism are fixing to be connected;The optical axis 1 that autocollimator one sends is perpendicular to certainly The optical axis 2 14 that collimator two sends, the optical axis 2 14 that autocollimator two sends is perpendicular to the optical axis three that autocollimator three sends 15, described second calibration portion 4 and the 3rd calibration portion 5 are arranged on described first translation mechanism 7, described second calibration portion 4 and Three calibration portions 5 are connected with control system.
Described first translation mechanism 7 is provided with first guide rail the 71, second guide rail 72, crossbeam and longeron, and described longeron guides Being assemblied on described first guide rail 71, described crossbeam guides and is assemblied on described second guide rail 72, and described first guide rail 71 is vertical In described second guide rail 72, described second calibration portion 4 is arranged on described longeron, and described 3rd calibration portion 5 is arranged on described horizontal stroke Liang Shang.By the first guide rail 71 and horizontal and vertical movement of the second guide rail 72, drive the horizontal and vertical fortune of crossbeam and longeron Dynamic, and then the second calibration portion 4 and the 3rd calibration portion 5 and the first calibration portion 2 position correction, and micromotion mechanism in parallel can be realized Adjusting the angle of wedge mirror so that the incident light axis of wedge mirror and reflection optical axis keeping parallelism, finally realize between its optical axis is parallel Property detection.
Described Parallel testing device also includes the 4th calibration portion of calibration portion the 9, the 6th of calibration portion the 10, the 5th 8 and the second translation Mechanism 12, described 4th calibration portion 10 is provided with autocollimator four and the second support platform 11, and described autocollimator four is arranged on In described second support platform 11, described 5th calibration portion 9 and the 6th calibration portion 8 are arranged on described second translation mechanism 12.
Described 5th calibration portion 9 includes the 3rd wedge mirror, autocollimator the five and the 3rd parallel microrobotics mechanism, described 3rd wedge Mirror, autocollimator the five and the 3rd parallel microrobotics mechanism are fixing to be connected;Described 6th calibration portion 10 includes the 4th wedge mirror, guide light reflection Mirror and the 4th parallel microrobotics mechanism, described 4th wedge mirror, guide light reflection mirror and the 4th parallel microrobotics mechanism are fixing to be connected, described in lead Light reflection mirror is positioned at bottom or the top in the 3rd calibration portion 5, the optical axis being reflected back by guide light reflection mirror and 5, the 3rd calibration portion The optical axis 3 15 gone out is consistent;Described second translation mechanism 12 is additionally provided with the 3rd guide rail 121 and the 4th guide rail 122, and the described 5th Calibration portion 9 and the 6th calibration portion 8 are arranged on described 3rd guide rail 121, and described 3rd guide rail 121 is perpendicular to the 4th guide rail 122, 3rd guide rail 121 can move left and right by the 4th guide rail 122, to realize the 5th calibration portion 9 and the 6th calibration portion 8 and the 4th calibration portion Position correction, the optical axis 4 16 that autocollimator four sends is perpendicular to the optical axis 5 17 that autocollimator five sends.
Embodiment one:
As it is shown in figure 1, when tested array mirror 1 normal is parallel with the optical axis 3 15 that autocollimator three sends, directly The depth of parallelism between hot-wire array reflecting mirror 1 normal.
S11, the basis reference being autocollimator one with fixed reference 3, autocollimator one completes collimation with this benchmark;
S12, on the basis of the crosshair center of autocollimator one self, by before and after autocollimator one observation motion the The attitude of one wedge mirror, and by control system, the first parallel microrobotics mechanism adjusts the attitude of the first wedge mirror before and after moving, first Autocollimator two is adjusted so that it is be received from the optical axis 1 that collimator one sends, so by the first guide rail 71 and the second guide rail 72 The angle of the first wedge mirror is adjusted afterwards so that it is the optical axis being reflected back by the first wedge mirror and auto-collimation by the first parallel microrobotics mechanism The optical axis 1 that instrument one sends is consistent all the time, thus before and after ensure that autocollimator two motion, attitude is consistent, i.e. autocollimator two Before and after motion, optical axis is parallel;
S13, autocollimator two complete pose adjustment through above-mentioned steps, with the crosshair center of autocollimator two self On the basis of, in like manner, by the attitude of the second wedge mirror before and after its observation motion, by control system, the second parallel microrobotics mechanism is adjusted The attitude of the second wedge mirror before and after whole motion, i.e. adjusts the angle of the second wedge mirror so that it is the optical axis being reflected back by the second wedge mirror with The optical axis 2 14 that autocollimator two sends is consistent all the time, consistent with attitude before and after ensureing autocollimator three motion, i.e. autocollimator Before and after three motions, optical axis is parallel, when the optical axis 15 that autocollimator three sends is with tested array mirror 1 normal parallel, so that it may straight Connect the depth of parallelism between hot-wire array reflecting mirror 1 normal, carry out the collimation detection of two-dimentional many optical axises with this.
Embodiment two:
As in figure 2 it is shown, when tested array mirror 1 normal is non-parallel with the optical axis 3 15 that autocollimator three sends, i.e. When tested array mirror 1 normal and optical axis 3 15 angle at 45 ° of autocollimator three, need to be in the bottom in the 3rd calibration portion 5 (or top) increases guide light reflection mirror, the optical axis 3 15 that the optical axis being reflected back by guide light reflection mirror and the 3rd calibration portion 5 are sent Unanimously, make light path return, thus complete the collimation detection of two-dimentional many optical axises.
Specifically include following steps:
S21: autocollimator four completes pose adjustment, on the basis of the crosshair center of autocollimator four self, passes through The attitude of the 3rd wedge mirror before and after its observation motion, by control system, the 3rd parallel microrobotics mechanism adjusts the 3rd wedge before and after motion The attitude of mirror is consistent with attitude before motion, i.e. first passes through the 3rd guide rail 121 and the 4th guide rail 122 adjusts autocollimator five, make It is received from the optical axis 4 16 that collimator four sends, and is then adjusted the angle of the 3rd wedge mirror by the 3rd parallel microrobotics mechanism, makes Its optical axis being reflected back by the 3rd wedge mirror is the most consistent with the optical axis 4 16 that autocollimator four sends, thus ensure that auto-collimation Before and after instrument five motion, attitude is consistent, and i.e. before and after autocollimator five motion, optical axis is parallel.
After S22: autocollimator five completes pose adjustment, on the basis of the crosshair center of autocollimator five self, from The attitude of the 4th wedge mirror before and after collimator five observation motion, on the basis of the attitude before motion, by control system, the 4th is in parallel It is consistent that micromotion mechanism adjusts the attitude attitude front with motion of the 4th wedge mirror before and after motion, i.e. first passes through the 3rd guide rail 121 and the The position of guide light reflection mirror is calibrated by four guide rails 122, is then adjusted the angle of the 4th wedge mirror by the 4th parallel microrobotics mechanism Degree, is made the optical axis being reflected back by the 4th wedge mirror the most consistent with the optical axis 5 17 that autocollimator five sends, thus ensure that and lead Before and after light reflection mirror motion, attitude is consistent, and i.e. normal parallel before and after the motion of guide light reflection mirror, forms reflected in parallel benchmark.
S23: repeat step S11-S13 of the present embodiment 1, carries out the parallel row detection of two-dimentional many optical axises with this.
Although moreover, it will be appreciated that this specification is been described by according to embodiment, but the most each embodiment only wraps Containing an independent technical scheme, this narrating mode of description is only that for clarity sake those skilled in the art should Description can also be formed those skilled in the art through appropriately combined as an entirety, the technical scheme in each embodiment May be appreciated other embodiments.

Claims (8)

1. meter level yardstick many optical axises Parallel testing device, it is characterised in that: it include the first calibration portion, the second calibration portion, 3rd calibration portion, the first translation mechanism and control system, described second calibration portion and the 3rd calibration portion are arranged on described first flat On moving mechanism, described second calibration portion and the 3rd calibration portion are connected with control system;
The optical axis one that first calibration portion sends is perpendicular to the optical axis two that the second calibration portion sends, the optical axis two that the second calibration portion sends It is perpendicular to the optical axis three that the 3rd calibration portion sends.
2. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 1, it is characterised in that: described first calibration Portion includes that autocollimator one, fixed reference and the first support platform, described autocollimator one and fixed reference are sequentially arranged at institute State in the first support platform;Described second calibration portion includes the first wedge mirror, autocollimator two and the first parallel microrobotics mechanism, described First wedge mirror, autocollimator the two, first parallel microrobotics mechanism are fixing to be connected;Described 3rd calibration portion includes the second wedge mirror, autocollimatic Straight instrument the three, second parallel microrobotics mechanism, described second wedge mirror, autocollimator the three, second parallel microrobotics mechanism are fixing to be connected.
3. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 2, it is characterised in that: described first translation Mechanism is provided with the first guide rail, the second guide rail, crossbeam and longeron, and described longeron guides and is assemblied on described first guide rail, described Crossbeam guides and is assemblied on described second guide rail, and described first guide rail is perpendicular to described second guide rail, described second calibration portion peace Being contained on described longeron, described 3rd calibration portion is arranged on described crossbeam.
4. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 1, it is characterised in that also include the 4th school Quasi-portion, the 5th calibration portion, the 6th calibration portion and the second translation mechanism, described 4th calibration portion is provided with autocollimator four and second Support platform, described autocollimator four is arranged in described second support platform, described 5th calibration portion and the 6th calibration portion peace It is contained on described second translation mechanism.
5. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 4, it is characterised in that the 4th calibration portion is sent out The optical axis four gone out is perpendicular to the optical axis five that the 5th calibration portion sends.
6. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 5, it is characterised in that described 4th calibration Portion is provided with autocollimator four, and described 5th calibration portion includes the 3rd wedge mirror, autocollimator the five and the 3rd parallel microrobotics mechanism, institute Stating the 3rd wedge mirror, the fixing connection of autocollimator the five and the 3rd parallel microrobotics mechanism, described 6th calibration portion includes the 4th wedge mirror, leads Light reflection mirror and the 4th parallel microrobotics mechanism, described 4th wedge mirror, guide light reflection mirror and the 4th parallel microrobotics mechanism are fixing to be connected.
7. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 6, it is characterised in that described guide light reflection Mirror is positioned at the optical axis that bottom or the top in the 3rd calibration portion, the optical axis being reflected back by guide light reflection mirror and the 3rd calibration portion are sent Three is consistent.
8. a kind of meter level yardstick many optical axises Parallel testing device as claimed in claim 7, it is characterised in that described second translation Mechanism is provided with the 3rd guide rail and the 4th guide rail, and described 3rd guide rail is perpendicular to the 4th guide rail, described 5th calibration portion and the 6th Calibration portion is installed on described 3rd guide rail.
CN201620759146.9U 2016-07-19 2016-07-19 A kind of meter level yardstick many optical axises Parallel testing device Expired - Fee Related CN205808675U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106197950A (en) * 2016-07-19 2016-12-07 中国工程物理研究院激光聚变研究中心 A kind of meter level yardstick many optical axises Parallel testing device and detection method
CN109238174A (en) * 2018-09-05 2019-01-18 长春理工大学 A kind of multi-axis turntable intercept and Intersection comprehensive test device and method
CN114236743A (en) * 2021-12-16 2022-03-25 北京环境特性研究所 Calibration system and method for plane mirror array

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106197950A (en) * 2016-07-19 2016-12-07 中国工程物理研究院激光聚变研究中心 A kind of meter level yardstick many optical axises Parallel testing device and detection method
CN109238174A (en) * 2018-09-05 2019-01-18 长春理工大学 A kind of multi-axis turntable intercept and Intersection comprehensive test device and method
CN114236743A (en) * 2021-12-16 2022-03-25 北京环境特性研究所 Calibration system and method for plane mirror array
CN114236743B (en) * 2021-12-16 2023-09-29 北京环境特性研究所 Calibration system and method for plane reflector array

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Termination date: 20170719