CN110160571A - It is a kind of based on the Fabry Perot sensor of silicon core fibre and its preparation and application - Google Patents
It is a kind of based on the Fabry Perot sensor of silicon core fibre and its preparation and application Download PDFInfo
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- CN110160571A CN110160571A CN201910471344.3A CN201910471344A CN110160571A CN 110160571 A CN110160571 A CN 110160571A CN 201910471344 A CN201910471344 A CN 201910471344A CN 110160571 A CN110160571 A CN 110160571A
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- 238000002360 preparation method Methods 0.000 title claims abstract description 6
- 238000003466 welding Methods 0.000 claims abstract description 32
- 239000013307 optical fiber Substances 0.000 claims abstract description 20
- 238000005498 polishing Methods 0.000 claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 28
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 5
- 238000009529 body temperature measurement Methods 0.000 claims description 4
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- 230000000694 effects Effects 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 238000011088 calibration curve Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
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- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007380 fibre production Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000011540 sensing material Substances 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
- G01D5/35374—Particular layout of the fiber
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- Spectroscopy & Molecular Physics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The present invention relates to technical field of optical fiber sensing, specifically a kind of Fabry Perot sensor and preparation method thereof based on silicon core fibre.Fabry Perot sensor based on silicon core fibre of the invention includes general single mode fiber, fused fiber splice end face, silicon core fibre and polished end faces, welding end face is formed after input optical fibre and the welding of silicon core fibre, silicon core fibre is made of silicon core fibre covering and silicon core fibre fibre core, grinding and polishing silicon core fibre end face forms polished end faces, and welding end face and polished end faces constitute two mirror surfaces of silicon core fibre Fabry Perot chamber.The advantages that resulting silicon core fibre Fabry Perot sensor of the present invention has very high temperature sensitivity, laser power sensitivity and response speed, and the present invention also has structure simple, is easy to make, reproducible.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, specifically a kind of Fabry Perot sensor based on silicon core fibre and
It is prepared and application.
Background technique
The advantages that fibre optical sensor is small by its size, electromagnetism interference, precision is high has been widely used in aviation boat
It, medical and health, fields such as agricultural sciences, and can be used for detecting a variety of physical quantitys, as temperature, pressure, wind speed, power, humidity,
Refractive index etc..
Common fibre optic temperature sensor has fiber bragg grating, long-period fiber grating, Mach-Zehnder interferometers
With fabry perot interferometer etc..It is limited to the lower thermo-optical coeffecient of vitreous silica and thermal expansion coefficient, conventional fiber-optic sensor
Temperature sensitivity there are certain upper limits, such as the temperature sensitivity of fiber bragg grating to be generally 10pm/ DEG C；Based on two
The temperature sensitivity of the fabry perot interferometer of silica or air is generally less than 14pm/ DEG C；Long-period fiber grating temperature
Sensitivity is up to 100pm/ DEG C, however, there are the sensitive questions of reporting to the leadship after accomplishing a task of temperature and strain；Michelson's interferometer and Mach were once
Dare interferometer can be made by modes such as special fiber welding or dislocation weldings, and production method is relatively easy, however, it is desirable to examine
Transmission spectrum is surveyed to realize the sensing of physical quantity, is not easy to the sensing of tiny area and long range.Fabry perot interferometer is one
The common device based on principle of interference of kind, compared with Michelson's interferometer and Mach-Zehnder interferometers, structure and system
Work is more simple, and there is no polarization inducement signal decaying, output signal is relatively stronger.Fabry perot interferometer usually divides
Are as follows: Intrinsical and extrinsic type, extrinsic type have biggish coupling loss and transmission loss usually using air as cavity；
For Intrinsical using optical fiber as resonant cavity, transmission loss is relatively small, and multiplexing capacity is strong.
It is theoretical it is found that the factor for limiting optical fiber sensor temperature sensitivity is mainly the hot light of sensing material by Fibre Optical Sensor
Coefficient and thermal expansion coefficient.Current many fibre optical sensors are made based on vitreous silica, are limited to the hot light of vitreous silica
The temperature sensitivity of coefficient and thermal expansion coefficient, sensors with auxiliary electrode is typically small.
Therefore, find a kind of easy to make, structure is simple, and has high temperature sensitivity, laser power sensitivity
Sensor with response speed is current urgent problem.
Summary of the invention
In order to solve the above technical problems existing in the prior art, the present invention provides a kind of method cloth based on silicon core fibre
In Perot sensor, it is specific as follows:
A kind of Fabry Perot sensor based on silicon core fibre, including general single mode fiber, fused fiber splice end face, silicon core
Optical fiber and polished end faces；The fused fiber splice end face, in general single mode fiber between silicon core fibre, by general single mode fiber with
It is formed after silicon core fibre welding；The silicon core fibre is made of silicon core fibre covering and silicon core fibre fibre core；The polished end faces
Be by silicon core fibre except welding end face another end face grinding and polishing after formed；The fused fiber splice end face and polished end faces constitute silicon
Two mirror surfaces of core fibre Fabry Perot chamber.
Preferably, fused fiber splice end face welding obtains smooth.
Preferably, the silicon core fibre covering is silica, and silicon core fibre fibre core is silicon.
Preferably, length range is 1~600 μm between the fused fiber splice end face and polished end faces, i.e. control Fabry
The cavity length range of Perot cavity is 1~600 μm, to guarantee interference spectrum contrast with higher and biggish freely frequency
Spectral limit.
Silicon core fibre is made currently, having using silicon compounds such as silica, silicon core fibre has low decaying, high stable
The characteristics of property, such as a kind of manufacturing method of pure silicon core low loss fiber of patent CN201610463104.5, in the plug
Outside deposition silica forms surrounding layer, Pure Silica Core Fiber prefabricated rods is made, exceeded to avoid the OH content of sandwich layer, guarantees
Pure silicon core low loss fiber is made in the performance of wire drawing optical fiber；Also have and use silica pure silicon core (PSC) fiber as fiber optic
The scheme for learning distributed sensor, if patent CN201180014780.X has the multi-wavelength DTS fiber window of PSC fiber, still
There has been no make Fabry Perot laser power and temperature sensor, and the Fabry amber made based on silicon core fibre at present
There are sieve sensor the technology contents of very high temperature sensitivity, laser power sensitivity and response speed to be disclosed, and mesh
The temperature sensitivity of the preceding fabry perot interferometer based on silica or air is generally less than 14pm/ DEG C.
Silicon also has the aspect for being used in Fabry-Perot-type cavity at present, but is substantially with monocrystalline silicon piece come mechanics cloth
In-reflecting surface of Perot cavity, the high stability optical fibre Fabry-perot pressure encapsulated such as patent CN201110227369.2 without glue
Sensor and production method, wherein with first reflecting surface of the first monocrystalline silicon piece rear surface configuration Fabry-Perot-type cavity, second
Monocrystalline silicon piece is for providing second reflecting surface of Fabry-Perot-type cavity；2nd Pyrex sheet glass and sensor body welding.
The present invention is silica using covering, and fibre core is the silicon core fibre of silicon, by specific technological parameter, by standard
Single mode optical fiber and silicon core fibre phase welding, so that welding end face is smooth, making it is suitable for as mirror surface, and grinding and polishing silicon core fibre
The other end makes 1~600 μm of length range between fused fiber splice end face and polished end faces, i.e. control silicon core Fabry Perot chamber
Cavity length range be 1~600 μm, to guarantee interference spectrum contrast with higher and biggish free frequency spectrum model
It encloses, and promotes the temperature sensitivity of the sensor, laser power sensitivity and response speed, final resulting silicon core fibre method cloth
In Perot sensor have very high temperature sensitivity, laser power sensitivity and response speed, temperature measurement range be -60
DEG C~1000 DEG C, temperature sensitivity range is 1~150pm/ DEG C；It can realize that the power of 500nm~1100nm wavelength laser is surveyed
Amount, laser power measurement range are 0mW~700mW, and power sensitivity reaches within 2nm/mW.
The preparation method of the Fabry Perot sensor based on silicon core fibre, includes the following steps:
(1) by silicon core fibre and standard single-mode fiber phase welding；
(2) it regrinds and throws the silicon core fibre other end to required length, to constitute silicon core fibre Fabry Perot sensor.
Preferably, described by standard single-mode fiber and silicon core fibre phase welding, the specific steps are that: first by standard single mode light
Fine and silicon core fibre waits for that welding one end is handled, and wherein standard single-mode fiber one end is cut flat with cutter, silicon core fibre one end
It is polished with optic fiber polishing machine；Then the single mode optical fiber handled well and silicon core fibre are placed in optical fiber splicer, with manual mould
Formula alignment；It is welded together again by arc discharge.Wherein splicing parameter are as follows: strength of discharge 70bit, discharge time
600ms, fritting time 50ms.It is smooth to control welding end face, it is suitable for the mirror surface as Fabry Perot chamber.
The present invention uses cavity of the silicon core fibre as Intrinsical Fabry Perot chamber.The thermo-optical coeffecient of silicon is vitreous silica
Nearly ten times, the temperature sensitivity and laser power sensitivity of sensor can be greatlyd improve.The thermal diffusivity of silicon is also high,
60 times bigger than fused quartz fibre optic temperature sensor of response speed or so.In addition, the present invention also has, production is simple, reproducible etc.
Advantage.
Fabry Perot sensor based on silicon core fibre of the invention, can be used for temperature sensing, temperature measurement range
It is -60 DEG C~1000 DEG C, temperature sensitivity range is 1~150pm/ DEG C.
Temperature sensing principle of the present invention are as follows:
The present invention is silica using covering, and fibre core is the silicon core fibre of silicon, by specific technological parameter, by standard
Single mode optical fiber and silicon core fibre phase welding, so that welding end face is smooth, making it is suitable for as mirror surface, and grinding and polishing silicon core fibre
The other end makes 1~600 μm of length range between fused fiber splice end face and polished end faces, i.e. control silicon core Fabry Perot chamber
Cavity length range be 1~600 μm, to guarantee interference spectrum contrast with higher and biggish free frequency spectrum model
It encloses, input 1550nm broadband light from single mode optical fiber one end and transmits into silicon core fibre Fabry Perot chamber, the broadband light of input exists
Intracavitary generation interference, since there are the variations of thermo-optic effect and thermal expansion effects, temperature, and the refractive index of cavity and chamber will be caused long
Variation, the optical path difference generated between every two adjacent interference lights of interference change therewith, and the variation of the peak position of interference spectrum depends on
Optical path difference, so as to detect temperature by the variation of interference spectrum peak position.
Fabry Perot sensor based on silicon core fibre of the invention can be used for laser power sensing, may be implemented
The laser power measurement of 500nm~1100nm wavelength, laser power detection range are 0mW~700mW, and power sensitivity is in 2nm/
Within mW.
Laser power sensing principle of the present invention are as follows:
The present invention is silica using covering, and fibre core is the silicon core fibre of silicon, by specific technological parameter, by standard
Single mode optical fiber and silicon core fibre phase welding, so that welding end face is smooth, making it is suitable for as mirror surface, and grinding and polishing silicon core fibre
The other end makes 1~600 μm of length range between fused fiber splice end face and polished end faces, i.e. control silicon core Fabry Perot chamber
Cavity length range be 1~600 μm, to guarantee interference spectrum contrast with higher and biggish free frequency spectrum model
It encloses, input 1550nm broadband light and laser simultaneously from single mode optical fiber one end and transmits into silicon core fibre Fabry Perot chamber, due to
Silicon changes correspondingly the strong absorption and photo-thermal effect of laser, cavity temperature, and the laser power of input is different, and cavity temperature is not
Together.Similarly, laser power size can be detected by the variation of interference spectrum peak position caused by temperature difference.
Compared with prior art, the technical effect of the invention is embodied in:
The present invention is based on silicon core fibre production Fabry Perot laser power and temperature sensor, and silicon has much higher than molten
The thermo-optical coeffecient and thermal diffusivity of fused silica, the present invention use cavity of the silicon core fibre as Intrinsical Fabry Perot chamber, lead to
Specific technological parameter is crossed, by standard single-mode fiber and silicon core fibre phase welding, so that welding end face is smooth, keeps it suitable
As mirror surface, and the grinding and polishing silicon core fibre other end, make 1~600 μm of length range between fused fiber splice end face and polished end faces,
The cavity length range for controlling silicon core Fabry Perot chamber is 1~600 μm, to guarantee interference spectrum comparison with higher
Degree and biggish free spectral range, and the temperature sensitivity of the sensor, laser power sensitivity and response speed are promoted, most
Resulting silicon core fibre Fabry Perot sensor has very high temperature sensitivity, laser power sensitivity and response speed eventually
Degree, temperature measurement range are -60 DEG C~1000 DEG C, and temperature sensitivity range is 1~150pm/ DEG C；It can realize 500nm~
The power measurement of 1100nm wavelength laser, laser power measurement range be 0mW~700mW, power sensitivity reach 2nm/mW with
It is interior.In addition, the present invention also has many advantages, such as that production is simple, it is reproducible.
Detailed description of the invention
Fig. 1 is the Fabry Perot sensor schematic of the invention based on silicon core fibre；
Fig. 2 is the temperature calibration curve graph of the Fabry Perot sensor of the invention based on silicon core fibre；
Fig. 3 is that the calibration to 980nm laser power of the Fabry Perot sensor of the invention based on silicon core fibre is bent
Line chart；
Wherein 1- general single mode fiber, 2- fused fiber splice end face, 3- silicon core fibre covering, 4- silicon core fibre fibre core, 5- are thrown
Light end face.
Specific embodiment
It is limited below with reference to specific embodiment technical solution of the present invention is further, but claimed
Range is not only limited to made description.
Embodiment
A kind of Fabry Perot sensor based on silicon core fibre, by general single mode fiber (1), fused fiber splice end face (2),
Silicon core fibre covering (3), silicon core fibre fibre core (4) and polished end faces (5) composition, referring to Fig. 1；Its manufacturing process is, first by silicon
Core fibre and standard single-mode fiber phase welding regrind and throw the silicon core fibre other end to required length, to constitute silicon core fibre method
Bripello sensor.Make welding end face smooth when by standard single-mode fiber and silicon core fibre phase welding；Silicon core method cloth
In Perot cavity cavity length range be 1~600 μm, to guarantee interference spectrum contrast with higher and biggish freedom
Spectral range.
Temperature sensing test and laser power sensing are carried out to the obtained Fabry Perot sensor based on silicon core fibre
Test, as a result as follows:
Referring to fig. 2, Fig. 2 is that the Fabry Perot sensor based on silicon core fibre of this example exists to temperature sensing test result
0 DEG C~150 DEG C of temperature calibration curve, as shown in Figure 2, since silicon has high thermo-optical coeffecient, temperature sensitivity reaches
83.92pm/℃。
Laser power sensing testing result is sensed referring to the Fabry Perot based on silicon core fibre that Fig. 3, Fig. 3 are this examples
Device is when cavity length is 163.59 μm, and to the calibration curve of 980nm laser power, power calibration range is 0mW~7mW, function
Rate sensitivity reaches 1.05nm/mW.
The above active testing the result shows that, the Fabry Perot sensor of the invention based on silicon core fibre have it is very high
Temperature sensitivity, laser power sensitivity and response speed, the temperature sensitivity for solving current fibre optical sensor are typically small
The problem of, and the sensitivity of the Fabry Perot sensor of the invention based on silicon core fibre is much higher than currently based on titanium dioxide
The temperature sensitivity of the fabry perot interferometer of silicon is (currently based on the temperature sensitive of the fabry perot interferometer of silica
Degree is generally less than 14pm/ DEG C).
Finally it is pointed out that above embodiments are only the more representational examples of the present invention.Obviously, technology of the invention
Scheme is not limited to above-described embodiment, and acceptable there are many deformations.Those skilled in the art can be from disclosed by the invention
All deformations that content is directly exported or associated, are considered as protection scope of the present invention.
Claims (10)
1. a kind of Fabry Perot sensor based on silicon core fibre, which is characterized in that including general single mode fiber, fused fiber splice
End face, silicon core fibre and polished end faces；The fused fiber splice end face, in general single mode fiber between silicon core fibre, by common
It is formed after single mode optical fiber and silicon core fibre welding；The silicon core fibre is made of silicon core fibre covering and silicon core fibre fibre core；Institute
State polished end faces be by silicon core fibre except welding end face another end face grinding and polishing after formed；The fused fiber splice end face and polishing
Two mirror surfaces of end face composition silicon core fibre Fabry Perot chamber.
2. the Fabry Perot sensor according to claim 1 based on silicon core fibre, which is characterized in that the optical fiber welding
Contact surface welding obtains smooth.
3. the Fabry Perot sensor according to claim 1 based on silicon core fibre, which is characterized in that the silicon core light
Fine covering is silica, and silicon core fibre fibre core is silicon.
4. the Fabry Perot sensor according to claim 1 based on silicon core fibre, which is characterized in that the optical fiber welding
Length range is 1~600 μm between contact surface and polished end faces.
5. the preparation method of the Fabry Perot sensor described in -4 based on silicon core fibre, feature exist according to claim 1
In including the following steps:
(1) by silicon core fibre and standard single-mode fiber phase welding；
(2) it regrinds and throws the silicon core fibre other end to required length, make length range 1 between fused fiber splice end face and polished end faces
~600 μm, to constitute silicon core fibre Fabry Perot sensor.
6. the preparation method of the Fabry Perot sensor according to claim 5 based on silicon core fibre, which is characterized in that
It is described by standard single-mode fiber and silicon core fibre phase welding, the specific steps are that: first standard single-mode fiber and silicon core fibre are waited for
Welding one end is handled, and wherein standard single-mode fiber one end is cut flat with cutter, silicon core fibre one end optic fiber polishing machine into
Row polishing；Then the single mode optical fiber handled well and silicon core fibre are placed in optical fiber splicer, are aligned with manual mode；Pass through electricity again
Arc discharge is welded together.
7. the application of the Fabry Perot sensor described in claim 1-5 based on silicon core fibre, which is characterized in that described
Fabry Perot sensor based on silicon core fibre, can be used for temperature sensing.
8. the application of the Fabry Perot sensor according to claim 7 based on silicon core fibre, which is characterized in that described
Temperature sensing is the temperature sensing that temperature measurement range is -60 DEG C~1000 DEG C.
9. the application of the Fabry Perot sensor described in claim 1-5 based on silicon core fibre, which is characterized in that described
Fabry Perot sensor based on silicon core fibre can be used for laser power sensing.
10. the application of the Fabry Perot sensor according to claim 9 based on silicon core fibre, which is characterized in that institute
State laser power sensing, be the laser power measurement of 500nm~1100nm wavelength, laser power detection range be 0mW~
700mW。
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| CN201910471344.3A CN110160571B (en) | 2019-05-31 | 2019-05-31 | Fabry-Perot sensor based on silicon core optical fiber and preparation and application thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN113624361A (en) * | 2021-08-16 | 2021-11-09 | 哈尔滨工程大学 | Optical fiber probe, temperature sensor and preparation method of optical fiber probe |
| CN113945542A (en) * | 2021-09-10 | 2022-01-18 | 汕头大学 | Optical fiber sensor, detection device based on optical fiber sensor and application of detection device |
| CN115014498A (en) * | 2022-06-01 | 2022-09-06 | 上海大学 | Optical fiber resonant Fabry-Perot ultrasonic sensor |
| RU2813237C1 (en) * | 2023-07-08 | 2024-02-08 | Общество с ограниченной ответственностью "НОВОТЕХ" | Fibre-optic temperature sensor based on silicon thermo-optical effect |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303300A (en) * | 2008-05-27 | 2008-11-12 | 重庆大学 | Minitype optical fiber F-P sensor, manufacturing method and liquid tester based on sensor |
| CN102261924A (en) * | 2011-04-26 | 2011-11-30 | 南京信息工程大学 | Fabry-Perot interferometric sensor based on solid photonic crystal fiber and manufacturing method thereof |
| CN106289339A (en) * | 2016-09-19 | 2017-01-04 | 上海大学 | Fiber F-P pyrostat based on crystallize and manufacture method |
| CN108020248A (en) * | 2017-11-28 | 2018-05-11 | 北京信息科技大学 | The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method |
-
2019
- 2019-05-31 CN CN201910471344.3A patent/CN110160571B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303300A (en) * | 2008-05-27 | 2008-11-12 | 重庆大学 | Minitype optical fiber F-P sensor, manufacturing method and liquid tester based on sensor |
| CN102261924A (en) * | 2011-04-26 | 2011-11-30 | 南京信息工程大学 | Fabry-Perot interferometric sensor based on solid photonic crystal fiber and manufacturing method thereof |
| CN106289339A (en) * | 2016-09-19 | 2017-01-04 | 上海大学 | Fiber F-P pyrostat based on crystallize and manufacture method |
| CN108020248A (en) * | 2017-11-28 | 2018-05-11 | 北京信息科技大学 | The method that large mode field fibre-optical F-P sensor is prepared based on chemical corrosion method |
Non-Patent Citations (5)
| Title |
|---|
| GUIGEN LIU,ET AL: "High-resolution and fast-response fiber-optic temperature sensor using silicon Fabry-Pérot cavity", 《OPTICS EXPRESS》 * |
| SHAOLIN ZHANG,ET AL: "Temperature characteristics of silicon core optical fiber Fabry–Perot interferometer", 《OPTICS LETTERS》 * |
| TAO ZHU,ET AL: "Fabry–Perot optical fiber tip sensor for high temperature measurement", 《OPTICS COMMUNICATIONS》 * |
| TENGJIAO WANG，ET AL: "All-fiber power sensor based on silicon-germanium core fiber F-P cavity", 《6TH CONFERENCE ON ADVANCES IN OPTOELECTRONICS AND MICRO/NANO-OPTICS》 * |
| 平智超: "光纤传感器的研制及其应用研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556595A (en) * | 2020-12-01 | 2021-03-26 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN112556595B (en) * | 2020-12-01 | 2022-04-15 | 哈尔滨工业大学（深圳） | Optical fiber FPI sensor, measuring device and measuring method |
| CN113624361A (en) * | 2021-08-16 | 2021-11-09 | 哈尔滨工程大学 | Optical fiber probe, temperature sensor and preparation method of optical fiber probe |
| CN113945542A (en) * | 2021-09-10 | 2022-01-18 | 汕头大学 | Optical fiber sensor, detection device based on optical fiber sensor and application of detection device |
| CN113945542B (en) * | 2021-09-10 | 2023-11-14 | 汕头大学 | Optical fiber sensor, detection device based on optical fiber sensor and application of detection device |
| CN115014498A (en) * | 2022-06-01 | 2022-09-06 | 上海大学 | Optical fiber resonant Fabry-Perot ultrasonic sensor |
| CN115014498B (en) * | 2022-06-01 | 2023-03-14 | 上海大学 | Optical fiber resonant Fabry-Perot ultrasonic sensor |
| RU2813237C1 (en) * | 2023-07-08 | 2024-02-08 | Общество с ограниченной ответственностью "НОВОТЕХ" | Fibre-optic temperature sensor based on silicon thermo-optical effect |
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