CN205608391U - Two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD - Google Patents
Two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD Download PDFInfo
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- CN205608391U CN205608391U CN201620060013.2U CN201620060013U CN205608391U CN 205608391 U CN205608391 U CN 205608391U CN 201620060013 U CN201620060013 U CN 201620060013U CN 205608391 U CN205608391 U CN 205608391U
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Abstract
The utility model discloses a two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD, include: arrange in perpendicularly the base upper surface DMD integrated component and by exposure workpiece, being fixed on Z axillare and Y axillare by exposure workpiece, all being installed DMD integrated component by exposure workpiece both sides, DMD device projection optical path is all installed on every DMD integrated component two sides, and a plurality of DMD device projection optical path of cross -distribution carry out vertical light exposure to the two sides by exposure workpiece simultaneously in DMD integrated component's the Y axle direction. It compares to scan the light shape formula of exposing to the sun with current simplex piece platform, the utility model discloses a can expose simultaneously by exposure workpiece's tow sides being set up two sets of DMD device projection optical path perpendicularly by exposure workpiece both sides, use the DMD device as projection optical path's figure generating device, the horizontal cruciate fixation of DMD device is by exposure workpiece along the removal of Z axle, to being carried out two -sided exposure by exposure workpiece for the efficiency of work promotes the one time, better improvement the productivity, guaranteed the quality of product simultaneously.
Description
Technical field
This utility model relates to a kind of exposure system and method, the laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD projection, belongs to direct-write type lithography machine quick scan exposure technical field.
Background technology
Write-through photoetching technique be development in recent years faster, to substitute the direct transfer techniques of image of the board-like photoetching technique of traditional mask, in quasiconductor and PCB production field, have increasingly consequence；Utilize this technology with shortened process, and production cost can be reduced.
The direct-write type lithography machine of main flow is scanned exposure in single work stage mode mostly in the market: after the most first having been exposed in the A face being exposed workpiece, then carries out reprint, is then exposed B face；In single workpiece table system, for exposure substrate upper plate, be directed at, expose, lower plate is carried out successively.
According to current structural system, each operating process has reached the time-consuming upper limit, is difficult to shorten the operating time of certain operating procedure again, and the direct-write type lithography machine of i.e. single work stage, due to the serial nature of each operating process, has been difficult to improve production capacity more.
Summary of the invention
The problem existed for above-mentioned prior art, this utility model provides the laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD projection, and this system can expose the tow sides being exposed workpiece simultaneously, improve work efficiency further, thus improve production capacity.
To achieve these goals, the technical solution adopted in the utility model is: the laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD projection, including:
It is vertically arranged in the DMD integrated package of base upper surface and is exposed workpiece；It is exposed workpiece to be fixed on Z axis plate and Y-axis plate, it is exposed workpiece both sides and is mounted on DMD integrated package, each DMD integrated package two sides is mounted on DMD device projecting light path, and in the Y direction of DMD integrated package, cross-distribution multiple DMD device projecting light path carries out vertical exposure to the two sides being exposed workpiece simultaneously.
Described DMD integrated package top and bottom the most all the time be exposed on workpiece, bottom concordant.
The detachable base upper surface that is fixed on bottom described DMD integrated package, P is exposed workpiece moving exposure in the Z-axis direction.
It is exposed workpiece and base angle is 0-90 °.
Compared with existing single work stage scan exposure form, this utility model is by being vertically arranged Liang Tao DMD device projecting light path and can expose and be exposed the tow sides of workpiece being exposed workpiece both sides simultaneously, use DMD device as the pattern generator of projecting light path, DMD device horizontal cross is fixed, it is exposed workpiece to move along Z axis, carries out double-sided exposure to being exposed workpiece so that the improved efficiency of work one times, preferably improve production capacity, ensure that the quality of product simultaneously.
Accompanying drawing explanation
Fig. 1 is this utility model system schematic.
In figure: 1, be exposed workpiece, 2, Z axis plate, 3, Y-axis plate, 4, base, 5, DMD device projecting light path, 6, DMD integrated package.
Detailed description of the invention
The utility model is described in further detail below in conjunction with the accompanying drawings.
Wherein, this utility model is on the basis of accompanying drawing 1, and left and right, upper and lower, the bottom of accompanying drawing 1, center, end are left and right, upper and lower, bottom of the present utility model, center, end.It should be noted that: unless specifically stated otherwise, positioned opposite, the numerical value etc. of the parts otherwise illustrated in the present embodiment is not limited to scope of the present utility model.
A kind of laser direct-writing double-sided exposure system of multiple rows of arranged crosswise DMD projection, including:
It is vertically arranged in the DMD integrated package 6 of base 4 upper surface and is exposed workpiece 1；It is exposed workpiece 1 to be fixed on Z axis plate 2 and Y-axis plate 3, direction along Z axis plate 2 is z-axis direction, direction along Y-axis plate 3 is Y direction, it is exposed workpiece 1 both sides and is mounted on DMD integrated package 6, each DMD integrated package two sides is mounted on DMD device projecting light path 5, and in the Y direction of DMD integrated package 6, cross-distribution multiple DMD device projecting light path carries out vertical exposure to the two sides being exposed workpiece simultaneously.
Described DMD integrated package top and bottom the most all the time be exposed on workpiece, bottom concordant.
The detachable base upper surface that is fixed on bottom described DMD integrated package, P is exposed workpiece moving exposure in the Z-axis direction.
It is exposed workpiece 1 and base 4 angle is 0-90 °.
Compared with existing single work stage scan exposure form, this utility model can expose simultaneously be exposed the tow sides of workpiece by being vertically arranged Liang Tao DMD device projecting light path on pcb board part both sides, use DMD device as the pattern generator of projecting light path, DMD device horizontal cross is fixed, it is exposed workpiece to move along Z axis, carries out double-sided exposure to being exposed workpiece so that the improved efficiency of work one times, preferably improve production capacity, ensure that the quality of product simultaneously.
It is obvious to a person skilled in the art that this utility model is not limited to the details of above-mentioned one exemplary embodiment, and in the case of without departing substantially from spirit or essential attributes of the present utility model, it is possible to realize this utility model in other specific forms.Therefore, no matter from the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, scope of the present utility model is limited by claims rather than described above, it is intended that all changes fallen in the implication of equivalency and scope of claim included in this utility model.Should not be considered as limiting involved claim by any reference in claim.
The above; it is only preferred embodiment of the present utility model; not in order to limit this utility model, every any trickle amendment, equivalent and improvement made above example according to technical spirit of the present utility model, within should be included in the protection domain of technical solutions of the utility model.
Claims (4)
1. the laser direct-writing double-sided exposure system of multiple rows of arranged crosswise DMD projection, it is characterised in that including:
It is vertically arranged in the DMD integrated package of base upper surface and is exposed workpiece；It is exposed workpiece to be fixed on Z axis plate and Y-axis plate, it is exposed workpiece both sides and is mounted on DMD integrated package, each DMD integrated package two sides is mounted on DMD device projecting light path, and in the Y direction of DMD integrated package, cross-distribution multiple DMD device projecting light path carries out vertical exposure to the two sides being exposed workpiece simultaneously.
The laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD the most according to claim 1 projection, it is characterised in that described DMD integrated package top and bottom the most all the time be exposed on workpiece, bottom concordant.
The laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD the most according to claim 2 projection, it is characterised in that detachable bottom described DMD integrated package be fixed on base upper surface, be exposed workpiece moving exposure in the Z-axis direction.
The laser direct-writing double-sided exposure system of a kind of multiple rows of arranged crosswise DMD the most according to claim 3 projection, it is characterised in that be exposed workpiece and base angle is 0-90 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620060013.2U CN205608391U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620060013.2U CN205608391U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205608391U true CN205608391U (en) | 2016-09-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620060013.2U Active CN205608391U (en) | 2016-01-22 | 2016-01-22 | Two -sided exposure system is directly write to projected laser of multirow cross arrangement DMD |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205608391U (en) |
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2016
- 2016-01-22 CN CN201620060013.2U patent/CN205608391U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 221000 west side of Hengshan Road, Pizhou City, Xuzhou City, Jiangsu Province Patentee after: Jiangsu Yingsu integrated circuit equipment Co., Ltd Address before: 221100 Huashan Road, Pizhou Economic Development Zone, Xuzhou, Jiangsu Patentee before: JIANGSU YINGSU PHOTOELECTRIC TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |