CN111665876A - Method and device for processing furnace pressure abnormity and storage medium - Google Patents
Method and device for processing furnace pressure abnormity and storage medium Download PDFInfo
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- CN111665876A CN111665876A CN201910171265.0A CN201910171265A CN111665876A CN 111665876 A CN111665876 A CN 111665876A CN 201910171265 A CN201910171265 A CN 201910171265A CN 111665876 A CN111665876 A CN 111665876A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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- G05D16/20—Control of fluid pressure characterised by the use of electric means
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Abstract
The invention provides a method, equipment and a storage medium for processing furnace pressure abnormity, relates to the field of single crystal furnace control systems, and can classify the furnace pressure abnormity and perform corresponding furnace pressure regulation processing and alarm processing according to different abnormal conditions. The specific technical scheme is as follows: acquiring the current furnace pressure in the single crystal furnace body; determining the size relation between the current furnace pressure and at least one preset pressure threshold; and performing corresponding furnace pressure regulation processing and alarm processing according to the size relation. The invention is used for monitoring and adjusting the furnace pressure of the single crystal furnace.
Description
Technical Field
The disclosure relates to the field of single crystal furnace control systems, in particular to a method and equipment for processing furnace pressure abnormity and a storage medium.
Background
Czochralski (CZ) method is one of the methods for producing single crystal silicon, and an inert gas is introduced into a furnace body of a single crystal furnace during the production of the crystalline silicon to ensure the growth of the crystalline silicon in an inert atmosphere. In order to ensure normal crystal pulling, the existing furnace pressure detection processing system can automatically detect the pressure in the furnace body, and when the pressure in the furnace body changes, the control system maintains the furnace pressure in the furnace body within the pressure range required by the normal growth of crystals by adjusting the opening of a throttle valve of a single crystal furnace.
Along with the urgent need of crystal pulling cost reduction, the size of the crucible is continuously increased, the material containing amount in the crucible is more and more, and accidents such as silicon leakage, crucible cracking and the like caused by equipment abnormality, manual misoperation and the like can happen along with the increase of the material containing amount. When accidents such as silicon leakage, crucible cracking and the like occur, the furnace pressure can rise and exceed the pressure range required by the normal growth of the crystal. When the regulating amplitude of the throttle valve exceeds the regulating pressure threshold value, the existing furnace pressure detection processing system can perform alarm processing, but cannot perform corresponding exception processing aiming at different abnormal conditions of the furnace pressure, so that an operator cannot know the abnormal conditions of the furnace pressure in time and perform corresponding processing.
Disclosure of Invention
The embodiment of the disclosure provides a method, equipment and a storage medium for processing furnace pressure abnormity, which can classify the furnace pressure abnormity and perform corresponding furnace pressure regulation processing and alarm processing according to different abnormal conditions. The technical scheme is as follows:
according to a first aspect of the embodiments of the present disclosure, there is provided a method for processing furnace pressure abnormality, the method including:
acquiring the current furnace pressure in the single crystal furnace body;
determining the size relation between the current furnace pressure and at least one preset pressure threshold;
and performing corresponding furnace pressure regulation processing and alarm processing according to the size relation.
Through presetting a plurality of pressure threshold values, the abnormal conditions of the furnace pressure can be classified, corresponding furnace pressure regulation processing is carried out according to different abnormal conditions, meanwhile, corresponding alarm prompts are set according to different abnormal conditions, manual confirmation is timely reminded, so that an operator can timely know the abnormal conditions of the single crystal furnace, and the monitoring efficiency is improved.
In a first possible implementation manner of the first aspect, the at least one preset pressure threshold comprises: the pressure control device comprises a first preset pressure threshold and a second preset pressure threshold, wherein the first preset pressure threshold is smaller than the second preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value comprises the following steps: the current furnace pressure is less than a first pressure preset threshold, the current furnace pressure is greater than or equal to the first pressure preset threshold and less than a second pressure preset threshold, and the current furnace pressure is greater than or equal to the second pressure preset threshold.
In a second possible implementation manner of the first aspect, the performing the corresponding furnace pressure adjusting process and the alarm process according to the magnitude relationship includes:
when the current furnace pressure is smaller than a first preset pressure threshold value, adjusting the opening of the throttle valve;
when the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold, adjusting the opening of the throttle valve and triggering a first alarm prompt;
and when the current furnace pressure is greater than or equal to a second preset pressure threshold value, controlling the closing of the air inlet valve and the opening of the air outlet valve, adjusting the opening of the throttle valve to be maximum and triggering a third alarm prompt.
In a third possible implementation manner of the first aspect, after the adjusting the opening degree of the throttle valve and triggering the first alarm prompt when the furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, the method further includes:
judging whether the alarm duration of the first alarm prompt exceeds a preset time threshold or not;
when the alarm duration time exceeds a preset time threshold and the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold, adjusting the opening of the throttle valve to be maximum and triggering a second alarm prompt;
and when the alarm duration time exceeds the preset alarm time and the current furnace pressure is less than a first preset pressure threshold value, adjusting the opening of the throttle valve and closing the alarm prompt.
In a fourth possible implementation manner of the first aspect, the at least one preset pressure threshold further includes: a third preset pressure threshold, the second preset pressure threshold being less than the third preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value further comprises: the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
In a fifth possible implementation manner of the first aspect, the performing the corresponding furnace pressure adjustment processing and the alarm processing according to the magnitude relationship further includes:
when the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold, controlling an air inlet valve to be closed and an air outlet valve to be opened, adjusting the opening of a throttle valve to be maximum and triggering a third alarm prompt;
and when the current furnace pressure is greater than or equal to a third preset pressure threshold, controlling the closing of the air inlet valve and the opening of the air outlet valve, adjusting the opening of the throttle valve to be maximum, controlling the crucible in the single crystal furnace to descend and triggering a fourth alarm prompt.
In a sixth possible implementation manner of the first aspect, before the obtaining of the current furnace pressure in the single crystal furnace body, the method further comprises:
detecting whether a furnace body heater of the single crystal furnace is started or not and detecting whether the single crystal furnace is in a non-blowing-out state or not;
detecting whether an air extractor of the single crystal furnace is started or not when a furnace body heater of the single crystal furnace is started and the single crystal furnace is in a non-blowing-out state;
the method for acquiring the furnace pressure in the single crystal furnace body comprises the following steps: and when the air extraction device is started, acquiring the current furnace pressure in the single crystal furnace body.
In a seventh possible implementation manner of the first aspect, the air inlet valve and the air outlet valve of the single crystal furnace are controlled to be in a closed state when the air exhaust device is not opened.
According to a second aspect of the embodiments of the present disclosure, there is provided a device for processing furnace pressure abnormality, including:
the acquisition module is used for acquiring the current furnace pressure in the single crystal furnace body;
the determining module is used for determining the size relation between the current furnace pressure and at least one preset pressure threshold;
and the processing module is used for carrying out corresponding furnace pressure regulation processing and alarm processing according to the size relation.
In a first possible implementation of the second aspect, the at least one preset pressure threshold comprises: the pressure control device comprises a first preset pressure threshold and a second preset pressure threshold, wherein the first preset pressure threshold is smaller than the second preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value comprises the following steps: the current furnace pressure is less than a first pressure preset threshold, the current furnace pressure is greater than or equal to the first pressure preset threshold and less than a second pressure preset threshold, and the current furnace pressure is greater than or equal to the second pressure preset threshold.
In a second possible implementation form of the second aspect,
the processing module is used for adjusting the opening of the throttle valve when the current furnace pressure is smaller than a first preset pressure threshold value;
the processing module is used for adjusting the opening of the throttle valve and triggering a first alarm prompt when the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
and the processing module is used for controlling the air inlet valve to be closed and the air outlet valve to be opened, adjusting the opening of the throttle valve to be maximum and triggering a third alarm prompt when the current furnace pressure is greater than or equal to a second preset pressure threshold.
In a third possible implementation manner of the second aspect, the device for processing the furnace pressure abnormality further includes: a judgment module;
the judging module is used for judging whether the alarm duration time of the first alarm prompt exceeds a preset time threshold value or not;
the processing module is used for adjusting the opening of the throttle valve to the maximum and triggering a second alarm prompt when the alarm duration exceeds a preset time threshold and the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
and the processing module is used for adjusting the opening of the throttle valve and closing the alarm prompt when the alarm duration time exceeds the preset alarm time and the current furnace pressure is less than a first preset pressure threshold value.
In a fourth possible implementation manner of the second aspect, the at least one preset pressure threshold further includes: a third preset pressure threshold, the second preset pressure threshold being less than the third preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value further comprises: the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
In a fifth possible implementation manner of the second aspect, the processing module is configured to control the air inlet valve to close and the air outlet valve to open, adjust the opening of the throttle valve to the maximum, and trigger a third alarm prompt when the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold;
and the processing module is used for controlling the air inlet valve to be closed and the air outlet valve to be opened, adjusting the opening of the throttle valve to be maximum, controlling the crucible in the single crystal furnace to descend and triggering a fourth alarm prompt when the current furnace pressure is greater than or equal to a third preset pressure threshold value.
In a sixth possible implementation manner of the second aspect, the device for processing the furnace pressure abnormality further includes: a detection module;
the detection module is used for detecting whether a furnace body heater of the single crystal furnace is started or not and detecting whether the single crystal furnace is in a non-blowing-out state or not;
the detection module is used for detecting whether an air extractor of the single crystal furnace is started or not when a furnace body heater of the single crystal furnace is started and the single crystal furnace is in a non-blowing-out state;
and the acquisition module is used for acquiring the current furnace pressure in the single crystal furnace body when the air extraction device is started.
In a seventh possible implementation manner of the second aspect, the obtaining module is configured to obtain a current furnace pressure in the single crystal furnace body through a furnace pressure detecting sensor.
According to a third aspect of the embodiments of the present disclosure, there is provided a furnace pressure abnormality processing apparatus, where the furnace pressure abnormality processing apparatus includes a processor and a memory, and the memory stores therein at least one computer instruction, and the instruction is loaded and executed by the processor to implement the steps performed in the furnace pressure abnormality processing method described in the first aspect and any one of the embodiments of the first aspect.
According to a fourth aspect of the embodiments of the present disclosure, there is provided a computer-readable storage medium, in which at least one computer instruction is stored, the instruction being loaded and executed by a processor to implement the steps performed in the method for processing the furnace pressure abnormality described in the first aspect and any one of the embodiments of the first aspect.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and together with the description, serve to explain the principles of the disclosure.
FIG. 1 is a flowchart of a method for processing furnace pressure anomalies according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of a single crystal furnace provided by an embodiment of the disclosure;
FIG. 3 is a schematic flow chart of a method for processing furnace pressure abnormality according to an embodiment of the present disclosure;
FIG. 4 is a schematic flow chart of a method for processing furnace pressure abnormality according to an embodiment of the present disclosure;
fig. 5 is a structural diagram of a device for processing furnace pressure abnormality according to an embodiment of the present disclosure;
fig. 6 is a structural diagram of a device for processing furnace pressure abnormality according to an embodiment of the present disclosure;
fig. 7 is a structural diagram of a device for processing furnace pressure abnormality according to an embodiment of the present disclosure;
fig. 8 is a structural diagram of a processing device for furnace pressure abnormality according to an embodiment of the present disclosure.
10-single crystal furnace, 11-lifting head, 12-lifting rope, 13-crucible, 14-air inlet pipeline, 140-air inlet valve, 15-air outlet pipeline, 150-air outlet valve, 151-throttle valve, 16-furnace pressure detector and 20-crystal bar.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the exemplary embodiments below are not intended to represent all implementations consistent with the present disclosure. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the present disclosure, as detailed in the appended claims.
Example one
The embodiment of the present disclosure provides a method for processing furnace pressure abnormality, as shown in fig. 1, the method for processing furnace pressure abnormality includes the following steps:
101. and obtaining the current furnace pressure in the single crystal furnace body.
In an embodiment of the disclosure, obtaining the furnace pressure within the single crystal furnace body comprises: and receiving the current furnace pressure in the single crystal furnace body sent by the furnace pressure detection equipment. The furnace pressure detection equipment can be a pressure sensor, a pressure measuring instrument and the like, and can be arranged at the exhaust pipeline, the air inlet pipeline, the shell of the single crystal furnace and the like of the single crystal furnace as long as the pressure in the furnace body can be detected.
102. And determining the size relation between the current furnace pressure and at least one preset pressure threshold.
In a first example, the at least one preset pressure threshold includes a first preset pressure threshold and a second preset pressure threshold, the first preset pressure threshold being less than the second preset pressure threshold. Then, determining a magnitude relationship between the current furnace pressure and at least one preset pressure threshold value comprises: comparing the current furnace pressure with a first preset pressure threshold and a second preset pressure threshold, so that the relationship between the current furnace pressure and at least one preset pressure threshold comprises three conditions:
a1: the current furnace pressure is smaller than a first preset pressure threshold;
a2: the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
a3: the current furnace pressure is greater than or equal to a second preset pressure threshold value.
In a second example, the at least one preset pressure threshold includes a first preset pressure threshold, a second preset pressure threshold, and a third preset pressure threshold, the first preset pressure threshold being less than the second preset pressure threshold, the second preset pressure threshold being less than the third preset pressure threshold. Then, the magnitude relationship between the current furnace pressure and at least one preset pressure threshold includes four conditions:
b1: the current furnace pressure is smaller than a first preset pressure threshold;
b2: the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
b3: the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold;
b4: the current furnace pressure is greater than or equal to a third preset pressure threshold value.
It should be noted that the first preset pressure threshold and the second preset pressure threshold in the first example and the second example may be the same or different, and are determined comprehensively according to empirical values, such as the crystal growth process, the crystal quality requirement, and the furnace body structures of different single crystal furnaces. Of course, a plurality of other pressure thresholds may also be provided.
103. And performing corresponding furnace pressure regulation processing and alarm processing according to the size relation.
Based on the magnitude relationship described in the first example in step 102, performing corresponding furnace pressure adjustment processing and alarm processing according to the magnitude relationship includes:
when the current furnace pressure is smaller than a first preset pressure threshold value, adjusting the opening of the throttle valve;
when the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold, adjusting the opening of the throttle valve and triggering a first alarm prompt;
and when the current furnace pressure is greater than or equal to a second preset pressure threshold value, controlling the closing of the air inlet valve and the opening of the air outlet valve, adjusting the opening of the throttle valve to be maximum and triggering a third alarm prompt.
By setting a plurality of pressure threshold values, the abnormal situations of the furnace pressure can be classified, and the specific treatment can be carried out on different abnormal situations; meanwhile, when the furnace pressure is abnormal, a plurality of types of alarm prompts are set, so that the judgment of the current abnormal conditions by operators according to different alarm types is facilitated. It should be noted that the alarm prompt may be different types of alarm prompts, may also be different intensities of alarm prompts, or may be combined with different color alarm lamps or other manners, and may generate multiple different types of alarm prompts, which is not limited in this embodiment of the present disclosure.
Further, after the first alarm is triggered, whether the alarm duration of the first alarm prompt exceeds a preset time threshold value is judged; when the alarm duration time exceeds a preset time threshold and the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold, adjusting the opening of the throttle valve to be maximum and triggering a second alarm prompt; and when the alarm duration time exceeds the preset alarm time and the current furnace pressure is less than a first preset pressure threshold value, adjusting the opening of the throttle valve and closing the alarm prompt. Through setting the alarm duration, the manual confirmation time is given, so that the faults of false alarm and the like existing in the equipment are conveniently eliminated manually, and meanwhile, the furnace pressure in the single crystal furnace body is judged again after the alarm duration is over, and the corresponding furnace pressure abnormity processing adjustment is carried out.
Based on the magnitude relationship described in the second example in step 102, performing corresponding furnace pressure adjustment processing and alarm processing according to the magnitude relationship includes:
when the current furnace pressure is smaller than a first preset pressure threshold value, adjusting the opening of the throttle valve;
when the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold, adjusting the opening of the throttle valve and triggering a first alarm prompt;
when the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold, controlling an air inlet valve to be closed and an air outlet valve to be opened, adjusting the opening of a throttle valve to be maximum and triggering a third alarm prompt;
and when the current furnace pressure is greater than or equal to a third preset pressure threshold, controlling the closing of the air inlet valve and the opening of the air outlet valve, adjusting the opening of the throttle valve to be maximum, controlling the crucible in the single crystal furnace to descend and triggering a fourth alarm prompt.
The method for processing the furnace pressure abnormity, provided by the embodiment of the disclosure, comprises the steps of obtaining the current furnace pressure in a single crystal furnace body, determining the size relation between the current furnace pressure and at least one preset pressure threshold value, and carrying out corresponding furnace pressure regulation processing according to the size relation. Through presetting a plurality of pressure threshold values, the abnormal conditions of the furnace pressure can be classified, corresponding furnace pressure regulation processing is carried out according to different abnormal conditions, meanwhile, corresponding alarm prompts are set according to different abnormal conditions, manual confirmation is timely reminded, operators can timely know the abnormal conditions of the single crystal furnace, and monitoring and processing efficiency is improved.
Example two
Based on the method for processing the furnace pressure abnormality provided in the embodiment corresponding to fig. 1, another embodiment of the present disclosure provides a method for processing the furnace pressure abnormality. Before describing the embodiments of the present disclosure, the structure of the single crystal furnace will be described first. As shown in fig. 2, a single crystal furnace 10 used in the embodiment of the present disclosure, the single crystal furnace 10 includes a pulling head 11, a pulling rope 12 and a crucible 13, a silicon material is contained in the crucible 13, and heaters are disposed at the bottom and the periphery of the crucible 13 and heat the silicon material to form a silicon melt. In the crystal preparation process, a seed crystal (not shown in fig. 1) is first introduced, one end of the seed crystal is connected to the pulling rope 12, the other end is immersed in the silicon melt, and then the pulling rope 12 is controlled by the pulling head 11 to be lifted, and the crystal rod 20 is pulled.
The single crystal furnace 10 is provided with an air inlet pipeline 14 and an air outlet pipeline 15 on a furnace body shell, and an air inlet valve 140 is arranged at the air inlet pipeline 14 to control air to enter the furnace body; a gas outlet valve 150 and a throttle valve 151 are provided in the exhaust duct 15, the gas outlet valve 150 controlling the flow of the gas, and the throttle valve 151 controlling the flow rate of the gas. Of course, a throttle valve may also be provided in the intake duct. An air extraction device (not shown in fig. 1) is further arranged outside the exhaust pipeline 15, and is communicated with the exhaust pipeline 15 and used for extracting gas in the furnace body. In the process of crystal growth, inert gas is introduced into the furnace body of the single crystal furnace 10 from the gas inlet pipeline 14 and is exhausted from the gas exhaust pipeline 15, the gas flow is controlled by adjusting the opening degree of the throttle valve 151, and the pressure value in the furnace body is further adjusted, so that the pressure in the furnace body is maintained in a set range.
The system for processing furnace pressure abnormality adopted in the embodiment of the present disclosure includes a PLC (Programmable logic controller) control system, a furnace pressure detector, and an alarm device, where the PLC control system is in signal connection with the furnace pressure detector and the alarm device, respectively. The PLC control system controls the working states of the devices on the furnace body, such as the heater, the air extractor, the air inlet valve 140, the air outlet valve 150, the throttle valve 151 and the like. The furnace pressure detector 16 is a pressure sensor and is arranged on the exhaust pipeline 15, but may also be arranged at other places of the single crystal furnace 10, such as the air inlet pipeline 14, the furnace body shell of the single crystal furnace 10, etc., and can detect the pressure value in the furnace body. The alarm device is provided with a plurality of types of alarm prompts, and specifically, 3 or more different types of alarm prompts are adopted for alarm prompt; of course, multi-level alarm prompt can be performed according to the intensity of the alarm prompt tone, or the alarm prompt tone can be combined with other modes, and various types of alarm prompts can be generated.
In this disclosed embodiment, set up three stove pressure intensity threshold values in the PLC control system, include: a primary pressure threshold P1, a secondary pressure threshold P2, and a tertiary pressure threshold P3, P1< P2< P3; the PLC control system carries out corresponding exception handling by the control system according to the size relation between the pressure value P of the single crystal furnace and the primary pressure threshold value P1, the secondary pressure threshold value P2 and the tertiary pressure threshold value P3. Meanwhile, a plurality of types of alarm prompts are set in the alarm device.
Referring to fig. 3, a flow chart of the method for processing the abnormal furnace pressure according to the embodiment is shown. Specifically, the method comprises the following steps:
after the PLC control system is started, the PLC control system circularly detects whether the heater is started or not and whether the single crystal furnace is in a non-blowing-out state or not. And when the PLC control system detects that the heater is not started and/or the single crystal furnace is in a furnace shutdown state, continuing to perform circular detection. When the PLC control system detects that the heater is started and the single crystal furnace is in a non-blowing-out state, the PLC control system detects whether the air pumping device is started or not. When the PLC control system detects that the air exhaust device is not opened, the PLC control system controls the air inlet valve 140 and the air outlet valve 150 to be in a closed state; when the PLC control system detects the opening of the air extraction device, the PLC control system starts to judge the size relation between the pressure value P in the furnace body and the pressure thresholds P1, P2 and P3 in real time and carries out corresponding exception handling.
Firstly, the PLC control system judges whether P is less than P1, and when the PLC control system judges that P is less than P1, the corresponding abnormal handling is that the control system automatically adjusts the opening degree of the throttle valve. The PLC control system automatically adjusts the opening of the throttle valve 151 and adjusts the gas flow rate to adjust the pressure value in the furnace body. The abnormal treatment belongs to the normal treatment of the furnace body pressure in the crystal growth process.
Then, when the PLC control system judges that P is not less than P1, whether P is more than or equal to P1 and less than P2 is judged, and when P is not less than P1 and less than P2, corresponding abnormal processing is that the PLC control system automatically adjusts the opening of the throttle valve 151; the alarm device adopts primary alarm prompt and sets alarm duration T.
Judging whether the alarm duration time exceeds T, if so, judging that the pressure value P in the furnace body is still P1-P < P2, correspondingly processing the abnormity that the opening of the throttle valve is regulated to the maximum by the PLC control system, and adopting a secondary alarm prompt by the alarm device; if the pressure value P in the furnace body is less than P1 after the alarm duration time T is exceeded, the corresponding abnormal processing is that the PLC control system automatically adjusts the opening of the throttle valve, and the alarm device cancels the alarm prompt. And the alarm duration time T is set, so that an operator can conveniently confirm the abnormal condition, and faults such as false alarm and the like existing in the equipment are eliminated.
Secondly, when the PLC control system judges that P is not more than or equal to P1 and less than P2, whether P is more than or equal to P2 and less than P3 is judged. When P2 is not less than P < P3, the corresponding exception handling is that the PLC control system controls the air inlet valve to be in a closed state and the air outlet valve to be in an open state, and the opening degree of the throttle valve is adjusted to be maximum. The alarm device adopts three-level alarm prompt. At the moment, three-level alarm is adopted to prompt the current abnormal situation of the furnace body of an operator.
Thirdly, when the PLC control system judges that P is not more than or equal to P2 and less than P3, whether P is more than or equal to P3 is judged, and when P is more than or equal to P3, corresponding exception handling is that the PLC control system controls the air inlet valve to be in a closed state and the air outlet valve to be in an open state, the opening of the throttle valve is adjusted to be maximum, the crucible is controlled to descend, and crystals are separated from the silicon melt; the alarm device adopts four-level alarm prompt. The crucible is controlled to descend, so that the crystal is separated from the silicon melt, the crystal growth is stopped, and the influence on the quality of the crystal is reduced.
