CN204825122U - Single crystal growing furnace heating voltage signal detection alarm device - Google Patents
Single crystal growing furnace heating voltage signal detection alarm device Download PDFInfo
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- CN204825122U CN204825122U CN201520612264.2U CN201520612264U CN204825122U CN 204825122 U CN204825122 U CN 204825122U CN 201520612264 U CN201520612264 U CN 201520612264U CN 204825122 U CN204825122 U CN 204825122U
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- single crystal
- heater
- crucible
- voltage signal
- growing furnace
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Abstract
The utility model provides a single crystal growing furnace heating voltage signal detection alarm device, includes the furnace body, fixes bell and drop -bottom, the crucible of tip the furnace body about and be used for carrying the last stand that draws the silicon single crystal stick respectively, and the outer peripheral face of crucible is equipped with the heater, and the crucible is fixed in the furnace body through stand down, and the furnace body is inside to be equipped with the heat -preserving container, and the tip is equipped with down the heat preservation under the heat -preserving container, and the heat -preserving container upper end is equipped with the lid that keeps warm, and goes up to keep warm and cover the central breach that confession silicon single crystal stick passes through that is equipped with, smelter body outer wall is last to be equipped with the digital signal controller, auxiliary relay and the alarm that are used for receiving heater output heating voltage signal that constitutes an electric link circuit, when heating voltage signal is less than / is higher than the setting value of the inside normal operating of furnace body, and digital signal controller alarm output signal, alarm warning. This technical operation is implemented conveniently, and the limit of putting on airs prevents that the single crystal growing furnace from losing, reducing by a wide margin or exceed normal crystal pulling scope because of heating power, can not in time discover and the serious consequence that causes.
Description
Technical field
The utility model relates to single silicon field, is specifically related to a kind of single crystal growing furnace heater voltage signal detection alarm device.
Background technology
Single crystal growing furnace normal operation period, the time being in continuous print heated condition will at 40 ~ 80h, at this production period, the polysilicon in single crystal growing furnace is in the liquid condition melting latter 1420 DEG C, does not allow during this period to occur that any abnormal heating power is lost and the situation that fluctuates widely.In isometrical pulling process, be utilize the accurate control to the liquid and solid-state critical temperature of polysilicon, what guarantee polysilicon can be stable becomes solid-state crystal bar from liquid state, and higher to the requirement of temperature, in stove, the temperature wave momentum of liquid polysilicon will control within ± 1 DEG C.
Single crystal growing furnace heating control system is a very complicated system, and some rigid or soft faults appear in occasional, cause heating power lose suddenly or significantly decline.If during being in isodiametric growth drawing, about 5s in-furnace temperature fluctuating quantity will exceed normal crystal pulling scope, silicon single crystal rod in stove is caused to occur brilliant change, become waste product, about 1min liquid-state silicon just starts at crystal bar surrounding crystalline, about 3min liquid level will whole crystallization, and quartz crucible and crystal bar are became one.Because crystal bar and quartz crucible are doing rightabout rotation always, speed of relative movement is about 20r/min, if and now can not Timeliness coverage fault, and take urgent measure crystal bar and quartz crucible are stopped the rotation, the flexible wire rope of axle will be caused because twisting disconnected towards a direction twist always, cause the related crystal bar having drawn out of seed crystal jig that axle plays to drop to together in the semi liquid state silicon material also do not solidified completely.When the crystal bar particularly drawing out is heavier, likely the direct quartz crucible by Sheng holder silicon material is pounded leakage, causes liquid-state silicon to leak in graphite field, causes larger accident, cause scrapping of a whole set of graphite field.
Utility model content
The purpose of this utility model is to provide a kind of single crystal growing furnace heater voltage signal detection alarm device, makes operator can carry out emergency operation in the very first time to single crystal furnace equipment, reduces security risk to greatest extent.
The technical scheme that the utility model is adopted for achieving the above object is: a kind of single crystal growing furnace heater voltage signal detection alarm device, single crystal growing furnace comprises body of heater, be separately fixed at bell and the drop-bottom of body of heater upper and lower end parts, crucible and the upper pillar stand for lifting silicon single crystal bar, the periphery of crucible is provided with well heater, described crucible is fixed in body of heater by lower pillar stand, upper pillar stand is fixed on the bell just to crucible central position, furnace interior is provided with insulated tank, insulated tank bottom is provided with lower thermal insulation layer, insulated tank upper end is provided with insulation cover, and upper insulation cover center is provided with the breach passed through for silicon single crystal bar, what furnace body outer wall was provided with that formation one is electrically connected loop exports the digital signal controller of heater voltage signal, intermediate relay and warning howler for receiving well heater, when heater voltage signal is lower than/the set(ting)value normally run higher than furnace interior, digital signal controller output alarm signal, alarm equipment alarm.
Wherein, the indentation, there at upper insulation cover center is provided with the heat shield plate in truncated cone, and the lower end of heat shield plate extend into crucible inside.
In the utility model, crucible is made up of quartz crucible and the plumbago crucible be coated on outside quartz crucible.Wherein, the internal diameter size of plumbago crucible matches with the physical dimension of quartz crucible, and plumbago crucible needs to have certain intensity, in order to bear the weight of silicon material and adaptation crucible.The utility model adopts three-clove style plumbago crucible.
Wherein, bell is provided with viewing window, this viewing window adds CCD measurement diameter system, directly can measure the diameter of silicon single crystal bar.The principle of work of CCD and charge-couple device measurement diameter system: when a branch of directional light is transmitted in CCD device through silicon single crystal bar, due to the existence of silicon single crystal bar, the shade of silicon single crystal bar will be thrown in CCD device simultaneously, and CCD device output signal is formed depression.Wherein, shade size just represents the size of silicon single crystal bar, and count the CCD picture dot number of dash area, the product of picture dot number and picture dot size just represents the size of silicon single crystal bar.
Wherein, furnace body outer wall is provided with the thermometric window extending to insulated tank inside.
In the utility model, the lower thermal insulation layer that insulated tank bottom is arranged, can strengthen the heat insulation effect of crucible bottom, avoid because calorific loss is on the impact of Detection results.
Beneficial effect: be provided with heat shield plate and multiple attemperator in body of heater of the present utility model, avoids thermosteresis on the impact of Detection results.Wherein, the utility model using the heater voltage signal of single crystal furnace heater as sampled signal, incoming digital signal controller, signal value time facilities for observation normally runs, digital signal controller is set as output alarm signal after this sampled signal is below or above normal operating value certain numerical value, alarm work, reminds staff to carry out emergency operation in time.It is convenient that this technological operation is implemented, and safety performance is good, can do limits and prevent single crystal growing furnace from losing, significantly reduce or exceed normal crystal pulling scope because of heating power, can not Timeliness coverage and the serious consequence that causes.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of single crystal growing furnace in the utility model;
Fig. 2 is the schematic diagram of bell in Fig. 1;
Fig. 3 is Cleaning Principle figure of the present utility model.
Reference numeral: 1, body of heater, 2, bell, 3, drop-bottom, 4, crucible, 5, upper pillar stand, 6, lower pillar stand, 7, well heater, 8, silicon single crystal bar, 9, insulated tank, 10, upper insulation cover, 11, lower thermal insulation layer, 12, breach, 13, digital signal controller, 14, intermediate relay, 15, warning howler, 16, heat shield plate, 17, quartz crucible, 18, plumbago crucible, 19, viewing window, 20, CCD measurement diameter system, 21, thermometric window.
Embodiment
Be described further below in conjunction with the detection alarm device of specific embodiment to single crystal growing furnace heater voltage signal of the present utility model, to make those skilled in the art better can understand the utility model being implemented, but illustrated embodiment is not as to restriction of the present utility model.
A kind of single crystal growing furnace heater voltage signal detection alarm device, as shown in Figure 1, single crystal growing furnace comprises body of heater 1, bell 2, drop-bottom 3, crucible 4, upper pillar stand 5, lower pillar stand 6 and well heater 7, wherein, bell 2 and drop-bottom 3 are separately fixed at the upper and lower end parts of body of heater 1, upper pillar stand 5 is for lifting silicon single crystal bar 8, and well heater 7 is located at the periphery of crucible 4.Described crucible 4 is fixed in body of heater 1 by lower pillar stand 6, and upper pillar stand 5 is fixed on the bell 2 just to crucible 4 central position.As shown in Figure 2, bell 2 is provided with viewing window 19, and this viewing window 19 adds CCD measurement diameter system 20, and the angle α between the central axis of this viewing window 19 and the central axis of bell 2 is 20 ~ 22 °, and this angle convenient operation person observes the situation in stove.In crystal pulling process, gold-plated glass need be loaded onto, to reduce radiation in this viewing window 19 position.
Wherein, the height of lower pillar stand 6 can regulate, and can ensure like this, when melt, can adjust the position of crucible 4; And when crystal pulling, have enough crucibles 4 to follow stroke.
Wherein, body of heater 1 inside is provided with insulated tank 9, body of heater 1 outer wall is provided with the thermometric window 21 extending to insulated tank 9 inside, insulated tank 9 bottom is provided with lower thermal insulation layer 11, insulated tank 9 upper end is provided with insulation cover 10, and upper insulation cover 10 center is provided with the breach 12 passed through for silicon single crystal bar 8, breach 12 place at upper insulation cover 10 center is provided with the heat shield plate 16 in truncated cone, and the lower end of heat shield plate 16 extend into crucible 4 inside, crucible 4 is made up of quartz crucible 17 and the plumbago crucible 18 be coated on outside quartz crucible 17.
Body of heater 1 outer wall is provided with one of formation electrical connection loop for receiving digital signal controller 13, two intermediate relays 14 and a warning howler 15 of the voltage signal of well heater 7 output heating, when heated, voltage signal lower than/higher than body of heater 1 inner normal run set(ting)value time, digital signal controller 13 output alarm signal, warning howler 15 is reported to the police.As shown in Figure 3, the FU in Fig. 3 represents total insurance to its principle of work, and KA1, KA2 represent intermediate relay, and warning howler is that 110V exchanges input, AL1 representative digit controller upper limit output alarm point, AL2 representative digit controller lower limit output point.
By mode shown in Fig. 3, digital signal controller 13, intermediate relay 14 are connected with warning howler 15, in this circuit loop, are also provided with reset button, Power Selection 110V AC power grade.Directly heater voltage signal is got, incoming digital signal controller 13 from well heater 7 two ends.Suppose, during normal work, heater voltage signal value is 800V, AL1 warning output point is set to 790V upper limit alarm, and AL2 guard signal is set to 780V lower limit and reports to the police, when the equipment heating preliminary stage, when heating power slowly upwards raises from 0 ~ 790V, AL2 action, but because of AL1 not operating, therefore KA2 rly. can not obtain electric, not output alarm signal, avoids warning howler in preliminary heat-processed to report to the police always; When heater voltage is more than 790V, AL1 upper limit alarm set point exports, KA1 coil energized action, self-insurance simultaneously; Go out active when stove heater voltage or significantly reduce, during lower than 780V, AL2 action, KA2 coil obtains electric, and KA2 node action, warning howler obtains electric alarm.When the artificial heating power of reduction on demand, needing certain hour because being cooled to 0 from normal working point by processing requirement, around here for preventing warning howler from reporting to the police always, can reset button be pressed, making warning circuit again be in original state, no longer output alarm signal.
Claims (5)
1. a single crystal growing furnace heater voltage signal detection alarm device, single crystal growing furnace comprises body of heater (1), be separately fixed at bell (2) and the drop-bottom (3) of body of heater (1) upper and lower end parts, crucible (4) and the upper pillar stand (5) for lifting silicon single crystal bar (8), the periphery of crucible (4) is provided with well heater (7), described crucible (4) is fixed in body of heater (1) by lower pillar stand (6), upper pillar stand (5) is fixed on just on the bell (2) of crucible (4) central position, body of heater (1) inside is provided with insulated tank (9), insulated tank (9) bottom is provided with lower thermal insulation layer (11), insulated tank (9) upper end is provided with insulation cover (10), and upper insulation cover (10) center is provided with the breach (12) passed through for silicon single crystal bar (8), it is characterized in that: body of heater (1) outer wall is provided with the digital signal controller (13) exporting heater voltage signal for receiving well heater (7) in a formation electrical connection loop, intermediate relay (14) and warning howler (15), when heater voltage signal lower than/higher than body of heater (1) inner normal run set(ting)value time, digital signal controller (13) output alarm signal, warning howler (15) is reported to the police.
2. a kind of single crystal growing furnace heater voltage signal detection alarm device according to claim 1, it is characterized in that: breach (12) place at upper insulation cover (10) center is provided with the heat shield plate (16) in truncated cone, and the lower end of heat shield plate (16) extend into crucible (4) inside.
3. a kind of single crystal growing furnace heater voltage signal detection alarm device according to claim 1 and 2, is characterized in that: described crucible (4) is by quartz crucible (17) and be coated on quartz crucible (17) plumbago crucible outward (18) and form.
4. a kind of single crystal growing furnace heater voltage signal detection alarm device according to claim 1, is characterized in that: described bell (2) is provided with viewing window (19), this viewing window (19) adds CCD measurement diameter system (20).
5. a kind of single crystal growing furnace heater voltage signal detection alarm device according to claim 1, is characterized in that: described body of heater (1) outer wall is provided with and extends to the inner thermometric window (21) of insulated tank (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520612264.2U CN204825122U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace heating voltage signal detection alarm device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520612264.2U CN204825122U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace heating voltage signal detection alarm device |
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| Publication Number | Publication Date |
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| CN204825122U true CN204825122U (en) | 2015-12-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520612264.2U Expired - Fee Related CN204825122U (en) | 2015-08-14 | 2015-08-14 | Single crystal growing furnace heating voltage signal detection alarm device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111665876A (en) * | 2019-03-07 | 2020-09-15 | 隆基绿能科技股份有限公司 | Method and device for processing furnace pressure abnormity and storage medium |
-
2015
- 2015-08-14 CN CN201520612264.2U patent/CN204825122U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111665876A (en) * | 2019-03-07 | 2020-09-15 | 隆基绿能科技股份有限公司 | Method and device for processing furnace pressure abnormity and storage medium |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151202 Termination date: 20170814 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |