CN204855409U - A equipment for detecting but, transparent material surface image - Google Patents
A equipment for detecting but, transparent material surface image Download PDFInfo
- Publication number
- CN204855409U CN204855409U CN201520185553.9U CN201520185553U CN204855409U CN 204855409 U CN204855409 U CN 204855409U CN 201520185553 U CN201520185553 U CN 201520185553U CN 204855409 U CN204855409 U CN 204855409U
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- China
- Prior art keywords
- light emitting
- emitting source
- light
- equipment
- tester
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- Expired - Fee Related
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model discloses an equipment for detecting but, transparent material surface image belongs to the test equipment technology field. It includes the light emitting source, one puts the thing platform, should put the top that the thing platform is located this light emitting source, and it is used for placing the tester, a receiver is located the top of putting the thing platform is used for receiving and pierces through the light at tester rear, a control unit, telecommunications is connected the light emitting source with the receiver is used for control the position of light emitting source, and, receive the data that the receiver read to data according to the receiver read is classified. The utility model discloses can shorten by a wide margin and examine the time measuring journey, can use in the detection of part one by one, improve the shortcoming of present selective examination operation, can accurately carry out the product classification, be favorable to going on of follow -up processing operation.
Description
Technical field
The utility model relates to checkout equipment technical field, especially relates to a kind of good bad equipment judging measured object according to the reacting record after light penetration material.
Background technology
Pattern forming on sapphire substrate or glass plate is quite important, and it is the structure after etching or sclerosis, especially in the process of carrying out, likely because every factor causes the generation of defective products.
With regard to the technology that present stage is detected, be inspect by random samples after sapphire substrate or glass substrate pattern forming, in in a collection of sapphire substrate that completes or glass substrate, randomized test several, if pinpoint the problems, then will process by the gross in unification.Its check system adopts a kind of scanning probe microscopy (AFM) to detect, and it is through the height of probe sapphire substrate or glass baseplate surface sensitive surface one by one, and its speed carrying out processing is slow.
Therefore, under some situation, be the confirmation that certain the several surface location selecting tester carries out shape, use the speed accelerating to detect, but this detection mode misdiagnosis rate be very high.
Utility model content
In order to overcome the deficiencies in the prior art, the utility model proposes a kind of equipment for detecting light-permeable material surface image, it can significantly shorten detection time-histories, can be used in and detect one by one, improve the shortcoming of sampling observation operation at present, accurately can carry out the classification of product, be beneficial to the carrying out of follow-up processing operation.
In order to solve above-mentioned technical matters, the basic technical scheme that the utility model proposes is: a kind of equipment for detecting light-permeable material surface image, and it comprises a light emitting source; One articles holding table, this articles holding table is positioned at the top of this light emitting source, and it is for placing tester; One receiver, is positioned at the top of described articles holding table, in order to receive the light penetrating described tester rear; One control module, telecommunications connects described light emitting source and described receiver, for controlling the position of described light emitting source; And, receive the data that described receiver reads, and classify according to the data that receiver reads.
Preferably, the direction of the light emitted by described light emitting source is vertical with the tester on described articles holding table.
Preferably, described light emitting source or described tester move according to the path of setting.
Preferably, described receiver carries out digitisation analysis to described tester, and records tester by the data after light penetration according to the position that digitisation is analyzed.
Preferably, wherein comprise one second further and inspect equipment, for amplifying the defect of inspecting and checking measured object.
The beneficial effects of the utility model are:
The technical solution of the utility model, receives the light after tester by receiver, and by the light transmission received to control module to carry out digitisation analysis, final realization is detected and classification; This technology can significantly shorten detection time-histories, can be used in the detection of part one by one, improves the shortcoming of sampling observation operation at present, accurately can carry out product classification, be conducive to the carrying out of following process operation.
Accompanying drawing explanation
Fig. 1 is the structural representation of the equipment for detecting light-permeable material surface image described in the utility model;
The path schematic diagram that Fig. 2 is the light emitting source described in Fig. 1 or articles holding table.
Identifier declaration in accompanying drawing:
10 light emitting source 20 articles holding table 30 receivers
40 control modules 50 second inspect equipment 60 display
Embodiment
Be described further below with reference to accompanying drawing 1 to accompanying drawing 2 pairs of the utility model, but protection domain of the present utility model should do not limited with this.
