CN205679342U - LTCC Fabry-perot optical fiber high-temp pressure sensor and sensor-based system - Google Patents
LTCC Fabry-perot optical fiber high-temp pressure sensor and sensor-based system Download PDFInfo
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- CN205679342U CN205679342U CN201620450511.8U CN201620450511U CN205679342U CN 205679342 U CN205679342 U CN 205679342U CN 201620450511 U CN201620450511 U CN 201620450511U CN 205679342 U CN205679342 U CN 205679342U
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Abstract
The utility model is a kind of LTCC Fabry-perot optical fiber high-temp pressure sensor and sensor-based system, and this sensor is mainly made up of pedestal, presser sensor diaphragm, optical fiber, lock pin and caudal peduncle.The utility model uses LTCC technology integration to manufacture presser sensor diaphragm and the pedestal of directly contact high temperature, with high temperature glue, optical fiber is fixed in caudal peduncle and lock pin, ceramic sintering technology or high temperature glue is used to be connected lock pin with pedestal, fiber end face and presser sensor diaphragm is made to be placed in parallel composition Fa-Po cavity, the membrane deflection change being caused by optical fiber sensing technology measurement pressure, thus carry out pressure measxurement.The utility model solves thermal stress under high temperature and does not mate the sensor failure problem causing.In addition, use Optical Fiber Transmission can completely cut off high temperature, eliminate the impact on signal processing circuit for the high temperature.Under hyperthermal environments, made pressure sensor can realize wide band original position pressure measxurement.
Description
Technical field
The utility model relates to technical field of optical fiber sensing, specifically a kind of LTCC Fabry-perot optical fiber high-temp pressure sensor and
Sensor-based system.
Background technology
The operating temperature of space flight and aviation engine is generally greater than 1300 DEG C, and the operating temperature of rocket pusher is up to 3000
DEG C, and conventional pressure sensor includes piezoresistance sensor, electric resistance sensor, piezoelectric transducer, silica fibre sensor etc., its
The temperature that works long hours is the highest is less than 900 DEG C, far below the operating temperature of engine, limits pressure sensor and navigates in space flight
Application in empty aircraft.Therefore, superhigh temperature pressure sensor controls in health status monitoring, the flight of space flight and aviation aircraft
There is urgent demand with design optimization aspect.
At present, the demand and pressure sensor heatproof in order to solve superhigh temperature pressure sensor low between contradiction, in reality
The main following two alternative that uses in the application of border: one is the pressure sensor using water-cooled or air cooling, its operating temperature
1000 DEG C can be reached.Two is the measuring method that long pressure guiding pipe combines Pressure of Ambient Temperature sensor, and temperature range is higher.Both sides
Method all has obvious shortcoming: water-cooled or air cooling system are more complicated, weight will be caused to be greatly increased and water-cooled or gas
The safety problem of cold generation, limits application in space flight and aviation engine for the type sensor；Combine normal temperature at pressure guiding pipe
In the measuring method of pressure sensor, pressure guiding pipe plays transmission pressure and the function of isolation heat transmission, so not only can cause
Ex situ accuracy of measurement is not high, and impulse can reduce the dynamic characteristic of measurement, it is impossible to meet the demand of real-time feedback control.
Therefore, the pressure measxurement under hyperthermal environments is a bottleneck of measurement technology at present in situ.
In sum, the pressure parameter in site measurement in hyperthermal environments has urgent demand and great challenge, anxious
Need to study further.
Content of the invention
The purpose of this utility model is to solve above-mentioned problems of the prior art, and provides a kind of LTCC optical fiber
Method amber high-temp pressure sensor and sensor-based system.
The utility model is achieved by the following technical solution:
A kind of LTCC Fabry-perot optical fiber high-temp pressure sensor, including base of ceramic, ceramic insertion core, caudal peduncle and optical fiber；Pottery
It is provided with inner chamber in pedestal, between inner chamber and base of ceramic bottom surface, form ceramic pressure sensitive diaphragm, base of ceramic, inner chamber and pottery
Presser sensor diaphragm uses LTCC (LTCC) technology integration to be fabricated by；Ceramic insertion core is fixed on base of ceramic
On, and the bottom of ceramic insertion core extends in inner chamber；Caudal peduncle is fixed on the top of ceramic insertion core, optical fiber be fixed on ceramic insertion core and
In caudal peduncle；The exiting surface of ceramic insertion core and optical fiber and ceramic pressure sensitive diaphragm are placed in parallel composition Fa-Po cavity；Base of ceramic, interior
Chamber, ceramic pressure sensitive diaphragm, ceramic insertion core, caudal peduncle and optical fiber are all located on same axis.
The exiting surface of described ceramic insertion core and optical fiber is all through milled processed, to ensure the reflection of outgoing fiber end face light
Rate.
Reflection light one side (i.e. the inner surface of ceramic pressure sensitive diaphragm) of described ceramic pressure sensitive diaphragm is coated with instead
Penetrate film (as passed through sputtering technology), to ensure the reflectivity of optical fiber transmission light.
Further, the preparation method of LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model, including as
Lower step:
1) prepared by base of ceramic: base of ceramic and inner chamber thereof, ceramic pressure sensitive diaphragm are to use LTCC technology integration
It is fabricated by, specifically, a) form the positioning hole of ceramic chips, via and inner hole structure by puncher；B) by positioning
The ceramic chips of multilayer 100 μ m-thick is carried out lamination by hole, and ensures the perpendicularity of via and endoporus；C) entirety after lamination being completed
Structure for vacuum encapsulation is placed in laminating machine and is laminated；D) overall structure after lamination is sintered i.e. in sintering furnace
Can；Wherein, from bottom to top counting, ground floor ceramic chips leads to as ceramic pressure sensitive diaphragm, the thickness of ceramic pressure sensitive diaphragm
The design crossing ground floor ceramic chips thickness realizes；Second layer ceramic chips offers endoporus on layer 6 ceramic chips, five endoporus
Laminating the inner chamber forming base of ceramic, diameter of bore determines the effective diameter of ceramic pressure sensitive diaphragm, ceramic pressure sensitive membrane
The effective diameter of piece is realized by the design of diameter of bore；Layer 7 ceramic chips offers via on n-th layer ceramic chips, some
Via laminates and is formed for fixing the pore structure of ceramic insertion core, and the degree of depth that ceramic insertion core is fixed in base of ceramic is by some mistakes
The design of hole total depth (that is: the gross thickness of N-6 piece ceramic chips) realizes；
2) base of ceramic and ceramic insertion core are fixed: the bottom of ceramic insertion core is passed through ceramic high temperature sintering technology or high-temp glue
In via on base of ceramic for the hydropexis, it is ensured that ceramic insertion core is vertical with base of ceramic to be fixed；
3) ceramic insertion core and caudal peduncle are fixed: be crimped in caudal peduncle the top of ceramic insertion core by press-connection machine.
4) optical fiber and ceramic insertion core, caudal peduncle are fixed: optical fiber is solidified in ceramic insertion core and caudal peduncle by high-temp glue glue knot,
The thermal coefficient of expansion of high temperature glue and optical fiber, ceramic insertion core close, specifically, high temperature glue is injected caudal peduncle and ceramic insertion core
Jack in, then insert optical fibers in the jack of caudal peduncle and ceramic insertion core, finally heated make high temperature the glue solidifies.
LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model, utilizes pottery, optical fiber, thermal coefficient of expansion to connect
The exotic materials such as near high temperature glue, and use LTCC (LTCC) technology integration processing ceramic pedestal and
Inner chamber, ceramic pressure sensitive diaphragm, utilize the advantages such as Fibre Optical Sensor high sensitivity, electromagnetism interference, compact conformation simultaneously, solves
3 big problems that high-temp pressure sensor is primarily present: the first, under high temperature, sensitive material or mechanism lost efficacy；2nd, different materials heat is swollen
The thermal stress that swollen coefficient difference causes is not mated, and then causes sensing head under high temperature to damage；3rd, high temperature is right along the conduction of signal hot line
The impact of signal processing circuit, it is achieved that the measurement of hyperthermal environments downforce signal.Meanwhile, the LTCC Fiber Optic Sensor of said structure
Amber high-temp pressure sensor also has simple in construction, processing technology is simple, be easy to the advantage that manufactures.
Further, the invention also discloses one based on LTCC Fabry-perot optical fiber high temperature pressure described in the utility model
The sensor-based system of sensor, this system is based on design on LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model
, this system includes LTCC Fabry-perot optical fiber high-temp pressure sensor and signal demodulating system；
Signal demodulating system include SLD light source, the first fiber coupler, the second fiber coupler, the first wave filter, second
Wave filter, the first photodetector, the second photodetector, orthogonal signalling processing unit and interface module, wherein, the first optical fiber
Coupler is connected with SLD light source and the second fiber coupler respectively, the second fiber coupler again respectively with the first wave filter and
Two wave filters connect, and the first wave filter is connected with the first photodetector again, and the second wave filter is again with the second photodetector even
Connecing, the first photodetector and the second photodetector are connected with orthogonal signalling processing unit again simultaneously, and orthogonal signalling process single
Unit is connected with interface module again；
The optical fiber of LTCC Fabry-perot optical fiber high-temp pressure sensor is by quartz single mode fiber and the first of signal demodulating system
Fiber coupler connects.
In native system, the output light of SLD light source enters LTCC Fabry-perot optical fiber high temperature pressure by the first fiber coupler and passes
Sensor；After the interference signal that LTCC Fabry-perot optical fiber high-temp pressure sensor returns is again by the first fiber coupler, by second
Fiber coupler is divided into identical two-beam；This two-beam arrives separately at respectively after the first wave filter and the second filter filtering
First photodetector and the second photodetector, and then it is converted into signal of telecommunication output；Two path signal enters orthogonal signalling
Processor enters row operation, obtains the change of cavity length amount of Fa-Po cavity, it is achieved pressure sensing.
Compared with prior art, the beneficial effects of the utility model are:
The utility model uses method (the i.e. described LTCC technology) integration of LTCC to manufacture directly contact height
The sensor critical component (base of ceramic and ceramic pressure sensitive diaphragm) of temperature, can solve under high temperature owing to thermal stress is not mated
The sensor degradation problem causing；Fiber end face and ceramic pressure sensitive diaphragm are placed in parallel mechanics amber by the utility model
Chamber carries out pressure measxurement.Owing to optical fiber and pottery belong to exotic material, solve sensitive material or mechanism under hot environment
Problem of Failure；By optical fiber sensing method, the utility model realizes that pressure signal is measured, can solve simultaneously high temperature to signal at
That manages circuit affects problem.Use Optical Fiber Transmission can completely cut off high temperature, eliminate the impact on signal processing circuit for the high temperature.In superelevation
Under temperature environment, the utility model sensor can realize wide band original position pressure measxurement.Additionally, LTCC light of the present utility model
The structure of nanofarads amber high-temp pressure sensor is very simple, and this greatly reduces processing and debugging difficulty.
Brief description
Fig. 1 is the structural representation of the utility model LTCC Fabry-perot optical fiber high-temp pressure sensor.
Fig. 2 is the structural representation of the sensor-based system based on LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model
Figure.
In figure: 1-base of ceramic, 2-ceramic insertion core, 3-caudal peduncle, 4-optical fiber, 5-inner chamber, 6-ceramic pressure sensitive diaphragm, 7-
Fa-Po cavity, 8-reflectance coating；
102-SLD light source, 103-the first fiber coupler, 104-the second fiber coupler, 105-the first wave filter, 106-
Second wave filter, 107-the first photodetector, 108-the second photodetector, 109-orthogonal signalling processing unit, 110-connect
Mouth die block, 111-quartz single mode fiber.
Detailed description of the invention
Below in conjunction with accompanying drawing, the utility model is further described:
As it is shown in figure 1, a kind of LTCC Fabry-perot optical fiber high-temp pressure sensor, including base of ceramic the 1st, ceramic insertion core the 2nd, caudal peduncle
3 and optical fiber 4；It is provided with inner chamber 5 in base of ceramic 1, between inner chamber 5 and base of ceramic 1 bottom surface, form ceramic pressure sensitive diaphragm 6,
Base of ceramic the 1st, inner chamber 5 and ceramic pressure sensitive diaphragm 6 use LTCC technology integration to be fabricated by；Ceramic insertion core 2 is fixed on
On base of ceramic 1, and the bottom of ceramic insertion core 2 extends in inner chamber 5；Caudal peduncle 3 is fixed on the top of ceramic insertion core 2, and optical fiber 4 is fixed
In ceramic insertion core 2 and caudal peduncle 3；The exiting surface of ceramic insertion core 2 and optical fiber 4 and ceramic pressure sensitive diaphragm 6 are placed in parallel composition
Fa-Po cavity 7；Base of ceramic the 1st, inner chamber the 5th, ceramic pressure sensitive diaphragm the 6th, ceramic insertion core the 2nd, caudal peduncle 3 and optical fiber 4 are all located at same axle
On line.
When being embodied as, the exiting surface of described ceramic insertion core 2 and optical fiber 4 is all through milled processed.Described pottery pressure
The reflection light one side of power sensitive diaphragm 6 is coated with reflectance coating 8.
The preparation method of LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model, comprises the steps:
1) prepared by base of ceramic 1: base of ceramic 1 and inner chamber thereof the 5th, ceramic pressure sensitive diaphragm 6 is to use LTCC technology one
Body is fabricated by, specifically, a forms the positioning hole of ceramic chips, via and inner hole structure by puncher；B is by determining
The ceramic chips of multilayer 100 μ m-thick is carried out lamination by position hole, and ensures the perpendicularity of via and endoporus；C lamination is completed after whole
The encapsulation of body structure for vacuum is placed in laminating machine and is laminated；Ceramic chips structure after d will be laminated is sintered in sintering furnace
?；Wherein, from bottom to top counting, ground floor ceramic chips is as ceramic pressure sensitive diaphragm 6, the thickness of ceramic pressure sensitive diaphragm 6
Degree is realized by the design of ground floor ceramic chips thickness；Second layer ceramic chips offers endoporus on layer 6 ceramic chips, five
Endoporus laminates the inner chamber 5 forming base of ceramic 1, and diameter of bore determines the effective diameter of ceramic pressure sensitive diaphragm 6, ceramic pressure
The effective diameter of sensitive diaphragm 6 is realized by the design of diameter of bore；Layer 7 ceramic chips was offered on n-th layer ceramic chips
Hole, some vias laminate and are formed for fixing the pore structure of ceramic insertion core 2, and ceramic insertion core 2 is fixed on the degree of depth in base of ceramic 1
Realized by the design of the total depth of some vias；
2) base of ceramic 1 and ceramic insertion core 2 are fixed: the bottom of ceramic insertion core 2 is passed through ceramic high temperature sintering technology or height
Temperature glue is fixed in the via on base of ceramic 1, it is ensured that ceramic insertion core 2 is vertical with base of ceramic 1 to be fixed；
3) ceramic insertion core 2 and caudal peduncle 3 are fixed: be crimped in caudal peduncle 3 top of ceramic insertion core 2 by press-connection machine.
4) optical fiber 4 and ceramic insertion core the 2nd, caudal peduncle 4 is fixed: optical fiber 4 is solidified on ceramic insertion core 2 and tail by high-temp glue glue knot
In handle 3, specifically, by the jack of high temperature glue injection caudal peduncle 3 and ceramic insertion core 2, then optical fiber 4 is inserted caudal peduncle 4 and pottery
In the jack of porcelain lock pin 2, finally heated make high temperature the glue solidifies.
A kind of sensor-based system based on LTCC Fabry-perot optical fiber high-temp pressure sensor described in the utility model, including LTCC light
Nanofarads amber high-temp pressure sensor and signal demodulating system；
Signal demodulating system includes the 104th, the first filter of SLD light source the 102nd, the first fiber coupler the 103rd, the second fiber coupler
Ripple device the 105th, the second wave filter the 106th, the first photodetector the 107th, the second photodetector the 108th, orthogonal signalling processing unit 109
With interface module 110, wherein, the first fiber coupler 103 is connected with SLD light source 102 and the second fiber coupler 104 respectively,
Second fiber coupler 104 is connected with the first wave filter 105 and the second wave filter 106 again respectively, and the first wave filter 105 is again with
One photodetector 107 connects, and the second wave filter 106 is connected with the second photodetector 108 again, the first photodetector 107
Be connected with orthogonal signalling processing unit 109 again with the second photodetector 108 simultaneously, orthogonal signalling processing unit 109 again with connect
Mouth die block 110 connects；
The optical fiber 4 of LTCC Fabry-perot optical fiber high-temp pressure sensor is by quartz single mode fiber 111 and signal demodulating system
First fiber coupler 103 connects.
The light of SLD light source 102 output incides through the first fiber coupler the 103rd, quartz single mode fiber the 111st, optical fiber 4
Inside LTCC Fabry-perot optical fiber high-temp pressure sensor, optical fiber 4 end face and ceramic pressure sensitive diaphragm 6 are placed in parallel the method constituting
In amber chamber 7, and between optical fiber 4 end face and ceramic pressure sensitive diaphragm 6, carry out multiple reflections and refraction.When LTCC Fabry-perot optical fiber
High-temp pressure sensor is in the pressure axial along ceramic pressure sensitive diaphragm 6 or the height that temperature/pressure composite tanks 100 applies
When under temperature environment, the center amount of deflection of ceramic pressure sensitive diaphragm 6 makes the chamber length of Fa-Po cavity 7 change, and is done by multiple beam
Relate to the phase change that the amount of deflection by ceramic pressure sensitive diaphragm 6 is converted into the interference signal of sensor output.LTCC Fabry-perot optical fiber
After the interference signal that high-temp pressure sensor returns is again by the first fiber coupler 103, by the second fiber coupler 104 points
Becoming identical two-beam, wherein light beam is detected by the first photodetector 107 after the first wave filter 105 filtering, and then quilt
It is converted into signal of telecommunication output.Meanwhile, another light beam is detected by the second photodetector 108 after the second wave filter 106 filtering, enters
And it is converted into signal of telecommunication output.The two path signal of the first photodetector 107 and the output of the second photodetector 108 is all entered
Enter orthogonal signalling processing unit 109 and enter row operation, obtain the change of cavity length amount of Fa-Po cavity 7, it is achieved the biography of hot environment downforce
Sense.
Further, the needs for high-frequency pressure measurement, the utility model research is towards practical double based on broadband light
Wavelength demodulation system, and produce the method for quadrature phase.To the broadband high-precision signal solution based on two-wavelengh demodulation principle
Adjusting system illustrates:
By the centre wavelength of the first wave filter 105 in the regulation first via, make the second filter in this centre wavelength and another road
The centre wavelength coupling of ripple device 106 is arranged, and produces two-way orthogonal signalling.In preliminary experiment, use Fiber Bragg Grating FBG
Replacing wave filter, one of them grating is fixed on piezoelectric ceramics, is realized the mobile control of centre wavelength by controlling piezoelectric ceramics
System.The orthogonal signalling that two-way produces can be expressed as
When a=b, according to formula (1) and (2), can obtain
According to formula (3), ifCalculated phase place ΦLT () will be equal toΦLT () exists
For jumping to-pi/2 from+pi/2 during pi/2 integral multiple, or jump to+pi/2 from-pi/2.In view of the situation of phase hit, we
Detection ΦLT the phase place of () two neighbouring sample points, deducts hop value+π radian or-π radian in catastrophe point, and by tiring out
Add device summation and i.e. can get tested phase place ΦL(t).According to formula (3), it can be seen that when obtain orthogonal signalling amplitude unequal or
When the phase difference of person's signal is not pi/2, calculated phase place is by inaccurate, and the certainty of measurement of sensor will be affected.This
Utility model uses automatic growth control to realize the normalization of orthogonal signalling amplitude, uses the Lissajou's figure of orthogonal signalling to phase
Potential difference detects and corrects.
Finally illustrating, above example is only in order to illustrating the technical solution of the utility model and unrestricted, although ginseng
According to preferred embodiment, the utility model is described in detail, it will be understood by those within the art that, can be to this
The technical scheme of utility model is modified or equivalent, without deviating from objective and the model of technical solutions of the utility model
Enclosing, it all should be covered in the middle of right of the present utility model.
Claims (4)
1. a LTCC Fabry-perot optical fiber high-temp pressure sensor, it is characterised in that: include base of ceramic (1), ceramic insertion core (2),
Caudal peduncle (3) and optical fiber (4)；It is provided with inner chamber (5) in base of ceramic (1), between inner chamber (5) and base of ceramic (1) bottom surface, form pottery
Porcelain presser sensor diaphragm (6)；Ceramic insertion core (2) is fixed on base of ceramic (1), and the bottom of ceramic insertion core (2) extends inner chamber
(5) in；Caudal peduncle (3) is fixed on the top of ceramic insertion core (2), and optical fiber (4) is fixed in ceramic insertion core (2) and caudal peduncle (3)；Pottery
The exiting surface of lock pin (2) and optical fiber (4) and ceramic pressure sensitive diaphragm (6) are placed in parallel composition Fa-Po cavity (7)；Base of ceramic
(1), inner chamber (5), ceramic pressure sensitive diaphragm (6), ceramic insertion core (2), caudal peduncle (3) and optical fiber (4) are all located on same axis.
2. LTCC Fabry-perot optical fiber high-temp pressure sensor according to claim 1, it is characterised in that: described ceramic insertion core
And the exiting surface of optical fiber (4) is all through milled processed (2).
3. LTCC Fabry-perot optical fiber high-temp pressure sensor according to claim 1 and 2, it is characterised in that: described pottery
The reflection light one side of presser sensor diaphragm (6) is coated with reflectance coating (8).
4. the sensor-based system based on LTCC Fabry-perot optical fiber high-temp pressure sensor described in claim 1, it is characterised in that: bag
Include LTCC Fabry-perot optical fiber high-temp pressure sensor and signal demodulating system；
Signal demodulating system include SLD light source (102), the first fiber coupler (103), the second fiber coupler (104), first
Wave filter (105), the second wave filter (106), the first photodetector (107), the second photodetector (108), orthogonal signalling
Processing unit (109) and interface module (110), wherein, the first fiber coupler (103) respectively with SLD light source (102) and second
Fiber coupler (104) connect, the second fiber coupler (104) again respectively with the first wave filter (105) and the second wave filter
(106) connecting, the first wave filter (105) is connected with the first photodetector (107) again, and the second wave filter (106) is again with second
Photodetector (108) connect, the first photodetector (107) and the second photodetector (108) again while and orthogonal signalling
Processing unit (109) connects, and orthogonal signalling processing unit (109) is connected with interface module (110) again；
The optical fiber (4) of LTCC Fabry-perot optical fiber high-temp pressure sensor is by quartz single mode fiber (111) and signal demodulating system
First fiber coupler (103) connects.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620450511.8U CN205679342U (en) | 2016-05-17 | 2016-05-17 | LTCC Fabry-perot optical fiber high-temp pressure sensor and sensor-based system |
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| CN201620450511.8U CN205679342U (en) | 2016-05-17 | 2016-05-17 | LTCC Fabry-perot optical fiber high-temp pressure sensor and sensor-based system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106017754A (en) * | 2016-05-17 | 2016-10-12 | 中北大学 | LTCC fiber Fabry-Perot high-temperature pressure sensor |
| CN111998990A (en) * | 2020-08-18 | 2020-11-27 | 重庆大学 | Porous array optical fiber probe for multi-direction high-speed dynamic pressure measurement and measurement system thereof |
| WO2024055209A1 (en) * | 2022-09-14 | 2024-03-21 | 宁德时代新能源科技股份有限公司 | Hard-shell battery detection device, method, and system |
-
2016
- 2016-05-17 CN CN201620450511.8U patent/CN205679342U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106017754A (en) * | 2016-05-17 | 2016-10-12 | 中北大学 | LTCC fiber Fabry-Perot high-temperature pressure sensor |
| CN106017754B (en) * | 2016-05-17 | 2019-04-12 | 中北大学 | LTCC Fabry-perot optical fiber high-temp pressure sensor |
| CN111998990A (en) * | 2020-08-18 | 2020-11-27 | 重庆大学 | Porous array optical fiber probe for multi-direction high-speed dynamic pressure measurement and measurement system thereof |
| WO2024055209A1 (en) * | 2022-09-14 | 2024-03-21 | 宁德时代新能源科技股份有限公司 | Hard-shell battery detection device, method, and system |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161109 Termination date: 20170517 |
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| CF01 | Termination of patent right due to non-payment of annual fee |