The method for processing the furnace pressure abnormity, provided by the embodiment of the disclosure, comprises the steps of obtaining the current furnace pressure in a single crystal furnace body, determining the size relation between the current furnace pressure and at least one preset pressure threshold value, and carrying out corresponding furnace pressure regulation processing according to the size relation. Through presetting a plurality of pressure threshold values, the abnormal conditions of the furnace pressure can be classified, corresponding furnace pressure adjustment processing is carried out according to different abnormal conditions, operators can know the abnormal conditions of the single crystal furnace in time, and monitoring and processing efficiency is improved.
EXAMPLE III
Based on the method for processing the abnormal furnace pressure provided by the embodiment corresponding to fig. 1 and the single crystal furnace described in fig. 2, another embodiment of the present disclosure provides a method for processing the abnormal furnace pressure. In this disclosure, the furnace pressure detection processing system according to the second embodiment is adopted, and two furnace pressure threshold values are set in the PLC control system, including: the PLC control system carries out corresponding exception handling according to the size relation between the pressure value P and the primary pressure threshold value Y1 and the secondary pressure threshold value Y2; the alarm device adopts corresponding type alarm prompt according to the size relation between the pressure value P and the primary pressure threshold value Y1 and the secondary pressure threshold value Y2.
As shown in fig. 4, a schematic flow chart of a method for processing abnormal furnace pressure provided in this embodiment is shown. Specifically, the method comprises the following steps:
after the PLC control system is started, the PLC control system circularly detects whether the heater is started or not and whether the single crystal furnace is in a non-blowing-out state or not. And when the PLC control system detects that the heater is not started and/or the single crystal furnace is in a furnace shutdown state, continuing to perform circular detection. When the PLC control system detects that the heater is started and the single crystal furnace is in a non-blowing-out state, the PLC control system detects whether the air pumping device is started or not. When the PLC control system detects that the air exhaust device is not opened, the PLC control system controls the air inlet valve 140 and the air outlet valve 150 to be in a closed state; when the PLC control system detects the opening of the air extraction device, the PLC control system starts to judge the size relation between the pressure value P in the furnace body and the pressure thresholds Y1 and Y2 in real time and carries out corresponding exception handling.
Firstly, the PLC control system judges whether the furnace pressure value P is less than Y1, and when P is less than Y1, the corresponding abnormal processing is that the PLC control system automatically adjusts the opening degree of the throttle valve 151 and adjusts the gas flow rate to adjust the pressure value in the furnace body.
Secondly, the PLC control system judges whether the furnace pressure value P is more than or equal to Y1 and less than Y2, and when P is more than or equal to Y1 and less than Y2, corresponding abnormal processing is that the control system automatically adjusts the opening of the throttle valve; the alarm device adopts primary alarm prompt and sets alarm duration T.
If the pressure value P in the furnace body is still equal to or more than Y1 and less than Y2 after the alarm duration time T is exceeded, the corresponding abnormal treatment is that the control system adjusts the opening of the throttle valve to the maximum, and the alarm device adopts secondary alarm prompt; if the alarm duration time T is exceeded, the PLC control system judges the pressure value P in the furnace body, the P is less than Y1, the corresponding abnormal treatment is that the control system automatically adjusts the opening degree of the throttle valve, and the alarm device cancels the alarm prompt.
Thirdly, the PLC control system judges whether the furnace pressure value P is more than or equal to Y2, when P is more than or equal to Y2, the corresponding exception handling is that the PLC control system controls the air inlet valve to be in a closed state and the air outlet valve to be in an open state, the opening of the throttle valve is adjusted to be the maximum, and the crucible is controlled to descend, so that the crystal is separated from the silicon melt; the alarm device adopts three-level alarm prompt.
According to the method for processing the furnace pressure abnormity, which is provided by the embodiment of the disclosure, the control system judges the magnitude relation between the pressure value P in the furnace body and the pressure threshold value by setting the plurality of pressure threshold values, and corresponding abnormity processing can be performed on different abnormity conditions. Meanwhile, a multi-level alarm prompt is set, alarm prompts are carried out on different abnormal conditions, and manual confirmation is timely reminded. In addition, the alarm duration is set, the control system is used for processing preferentially, manual confirmation is facilitated, faults such as equipment false alarm are eliminated, operators can know abnormal conditions of the single crystal furnace in time conveniently, and monitoring and processing efficiency is improved.
Example four
Based on the method for processing the furnace pressure abnormality described in the embodiments corresponding to fig. 1 and fig. 3, the following is an embodiment of the apparatus of the present disclosure, which can be used to execute the embodiment of the method of the present disclosure.
The embodiment of the present disclosure provides a device for processing furnace pressure abnormality, as shown in fig. 5, the device 50 for processing furnace pressure abnormality includes: an acquisition module 501, a determination module 502 and a processing module 503;
an obtaining module 501, configured to obtain a current furnace pressure in a single crystal furnace body;
a determining module 502, configured to determine a size relationship between a current furnace pressure and at least one preset pressure threshold;
and the processing module 503 is configured to perform corresponding furnace pressure adjustment processing and alarm processing according to the magnitude relationship.
In one embodiment, the at least one preset pressure threshold comprises: the pressure control device comprises a first preset pressure threshold and a second preset pressure threshold, wherein the first preset pressure threshold is smaller than the second preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value comprises the following steps: the current furnace pressure is less than a first pressure preset threshold, the current furnace pressure is greater than or equal to the first pressure preset threshold and less than a second pressure preset threshold, and the current furnace pressure is greater than or equal to the second pressure preset threshold.
In one embodiment, the processing module 503 is configured to adjust the opening of the throttle valve when the current furnace pressure is less than a first preset pressure threshold;
the processing module 503 is configured to adjust the opening of the throttle valve and trigger a first alarm prompt when the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
and the processing module 503 is configured to control the air inlet valve to be closed and the air outlet valve to be opened, adjust the opening of the throttle valve to the maximum, and trigger a third alarm prompt when the current furnace pressure is greater than or equal to a second preset pressure threshold.
In one embodiment, as shown in fig. 6, the processing device 50 for furnace pressure abnormality further includes: a judging module 504;
a judging module 504, configured to judge whether an alarm duration of the first alarm prompt exceeds a preset time threshold;
the processing module 503 is configured to adjust the opening of the throttle valve to the maximum and trigger a second alarm prompt when the alarm duration exceeds a preset time threshold and the current furnace pressure is greater than or equal to a first preset pressure threshold and less than a second preset pressure threshold;
and the processing module 503 is configured to adjust the opening of the throttle valve and close the alarm prompt when the alarm duration exceeds the preset alarm time and the current furnace pressure is less than the first preset pressure threshold.
In one embodiment, the at least one preset pressure threshold further comprises: a third preset pressure threshold, the second preset pressure threshold being less than the third preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value further comprises: the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
In one embodiment, the processing module 503 is configured to control the air inlet valve to close and the air outlet valve to open, adjust the opening of the throttle valve to the maximum, and trigger a third alarm prompt when the current furnace pressure is greater than or equal to a second preset pressure threshold and less than a third preset pressure threshold;
and the processing module 503 is configured to control the air inlet valve to be closed and the air outlet valve to be opened, adjust the opening of the throttle valve to the maximum, control the crucible in the single crystal furnace to descend, and trigger a fourth alarm prompt when the current furnace pressure is greater than or equal to a third preset pressure threshold.
In one embodiment, as shown in fig. 7, the processing device 50 for furnace pressure abnormality further includes: a detection module 505;
the detection module 505 is used for detecting whether a furnace body heater of the single crystal furnace is started or not and detecting whether the single crystal furnace is in a non-blowing-out state or not;
the detection module 505 is used for detecting whether an air extractor of the single crystal furnace is started or not when a furnace body heater of the single crystal furnace is started and the single crystal furnace is in a non-blowing-out state;
the obtaining module 501 is configured to obtain a current furnace pressure in the single crystal furnace body when the air exhaust device is turned on.
In one embodiment, the acquiring module 501 is configured to acquire a current furnace pressure inside a single crystal furnace body through a furnace pressure detecting sensor.
The device for processing the abnormal furnace pressure, provided by the embodiment of the disclosure, is used for obtaining the current furnace pressure in the single crystal furnace body, determining the size relationship between the current furnace pressure and at least one preset pressure threshold value, and performing corresponding furnace pressure regulation processing according to the size relationship. Through presetting a plurality of pressure threshold values, the abnormal conditions of the furnace pressure can be classified, corresponding furnace pressure regulation processing is carried out according to different abnormal conditions, meanwhile, corresponding alarm prompts are set according to different abnormal conditions, manual confirmation is timely reminded, operators can timely know the abnormal conditions of the single crystal furnace, and monitoring and processing efficiency is improved.
Referring to fig. 8, the embodiment of the present disclosure further provides a device for processing a furnace pressure abnormality, where the device for processing a furnace pressure abnormality includes a receiver 801, a transmitter 802, a memory 803, and a processor 804, where the transmitter 802 and the memory 803 are respectively connected to the processor 804, the memory 803 stores at least one computer instruction, and the processor 804 is configured to load and execute the at least one computer instruction to implement the method for processing a furnace pressure abnormality described in the embodiment corresponding to fig. 1.
Based on the method for processing the abnormal furnace pressure described in the embodiment corresponding to fig. 1, an embodiment of the present disclosure further provides a computer-readable storage medium, for example, the non-transitory computer-readable storage medium may be a Read Only Memory (ROM), a Random Access Memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, and the like. The storage medium stores at least one computer instruction for executing the method for processing the abnormal furnace pressure described in the embodiment corresponding to fig. 1.
It will be understood by those skilled in the art that all or part of the steps for implementing the above embodiments may be implemented by hardware, or may be implemented by a program instructing relevant hardware, where the program may be stored in a computer-readable storage medium, and the above-mentioned storage medium may be a read-only memory, a magnetic disk or an optical disk, etc.
Other embodiments of the disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the disclosure disclosed herein. This application is intended to cover any variations, uses, or adaptations of the disclosure following, in general, the principles of the disclosure and including such departures from the present disclosure as come within known or customary practice within the art to which the disclosure pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the disclosure being indicated by the following claims.
Claims (10)
1. A method for processing furnace pressure abnormity is characterized by comprising the following steps:
acquiring the current furnace pressure in the single crystal furnace body;
determining the size relation between the current furnace pressure and at least one preset pressure threshold;
and performing corresponding furnace pressure regulation processing and alarm processing according to the size relation.
2. The method of claim 1, wherein the at least one preset pressure threshold comprises: the pressure control device comprises a first preset pressure threshold and a second preset pressure threshold, wherein the first preset pressure threshold is smaller than the second preset pressure threshold;
the magnitude relation between the current furnace pressure and at least one preset pressure threshold value comprises the following steps: the current furnace pressure is smaller than the first pressure preset threshold, the current furnace pressure is greater than or equal to the first pressure preset threshold and smaller than the second pressure preset threshold, and the current furnace pressure is greater than or equal to the second pressure preset threshold.
3. The method of claim 2, wherein performing the corresponding furnace pressure adjustment process and the alarm process according to the magnitude relationship comprises:
when the current furnace pressure is smaller than the first preset pressure threshold value, adjusting the opening of a throttle valve;
when the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, adjusting the opening of the throttle valve and triggering a first alarm prompt;
and when the current furnace pressure is greater than or equal to the second preset pressure threshold, controlling an air inlet valve to close and an air outlet valve to open, adjusting the opening of the throttle valve to be maximum, and triggering a third alarm prompt.
4. The method of claim 3, wherein after adjusting the opening of the throttle valve and triggering a first alarm prompt when the furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, the method further comprises:
judging whether the alarm duration time of the first alarm prompt exceeds a preset time threshold value or not;
when the alarm duration time exceeds the preset time threshold and the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, adjusting the opening of the throttle valve to the maximum and triggering a second alarm prompt;
and when the alarm duration time exceeds the preset alarm time and the current furnace pressure is less than the first preset pressure threshold value, adjusting the opening of the throttle valve and closing the alarm prompt.
5. The method of claim 3, wherein the at least one preset pressure threshold further comprises: a third preset pressure threshold, the second preset pressure threshold being less than the third preset pressure threshold;
the relationship between the current furnace pressure and at least one preset pressure threshold value further comprises: the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
6. The method of claim 5, wherein said performing respective furnace pressure adjustment and alarm processes according to said magnitude relationship further comprises:
when the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold, controlling the air inlet valve to be closed and the air outlet valve to be opened, adjusting the opening of the throttle valve to be maximum and triggering a third alarm prompt;
and when the current furnace pressure is greater than or equal to the third preset pressure threshold, controlling the air inlet valve to be closed and the air outlet valve to be opened, adjusting the opening degree of the throttle valve to be maximum, controlling the crucible in the single crystal furnace to descend and triggering a fourth alarm prompt.
7. The method of claim 1, wherein prior to obtaining the current furnace pressure within the single crystal furnace body, the method further comprises:
detecting whether a furnace body heater of the single crystal furnace is started or not and detecting whether the single crystal furnace is in a non-blowing-out state or not;
when a furnace body heater of the single crystal furnace is started and the single crystal furnace is in a non-blowing-out state, detecting whether an air extractor of the single crystal furnace is started or not;
the method for acquiring the furnace pressure in the single crystal furnace body comprises the following steps: and when the air exhaust device is started, acquiring the current furnace pressure in the single crystal furnace body.
8. The method of claim 7, wherein the obtaining a current furnace pressure within the single crystal furnace body comprises:
and acquiring the current furnace pressure in the single crystal furnace body through a furnace pressure detection sensor.
9. A device for processing furnace pressure abnormity, which is characterized by comprising a processor and a memory, wherein the memory stores at least one computer instruction, and the instruction is loaded and executed by the processor to realize the steps executed in the method for processing furnace pressure abnormity according to any one of claims 1 to 8.
10. A computer-readable storage medium, wherein at least one computer instruction is stored in the storage medium, and the instruction is loaded and executed by a processor to implement the steps executed in the method for processing the abnormal furnace pressure according to any one of claims 1 to 8.
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| CN201910171265.0A CN111665876A (en) | 2019-03-07 | 2019-03-07 | Method and device for processing furnace pressure abnormity and storage medium |
| PCT/CN2019/117201 WO2020177375A1 (en) | 2019-03-07 | 2019-11-11 | Furnace pressure abnormality processing method and device, and storage medium |
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| CN113049022A (en) * | 2021-03-09 | 2021-06-29 | 西安奕斯伟设备技术有限公司 | Detection equipment and single crystal furnace |
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