CN205677807U - The membrane pump that a kind of chip type piezoelectric vibrator drives - Google Patents
The membrane pump that a kind of chip type piezoelectric vibrator drives Download PDFInfo
- Publication number
- CN205677807U CN205677807U CN201620626046.9U CN201620626046U CN205677807U CN 205677807 U CN205677807 U CN 205677807U CN 201620626046 U CN201620626046 U CN 201620626046U CN 205677807 U CN205677807 U CN 205677807U
- Authority
- CN
- China
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- pump
- barrier film
- contiguous block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012528 membrane Substances 0.000 title claims abstract description 5
- 230000004888 barrier function Effects 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 230000006835 compression Effects 0.000 claims abstract description 6
- 238000007906 compression Methods 0.000 claims abstract description 6
- 238000010276 construction Methods 0.000 claims abstract description 5
- 238000009434 installation Methods 0.000 claims abstract 3
- 239000002184 metal Substances 0.000 claims description 9
- 230000005611 electricity Effects 0.000 claims 1
- 230000008676 import Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 abstract description 13
- 238000004904 shortening Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000002360 preparation method Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 10
- 239000000446 fuel Substances 0.000 description 3
- 230000002146 bilateral effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000013270 controlled release Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Abstract
The utility model relates to the membrane pump that a kind of chip type piezoelectric vibrator drives, and belongs to fluid drive control field.Barrier film and pump cover that cavity end is installed constitute pump chamber, and force-applying piece disk and baffle plate are crimped on barrier film both sides, and force-applying piece guide rod end is equipped with contiguous block, and equipped with piezoelectric vibrator on contiguous block, piezoelectric vibrator two ends are fixed on the wallboard of left and right；Piezoelectric vibrator is flat construction before installing and length is more than left and right wallboard spacing, becomes warp architecture and piezoelectric chip radius is less than substrate radius after installation, and wafer bears compression；Voltage-phase between contiguous block left side drive unit I and right-side drive units II is contrary, and in two driver elements, shortening amount and the elongation of piezoelectric vibrator mutually restrict.Characteristic and advantage: construct telescopic piezoelectric actuator by installation method, preparation method and technique are simple, low cost；Piezoelectric patches only compression chord and two driver element deflections mutually restrict, and reliability is high；Easily improve flow and the pressure of pump by increasing piezoelectric vibrator quantity and length.
Description
Technical field
The utility model belongs to fluid and drives and control field, is specifically related to the barrier film that a kind of chip type piezoelectric vibrator drives
Pump.
Background technology
Piezoelectric pump with its simple in construction, volume is little, reaction is fast, without electromagnetic interference, easily operated, flow and pressure controllable
Wait well many advantages, electro-hydraulic at fuel supply, the microcomputer of medical treatment, chemical analysis, Aero-Space, automobile engine and fuel cell
The aspects such as system all have wide practical use, and it develops the extensive concern enjoying countries in the world scholar.For satisfied difference
The application demand in field, there has been proposed the piezoelectric pump of various structures form.Although the version of existing piezoelectric pump and performance
Differ greatly, but be all that the flexural deformation utilizing chip type piezoelectric vibrator to produce under electric field action realizes fluid-operated.Cause
The fluid of each working cycles of piezoelectric pump output is the volume variable quantity of the caused pump chamber of piezoelectric vibrator deformation, therefore can realize
The aspects such as flow and the accurate control of pressure, be particularly suited for medicine controlled release, chemical reagent proportioning, fuel-cell fuel supply.
Existing piezoelectric pump is mostly driven by circular piezoelectric vibrator, and its output flow and pressure are relatively low, is simply possible to use in low-pressure and miniflow
The occasion of amount；It is crucial that ,-the compression of drawing of alternation is born in piezoelectric vibrator compound bending deformation in work, piezoelectric chip, therefore
Easily because deflection is excessive and damaged, reliability is low, cannot improve output flow by increasing piezoelectric vibrator yardstick and driving voltage
And pressure.
Content of the invention
For the deficiency in terms of existing piezoelectric pump fan-out capability and reliability, the utility model proposes a kind of piezoelectric chip and shake
The membrane pump that son drives.The utility model adopted implementation scheme is that the pump housing is provided with left wall plate and right wallboard, and left wall plate sets
Having the pilot hole being interconnected and cavity, cavity wall end is provided with barrier film and pump cover through screw, and pump cover is provided with inlet valve
And outlet valve, barrier film and pump cover constitute pump chamber；The disk of force-applying piece and baffle plate are through the screw thread pressure on the guide rod of nut and force-applying piece
It is connected on the both sides of barrier film；For obtaining bigger output flow, when barrier film is 0.2mm and 0.1mm thickness, force-applying piece disk diameter is respectively
For D1=(0.55～0.75) D2 and D1=(0.7～0.9) D2, in formula, D2 is pump chamber diameter；Guide rod stretches out through pilot hole, guide rod
End is fixed with contiguous block through nut, and contiguous block is provided with two groups of piezoelectric vibrators, piezoelectric vibrator two ends warp through briquetting and screw
Briquetting and screw are separately fixed on left wall plate and right wallboard, and piezoelectric vibrator is formed by metal substrate and piezoelectric chip bonding；Pressure
Electric tachometer indicator install before free state under be flat construction and its length more than the distance between left wall plate and right wallboard, piezoelectricity shakes
Son becomes warp architecture and the piezoelectric chip radius of curvature radius of curvature less than metal substrate after installing, piezoelectric chip bears pressure
Stress, metal substrate bear tension；It is in the part on the left of contiguous block on piezoelectric vibrator and constitute driver element I, right part
Constituting driver element II, the driving voltage phase difference of driver element I and driver element II is 180 degree.
In the course of work, when driver element I is extended by voltage effect, driver element II is shortened by voltage effect, and guide rod is to the right
Motion, pump chamber increases, fluid pressure drop is low, and fluid enters pump chamber through inlet valve；After driving voltage commutation, driver element I
When being shortened by voltage effect, driver element II is extended by voltage effect, and guide rod is to left movement, and pump chamber reduces, fluid pressure increases
Adding, pump cavity fluid flows out through outlet valve；Driving voltage defines the bilateral reciprocation of guide rod when alternately changing continuously
And the continuous output of fluid；Piezoelectric vibrator drives at another when being reached maximum by voltage effect elongation in a driver element
In unit, shortening amount reaches maximum, and shortening amount and elongation mutually restrict, so that it is guaranteed that piezoelectric chip always works in reasonably
In the range of compression；When other conditions determine, increase piezoelectric vibrator quantity and length can be respectively increased output pressure and flow.
Advantage and characteristic: 1. straight piezoelectric vibrator is become warp architecture by the method by installing, and forms telescopic piezoelectricity
Driver, preparation method and technique are simple, low cost；2. piezoelectric chip is only operated under compressive stress state and two drivings are single
The deflection of unit mutually restricts, therefore reliability is high；3. it is easy to increase the defeated of offer pump by increasing piezoelectric vibrator quantity and length
Go out pressure and flow.
Brief description
Fig. 1 is pump structure principle sketch in one preferred embodiment of the utility model；
Fig. 2 is the structural representation of piezoelectric vibrator in one preferred embodiment of the utility model；
Fig. 3 is the structure chart of one preferred embodiment middle pump body of the utility model；
Fig. 4 is the structure chart of force-applying piece in one preferred embodiment of the utility model；
Fig. 5 is the mutual relation of electric voltage figure of two driver elements of the utility model.
Detailed description of the invention
Pump housing h is provided with left wall plate h1 and right wallboard h2, and left wall plate h1 is provided with the pilot hole h4 being interconnected and cavity
The end of the sidewall h3 of C, cavity C is provided with barrier film c and pump cover a through screw, and pump cover a is provided with inlet valve a2 and outlet valve a1,
Barrier film c and pump cover a constitutes pump chamber C1；The disk b1 of force-applying piece b and baffle plate d is through the screw thread on the guide rod b2 of nut e and force-applying piece b
It is crimped on the both sides of barrier film c；For obtaining bigger output flow, the diameter of the disk b1 of force-applying piece b when barrier film c is 0.2mm thickness
Diameter D1=(0.7～0.9) D2 of the disk b1 of force-applying piece b when D1=(0.55～0.75) D2, barrier film c are 0.1mm thickness, in formula
D2 is the diameter of pump chamber C1；Guide rod b2 stretches out through pilot hole h4, and the end of guide rod b2 is fixed with contiguous block i, contiguous block i through nut
On through briquetting f and screw, two groups of piezoelectric vibrator g are installed, the two ends of piezoelectric vibrator g are separately fixed at left wall through briquetting f and screw
On plate h1 and right wallboard h2, piezoelectric vibrator g is formed by metal substrate g1 and piezoelectric chip g2 bonding；Before piezoelectric vibrator g installs
It is that flat construction and its length L1 are installed more than distance L2 between left wall plate h1 and right wallboard h2, piezoelectric vibrator g under free state
After become warp architecture and the piezoelectric chip g2 radius of curvature radius of curvature less than metal substrate g1, piezoelectric chip g2 bears pressure
Stress, metal substrate g1 bear tension；It is in the part on the left of contiguous block i on piezoelectric vibrator g and constitute driver element I, right side
Part constitutes driver element II, and the driving voltage phase difference of driver element I and driver element II is 180 degree.
In the course of work, when driver element I is extended by voltage effect, driver element II is shortened by voltage effect, guide rod b2 to
Right motion, the volume of pump chamber C1 increases, fluid pressure drop is low, and fluid enters pump chamber through inlet valve a2；After driving voltage commutation, drive
When moving cell I is shortened by voltage effect, driver element II is extended by voltage effect, and guide rod b2 subtracts to left movement, the volume of pump chamber C1
Little, fluid pressure increases, and in pump chamber C1, fluid flows out through outlet valve a1；Driving voltage defines when alternately changing continuously and leads
The bilateral reciprocation of bar b2 and the continuous output of fluid.Piezoelectric vibrator g in a driver element by voltage effect elongation
Reach maximum, when i.e. reaching straightened condition, in another driver element, shortening amount reaches maximum, and i.e. piezoelectric vibrator is two drivings
Shortening amount in unit and elongation mutually restrict, so that it is guaranteed that in the range of piezoelectric chip always works in rational compression；
When other conditions determine, increase the quantity of piezoelectric vibrator g and length can be respectively increased output pressure and flow.
Claims (1)
1. the membrane pump that a chip type piezoelectric vibrator drives, it is characterised in that: the pump housing is provided with left and right wallboard, and left wall plate sets
Having the pilot hole being interconnected and cavity, cavity wall end is provided with barrier film and pump cover through screw, and pump cover is provided with import and export
Valve, barrier film and pump cover constitute pump chamber；Force-applying piece disk and baffle plate are crimped on barrier film two through the screw thread on nut and force-applying piece guide rod
Side；Guide rod stretches out through pilot hole, and guide rod end is fixed with contiguous block through nut, and contiguous block is provided with two groups through briquetting and screw
Piezoelectric vibrator, piezoelectric vibrator two ends are separately fixed on the wallboard of left and right through briquetting and screw, and piezoelectric vibrator is by metal substrate and pressure
Electricity bonding wafer forms；Piezoelectric vibrator is flat construction before installing and its length is more than the distance between the wallboard of left and right, piezoelectric vibrator
Become warp architecture and piezoelectric chip radius of curvature after installation and be less than metal substrate radius of curvature, piezoelectric chip bear compression,
Metal substrate bears tension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620626046.9U CN205677807U (en) | 2016-06-15 | 2016-06-15 | The membrane pump that a kind of chip type piezoelectric vibrator drives |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620626046.9U CN205677807U (en) | 2016-06-15 | 2016-06-15 | The membrane pump that a kind of chip type piezoelectric vibrator drives |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205677807U true CN205677807U (en) | 2016-11-09 |
Family
ID=57430645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620626046.9U Expired - Fee Related CN205677807U (en) | 2016-06-15 | 2016-06-15 | The membrane pump that a kind of chip type piezoelectric vibrator drives |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205677807U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108223339A (en) * | 2016-12-14 | 2018-06-29 | 德尔格制造股份两合公司 | Cavity pump and the method for running cavity pump |
-
2016
- 2016-06-15 CN CN201620626046.9U patent/CN205677807U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108223339A (en) * | 2016-12-14 | 2018-06-29 | 德尔格制造股份两合公司 | Cavity pump and the method for running cavity pump |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106014907B (en) | A kind of plunger pump of piezoelectric chip oscillator driving | |
| CN106014940B (en) | A kind of membrane pump of chip type piezoelectric vibrator driving | |
| CN103148032B (en) | A kind of Study of Cyclic Loading hydraulic system | |
| CN102374158A (en) | Self-sensing piezoelectric diaphragm pump | |
| CN102213210A (en) | Driving-sensing integral piezoelectric chip pump | |
| CN202149012U (en) | Self-sensing piezoelectric membrane pump | |
| CN205677807U (en) | The membrane pump that a kind of chip type piezoelectric vibrator drives | |
| CN105958867A (en) | Self-excited pipeline fluid piezoelectric energy harvester | |
| CN103148033B (en) | A kind of Study of Cyclic Loading hydraulic system | |
| CN205677780U (en) | The plunger displacement pump that a kind of piezoelectric chip oscillator drives | |
| CN1936326A (en) | Valve-free micro-pressure electric pump | |
| CN104776002B (en) | Integrated extra-high pressure booster pump | |
| CN102966521B (en) | Piezo-stack pump capable of driving double-piston in tandem connection | |
| CN100547240C (en) | Piezoelectric hydraulic pump | |
| RU2012105645A (en) | ADJUSTING THE VARIABLE FLOW USING A LINEAR PUMP | |
| CN202149011U (en) | Driving-sensing integrated piezoelectric chip pump | |
| CN103032296B (en) | Piezoelectric stack pump based on disk type sensor valve | |
| CN202673688U (en) | Double slide valve inner volume ratio stepless regulating device of single-screw refrigerating compressor | |
| CN202165255U (en) | Interlocking spiral flow pipe valve-free piezoelectric pump | |
| CN204553137U (en) | Ultrahigh pressure plunger suction booster | |
| CN106026762A (en) | Piezoelectric wafer driver | |
| CN205681331U (en) | A kind of piezoelectric crystal chip driver | |
| CN111980889A (en) | Semi-flexible integrated valve active piezoelectric pump | |
| CN2916216Y (en) | Oil immersion type hydraulic station | |
| CN109915427A (en) | A kind of three pumps with back pressure control are straight to drive electric hydrostatic actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161109 Termination date: 20170615 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |