CN204887465U - Mems microphone - Google Patents
Mems microphone Download PDFInfo
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- CN204887465U CN204887465U CN201520533267.7U CN201520533267U CN204887465U CN 204887465 U CN204887465 U CN 204887465U CN 201520533267 U CN201520533267 U CN 201520533267U CN 204887465 U CN204887465 U CN 204887465U
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- mems microphone
- acoustic aperture
- mems
- shell
- mid portion
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- 239000007787 solid Substances 0.000 claims abstract description 12
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 238000003466 welding Methods 0.000 claims description 8
- 230000005236 sound signal Effects 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 239000013212 metal-organic material Substances 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 10
- 239000000428 dust Substances 0.000 abstract description 9
- 238000004806 packaging method and process Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
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- Details Of Audible-Bandwidth Transducers (AREA)
Abstract
The utility model provides a MEMS microphone, including shell and circuit board, the fixed packaging structure who forms MEMS of shell and gate face is provided with the sound hole of receiving external voice signal on the shell, the sound hole includes mid portion and centers on mid portion's part on every side, mid portion is solid to the part is provided with a plurality of through -holes around. Utilize the utility model discloses, can solve inside the dust gets into MEMS microphone easily, influence its acoustic performance's problem to guarantee the regular transmission of MEMS microphone's voice signal and good acoustic performance.
Description
Technical field
The utility model relates to electroacoustic switch technology field, more specifically, relates to a kind of dust-proof MEMS microphone.
Background technology
Along with the progress of society and the development of technology, in recent years, the electronic product such as mobile phone, notebook computer volume constantly reduces, the performance requirement of people to these portable electronic products is also more and more higher, thus also require that the volume of electronic component supporting with it constantly reduces, performance and consistency improve constantly.MEMS (Micro-Electro-Mechanical-System, being called for short MEMS) the integrated MEMS microphone of technique starts to be applied in the electronic product such as mobile phone, notebook computer in batches, its encapsulation volume is less than traditional electret microphone, is therefore subject to the favor of most of microphone manufacturer.
MEMS microphone is the encapsulating structure be made up of metal shell and wiring board (PrintedCircuitBoard, referred to as PCB).Encapsulating structure inside comprises PCB and is provided with MEMS acoustic-electric chip and asic chip on the surface.And, operation principle due to MEMS microphone requires that its structure must exist the acoustic aperture being communicated with space outerpace, in order to ensure the transmission of voice signal and ensure the needs of acoustical behavior, if the acoustic aperture design of MEMS microphone is too small, then can affect the pickup effect of MEMS microphone, if the acoustic aperture design of MEMS microphone is excessive, the materials such as dust can enter its inside by the acoustic aperture of MEMS microphone, affect its acoustical behavior.
In sum, in order to ensure the transmission of the voice signal of MEMS microphone and the good of acoustical behavior, need the acoustic aperture that a kind of new MEMS microphone is provided.
Utility model content
In view of the above problems, the purpose of this utility model is to provide a kind of MEMS microphone, adopt that this peripheral part is provided with through hole, mid portion is solid acoustic aperture, MEMS microphone inside is easily entered to solve dust, affect the problem of its acoustical behavior, thus ensure the normal transmission of the voice signal of MEMS microphone and good acoustical behavior.
The utility model provides a kind of MEMS microphone, comprises shell and wiring board, and shell and wiring board fix the encapsulating structure forming MEMS, and shell is provided with the acoustic aperture receiving external sound signal; Wherein, acoustic aperture comprises mid portion and the peripheral part around mid portion; Mid portion is solid, and part is provided with multiple through hole around.
In addition, preferred structure is, the shape of acoustic aperture is circle, rhombus or polygon.
In addition, preferred structure is, through hole is evenly centered around around mid portion.
In addition, preferred structure is, the scope in the aperture of multiple through hole is 0.02 ~ 0.1mm.
In addition, preferred structure is, shell comprises side and the end face perpendicular to side, and wherein, acoustic aperture is arranged on side or the end face of shell.
In addition, preferred structure is, acoustic aperture is coated with the close net of protection of metal material or organic material.
In addition, preferred structure is, the side of shell is affixed with wiring board and be electrically connected, and adopts conductive adhesive, or solder welding or laser welding or ultra-sonic welded or electric resistance welding form conductive contact.
In addition, preferred structure is, the wiring board of encapsulating structure inside is provided with MEMS chip and asic chip, is electrically connected between MEMS chip with asic chip by wire.
From technical scheme above, the MEMS microphone that the utility model provides, adopting this peripheral part to arrange porose, mid portion is solid acoustic aperture, MEMS microphone inside is easily entered to solve dust, affect the problem of its acoustical behavior, this design can also play the effect of waterproof simultaneously, thus ensures the transmission of the voice signal of MEMS microphone and good acoustical behavior.
Accompanying drawing explanation
By reference to the content below in conjunction with the description of the drawings and claims, and understand more comprehensively along with to of the present utility model, other object of the present utility model and result will be understood and easy to understand more.In the accompanying drawings:
Fig. 1 is the MEMS microphone cross-sectional view according to the utility model embodiment;
Fig. 2 is shell according to the utility model embodiment and rhombus acoustic aperture front view;
Fig. 3 is shell according to the utility model embodiment and circular acoustic aperture front view;
Fig. 4 is the rhombus acoustic aperture structure for amplifying schematic diagram according to the utility model embodiment;
Fig. 5 is the circular acoustic aperture structure for amplifying schematic diagram according to the embodiment of the present invention.
Reference numeral wherein comprises: shell 1, wiring board 2, acoustic aperture 3, MEMS chip 4, asic chip 5, wire 6.
Label identical in all of the figs indicates similar or corresponding feature or function.
Embodiment
In the following description, for purposes of illustration, in order to provide the complete understanding to one or more embodiment, many details have been set forth.But, clearly, also these embodiments can be realized when there is no these details.
If for the acoustic aperture of the MEMS microphone of aforementioned proposition design too small, then can affect the pickup effect of MEMS microphone, if the acoustic aperture design of MEMS microphone is excessive, the materials such as dust can enter its inside by the acoustic aperture of MEMS microphone, affect the problems such as its acoustical behavior, a kind of MEMS microphone is the utility model proposes, to solve the problem affecting its acoustical behavior by the needs of acoustical behavior in order to ensure the transmission of voice signal and ensure.Adopt that this peripheral part is provided with through hole, mid portion is solid acoustic aperture, with the problem that the acoustic aperture solving MEMS microphone is excessive or too small, solve the problem that dust easily enters MEMS microphone inside simultaneously, thus ensure the transmission of the voice signal of MEMS microphone and good acoustical behavior.
Below with reference to accompanying drawing, specific embodiment of the utility model is described in detail.
In order to the structure of the MEMS microphone that the utility model provides is described, Fig. 1 to Fig. 5 has carried out exemplary sign to the structure of MEMS microphone respectively from different perspectives.Particularly, Fig. 1 shows the MEMS microphone cross-section structure according to the utility model embodiment; Fig. 2 shows shell according to the utility model embodiment and the positive TV structure of rhombus acoustic aperture; Fig. 3 shows shell according to the utility model embodiment and the positive TV structure of circular acoustic aperture; Fig. 4 shows the rhombus acoustic aperture structure for amplifying according to the utility model embodiment; Fig. 5 shows the circular acoustic aperture structure for amplifying according to the embodiment of the present invention.
As Fig. 1 to Fig. 5 jointly shown in, the MEMS microphone that the utility model provides comprises: shell 1, wiring board 2, acoustic aperture 3, MEMS chip 4, asic chip 5.Wherein, shell 1 encapsulating structure that form MEMS fixing with wiring board 2, the wiring board 2 of encapsulating structure inside is provided with MEMS chip 4 and asic chip 5, shell is provided with the acoustic aperture 3 receiving external sound signal.
Wherein, shell 1 comprises side and the end face perpendicular to side, and side is affixed with wiring board 2 and be electrically connected.(not shown) in specific embodiment of the present utility model, shell comprises side, the end face perpendicular to side and the next week perpendicular to side along flanging, and next week is affixed with the upper surface of wiring board 2 and conduct electricity and be connected along the lower surface of flanging.Wherein, it should be noted that, shell 1 is connected with wiring board 2 conduction, and conducting resinl can be adopted to bond, or solder welding, or laser welding, or ultra-sonic welded, or resistance welded forms conductive contact.
Wherein, connected by wire 6 between the MEMS chip 4 wiring board 2 of encapsulating structure inside arranged and asic chip 5.
In embodiment of the present utility model, shell 2 is provided with the acoustic aperture 3 receiving external sound signal.The structure of the acoustic aperture 3 of MEMS microphone will be introduced in detail below.Acoustic aperture 3 comprises mid portion and peripheral part, and wherein, mid portion is solid, and peripheral part is around mid portion, and part is provided with multiple through hole around.The shape of the acoustic aperture 3 that multiple through hole is formed can be circle, rhombus or polygon etc.
In the embodiment shown in Fig. 2 and Fig. 4, the end face of shell 1 is provided with acoustic aperture 3, the shape of acoustic aperture 3 is rhombus, and as can be seen from the embodiment of Fig. 4, the mid portion of acoustic aperture 3 is solid, does not have through hole; Peripheral part around solid mid portion is provided with multiple through hole, and these through holes are combined to form rhombus.In the embodiment shown in Fig. 3 and Fig. 5, the end face of shell 1 is provided with acoustic aperture 3, the shape of acoustic aperture 3 is circular, and as can be seen from the embodiment of Fig. 5, the mid portion of acoustic aperture 3 is solid construction, does not have through hole; Peripheral part around solid mid portion is provided with multiple through hole, and these through holes are combined to form circle.
Wherein, acoustic aperture 3 can be arranged on the end face of shell 2, also can be arranged on the side of shell 2, generally carries out the particular location of setting acoustic aperture 3 on shell according to actual needs.Shape due to acoustic aperture 3 is circle, rhombus or polygon, can according to actual needs, the shape that setting acoustic aperture 3 is finally formed.Multiple through hole forms difform acoustic aperture 3, the acoustic aperture of MEMS microphone is designed not too large or too little, and can prevent extraneous dust from entering the inside of MEMS microphone, thus ensure that acoustic aperture 3 can ensure the normal transmission of sound, and its good acoustical behavior can be ensured.
Wherein, multiple through hole is evenly distributed on peripheral part of acoustic aperture 3, and namely, multiple through hole is evenly centered around around mid portion, and in embodiment as Figure 2-Figure 5, the shape that multiple equally distributed through hole is formed is acoustic aperture 3 that is circular and rhombus; Acoustic aperture 3 is made up of multiple through holes of different pore size according to actual needs.It should be noted that, the scope in the aperture of multiple through holes of composition acoustic aperture 3 is 0.02 ~ 0.1mm.
In addition, in the utility model, acoustic aperture 3 is coated with the close net of protection of metal material or organic material.Close for protection net is arranged in acoustic aperture 3, can prevents extraneous dust from entering into MEMS microphone inside via acoustic aperture further, protect the transmission of its voice signal and good acoustical behavior.
Can be found out by above-mentioned execution mode, the MEMS microphone that the utility model provides, adopting this peripheral part to arrange porose, mid portion is solid acoustic aperture, acoustic aperture can be solved excessive or too small, affect the problem of its acoustical behavior, and prevent dust from entering the inside of MEMS microphone, this design can also play the effect of waterproof, thus ensures the transmission of the voice signal of MEMS microphone and good acoustical behavior simultaneously.
The MEMS microphone according to the utility model proposes is described in an illustrative manner above with reference to accompanying drawing.But, it will be appreciated by those skilled in the art that the MEMS microphone that above-mentioned the utility model is proposed, various improvement can also be made on the basis not departing from the utility model content.Therefore, protection range of the present utility model should be determined by the content of appending claims.
Claims (8)
1. a MEMS microphone, comprises shell and wiring board, and described shell and wiring board fix the encapsulating structure forming MEMS, is provided with the acoustic aperture receiving external sound signal on the housing; It is characterized in that,
Described acoustic aperture comprises mid portion and the peripheral part around described mid portion;
Described mid portion is solid; Further,
Described peripheral part is provided with multiple through hole.
2. MEMS microphone as claimed in claim 1, is characterized in that,
The shape of described acoustic aperture is circle, rhombus or polygon.
3. MEMS microphone as claimed in claim 1, is characterized in that,
Described through hole is evenly centered around around described mid portion.
4. MEMS microphone as claimed in claim 1, is characterized in that,
The scope in the aperture of described through hole is 0.02 ~ 0.1mm.
5. MEMS microphone as claimed in claim 1, is characterized in that,
Described shell comprises side and the end face perpendicular to described side, and wherein, described acoustic aperture is arranged on side or the end face of described shell.
6. MEMS microphone as claimed in claim 1, is characterized in that,
Described acoustic aperture is coated with the close net of protection of metal material or organic material.
7. MEMS microphone as claimed in claim 6, is characterized in that,
The side of described shell is affixed with described wiring board and be electrically connected, wherein,
Adopt conductive adhesive, or solder welding or laser welding or ultra-sonic welded or electric resistance welding form conductive contact.
8. MEMS microphone as claimed in claim 1, is characterized in that,
The wiring board of described encapsulating structure inside is provided with MEMS chip and asic chip, and described MEMS chip is electrically connected by wire with between asic chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520533267.7U CN204887465U (en) | 2015-07-21 | 2015-07-21 | Mems microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520533267.7U CN204887465U (en) | 2015-07-21 | 2015-07-21 | Mems microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204887465U true CN204887465U (en) | 2015-12-16 |
Family
ID=54831783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520533267.7U Active CN204887465U (en) | 2015-07-21 | 2015-07-21 | Mems microphone |
Country Status (1)
| Country | Link |
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| CN (1) | CN204887465U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111147992A (en) * | 2019-12-31 | 2020-05-12 | 歌尔股份有限公司 | A dustproof construction and MEMS microphone packaging structure for MEMS device |
| CN112087692A (en) * | 2020-08-28 | 2020-12-15 | 钰太芯微电子科技（上海）有限公司 | Microphone with waterproof function |
-
2015
- 2015-07-21 CN CN201520533267.7U patent/CN204887465U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111147992A (en) * | 2019-12-31 | 2020-05-12 | 歌尔股份有限公司 | A dustproof construction and MEMS microphone packaging structure for MEMS device |
| CN112087692A (en) * | 2020-08-28 | 2020-12-15 | 钰太芯微电子科技（上海）有限公司 | Microphone with waterproof function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200611 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |