CN205258662U - 一种自动硅片匀胶机 - Google Patents
一种自动硅片匀胶机 Download PDFInfo
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- CN205258662U CN205258662U CN201520997529.5U CN201520997529U CN205258662U CN 205258662 U CN205258662 U CN 205258662U CN 201520997529 U CN201520997529 U CN 201520997529U CN 205258662 U CN205258662 U CN 205258662U
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CN201520997529.5U CN205258662U (zh) | 2015-12-07 | 2015-12-07 | 一种自动硅片匀胶机 |
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CN201520997529.5U CN205258662U (zh) | 2015-12-07 | 2015-12-07 | 一种自动硅片匀胶机 |
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CN205258662U true CN205258662U (zh) | 2016-05-25 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105543977A (zh) * | 2015-12-07 | 2016-05-04 | 天津中环半导体股份有限公司 | 自动硅片匀胶机 |
CN110320855A (zh) * | 2019-08-02 | 2019-10-11 | 吉林华微电子股份有限公司 | 匀胶机控制装置及方法 |
CN112774933A (zh) * | 2020-12-28 | 2021-05-11 | 无锡优联创芯机电设备有限公司 | 一种自动硅片匀胶用涂抹装置及使用方法 |
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- 2015-12-07 CN CN201520997529.5U patent/CN205258662U/zh not_active Withdrawn - After Issue
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105543977A (zh) * | 2015-12-07 | 2016-05-04 | 天津中环半导体股份有限公司 | 自动硅片匀胶机 |
CN105543977B (zh) * | 2015-12-07 | 2018-01-12 | 天津中环半导体股份有限公司 | 自动硅片匀胶机 |
CN110320855A (zh) * | 2019-08-02 | 2019-10-11 | 吉林华微电子股份有限公司 | 匀胶机控制装置及方法 |
CN112774933A (zh) * | 2020-12-28 | 2021-05-11 | 无锡优联创芯机电设备有限公司 | 一种自动硅片匀胶用涂抹装置及使用方法 |
CN112774933B (zh) * | 2020-12-28 | 2022-04-19 | 无锡优联创芯机电设备有限公司 | 一种自动硅片匀胶用涂抹装置及使用方法 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170104 Address after: 300384 the Binhai New Area of Tianjin Huayuan Industrial Zone (outer ring) Haitai Branch Street No. 3 Patentee after: Tianjin ring Energy Technology Co., Ltd. Address before: 300384 Tianjin city Xiqing Haitai Road No. 12 Patentee before: Tianjin Zhonghuan Semiconductor Joint-Stock Co., Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170823 Address after: 300384 in Tianjin Binhai high tech Zone Huayuan Industrial Zone (outer ring) Haitai Road No. 12 Patentee after: Tianjin Zhonghuan Semiconductor Joint-Stock Co., Ltd. Address before: 300384 the Binhai New Area of Tianjin Huayuan Industrial Zone (outer ring) Haitai Branch Street No. 3 Patentee before: Tianjin ring Energy Technology Co., Ltd. |
|
AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |
Granted publication date: 20160525 Effective date of abandoning: 20180112 |