CN205333677U

CN205333677U - Quartzy resonant transducer of four girder constructions

Info

Publication number: CN205333677U
Application number: CN201521092715.0U
Authority: CN
Inventors: 王显波; 王天雄; 周禄雄; 饶绍兵
Original assignee: SICHUAN SANTAI QUATZ CRYSTAL EELECTRONICS CO Ltd
Current assignee: SICHUAN SANTAI QUATZ CRYSTAL EELECTRONICS CO Ltd
Priority date: 2015-12-25
Filing date: 2015-12-25
Publication date: 2016-06-22
Anticipated expiration: 2025-12-25

Abstract

The utility model discloses a quartzy resonant transducer of four girder constructions, including glass substrate (7), be located silica -based support (5) of glass substrate upper surface, silica -based has strutted a rectangle hole, be provided with briquetting (6) in these rectangle hole central authorities, briquetting (6) are connected with four faces of rectangle hole respectively through four cantilever beam (3) makes the unsettled setting of briquetting, the briquetting below is provided with metal electrode (8), the area of the up end of briquetting is lighter than face area down, the lower extreme every detail of briquetting is to metal electrode, the up end of briquetting is provided with second silicon boss (4), the up end of briquetting is on a parallel with the up end of silica -based support, the up end of silica -based support is provided with first silicon boss (2), all be provided with on first silicon boss (2) and the second silicon boss (4) quartz wedge (1), be provided with resonance roof beam (9) of 2 parallels between two quartz wedge (1).

Description

Four girder construction quartz resonance sensors

Technical field

This utility model relates to resonant transducer, is specifically related to four girder construction quartz resonance sensors。

Background technology

At present, in high precision, high-resolution digitized acceleration measurement method obtained increasingly developing widely, in have wide practical use in high-precision high-speed figure navigation system, gravimetry, cruise missile, autonomous underwater navigation etc.。The output of this type of accelerometer is frequency signal, it does not have the loss of significance that digital-to-analogue conversion brings, it is possible to measures system with high accuracy number and combines。The sensor adopting MEMS processing conventional at present is broadly divided into pressure resistance type and condenser type。Piezoresistive transducer is by having the resistance of piezoresistive effect and having beam one mass of a fixed structure and carry out induction acceleration, and capacitance acceleration transducer is then carry out induction acceleration by changing the area of capacitor plate or distance。The acceleration transducer output that both the above is conventional is all analogue signal, and post processing circuitry is complicated, and sensitivity is low, there is analog digital conversion error, and can not directly combine with high-precision digital display circuit。Currently also having a small amount of resonant silicon micro-acceleration sensor, although sensors with auxiliary electrode output is digital signal, but there is the problems such as low, the poor sensitivity of resonant frequency, structure is complicated simultaneously, difficulty of processing is big, and cost is high。In a word, the simulation output of existing accelerometer ubiquity, the problems such as sensitivity is low, processed complex。

Utility model content

Technical problem to be solved in the utility model is to improve the sensitivity of resonant transducer, it is therefore intended that provide four girder construction quartz resonance sensors。

Of the present utility model it is achieved through the following technical solutions: four girder construction quartz resonance sensors, including glass substrate, it is positioned at the silica-based support of glass substrate upper surface, silica-based support has a rectangle hole, this rectangle hole central authorities are provided with briquetting, briquetting is connected so that the unsettled setting of briquetting with the four of rectangle hole faces by four cantilever beams respectively, briquetting is arranged below metal electrode, the area of the upper surface of briquetting is less than lower surface area, the lower surface of briquetting is towards metal electrode, the upper surface of briquetting is provided with the second silicon boss, the upper surface of briquetting is parallel to the upper surface of silica-based support, the upper surface of silica-based support is provided with the first silicon boss, first silicon boss and the second silicon boss are provided with quartz wedge, 2 parallel resonance beam it are provided with between two quartz wedges。

The structure of traditional briquetting is converted by this utility model so that the area of the upper surface of briquetting is less than the area of lower surface so that the area of the lower surface of briquetting increases, it is ensured that briquetting can fully contact with metal electrode, improves sensitivity。There is inverse piezoelectric effect in two quartz wedges of the present utility model, when there is electric charge alternate on electrode two sides, the resonance beam between two quartz wedges arises that vibration, and its frequency of vibration is by the impact of quartz wedge, resonant beam structure shape。When acceleration acts on chip, the displacement that the briquetting that cantilever beam supports is mobile small under inertia force effect。Owing to quartz wedge is fixed, one quartz wedge is connected with mass, so the structure of two quartz wedges and resonance beam composition occurs bending and deformation, this flexural deformation causes that its resonant frequency changes, the size changed is directly proportional to acceleration, just can obtain the size of acceleration thereby through the resonant frequency detecting resonance beam。First silicon boss and the second silicon boss are prevented from the silica-based support interference to vibration；Therefore the present invention adopts quartz wedge and 2 resonance beam as sensitive material, and substrate support is silicon, so having rate-adaptive pacemaker, volume is little, and sensitivity is high and quality factor advantages of higher。Quartz wedge and 2 resonance beam composition resonance structures。

Preferably, having the movement clearance of 3 microns between described metal electrode and briquetting lower surface, this utility model reduces movement clearance, can improve sensitivity further。Having the movement clearance of 3 microns between briquetting and glass substrate, when there being acceleration to act on chip, according to Newton's second law, briquetting to produce certain displacement under the effect of inertia force, thus resonance structure produces flexural deformation and causes the change of its frequency。

Preferably, there is the movement clearance of 10 microns between two resonance beam。This movement clearance arranges son 10 microns, can improve sensitivity further。

Preferably, the upper surface of the first silicon boss and the second silicon boss exceeds 40 to 50 microns, the upper surface of silica-based support。So can better prevent the silicon face obstruction to resonance structure resonance, make the frequency of vibration of resonance structure more objectively react the size of acceleration。

Preferably, the cross section shape of briquetting is isosceles trapezoid, and the bottom of this isosceles trapezoid is longer than base, and bottom is towards metal electrode。Metal electrode is set, it is possible to prevent the Electrostatic Absorption between electrostatic bonding brief acceleration briquetting and glass substrate。

Preferably, described resonance beam surface surrounding is provided with electrode。Can vibrate according to predetermined modality after energising。The direction of vibration of two resonance beam is contrary。

Preferably, the axis of described cantilever beam and briquetting overlaps。

Preferably, the thickness of described metal electrode is 100 microns。

Preferably, described cantilever beam adopts the long strip type part of thickness 1mm to 5mm。

The operation principle of the present invention is: when acceleration acts on sensor chip, and briquetting is as the sensitive-mass block of sensor acceleration。According to Newton's second law, when acceleration acts on briquetting, effect due to inertia force, briquetting can produce certain displacement, and then making resonance structure deform upon, this deformation causes that the resonant frequency of quartz beam changes, and this change is converted into frequency signal output by frequency detection circuit, thus realizing the acceleration one frequency signal conversion of sensor chip, complete the digitized measurement to acceleration。

This utility model compared with prior art, has such advantages as and beneficial effect: have volume little, and weight is little, high sensitivity, the advantage that digital signal output is high with resolution。

Accompanying drawing explanation

Accompanying drawing described herein is used for providing being further appreciated by this utility model embodiment, constitutes the part of the application, is not intended that the restriction to this utility model embodiment。In the accompanying drawings:

Fig. 1 is this utility model plan structure schematic diagram。

Fig. 2 is this utility model side-looking structural representation。

Fig. 3 is the structural representation of resonance structure。

The parts title of labelling and correspondence in accompanying drawing:

1, quartz wedge；2, the first silicon boss；3, cantilever beam；4, the second silicon boss；5, silica-based support；6, briquetting；7, glass substrate；8, metal electrode；9, resonance beam。

Detailed description of the invention

For making the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with embodiment and accompanying drawing, the utility model is described in further detail, exemplary embodiment of the present utility model and explanation thereof are only used for explaining this utility model, are not intended as restriction of the present utility model。

Embodiment

As shown in Figure 1 to Figure 3, of the present utility model it is achieved through the following technical solutions: four girder construction quartz resonance sensors, including glass substrate 7, it is positioned at the silica-based support 5 of glass substrate upper surface, silica-based support has a rectangle hole, this rectangle hole central authorities are provided with briquetting 6, briquetting 6 is connected so that the unsettled setting of briquetting with the four of rectangle hole faces by four cantilever beams 3 respectively, briquetting is arranged below metal electrode 8, the area of the upper surface of briquetting is less than lower surface area, the lower surface of briquetting is towards metal electrode, the upper surface of briquetting is provided with the second silicon boss 4, the upper surface of briquetting is parallel to the upper surface of silica-based support, the upper surface of silica-based support is provided with the first silicon boss 2, first silicon boss 2 and the second silicon boss 4 are provided with quartz wedge 1, 2 parallel resonance beam 9 it are provided with between two quartz wedges 1。

Preferably, having the movement clearance of 3 microns between described metal electrode 8 and briquetting lower surface, this utility model reduces movement clearance, can improve sensitivity further。Having the movement clearance of 3 microns between briquetting and glass substrate, when there being acceleration to act on chip, according to Newton's second law, briquetting to produce certain displacement under the effect of inertia force, thus resonance structure produces flexural deformation and causes the change of its frequency。

Preferably, there is the movement clearance of 10 microns between two resonance beam 9。This movement clearance arranges son 10 microns, can improve sensitivity further。

Preferably, the upper surface of the first silicon boss 2 and the second silicon boss 4 exceeds 40 to 50 microns, the upper surface of silica-based support。So can better prevent the silicon face obstruction to resonance structure resonance, make the frequency of vibration of resonance structure more objectively react the size of acceleration。

Preferably, the axis of described cantilever beam 3 and briquetting 6 overlaps。

Preferably, the thickness of described metal electrode is 100 microns。

Above-described detailed description of the invention; the purpose of this utility model, technical scheme and beneficial effect have been further described; it is it should be understood that; the foregoing is only detailed description of the invention of the present utility model; it is not used to limit protection domain of the present utility model; all within spirit of the present utility model and principle, any amendment of making, equivalent replacement, improvement etc., should be included within protection domain of the present utility model。

Claims

1. four girder construction quartz resonance sensor, it is characterized in that, including glass substrate (7), it is positioned at the silica-based support (5) of glass substrate upper surface, silica-based support has a rectangle hole, this rectangle hole central authorities are provided with briquetting (6), briquetting (6) is connected so that the unsettled setting of briquetting with the four of rectangle hole faces by four cantilever beams (3) respectively, briquetting is arranged below metal electrode (8), the area of the upper surface of briquetting is less than lower surface area, the lower surface of briquetting is towards metal electrode, the upper surface of briquetting is provided with the second silicon boss (4), the upper surface of briquetting is parallel to the upper surface of silica-based support, the upper surface of silica-based support is provided with the first silicon boss (2), first silicon boss (2) and the second silicon boss (4) are provided with quartz wedge (1), 2 parallel resonance beam (9) it are provided with between two quartz wedges (1)。

2. four girder construction quartz resonance sensors according to claim 1, it is characterised in that have the movement clearance of 3 microns between described metal electrode (8) and briquetting lower surface。

3. four girder construction quartz resonance sensors according to claim 1, it is characterised in that have the movement clearance of 10 microns between two resonance beam (9)。

4. four girder construction quartz resonance sensors according to claim 1, it is characterised in that the upper surface of the first silicon boss (2) and the second silicon boss (4) exceeds 40 to 50 microns, the upper surface of silica-based support。

5. four girder construction quartz resonance sensors according to claim 1, it is characterised in that the cross section shape of briquetting is isosceles trapezoid, and the bottom of this isosceles trapezoid is longer than base, bottom is towards metal electrode。

6. four girder construction quartz resonance sensors according to claim 1, it is characterised in that described resonance beam surface surrounding is provided with electrode。

7. four girder construction quartz resonance sensors according to claim 1, it is characterised in that the axis of described cantilever beam (3) and briquetting (6) overlaps。

8. four girder construction quartz resonance sensors according to claim 1, it is characterised in that the thickness of described metal electrode is 100 microns。

9. four girder construction quartz resonance sensors according to claim 1, it is characterised in that described cantilever beam adopts the long strip type part of thickness 1mm to 5mm。