CN205152398U - 一种双排气管扩散炉用石英管 - Google Patents
一种双排气管扩散炉用石英管 Download PDFInfo
- Publication number
- CN205152398U CN205152398U CN201520820137.1U CN201520820137U CN205152398U CN 205152398 U CN205152398 U CN 205152398U CN 201520820137 U CN201520820137 U CN 201520820137U CN 205152398 U CN205152398 U CN 205152398U
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- CN
- China
- Prior art keywords
- pipe
- inlet pipe
- inlet
- diffusion furnace
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 238000009792 diffusion process Methods 0.000 title claims abstract description 31
- 239000010453 quartz Substances 0.000 title claims abstract description 10
- 239000002775 capsule Substances 0.000 title abstract 2
- 239000002912 waste gas Substances 0.000 claims abstract description 12
- 238000011084 recovery Methods 0.000 claims abstract description 11
- 238000013022 venting Methods 0.000 claims description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 239000000377 silicon dioxide Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 33
- 239000007789 gas Substances 0.000 abstract description 25
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000002994 raw material Substances 0.000 abstract description 3
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 description 16
- 238000000034 method Methods 0.000 description 8
- 238000004064 recycling Methods 0.000 description 7
- 238000010926 purge Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 231100000614 poison Toxicity 0.000 description 2
- 230000007096 poisonous effect Effects 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Abstract
Description
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520820137.1U CN205152398U (zh) | 2015-10-21 | 2015-10-21 | 一种双排气管扩散炉用石英管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520820137.1U CN205152398U (zh) | 2015-10-21 | 2015-10-21 | 一种双排气管扩散炉用石英管 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205152398U true CN205152398U (zh) | 2016-04-13 |
Family
ID=55688113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520820137.1U Expired - Fee Related CN205152398U (zh) | 2015-10-21 | 2015-10-21 | 一种双排气管扩散炉用石英管 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205152398U (zh) |
-
2015
- 2015-10-21 CN CN201520820137.1U patent/CN205152398U/zh not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Twin exhaust pipes is quartz capsule for diffusion furnace Effective date of registration: 20190312 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: 2019990000200 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20200427 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: 2019990000200 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Twin exhaust pipes is quartz capsule for diffusion furnace Effective date of registration: 20200428 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2020990000391 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210604 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2020990000391 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A quartz tube for double exhaust pipe diffusion furnace Effective date of registration: 20220704 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2022370010106 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
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Date of cancellation: 20231127 Granted publication date: 20160413 Pledgee: Qingdao high technology financing Company limited by guarantee Pledgor: QINGDAO JINHUIYUAN ELECTRONICS Co.,Ltd. Registration number: Y2022370010106 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160413 |