CN203382660U - Glass surface etching device - Google Patents
Glass surface etching device Download PDFInfo
- Publication number
- CN203382660U CN203382660U CN201320378087.7U CN201320378087U CN203382660U CN 203382660 U CN203382660 U CN 203382660U CN 201320378087 U CN201320378087 U CN 201320378087U CN 203382660 U CN203382660 U CN 203382660U
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- etching
- glass
- etching gas
- box unit
- contactless
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Abstract
The utility model provides a glass surface etching device comprising a glass conveying device, an etching gas generating device and at least one group of main etching body, wherein the main etching body is composed of a non-contact etching box unit and a back cover plate; the glass conveying device is located between the non-contact etching box unit and the back cover plate; the non-contact etching box unit is internally provided with an etching gas input pipeline; an etching gas output port of the etching gas generating device is communicated with the etching gas input pipeline; the etching gas input pipeline is connected with a spray nozzle capable of spraying etching gas on a glass sheet and covering the surface of the whole glass sheet. The non-contact etching box unit is internally provided with the etching gas input pipeline connected with the etching gas generating device, the etching gas input pipeline is connected with the spray nozzle capable of spraying the etching gas, and the spray nozzle can cover the glass sheet, so that the glass surface etching device can be used on a common glass sheet production line and can be used for etching a common glass sheet with a large area.
Description
Technical field
The utility model belongs to sheet glass and manufactures field, is specifically related to a kind of glass surface etching device.
Background technology
Sheet glass by the smelting process manufacture has very smooth surface, can display element (such as thin film transistor and the spectral filter etc.) major surfaces that will arrange on sheet glass not damaged in process of production.The staff finds, more smooth surface more easily produces static in the course of processing in practice, can reduce to reduce its slickness the possibility that static occurs and glass surface is carried out to etching, therefore, can under the prerequisite that does not affect glass optical characteristic, to glass, carry out etching.Although also be useful on the device of glass surface etching in prior art, but because this device can only be applied under vacuum environment, operating environment is strict, and only is suitable for the etching of the photovoltaic glass sheet of tens square centimeters, can not be applicable to the etching of large-area simple glass plate.
The utility model content
The purpose of this utility model is to provide a kind of glass surface etching system, and this device is used on the simple glass slice assembly line, and can carry out etching to the big area common glass sheet.
In order to achieve the above object, the technical solution adopted in the utility model is: comprise glass conveyer device, etching gas generating unit and at least one group of etching main body be comprised of contactless etching box unit and back cover plate, described glass conveyer device is between contactless etching box unit and back cover plate; Be provided with the etching gas input channel in contactless etching box unit, the etching gas delivery port of etching gas generating unit is connected with the etching gas input channel, is connected to the nozzle that sprays etching gas on the etching gas input channel.
The direction that described etching gas input channel is arranged on contactless etching box unit is vertical with the direction that sheet glass transmits.
The both sides of described etching gas input channel are respectively equipped with a wind pipe that the line style suction opening is installed, and wind pipe is arranged in contactless etching box unit.
Described etching gas input channel and wind pipe are set in parallel in contactless etching box unit, and an end of wind pipe communicates with the external world.
Described nozzle is one or more, and when nozzle is one, nozzle is the line style nozzle.
Described glass conveyer device forms by some groups of driving rolls that are arranged on etching main body two ends and for sheet glass being played to some groups of unpowered driving steamboats that support transitional function, and, when the contactless etching box unit in every group of etching main body is arranged in the glass conveyer device below, some groups of unpowered driving steamboats are arranged on contactless etching box unit; When the contactless etching box unit in every group of etching main body is arranged in the glass conveyer device top, some groups of unpowered driving steamboats are arranged on the cover plate of back.
Contactless etching box unit in described etching main body is arranged in glass conveyer device below or glass conveyer device top.
Cover plate inside, described back is equipped with heating system.
Described etching gas generating unit is one or more groups plasma generator, and the etching gas delivery port of plasma generator is connected with the etching gas input channel in contactless etching box unit in the etching main body.
Compared with prior art, the beneficial effects of the utility model are:
The utility model arranges the etching gas input channel be connected with the etching gas delivery port in contactless etching box unit, on this etching gas input channel, offers to be connected to spray the nozzle of etching gas with the etching glass sheet; Therefore, the etching gas produced after a certain proportion of carbon tetrafluoride gas and water vapour are by the etching gas generating unit enters the etching gas input channel in contactless etching box unit, and by being connected on the nozzle ejection of etching gas input channel, and lay the sheet glass transmitted on the glass conveyer device between contactless etching box unit and back cover plate, etching gas is sprayed onto the sheet glass transmitted, thereby realizes the etching on a surface of sheet glass; Simultaneously can the cover glass sheet due to nozzle, so the utility model can be used on the simple glass slice assembly line, and can carry out etching to the big area common glass sheet.
The accompanying drawing explanation
Fig. 1 is that tetrafluoro-methane and aqueous vapor generate HF and the CO for the acid gas etching after plasma
2the schematic diagram of gaseous mixture.
Fig. 2 is the front view of normal pressure lower-glass device for etching surface to the etching schematic diagram of moving glass phase sheet upper surface;
Fig. 3 is the vertical view of normal pressure lower-glass device for etching surface to the etching schematic diagram of moving glass phase sheet upper surface;
Fig. 4 is the front view of normal pressure lower-glass surface etching device to the etching schematic diagram of moving glass phase sheet lower surface;
Wherein, 1, contactless etching box unit, 2, driving rolls, 3, the line style nozzle, 4, the line style suction opening, 5, unpowered driving steamboat, 6, the etching gas input channel, 7, the back cover plate, 8, wind pipe, 9, sheet glass.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further details.
Referring to Fig. 1-4, the utility model comprises glass conveyer device, one or more groups plasma generator and at least one group of etching main body be comprised of contactless etching box unit 1 and back cover plate 7; Glass conveyer device is between contactless etching box unit 1 and back cover plate 7; Be provided with etching gas input channel 6 and two wind pipes 8 that line style suction opening 4 is installed in contactless etching box unit 1, air outlet tube 8 is positioned at the both sides of etching gas input channel 6, and an end of wind pipe 8 communicates with the external world, etching gas input channel 6 and wind pipe 8 be arranged in parallel, and the direction that etching gas input channel 6 is arranged on contactless etching box unit 1 is vertical with the direction that sheet glass 9 transmits.Because air outlet tube 8 is positioned at the both sides of etching gas input channel 6, in the nozzle ejection etching gas, both sides line style suction opening 4 starts exhausting, and the air be drawn into is discharged by an end of wind pipe 8, has so just guaranteed etched homogeneity;
The etching gas delivery port of plasma generator is connected with etching gas input channel 6, be connected on etching gas input channel 6 to sheet glass 9 and spray etching gas and can cover the nozzle of whole glass sheet surface, described nozzle is one or more, when nozzle is 1, nozzle adopts the line style nozzle, and the length of line style nozzle 3 at least can the cover glass sheet.When described nozzle is a plurality of, the nozzle ejection that etching gas also can pass through other shapes is on glass, as long as the scope of these nozzle ejection can cover glass sheet 9.
Every group of contactless etching box unit 1 is arranged in glass conveyer device below or glass conveyer device top.Wherein, glass conveyer device is by the some groups of driving rolls 2 that are arranged on etching main body two ends and for 9 some groups of unpowered driving steamboats 5 that support transitional function of sheet glass are formed, and some groups of unpowered driving trundles 5 can be supported transition at sheet glass 9 to sheet glass 9 through out-of-date.
Referring to Fig. 2, when the contactless etching box unit 1 in every group of etching main body is arranged in the glass conveyer device below, some groups unpowered without driving steamboat 5 to be arranged on contactless etching box unit 1, just can carry out etching to the upper surface of sheet glass 9 from the etching gas of nozzle ejection like this; Referring to Fig. 4, when the contactless etching box unit 1 in every group of etching main body is arranged in the glass conveyer device top, some groups of unpowered driving steamboats 5 are arranged on back cover plate 7, just can carry out etching to the lower surface of sheet glass 9 from the etching gas of nozzle ejection like this.In addition, adopted many groups etching main body in the utility model, and wherein existing contactless etching box unit 1 is arranged in the glass conveyer device top, also there is contactless etching box unit 1 to be arranged in glass conveyer device below, just can carry out etching to upper and lower two surfaces of sheet glass 9 from the etching gas of nozzle ejection like this.
Further, cover plate 7 inside in back are equipped with heating system, prevent that etching gas from, in the interior dewfall of contactless etching box unit 1, affecting the homogeneity of etching.
When lower mask body is introduced contactless etching box unit 1 in every group of etching main body and is arranged in the glass conveyer device below, using method of the present utility model is:
Referring to Fig. 1, by a certain proportion of CF
4gas and water vapour H
2o is undertaken generating HF and CO2 gaseous mixture (etching gas) after plasma by plasma generator, etching gas enters the interior etching gas input channel of contactless etching box unit 1 from the etching gas delivery port of plasma generator, and then be injected in sheet glass 9 surfaces above by the line style nozzle 3 of etching gas input channel connection, can also be by adjusting CF
4and CF
4input adjust the concentration of acid gas etching gas, thereby control the etching degree to sheet glass.
Referring to Fig. 2-3, when dry sheet glass 9, with horizontal direction, betransported by between contactless etching box unit and glass conveyer device, sheet glass 9 on horizontal direction along continuous straight runs under the driving of driving rolls 2 moves to the etching main direction, the etching gas be transported on contactless etching box unit 1 is spouting by line style nozzle 3, when sheet glass 9 during by contactless etching box unit 1, line style nozzle 3 sprays etching gas to the upper surface of sheet glass 9 with the flow of 36～2880SCCM, the line style suction opening 4 of line style nozzle 3 both sides starts exhausting at the nozzle ejection etching gas simultaneously, guarantee etched homogeneity, make mean roughness through overetched glass sheet surface in 0.4～1.3 nanometer.
Below, only for better understanding the utility model, can make changes and improvements to above-described embodiment, and not break away from fact the utility model, all these changes and improvements are included in scope of the present utility model.
Claims (9)
1. glass surface etching device, it is characterized in that: comprise glass conveyer device, etching gas generating unit and at least one group of etching main body be comprised of contactless etching box unit (1) and back cover plate (7), described glass conveyer device is positioned between contactless etching box unit (1) and back cover plate (7); Be provided with etching gas input channel (6) in contactless etching box unit (1), the etching gas delivery port of etching gas generating unit is connected with etching gas input channel (6), is connected to the nozzle that sprays etching gas on etching gas input channel (6).
2. glass surface etching device according to claim 1 is characterized in that: described etching gas input channel (6) is vertical with the direction of sheet glass (9) transmission in the upper direction of arranging of contactless etching box unit (1).
3. glass surface etching device according to claim 1 and 2, it is characterized in that: the both sides of described etching gas input channel (6) are respectively equipped with a wind pipe (8) that line style suction opening (4) are installed, wind pipe (8) is arranged in contactless etching box unit (1), and an end of wind pipe (8) communicates with the external world.
4. glass surface etching device according to claim 3, it is characterized in that: described etching gas input channel (6) and wind pipe (8) are set in parallel in contactless etching box unit (1).
5. glass surface etching device according to claim 1, it is characterized in that: described nozzle is one or more, when nozzle is one, nozzle is line style nozzle (3).
6. glass surface etching device according to claim 5, it is characterized in that: described glass conveyer device forms by the some groups of driving rolls (2) that are arranged on etching main body two ends and for sheet glass (9) is played to the some groups of unpowered driving steamboats (5) that support transitional function, and, when the contactless etching box unit (1) in every group of etching main body is arranged in the glass conveyer device below, some groups of unpowered driving steamboats (5) are arranged on contactless etching box unit (1); When the contactless etching box unit (1) in every group of etching main body is arranged in the glass conveyer device top, some groups of unpowered driving steamboats (5) are arranged on back cover plate (7).
7. glass surface etching device according to claim 1 is characterized in that: the contactless etching box unit (1) in described etching main body is arranged in glass conveyer device below or glass conveyer device top.
8. glass surface etching device according to claim 1, it is characterized in that: described back cover plate (7) inside is equipped with heating system.
9. glass surface etching device according to claim 1, it is characterized in that: described etching gas generating unit is one or more groups plasma generator, and the etching gas delivery port of plasma generator is connected with the etching gas input channel (6) in contactless etching box unit (1) in the etching main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320378087.7U CN203382660U (en) | 2013-06-27 | 2013-06-27 | Glass surface etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320378087.7U CN203382660U (en) | 2013-06-27 | 2013-06-27 | Glass surface etching device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203382660U true CN203382660U (en) | 2014-01-08 |
Family
ID=49871172
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320378087.7U Expired - Lifetime CN203382660U (en) | 2013-06-27 | 2013-06-27 | Glass surface etching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203382660U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503148A (en) * | 2014-12-30 | 2015-04-08 | 深圳市华星光电技术有限公司 | Vapor etching alignment method and vapor etching alignment equipment |
| CN107709261A (en) * | 2015-09-11 | 2018-02-16 | 日本电气硝子株式会社 | The manufacture method and its manufacture device of glass plate |
| CN109790064A (en) * | 2016-11-16 | 2019-05-21 | 日本电气硝子株式会社 | The manufacturing method of glass substrate |
-
2013
- 2013-06-27 CN CN201320378087.7U patent/CN203382660U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503148A (en) * | 2014-12-30 | 2015-04-08 | 深圳市华星光电技术有限公司 | Vapor etching alignment method and vapor etching alignment equipment |
| WO2016106834A1 (en) * | 2014-12-30 | 2016-07-07 | 深圳市华星光电技术有限公司 | Method and device for gas etching alignment |
| CN104503148B (en) * | 2014-12-30 | 2018-08-14 | 深圳市华星光电技术有限公司 | A kind of gas carves alignment method and equipment |
| CN107709261A (en) * | 2015-09-11 | 2018-02-16 | 日本电气硝子株式会社 | The manufacture method and its manufacture device of glass plate |
| CN107709261B (en) * | 2015-09-11 | 2020-06-30 | 日本电气硝子株式会社 | Method and apparatus for manufacturing glass plate |
| CN109790064A (en) * | 2016-11-16 | 2019-05-21 | 日本电气硝子株式会社 | The manufacturing method of glass substrate |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140108 |
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| CX01 | Expiry of patent term |