Contrast accompanying drawing 1 to accompanying drawing 2:
Equipment 1 for detecting light-permeable material surface image described in the utility model, it comprises light emitting source 10, articles holding table 20, receiver 30 and control module 40.Wherein light emitting source 10 is positioned at immediately below articles holding table 20, and described receiver 30 is positioned at directly over articles holding table 20, and control module 40 communicates to connect described receiver 30 and light emitting source 10.
Wherein, articles holding table 20 is with for placement tester S, and receiver 30 is for receiving the light after inter-hole testing thing S.Control module 40 communicates to connect described light emitting source 10 for controlling the position of this light emitting source 10 or tester S, and this control module 40 is also for receiving the data that receiver 30 reads, and classifies to tester S according to the data that receiver 30 reads.
Concrete, the light emitted by light emitting source 10 is vertical with the tester S on articles holding table 20.The structure of this light emitting source 10 or articles holding table 20 can as shown in Figure 2, and move according to a presetting path, to complete all scanning, wherein in figure, dotted line represents that the direction of arrow according to front has come and gone full wafer scanning.
The light data that receiver 30 receives are transferred to control module 40, and this control module 40 carries out digitisation analysis to the data received, and carry out the data after recording light inter-hole testing thing S according to the position of digitisation analysis.This equipment also comprises second and inspects equipment 50, and this second is inspected equipment 50 and check be listed in the state of undesirable tester S, to facilitate follow-up processing for amplifying to inspect after the equipment 1 for detecting light-permeable material surface image that detects detects.Moreover, vertical direction can also be increased to image thicknesses and height and the observation of shape to facilitate detection by this equipment.
In addition, the technical solution of the utility model has and will check that structure classification is made the function of archives preservation in system and device, and connect a display 60 via this control module 40 signal further, can, by inspection archive list on picture, select can demonstrate the archives of this position to check picture during the inspection structure needed.The utility model also can produce the display frame of the audit report exporting each measured object or each batch automatically, or the data freely choosing needs produces audit report.And the feature of manufacturing equipment and the confirmation of making and improvement can be carried out according to check result.
The announcement of book and instruction according to the above description, the utility model those skilled in the art can also change above-mentioned embodiment and revise.Therefore, the utility model is not limited to embodiment disclosed and described above, also should fall in the protection domain of claim of the present utility model modifications and changes more of the present utility model.In addition, although employ some specific terms in this instructions, these terms just for convenience of description, do not form any restriction to the utility model.
Claims (5)
1. for detecting an equipment for light-permeable material surface image, it is characterized in that, it comprises:
One light emitting source;
One articles holding table, this articles holding table is positioned at the top of this light emitting source, and it is for placing tester;
One receiver, is positioned at the top of described articles holding table, in order to receive the light penetrating described tester rear;
One control module, telecommunications connects described light emitting source and described receiver, for controlling the position of described light emitting source; And, receive the data that described receiver reads, and classify according to the data that receiver reads.
2. as claimed in claim 1 for detecting the equipment of light-permeable material surface image, it is characterized in that: the direction of the light emitted by described light emitting source is vertical with the tester on described articles holding table.
3. as claimed in claim 1 for detecting the equipment of light-permeable material surface image, it is characterized in that: described light emitting source or described tester move according to the path of setting.
4. as claimed in claim 1 for detecting the equipment of light-permeable material surface image, it is characterized in that: described receiver carries out digitisation analysis to described tester, and record tester by the data after light penetration according to the position that digitisation is analyzed.
5. as claimed in claim 1 for detecting the equipment of light-permeable material surface image, it is characterized in that: wherein comprise one second further and inspect equipment, for amplifying the defect of inspecting and checking measured object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520185553.9U CN204855409U (en) | 2015-03-30 | 2015-03-30 | A equipment for detecting but, transparent material surface image |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520185553.9U CN204855409U (en) | 2015-03-30 | 2015-03-30 | A equipment for detecting but, transparent material surface image |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204855409U true CN204855409U (en) | 2015-12-09 |
Family
ID=54745947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520185553.9U Expired - Fee Related CN204855409U (en) | 2015-03-30 | 2015-03-30 | A equipment for detecting but, transparent material surface image |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204855409U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106056568A (en) * | 2015-12-08 | 2016-10-26 | 湖南酷开机电有限公司 | Key data interpretation method |
-
2015
- 2015-03-30 CN CN201520185553.9U patent/CN204855409U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106056568A (en) * | 2015-12-08 | 2016-10-26 | 湖南酷开机电有限公司 | Key data interpretation method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 Termination date: 20170330 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |