CN205188472U - Quartz glass melting furnace - Google Patents
Quartz glass melting furnace Download PDFInfo
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- CN205188472U CN205188472U CN201520946817.8U CN201520946817U CN205188472U CN 205188472 U CN205188472 U CN 205188472U CN 201520946817 U CN201520946817 U CN 201520946817U CN 205188472 U CN205188472 U CN 205188472U
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- heater
- silica glass
- stove cylinder
- smelting furnace
- quartz glass
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Abstract
The utility model provides a quartz glass melting furnace, the melting furnace adopt and to feed, get the material working method down, the furnace chamber be the totally -enclosed structure, has realized the lift and rotatory process of quartz glass fuse -element in the stove, the cleanliness factor is high in the forming process, samming district temperature is even, the temperature of going up and down is efficient, the brilliant circumstances is analysed to optics quartz glass product temperature uniformity good (the homogeneity is good), nothing after the shaping. The utility model discloses a does can is quartz glass melting furnace applicable to all kinds of jumbo sizes and (arrive 800mm200mm (diameter thickness), optical quartz glass's (including ultraviolet optical quartz glass, infrared optical quartz glass and visible optical quartz glass ) post forming is handled.
Description
Technical field
The utility model belongs to silica glass processing technique field, is specifically related to a kind of silica glass smelting furnace.
Background technology
As inertial confinement fusion (Inertialconfinementfusion, one of be called for short ICF) desirable optical material, heavy caliber ultraviolet optics silica glass (ZS) is widely used in the components and parts such as spatial filter, switch window, diagnosis beam-splitting board, continuous phase plate, focal target mirror, beam splitting sampled-grating in ICF device, is that ICF develops indispensable base mateiral.This material is also widely used in aerospace and IC industry simultaneously.
Ultraviolet optics silica glass generally adopts chemical Vapor deposition process CVD to produce, and the method is for making the silica glass ingot of following process.In order to the suitable dimension quartz glass products that can be met actual use just needs the material silica glass melting unit that sticks together by chemical Vapor deposition process is produced to carry out post forming by high temperature melting means.
Size and the optical homogeneity of existing silica glass melting unit synthetic quartz glass ingot do not reach service requirements, and production efficiency is not high.
Summary of the invention
The technical problems to be solved in the utility model is to provide a kind of silica glass smelting furnace.
Silica glass smelting furnace of the present utility model, comprise: body of heater, well heater, radiation shield and thermoscreen, charging mechanism, material fetching mechanism, wherein thermoscreen is close to inboard wall of furnace body installation, radiation shield covers on thermoscreen, well heater hangs and is arranged on furnace interior and thermoscreen, charging mechanism is connected with upper of furnace body outside body of heater, and material fetching mechanism is connected with bottom of furnace body outside body of heater.
Described body of heater, comprise: seed crystal rotates and upgrades device, secondary stove cylinder, upper bell, charging bole, middle stove cylinder, crucible rotation hoisting appliance, furnace hearth plate, crucible pallet, seed crystal rotates and upgrades device and is arranged on secondary stove cylinder top, the charging bole of secondary stove cylinder bottom and upper bell passes through Flange joint, upper bell is arranged on middle stove cylinder top, crucible rotation hoisting appliance is arranged on furnace hearth plate central position, crucible pallet is that movable part is placed on crucible rotation hoisting appliance, furnace hearth plate is by material fetching mechanism jacking and middle stove cylinder close contact, furnace hearth plate and inside, middle stove cylinder junction have sealing-ring to seal, outside buckle is fixedly connected with.
Described body of heater adopts Double water-cooled structure, furnace body outer wall hollow, and water coolant is flowed into from water-in by pumping, flows out, lower the temperature to furnace body outer wall from water outlet.
Described well heater is divided into primary heater and lower compensating heater, and primary heater is arranged on the middle stove cylinder inwall of body of heater, and lower compensating heater is arranged on the furnace hearth plate inwall of body of heater.
Described radiation shield is multilayered structure, and every layer of screen is fritter overlap joint, separates between each layer with support bar.
Described thermoscreen internal layer is carbon felt, outer layer covers molybdenum sheet
Described charging mechanism is connected with the rotating shaft of secondary stove cylinder, and secondary stove cylinder Unscrew can expose the charging bole at bell top, loads quartzy ingot by charging bole.
Described seed crystal rotates and upgrades device and is installed on secondary stove cylinder, and the quartzy ingot controlling to found in body of heater promotes and rotates.
Described furnace hearth plate is provided with crucible rotation hoisting appliance, controls lifting and the rotation of crucible pallet in body of heater, and the material fetching mechanism be connected with furnace hearth plate, furnace hearth plate can be controlled and open downwards, enter for fork truck arm and take out crucible pallet and the product after founding.
Silica glass smelting furnace of the present utility model can meet all kinds of large size (maximum to 800mm × 200mm(diameter * thickness)) the post forming process for producing of optical quartz glass (comprising ultraviolet optics silica glass (ZS), infrared optical silex (HS), visible optical silica glass (KS)).Silica glass smelting furnace of the present utility model adopts upper charging, material taking mode of operation, and furnace chamber is fully-closed structure, and interior cleanliness factor is high, and uniform temperature zone temperature field is even, and warming and cooling rate is fast, achieves lifting and the rotary course of silica glass melt in stove.Product after silica glass smelting furnace of the present utility model post forming has uniform temperature good (good uniformity), without advantages such as crystallization situations.
Accompanying drawing explanation
Fig. 1 is the structural representation of silica glass smelting furnace of the present utility model;
Fig. 2 is body of heater (1) the block construction schematic diagram of silica glass smelting furnace of the present utility model;
Fig. 3 is the layout schematic diagram of silica glass smelting furnace well heater (2) of the present utility model;
In figure, 1. body of heater 2. well heater 3. radiation shield 4. thermoscreen 5. charging mechanism 6. material fetching mechanism 101. seed crystal to rotate and upgrade on the secondary stove cylinder 103. of device 102. stove cylinder 106. crucible rotation hoisting appliance 107. furnace hearth plate 108. crucible pallet 201. primary heater, 202. times compensating heaters in bell 104. charging bole 105..
Embodiment
The utility model is illustrated below in conjunction with drawings and Examples.
Fig. 1 is the structural representation of silica glass smelting furnace of the present utility model, as shown in Figure 1, silica glass smelting furnace 1 of the present utility model, comprise: body of heater 1, well heater 2, radiation shield 3 and thermoscreen 4, charging mechanism 5, material fetching mechanism 6, wherein thermoscreen 4 is close to inboard wall of furnace body 1 and is installed, radiation shield 3 covers on thermoscreen 4, well heater 3 hangs and is arranged on body of heater 1 inside and thermoscreen 4, charging mechanism 5 is connected with body of heater 1 top outside body of heater 1, and material fetching mechanism 6 is connected with bottom body of heater 1 outside body of heater 1.
Fig. 2 is body of heater (1) the block construction schematic diagram of silica glass smelting furnace of the present utility model, as shown in Figure 2, described body of heater 1 comprises seed crystal and rotates and upgrades device 101, secondary stove cylinder 102, upper bell 103, charging bole 104, middle stove cylinder 105, crucible rotation hoisting appliance 106, furnace hearth plate 107, crucible pallet 108; Seed crystal rotates and upgrades device 101 and is arranged on secondary stove cylinder 102 top, the charging bole 104 of secondary stove cylinder 102 bottom and upper bell 103 passes through Flange joint, upper bell 103 is arranged on middle stove cylinder 105 top, crucible rotation hoisting appliance 106 is arranged on furnace hearth plate 107 central position, crucible pallet 108 is placed on crucible rotation hoisting appliance 106 for movable part, furnace hearth plate 107 is by material fetching mechanism 6 jacking and middle stove cylinder 105 close contact, furnace hearth plate and inside, middle stove cylinder junction have sealing-ring to seal, and outside buckle is fixedly connected with.
Described body of heater 1 adopts Double water-cooled structure, body of heater 1 outer wall hollow, and water coolant is flowed into from water-in by pumping, flows out, lower the temperature to body of heater 1 outer wall from water outlet.
Fig. 3 is the layout schematic diagram of silica glass smelting furnace well heater (2) of the present utility model, as shown in Figure 3, described well heater 2 is divided into primary heater 201 and lower compensating heater 202, primary heater 201 is arranged on middle stove cylinder 105 inwall of body of heater 1, and lower compensating heater 202 is arranged on furnace hearth plate 107 inwall of body of heater 1.
Described radiation shield 3 is multilayered structure, and every layer of screen is fritter overlap joint, separates between each layer with support bar.
Described thermoscreen 4 internal layer is carbon felt, outer layer covers molybdenum sheet.
Described charging mechanism 5 is connected with rotating shaft with secondary stove cylinder 102, and secondary stove cylinder 102 Unscrew can expose the charging bole 104 at bell 103 top, loads quartzy ingot by charging bole 104.
Described seed crystal rotates and upgrades device 101 and is installed on secondary stove cylinder 102, and the quartzy ingot controlling to found in body of heater 1 promotes and rotates.
Described furnace hearth plate 107 is provided with crucible rotation hoisting appliance 106, control lifting and the rotation of crucible pallet 108 in body of heater 1, and the material fetching mechanism 6 be connected with furnace hearth plate 107, furnace hearth plate 107 can be controlled and open downwards, enter for fork truck arm and take out crucible pallet 108 and the product after founding.
Specific works process is: start charging mechanism 5, promote secondary stove cylinder 102 and itself and upper bell 103 are disengaged, the charging bole 104 at upper bell 103 top is exposed secondary stove cylinder 102 90-degree rotation.Rotating and upgrading device 101 with seed crystal, quartzy ingot to be promoted to secondary stove cylinder 102 inner, closes secondary stove cylinder 102, by charging bole 104 the silica glass ingot of 102 li, secondary stove cylinder put into the crucible central position on crucible pallet 108.To fetch boiling water cooling system start vacuum system and body of heater is vacuumized, to 5Pa.Start crucible rotation hoisting appliance 106 lifting gear, make it rotate by 1 ~ 10rpm speed.Inner to well heater 2 electrified regulation body of heater 1, it is 8.5 DEG C/min that temperature rise rate controls.After body of heater 1 inside is warmed up to 1600 DEG C, stops vacuumizing and be filled with argon gas in body of heater 1, make body of heater 1 internal pressure be raised to the slight positive pressure state of 0.015MPa.Adjustment temperature rise rate is 1.5 DEG C/min, and body of heater 1 inside continues be warmed up to 1830 DEG C and keep.After keeping warm mode terminates, utilize well heater 2 to control the inner slow cooling to 80 DEG C of body of heater 1, temperature-fall period is divided into the stage of multiple rate of temperature fall according to processing requirement, and it is 8 DEG C/min that the highest rate of temperature fall controls.Start material fetching mechanism 6 and open furnace hearth plate 107, make can insert fork truck arm below crucible pallet 108 with crucible lift mechanism 106 jacking crucible pallet 108, take out crucible pallet 108 and crucible with fork truck, obtain the silica glass founded.
Claims (9)
1. a silica glass smelting furnace, is characterized in that, described smelting furnace comprises: body of heater (1), well heater (2), radiation shield (3) and thermoscreen (4), charging mechanism (5), material fetching mechanism (6); Described thermoscreen (4) is close to body of heater (1) inwall and is installed, radiation shield (3) covers on thermoscreen (4), well heater (2) hangs and is arranged on body of heater (1) inside and thermoscreen (4), charging mechanism (5) is connected with body of heater (1) top outward at body of heater (1), and material fetching mechanism (6) is connected with body of heater (1) bottom outward at body of heater (1).
2. silica glass smelting furnace according to claim 1, it is characterized in that, described body of heater (1) comprises seed crystal and rotates and upgrades device (101), secondary stove cylinder (102), upper bell (103), charging bole (104), middle stove cylinder (105), crucible rotation hoisting appliance (106), furnace hearth plate (107), crucible pallet (108); Described seed crystal rotates and upgrades device (101) and is arranged on secondary stove cylinder (102) top, the charging bole (104) of secondary stove cylinder (102) bottom and upper bell (103) passes through Flange joint, upper bell (103) is arranged on middle stove cylinder (105) top, and crucible rotation hoisting appliance (106) is arranged on furnace hearth plate (107) central position; Described crucible pallet (108) is placed on crucible rotation hoisting appliance (106), furnace hearth plate (107) is by material fetching mechanism (6) jacking and middle stove cylinder (105) close contact, furnace hearth plate (107) and middle stove cylinder (105) inside, junction have sealing-ring to seal, and outside buckle is fixedly connected with.
3. silica glass smelting furnace according to claim 1 and 2, is characterized in that, described body of heater (1) adopts Double water-cooled structure, body of heater (1) outer wall hollow, water coolant is flowed into from water-in by pumping, flows out, lower the temperature to body of heater (1) outer wall from water outlet.
4. silica glass smelting furnace according to claim 1 and 2, it is characterized in that, described well heater (2) is divided into primary heater (201) and lower compensating heater (202), primary heater (201) is arranged on middle stove cylinder (105) inwall of body of heater (1), and lower compensating heater (202) is arranged on furnace hearth plate (107) inwall of body of heater (1).
5. silica glass smelting furnace according to claim 1, is characterized in that, described radiation shield (3) is multilayered structure, and every layer of radiation shield (3), with fritter overlap joint, separates with support bar between each layer.
6. silica glass smelting furnace according to claim 1 or 5, it is characterized in that, described thermoscreen (4) internal layer is carbon felt, outer layer covers molybdenum sheet.
7. silica glass smelting furnace according to claim 1 and 2, it is characterized in that, described charging mechanism (5) is connected by rotating shaft with secondary stove cylinder (102), secondary stove cylinder (102) Unscrew can expose the charging bole (104) at bell (103) top, loads quartzy ingot by charging bole (104).
8. silica glass smelting furnace according to claim 2, is characterized in that, described seed crystal rotates and upgrades device (101) and is installed on secondary stove cylinder (102), and the quartzy ingot controlling to found in body of heater (1) promotes and rotates.
9. silica glass smelting furnace according to claim 2, is characterized in that, described furnace hearth plate (107) is provided with crucible rotation hoisting appliance (106), controls lifting and the rotation of body of heater (1) interior crucible pallet (108); The material fetching mechanism (6) be connected with furnace hearth plate (107), control furnace hearth plate (107) and open downwards, fork truck arm stretches into body of heater (1) and takes out crucible pallet (108) and the product after founding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520946817.8U CN205188472U (en) | 2015-11-25 | 2015-11-25 | Quartz glass melting furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520946817.8U CN205188472U (en) | 2015-11-25 | 2015-11-25 | Quartz glass melting furnace |
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| CN205188472U true CN205188472U (en) | 2016-04-27 |
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| CN201520946817.8U Active CN205188472U (en) | 2015-11-25 | 2015-11-25 | Quartz glass melting furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463565A (en) * | 2015-11-25 | 2016-04-06 | 四川神光石英科技有限公司 | Quartz glass melting furnace |
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2015
- 2015-11-25 CN CN201520946817.8U patent/CN205188472U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463565A (en) * | 2015-11-25 | 2016-04-06 | 四川神光石英科技有限公司 | Quartz glass melting furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 610000 floor 2, No. 9, Jianshe South Street, Chenghua District, Chengdu, Sichuan Patentee after: Shenguang Optical Group Co.,Ltd. Address before: 621999 No. 64 Mianshan Road, Mianyang City, Sichuan Province Patentee before: SICHUAN SHENGUANG QUARTZ TECHNOLOGY CO.,LTD. |
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| CP03 | Change of name, title or address |