CN205011867U - Business turn over boat device based on diffusion furnace - Google Patents
Business turn over boat device based on diffusion furnace Download PDFInfo
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- CN205011867U CN205011867U CN201520668039.0U CN201520668039U CN205011867U CN 205011867 U CN205011867 U CN 205011867U CN 201520668039 U CN201520668039 U CN 201520668039U CN 205011867 U CN205011867 U CN 205011867U
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- out device
- quartz boat
- push
- block
- conveying track
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Abstract
The utility model relates to a diffusion furnace field, concretely relates to business turn over boat device based on diffusion furnace should pass in and out and install the quartz boat on the boat device, and this quartz boat comes and goes between diffusion furnace and insert machine through business turn over boat device, should pass in and out the boat device and include: the carrier, it includes the bottom plate and sets up the setting element on the bottom plate, this quartz boat and setting element cooperation installation, this quartz boat passes through the setting element to be fixed on the bottom plate, the transportation platform, it is including transporting track and power unit, and this power unit sets up on the transportation track, and this carrier is placed on the transportation track to drive through power unit comes and goes on the transportation track. The utility model discloses a design a business turn over boat device based on diffusion furnace, the quartz boat is realized coming and going between diffusion furnace and insert machine through transportation platform on with the carrier to form the automatic integration of production, improve production efficiency, pass in and out boat device simple structure simultaneously, it has, and low in production cost is honest and clean, the operation is reliable, maintain advantages such as convenient.
Description
Technical field
The utility model relates to diffusion furnace field, is specifically related to a kind ofly enter push-out device based on diffusion furnace.
Background technology
Diffusion furnace is one of important technological equipment of operation before semiconductor production line, for the diffusion of the industries such as large-scale integrated circuit, discrete device, power electronics, photoelectric device and photoconductive fiber, oxidation, annealing, the technique such as alloy and sintering.Diffusion furnace is made up of Controlling System, turnover boat system, body of heater heating system and gas control system etc.
Diffuse to form the critical process that P-N junction is solar battery sheet, and diffusion furnace is one of substantial equipment of solar battery sheet production.Introduce the virulent gas of human body in diffusion technique and produce toxic tail gas, great harm can be caused to human body, under the condition ensureing technique, set up solar battery sheet automatic production line, the level of automation of raising equipment, reducing the artificial intervention to equipment, is the major objective of device fabrication producer.
Particularly passing in and out boat system, is realize the transition mechanism of diffusion furnace to plug-in sheet machine, by this mechanism can realize quartz boat diffusion furnace to plug-in sheet machine and plug-in sheet machine freely docking to diffusion furnace, thus form automatic integratedization, enhance productivity.
But existing turnover boat system, the problems such as equipment there is complete machine and parts price is high, complex structure, inconvenient maintenance, therefore development and production turnover boat system with low cost, reliable, easy to maintenance is technical problem urgently to be resolved hurrily in the industry.
Utility model content
The technical problems to be solved in the utility model is, for the above-mentioned defect of prior art, provides a kind of and enters push-out device based on diffusion furnace, realizes producing automatic integratedization, enhances productivity.
The utility model solves the technical scheme that its technical problem adopts: provide a kind of and enter push-out device based on diffusion furnace, this enters quartz boat push-out device is provided with for placing silicon chip, this quartz boat passes through to come and go between diffusion furnace and plug-in sheet machine into push-out device, and this enters push-out device and comprises:
Carrier, it comprises base plate and is arranged on the positioning element on base plate, and this quartz boat coordinates with positioning element to be installed, and this quartz boat is fixed on base plate by positioning element;
Shipping platform, it comprises conveying track and actuating unit, and this actuating unit is arranged on conveying track, and this carrier is placed on conveying track, and is come and gone on conveying track by the drive of actuating unit;
Sensing unit, it is arranged on shipping platform, and it comprises quartz boat inductor block and silicon chip inductor block, and this actuating unit drives on conveying track round according to the feedback information of quartz boat inductor block and silicon chip inductor block.
Wherein, preferred version is: this conveying track comprises the gib block of the left and right sides, some spacing preset piecess for being fixedly connected with by gib block.
Wherein, preferred version is: this actuating unit comprise be arranged on gib block two ends runner, for connecting the travelling belt of two ends runner and the motor for driving runner to rotate, this travelling belt covers on gib block, this carrier is placed on travelling belt, and is come and gone on shipping platform by the drive of travelling belt.
Wherein, preferred version is: this actuating unit also comprises shaft coupling, and this shaft coupling is arranged between two runners with end.
Wherein, preferred version is: this motor is three-phase reversible electric machine.
Wherein, preferred version is: also comprise a control unit, and this control unit is connected with motor and sensing unit respectively.
Wherein, preferred version is: this conveying track also comprises the locating part being arranged on this gib block one end and the buffering wheel being arranged on this gib block the other end.
Wherein, preferred version is: this conveying track also comprises the position-sensing switch be arranged on locating part.
Wherein, preferred version is: this positioning element comprises the baffle plate that is arranged on base plate two ends and is arranged on the back-up block on baffle plate, and this quartz boat is arranged between baffle plate, and coordinates with back-up block and install.
Wherein, preferred version is: this baffle plate is provided with first quartz of conflicting with quartz boat and pads, and this back-up block is provided with second quartz of conflicting with quartz boat and pads.
The beneficial effects of the utility model are, compared with prior art, the utility model enters push-out device by design is a kind of based on diffusion furnace, quartz boat by shipping platform by carrier, realize coming and going between diffusion furnace and plug-in sheet machine, thus form production automatic integratedization, enhance productivity; Pass in and out boat apparatus structure simple, it has low production cost, the advantage such as reliable, easy to maintenance simultaneously.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the structural representation that the utility model enters push-out device;
Fig. 2 is the structural representation one of the utility model shipping platform;
Fig. 3 is the structural representation two of the utility model shipping platform;
Fig. 4 is the structural representation of the utility model carrier.
Embodiment
Now by reference to the accompanying drawings, preferred embodiment of the present utility model is elaborated.
As shown in Figure 1, the utility model provide a kind of enter the preferred embodiment of push-out device.
Enter a push-out device based on diffusion furnace, enter the quartz boat 40 push-out device is provided with for placing silicon chip 50, quartz boat 40 passes through to come and go between diffusion furnace and plug-in sheet machine into push-out device, realizes the production automation.Wherein, enter push-out device and comprise carrier 10, shipping platform 20 and sensing unit 30, specifically:
The positioning element 12 that carrier 10 comprises base plate 11 and is arranged on base plate 11, quartz boat 40 coordinates with positioning element 12 to be installed, and quartz boat 40 is fixed on base plate 11 by positioning element 12;
Shipping platform 20 comprises conveying track 21 and actuating unit 22, and actuating unit 22 is arranged on conveying track 21, and carrier 10 is placed on conveying track 21, and is come and gone on conveying track 21 by the drive of actuating unit 22;
Sensing unit 30 is arranged on shipping platform 20, and for the placement situation information of the positional information and silicon chip 50 that detect, feed back quartz boat 40, actuating unit 22 drives according to the feedback information of sensing unit 30 and comes and goes on conveying track 21.
As shown in Figures 2 and 3, the utility model provides a kind of preferred embodiment of shipping platform.
Shipping platform 20 comprises conveying track 21 and actuating unit 22.
For conveying track 21, conveying track 21 comprise the left and right sides gib block 211, some spacing preset piecess 212 for gib block 211 is fixedly connected with, be arranged on the locating part 213 of gib block 211 one end and be arranged on the buffering wheel 214 of gib block 211 the other end.Particularly, conveying track 21 comprises the first gib block 2111 and the second gib block 2112 be arranged in parallel; Be fixed by spacing preset pieces 212 between first gib block 2111 and the second gib block 2112, guarantee the firm and spacing of the first gib block 2111 and the second gib block 2112; Locating part 213 is separately positioned on the rear end of the first gib block 2111 and the second gib block 2112, skids off for preventing carrier 10; Buffering wheel 214 is separately positioned on the front end of the first gib block 2111 and the second gib block 2112, prevents carrier 10 and the contact of conveying track 21, improves transportation stability.
Wherein, conveying track 21 also comprises the position-sensing switch 225 be arranged on locating part 213, when carrier 10 is transported to locating part 213, carrier 10 is positioned by position-sensing switch 225, and after completing related process operation, position-sensing switch 225 unclamps carrier 10, ensures that carrier 10 is stable in operational process of craft.
Wherein, gib block 211 is preferably the track of 50 modules.
For actuating unit 22, actuating unit 22 comprise be arranged on gib block 211 two ends runner 221, for connecting the travelling belt 222 of two ends runner 221 and the motor 223 for driving runner 221 to rotate, this carrier 10 is placed on travelling belt 222, and is come and gone on shipping platform 20 by the drive of travelling belt 222.Particularly, runner 221 comprises the front end runner 2211 and rear end runner 2212 that are arranged on gib block 211 two ends; Travelling belt 222 connects front end runner 2211 and the rear end runner 2212 at wherein gib block 211 two ends respectively, and be arranged on gib block 211, wherein, some auxiliary sheave 226 are provided with in gib block 211, travelling belt 222 covers on auxiliary sheave 226, and auxiliary sheave 226 is for assistant conveyance belt 222 stable motion on gib block 211; Motor 223 is preferably connected with front end runner 2211.
Wherein, actuating unit 22 also comprises shaft coupling 224, this shaft coupling 224 is arranged between two runners 221 with end, preferably, shaft coupling 224 is arranged between two front end runners 2211, motor 223 drives a certain front end runner 2211 to rotate, and drives another front end runner 2211 to rotate, drive rear end runner 2212 by travelling belt 222 by shaft coupling 224.
Wherein, motor 223 is preferably three-phase reversible electric machine.
Further, sensing unit 30 is arranged on conveying track 21, is detected the correlation circumstance of carrier 10 or silicon chip 50 by sensing unit 30.
Specifically: sensing unit 30 comprises quartz boat inductor block 31, silicon chip inductor block 32 and some position switch 34; Quartz boat inductor block 31 is for detecting the placement situation of quartz boat 40, silicon chip inductor block 32 is for detecting silicon chip 50 situation on quartz boat 40, position switch 34 is for detecting the situation of carrier 10, or quartz boat inductor block 31 also can detect the situation of carrier 10 simultaneously.Wherein, position switch 34 is arranged on gib block 211 every a segment distance; Quartz boat inductor block 31, silicon chip inductor block 32 are all arranged on spacing preset pieces 212.
As shown in Figure 4, the utility model provides a kind of preferred embodiment of carrier.
The positioning element 12 that carrier 10 comprises base plate 11 and is arranged on base plate 11, positioning element 12 comprises the baffle plate 121 being arranged on base plate 11 two ends and the back-up block 122 be arranged on baffle plate 121, quartz boat 40 comprises the draw-in groove coordinated with back-up block 122, quartz boat 40 is arranged between baffle plate 121, and coordinates with back-up block 122 and install.
Because quartz boat 40 is extremely fragile, carrier 10 is all quartz member with the material of quartz boat 40 contact part, thus ensures that quartz boat 40 can avoid unnecessary wearing and tearing in loading process as far as possible.Therefore baffle plate 121 is provided with first quartz of conflicting with quartz boat 40 pad 131, this back-up block 122 be provided with conflict with quartz boat 40 second quartzy pad 132.
In the utility model, also comprise a control unit, this control unit is connected with motor 223 and sensing unit 30 respectively, it detects according to sensing unit 30, feed back the placement situation information of the positional information of quartz boat 40 and silicon chip 50, controls motor 223 and is with mobile carrier 10 to come and go on conveying track 21.
In the utility model, enter push-out device and be arranged between diffusion furnace and plug-in sheet machine, the conveying track 21 entering push-out device can sufficiently long, or adopt some enter to connect before and after push-out device coordinate.Specifically, diffusion furnace arranges one and enters push-out device, and plug-in sheet machine arranges one and enters push-out device, and the front end entering push-out device of diffusion furnace is docked with the front end entering push-out device of inserted sheet.
Meanwhile, in order to increase working efficiency, can be arranged side by side some enter push-out device, realize multiple enter push-out device work simultaneously.
In the utility model, provide a kind of enter the mode of operation of push-out device:
1, quartz boat 40 is passed through mechanical manipulator, be put on carrier 10 in place stably;
2, quartz boat inductor block 31, silicon chip inductor block 32 detects respectively that carrier 10 has after quartz boat 40 and silicon chip 50, sensing unit 30 by with plug-in sheet machine communication, thus obtain the instruction whether quartz boat 40 can being delivered to diffusion furnace;
3, after sensing unit 30 bag gets instruction, starter motor 223, drives travelling belt 222 to move, quartz boat 40 is transported to the end of docking with insert mechanism and stops;
4, now due in insert mechanism with enter the part that push-out device docks and also move, carrier 10 is transported in plug-in sheet machine by the form of being docked with band by band, carries out the unloading piece work of being correlated with;
5, in plug-in sheet machine, after the silicon chip 50 not doing technique is inserted into quartz boat 40, also by same mode, quartz boat 40 is transported to docking end;
6, now, motor 223 reverses, and is transported on corresponding position by quartz boat 40 by accurately locating, and waits pending corresponding technological action.
7, jump to step 1, then circulate above-mentioned flow process.
As described above, be only the utility model most preferred embodiment, and not for limiting scope of the present utility model, all equivalences done according to the utility model claim change or modify, and are all the utility model and contain.
Claims (10)
1. enter a push-out device based on diffusion furnace, this enters quartz boat push-out device is provided with for placing silicon chip, and this quartz boat passes through to come and go between diffusion furnace and plug-in sheet machine into push-out device, and it is characterized in that, this enters push-out device and comprises:
Carrier, it comprises base plate and is arranged on the positioning element on base plate, and this quartz boat coordinates with positioning element to be installed, and this quartz boat is fixed on base plate by positioning element;
Shipping platform, it comprises conveying track and actuating unit, and this actuating unit is arranged on conveying track, and this carrier is placed on conveying track, and is come and gone on conveying track by the drive of actuating unit;
Sensing unit, it is arranged on shipping platform, and it comprises quartz boat inductor block and silicon chip inductor block, and this actuating unit drives on conveying track round according to the feedback information of quartz boat inductor block and silicon chip inductor block.
2. according to claim 1 enter push-out device, it is characterized in that: this conveying track comprises the gib block of the left and right sides, some spacing preset piecess for being fixedly connected with by gib block.
3. according to claim 2 enter push-out device, it is characterized in that: this actuating unit comprise be arranged on gib block two ends runner, for connecting the travelling belt of two ends runner and the motor for driving runner to rotate, this travelling belt covers on gib block, this carrier is placed on travelling belt, and is come and gone on shipping platform by the drive of travelling belt.
4. according to claim 3 enter push-out device, it is characterized in that: this actuating unit also comprises shaft coupling, this shaft coupling be arranged on end two runners between.
5. according to claim 3 enter push-out device, it is characterized in that: this motor is three-phase reversible electric machine.
6. according to claim 5 enter push-out device, it is characterized in that: also comprise a control unit, this control unit is connected with motor and sensing unit respectively.
7. according to claim 2 enter push-out device, it is characterized in that: this conveying track also comprises the locating part that is arranged on this gib block one end and is arranged on the buffering wheel of this gib block the other end.
8. according to claim 7 enter push-out device, it is characterized in that: this conveying track also comprises the position-sensing switch be arranged on locating part.
9. according to claim 1 enter push-out device, it is characterized in that: this positioning element comprises the baffle plate that is arranged on base plate two ends and is arranged on the back-up block on baffle plate, and this quartz boat is arranged between baffle plate, and coordinate with back-up block and install.
10. according to claim 9 enter push-out device, it is characterized in that: this baffle plate is provided with first quartz of conflicting with quartz boat and pad, this back-up block is provided with second quartzy padding of conflicting with quartz boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520668039.0U CN205011867U (en) | 2015-08-31 | 2015-08-31 | Business turn over boat device based on diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520668039.0U CN205011867U (en) | 2015-08-31 | 2015-08-31 | Business turn over boat device based on diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205011867U true CN205011867U (en) | 2016-02-03 |
Family
ID=55210480
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520668039.0U Active CN205011867U (en) | 2015-08-31 | 2015-08-31 | Business turn over boat device based on diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205011867U (en) |
-
2015
- 2015-08-31 CN CN201520668039.0U patent/CN205011867U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210508 Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's photovoltaic equipment Co.,Ltd. Address before: 518000 1-2 / F, area B, Han's innovation building, 9018 Beihuan Avenue, North District, high tech Zone, Nanshan District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN FULLSHARE EQUIPMENT Co.,Ltd. |