CN205664639U

CN205664639U - Air sword system

Info

Publication number: CN205664639U
Application number: CN201620525505.4U
Authority: CN
Inventors: 钱娟娟; 马超; 黄胜; 徐海涛; 刘超; 王守波; 欧阳欠; 林杰
Original assignee: BOE Technology Group Co Ltd; Hefei BOE Optoelectronics Technology Co Ltd
Current assignee: BOE Technology Group Co Ltd; Hefei BOE Optoelectronics Technology Co Ltd
Priority date: 2016-05-27
Filing date: 2016-05-27
Publication date: 2016-10-26
Anticipated expiration: 2026-05-27

Abstract

The utility model relates to an air sword system for the liquid of separation substrate surface, include the gaseous air sword to base plate suface jet to and be used for absorbing the vacuum liquid suction device of the liquid that the gas that is sprayed by the air sword blew afloat. The utility model discloses beneficial effect is: the liquid that the gas that is sprayed by the air sword blew afloat is in time absorb in the cooperation of vacuum liquid suction device and air sword, avoids water stain and remain, guarantees the homogeneity of air sword to base plate surface interaction power.

Description

A kind of air knife system

Technical field

This utility model relates to LCD product manufacture technology field, particularly relates to a kind of air knife system.

Background technology

In the manufacturing process of TFT-LCD (thin film transistor-liquid crystal display) all Need, through plated film, gluing, exposure, development, etching, to peel off these operations.Cleaning is mostly had before and after these operations Link, the purpose of cleaning is the most different, and the cleaning before usual operation is the Particle (dust) for cleaning base plate surface, Increase the adhesion etc. of substrate surface；And the cleaning after operation cleans up typically to by the chemical drugs used by operation； It is required for the Air Knife (air knife) being connected to be separated by cleanout fluid after these cleaning units, thus reaches separating base plate table Face liquid the effect on dry substrate surface.

Air Knife is as the capital equipment of separation cleaning fluid, under traditional design structure, is only capable of depending in actual production By adjusting the flow of air port CDA (compressed air) to control the drying capacity of air knife, there is following shortcoming:

1. air knife air outlet gas flow is excessive, the corner areas active force of substrate is crossed conference and causes substrate to shake, The adhesiveness of film surface can be affected simultaneously, cause Peeling (stripping) bad.

2. air knife air outlet gas flow is too small, the most not enough to the active force of liquid, can cause serious water stain residual.

3., with the gathering of rate of water added, CDA easily forms water smoke to its impact, and these water smokes can corrode the substrate of drying Surface.

4. the Particle of substrate surface is under the effect of air knife, and the Particle corner easily forming L-type is assembled.

Utility model content

In order to solve above-mentioned technical problem, this utility model provides a kind of air knife system, draws in time and is sprayed by air knife The liquid of the gas penetrated, it is to avoid the problems such as the water stain residual caused due to liquid accumulation.

In order to achieve the above object, the technical solution adopted in the utility model is: a kind of air knife system, for un-mixing bases The liquid on plate surface, including the air knife to substrate surface injection gas, and blows for drawing the gas sprayed by air knife The vacuum liquid-absorbing device of the liquid risen.

Further, described vacuum liquid-absorbing device includes: be placed in the fluid suction head of surface, and by pump-line with The vacuum pumping hardware that described fluid suction head connects.

Further, described vacuum pumping hardware includes gas-liquid separation device, and by gas-liquid separation device with described The vacuum pump that pump-line connects.

Further, described gas-liquid separation device includes the gas-liquid separation chamber being connected with described pump-line, described gas Liquid split cavity is divided into, by gas-liquid separation plate, the first chamber being connected with described pump-line and is connected with described vacuum pump Second chamber.

Further, the discharge opeing case being connected with described first chamber is also included near the side of described fluid suction head.

Further, described fluid suction head includes the imbibition panel with a hollow cavity, the first table of described imbibition panel Face is provided with the first through hole that multiple and described hollow cavity connects, the second table that described imbibition panel is relative with described first surface Face is provided with the second through hole connected with described pump-line.

Further, the first surface of described imbibition panel is parallel with described air knife air outlet place plane, described suction Liquid level plate first surface vertical dimension when imbibition and between substrate is the first predeterminable range, described imbibition panel is positioned at Under the liquid level of the liquid that the gas sprayed by air knife on substrate blows afloat.

Further, the airflow direction of described air knife injection gas is contrary with the direction of transfer of substrate.

This utility model provides the benefit that: vacuum liquid-absorbing device and air knife coordinate draws the gas sprayed by air knife in time The liquid that body blows afloat, it is to avoid water stain residual, it is ensured that the air knife uniformity to substrate surface active force.

Accompanying drawing explanation

Fig. 1 represents this utility model embodiment hollow air knife system structural representation；

Fig. 2 represents air knife in this utility model embodiment, imbibition positions of panels relation schematic diagram；

Fig. 3 represents imbibition panel concrete structure schematic diagram in this utility model embodiment.

Detailed description of the invention

Being described in detail feature of the present utility model and principle below in conjunction with accompanying drawing, illustrated embodiment is only used for explaining This utility model, not limits this utility model protection domain with this.

The present embodiment provides a kind of air knife system, for the liquid on separating base plate surface, sprays including to substrate surface The air knife of gas, and for drawing the vacuum liquid-absorbing device of the liquid that the gas sprayed by air knife blows afloat.

Vacuum liquid-absorbing device and air knife coordinate draws the liquid that the gas sprayed by air knife blows afloat in time, it is to avoid water stain Residual, the liquid of gathering drained in time, it is to avoid impacted the water smoke formed by CDA, corrodes the substrate surface being dried；And Liquid can effectively take away the Particle of substrate surface while being sucked away, prevents the product that L-type Particle corner is assembled Raw；Making air knife is all identical to substrate surface active force everywhere, it is ensured that air knife is equal to substrate surface active force Even property, facilitates the adjustment to air knife gas flow in actual production.

The specific constructive form of described vacuum liquid-absorbing device can have multiple, blows as long as realizing the gas by air knife sprays The purpose that the liquid risen siphons away.

As it is shown in figure 1, in the present embodiment, described vacuum liquid-absorbing device includes: be placed in the fluid suction head of surface, Yi Jitong Cross the vacuum pumping hardware that pump-line 2 is connected with described fluid suction head.

In order to ensure vacuum suction and being smoothed out that liquid is discharged, described vacuum pumping hardware includes that gas-liquid separation fills Put, and the vacuum pump being connected with described pump-line 2 by gas-liquid separation device.

Further, described gas-liquid separation device includes the gas-liquid separation chamber being connected with described pump-line 2, described gas Liquid split cavity is divided into, by gas-liquid separation plate 5, the first chamber 3 being connected with described pump-line 2 and is connected with described vacuum pump The second chamber 4.

As it is shown in figure 1, vacuum pump is connected to the top of the second chamber 4 by pipeline, pump-line 2 is connected to the first chamber The sidewall of 3, the setting of gas-liquid separation plate 5 makes when evacuation, and gas enters the second chamber 4, and liquid stays the first chamber 3.

Described gas-liquid separation plate 5 is a platy structure with multiple through hole, and gas is by the through hole on gas-liquid separation plate 5 Entering the second chamber 4, and drained by vacuum pumping hardware, liquid stays the first chamber 3 under itself action of gravity.

In order to be discharged by the liquid of the first chamber 3 in time, described gas-liquid separation device also includes leaning on described first chamber 3 The discharge opeing case 6 that the side of nearly described fluid suction head connects.

Further, described fluid suction head includes the imbibition panel 1 with a hollow cavity, the first of described imbibition panel 1 Surface is provided with the first through hole 11 that multiple and described hollow cavity connects, and described imbibition panel 1 is relative with described first surface Second surface is provided with the second through hole connected with described pump-line 2.

One side that imbibition panel 1 has the first through hole 11 that what Fig. 3 represented is.

In order to be discharged by liquid in time in the present embodiment, described pump-line 2 is 2, actually used in, pump-line 2 Quantity can set according to actual needs.

In the present embodiment, the first surface of described imbibition panel 1 is parallel with described air knife 7 air outlet place plane, institute State imbibition panel 1 first surface vertical dimension when imbibition and between substrate to be the first predeterminable range, make described imbibition face Plate 1 is positioned on substrate under the liquid level of the liquid that the gas sprayed by air knife 7 blows afloat.

Further, to spray the airflow direction of gas contrary with the direction of transfer of substrate for described air knife 7.

First predeterminable range can set according to actual needs.

As in figure 2 it is shown, arrow represents that air knife 7 sprays the airflow direction of gas, curve represents the gas that air knife sprays The liquid blown afloat, sprays the airflow direction of gas along air knife 7, and imbibition panel 1 is located at the front of air knife 7, and imbibition face Plate 1 is positioned under the liquid level of the liquid that the gas sprayed by air knife 7 blows afloat.

The present embodiment air knife 7 system, increases in the front (right side of the air knife 7 shown in Fig. 2) of air knife 7 air outlet Vacuum liquid-absorbing device.Air knife 7 sprays gas and is dried substrate and vacuum liquid-absorbing device carries out imbibition and carries out simultaneously, protects The liquid that the gas that sprayed by air knife 7 of card blows afloat, assemble can be discharged timely.

When substrate initially arrives the position of air knife 7 correspondence, air knife 7 air outlet starts injection compressed gas at a high speed Body, vacuum liquid-absorbing device also begins to operating simultaneously, make imbibition panel 1 and together with pipeline in form the vacuum environment of moment, The liquid of the air accumulation sprayed by air knife 7, under the effect of atmospheric pressure, enters water suction panel and rapidly by bleeding Pipeline 2 enters the first chamber 3, is then discharged in discharge opeing case 6.

Vacuum liquid-absorbing device during imbibition, the gas that imbibition panel 1 substrate to be always positioned at is sprayed by air knife 7 (in actual use, in order to avoid imbibition panel 1 contacts with substrate with wounded substrate, and protect under the liquid level of the liquid blown afloat Card liquid is drawn by vacuum liquid-absorbing device, and the position of imbibition panel 1 is positioned at the air-flow of the gas sprayed by air knife 7 and blows the liquid caught up with Body fluid position highest point), it is ensured that the liquid of substrate surface can be real in the case of atmospheric pressure and fluid molecule inherent function Time be discharged in the first chamber 3, and be finally discharged into discharge opeing case 6.

The present embodiment air knife 7 system achieves air knife 7 and sprays gas drying substrate surface and vacuum dehydration is taken out in real time Walk the perfect cooperation of the liquid assembled.The liquid touched due to the gas of air knife 7 injection is the most certain, it is ensured that air knife 7 Homogeneity to substrate surface active force everywhere.In production application, need to realize the gas gas of air knife 7 air outlet Flow path direction and the antiparallel design of substrate direction of transfer, discharge opeing case 6 place to be ensured plane, when substrate passes through, is located all the time Under substrate liquid levels, in order to the discharge of liquid.

It is more than this utility model preferred embodiment, it should be noted that to those skilled in the art, On the premise of principle described in the utility model, it is also possible to make some improvements and modifications, these improvements and modifications also should It is considered as this utility model protection domain.

Claims

1. an air knife system, for the liquid on separating base plate surface, it is characterised in that includes spraying gas to substrate surface Air knife, and for drawing the vacuum liquid-absorbing device of the liquid that the gas that sprayed by air knife blows afloat.

Air knife system the most according to claim 1, it is characterised in that described vacuum liquid-absorbing device includes: be placed in substrate The fluid suction head of top, and the vacuum pumping hardware being connected with described fluid suction head by pump-line.

Air knife system the most according to claim 2, it is characterised in that described vacuum pumping hardware includes that gas-liquid separation fills Put, and the vacuum pump being connected with described pump-line by gas-liquid separation device.

Air knife system the most according to claim 3, it is characterised in that described gas-liquid separation device includes bleeding with described The gas-liquid separation chamber that pipeline connects, described gas-liquid separation chamber is divided into by gas-liquid separation plate and to be connected with described pump-line First chamber and the second chamber being connected with described vacuum pump.

Air knife system the most according to claim 4, it is characterised in that also include with described first chamber near described suction The discharge opeing case that the side of liquid head connects.

Air knife system the most according to claim 2, it is characterised in that described fluid suction head includes having a hollow cavity Imbibition panel, the first surface of described imbibition panel is provided with the first through hole that multiple and described hollow cavity connects, described imbibition The second surface that panel is relative with described first surface is provided with the second through hole connected with described pump-line.

Air knife system the most according to claim 6, it is characterised in that the first surface of described imbibition panel and described sky Air knife air outlet place plane is parallel, and described imbibition panel first surface vertical dimension when imbibition and between substrate is first Predeterminable range, described imbibition panel is positioned on substrate under the liquid level of the liquid that the gas sprayed by air knife blows afloat.

Air knife system the most according to claim 1, it is characterised in that described air knife injection gas airflow direction with The direction of transfer of substrate is contrary.