CN108707962A - A kind of protective device for adjusting zone melting furnace pressure - Google Patents
A kind of protective device for adjusting zone melting furnace pressure Download PDFInfo
- Publication number
- CN108707962A CN108707962A CN201810713117.2A CN201810713117A CN108707962A CN 108707962 A CN108707962 A CN 108707962A CN 201810713117 A CN201810713117 A CN 201810713117A CN 108707962 A CN108707962 A CN 108707962A
- Authority
- CN
- China
- Prior art keywords
- melting furnace
- zone melting
- pipeline
- explosion
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004857 zone melting Methods 0.000 title claims abstract description 43
- 230000001681 protective effect Effects 0.000 title claims abstract description 17
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000686 essence Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The present invention provides a kind of protective devices for adjusting zone melting furnace pressure; pipeline including being placed in the external wall connection of zone melting furnace; the other end of the pipeline is connected to extraneous air; the pipeline is equipped with explosion-proof valve; the zone melting furnace body is sealed by the explosion-proof valve, pressure sensor is additionally provided on the pipeline between the explosion-proof valve and the external wall of the zone melting furnace.A kind of protective device for adjusting zone melting furnace pressure of the present invention; pass through the device of design; gas pressure intensity in furnace body can be monitored or ensure that the pressure at furnace sealing does not exceed furnace body rated pressure, realized and automatically adjust, ensure the security performance of zone melting furnace body.
Description
Technical field
The invention belongs to zone melting furnace apparatus fields, more particularly, to a kind of protective device for adjusting zone melting furnace pressure.
Background technology
Zone melting furnace structure of furnace body is made of the furnace chamber of upper, middle and lower three, and zone melting furnace will first be taken out in normal work in furnace chamber
Vacuum, which is then charged with a certain amount of gas (argon gas, the inert gases such as nitrogen), makes its air pressure inside higher than the outer atmospheric pressure (custom of stove
The positive pressure of title), when the rear furnace body of production is needed by the gas discharge (being discharged by the gas exhaust piping of furnace body) in stove, at this time
Gas pressure intensity in furnace body be monitored or ensure that the pressure at furnace sealing does not exceed furnace body rated pressure, at this moment
Time just needs to design a kind of device and is monitored to the gas pressure of zone melting furnace, ensures furnace body safety.The present invention proposes one kind
Protective device for adjusting zone melting furnace pressure, by the device of design, the gas pressure intensity in furnace body can be monitored or
Person ensures that the pressure at furnace sealing does not exceed furnace body rated pressure, realizes and automatically adjusts, ensures the safety of zone melting furnace body
Performance.
Invention content
In view of this, the present invention is directed to propose a kind of protective device for adjusting zone melting furnace pressure, passes through the dress of design
It sets, the gas pressure intensity in furnace body can be monitored or ensures that the pressure at furnace sealing does not exceed the specified pressure of furnace body
Power is realized and is automatically adjusted, ensures the security performance of zone melting furnace body.
In order to achieve the above objectives, the technical proposal of the invention is realized in this way：
A kind of protective device for adjusting zone melting furnace pressure, including it is placed in the pipeline of the external wall connection of zone melting furnace, it is described
The other end of pipeline is connected to extraneous air, and the pipeline is equipped with explosion-proof valve, by the explosion-proof valve by the zone melting furnace body
It seals, pressure sensor is additionally provided on the pipeline between the explosion-proof valve and the external wall of the zone melting furnace.
Further, the rubber stopper being slidably matched, the axis of the rubber stopper and the pipeline are equipped in the explosion-proof valve
Axis overlap.
Further, the driving mechanism in the explosion-proof valve drives the rubber stopper to move and then realizes the keying of sealing,
The direction of motion of the rubber stopper is parallel with the axis of the pipeline.
Further, control unit is equipped in the zone melting furnace body, the pressure sensor is electrically connected with described control unit
It connects.
Further, the driving mechanism in the explosion-proof valve is equally electrically connected with described control unit.
Compared with the existing technology, a kind of protective device for adjusting zone melting furnace pressure of the present invention has following excellent
Gesture：
(1) a kind of protective device for adjusting zone melting furnace pressure of the present invention can be right by the device of design
Gas pressure intensity in furnace body is monitored or ensures the pressure at furnace sealing and do not exceed furnace body rated pressure, realizes automatic
Adjusting, ensure zone melting furnace body security performance.
Description of the drawings
The attached drawing for constituting the part of the present invention is used to provide further understanding of the present invention, schematic reality of the invention
Example and its explanation are applied for explaining the present invention, is not constituted improper limitations of the present invention.In the accompanying drawings：
Fig. 1 is a kind of protective device structural schematic diagram for adjusting zone melting furnace pressure described in the embodiment of the present invention.
Reference sign：
1- zone melting furnace bodies；2- explosion-proof valves；3- rubber stoppers.
Specific implementation mode
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
In the description of the present invention, it is to be understood that, term "center", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, with specific azimuth configuration and operation, therefore should not be understood as pair
The limitation of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply phase
To importance or implicitly indicate the quantity of indicated technical characteristic.The feature for defining " first ", " second " etc. as a result, can
To express or implicitly include one or more this feature.In the description of the present invention, unless otherwise indicated, " multiple "
It is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood by concrete condition
Concrete meaning in the present invention.
The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
A kind of protective device for adjusting zone melting furnace pressure as shown in Figure 1, including it is placed in the connection of 1 outer wall of zone melting furnace body
The other end of pipeline, the pipeline is connected to extraneous air, and the pipeline is equipped with explosion-proof valve 2, by the explosion-proof valve 2 by institute
The sealing of zone melting furnace body 1 is stated, pressure sensing is additionally provided on the pipeline between the explosion-proof valve 2 and 1 outer wall of zone melting furnace body
Device.
Wherein, the rubber stopper 3 being slidably matched, the axis of the rubber stopper 3 and the pipeline are equipped in the explosion-proof valve 2
Axis overlaps.
Wherein, the driving mechanism in the explosion-proof valve 2 drives the rubber stopper 3 to move and then realizes the keying of sealing, institute
The direction of motion for stating rubber stopper 3 is parallel with the axis of the pipeline.
Wherein, control unit is equipped in the zone melting furnace body 1, the pressure sensor is electrically connected with described control unit.
Wherein, the driving mechanism in the explosion-proof valve 2 is equally electrically connected with described control unit.
The specific implementation mode of the present invention：1 gassy of zone melting furnace body (under barotropic condition), rotary switch is by furnace gas
When emptying (gas can be arranged by furnace body pressure piping outside furnace body), in the process, it is understood that there may be local area pressure mistake
Greatly, the rated pressure set in zone melting furnace body 1 can be more than, at this point, being correspondingly arranged at the pressure sensor inspection of each corresponding site
The pressure for surveying part transmits a signal to control unit when the pressure detected is more than rating number, control unit signal to
The driving mechanism of explosion-proof valve 2, control rubber stopper 3 slide axially, and realize the unlatching of explosion-proof valve 2, pressure is discharged from this, and then reaches
The purpose of release ensures the security performance of zone melting furnace body 1.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
With within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention god.
Claims (5)
1. a kind of protective device for adjusting zone melting furnace pressure, it is characterised in that：Including being placed in the external wall connection of zone melting furnace
The other end of pipeline, the pipeline is connected to extraneous air, and the pipeline is equipped with explosion-proof valve, will be described by the explosion-proof valve
Zone melting furnace body seals, and pressure sensor is additionally provided on the pipeline between the explosion-proof valve and the external wall of the zone melting furnace.
2. a kind of protective device for adjusting zone melting furnace pressure according to claim 1, it is characterised in that：It is described explosion-proof
The rubber stopper being slidably matched is equipped in valve, the axis of the rubber stopper is overlapped with the axis of the pipeline.
3. a kind of protective device for adjusting zone melting furnace pressure according to claim 2, it is characterised in that：It is described explosion-proof
Driving mechanism in valve drives the rubber stopper to move and then realizes the keying of sealing, the direction of motion of the rubber stopper with it is described
The axis of pipeline is parallel.
4. a kind of protective device for adjusting zone melting furnace pressure according to claim 3, it is characterised in that：The area is molten
Control unit is equipped in furnace body, the pressure sensor is electrically connected with described control unit.
5. a kind of protective device for adjusting zone melting furnace pressure according to claim 4, it is characterised in that：It is described explosion-proof
The driving mechanism in valve is equally electrically connected with described control unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810713117.2A CN108707962A (en) | 2018-06-29 | 2018-06-29 | A kind of protective device for adjusting zone melting furnace pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810713117.2A CN108707962A (en) | 2018-06-29 | 2018-06-29 | A kind of protective device for adjusting zone melting furnace pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108707962A true CN108707962A (en) | 2018-10-26 |
Family
ID=63873252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810713117.2A Pending CN108707962A (en) | 2018-06-29 | 2018-06-29 | A kind of protective device for adjusting zone melting furnace pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108707962A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111665876A (en) * | 2019-03-07 | 2020-09-15 | 隆基绿能科技股份有限公司 | Method and device for processing furnace pressure abnormity and storage medium |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101660200A (en) * | 2009-07-09 | 2010-03-03 | 南安市三晶阳光电力有限公司 | Method for growing polycrystalline silicon ingot under slight positive pressure state and ingot furnace |
| CN203757102U (en) * | 2013-12-30 | 2014-08-06 | 上海朗兆机电设备有限公司 | Explosion-proof valve of sapphire furnace |
| CN203800106U (en) * | 2014-03-17 | 2014-08-27 | 科源（天津）电源部品有限公司 | Adjustable pressure type battery anti-explosion valve |
| JP2018021600A (en) * | 2016-08-03 | 2018-02-08 | トーステ株式会社 | Control valve for steam |
-
2018
- 2018-06-29 CN CN201810713117.2A patent/CN108707962A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101660200A (en) * | 2009-07-09 | 2010-03-03 | 南安市三晶阳光电力有限公司 | Method for growing polycrystalline silicon ingot under slight positive pressure state and ingot furnace |
| CN203757102U (en) * | 2013-12-30 | 2014-08-06 | 上海朗兆机电设备有限公司 | Explosion-proof valve of sapphire furnace |
| CN203800106U (en) * | 2014-03-17 | 2014-08-27 | 科源（天津）电源部品有限公司 | Adjustable pressure type battery anti-explosion valve |
| JP2018021600A (en) * | 2016-08-03 | 2018-02-08 | トーステ株式会社 | Control valve for steam |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111665876A (en) * | 2019-03-07 | 2020-09-15 | 隆基绿能科技股份有限公司 | Method and device for processing furnace pressure abnormity and storage medium |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20181130 Address after: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Area (outside the ring) Hai Tai Road 12 inside. Applicant after: TIANJIN ZHONGHUAN ADVANCED MATERIAL TECHNOLOGY Co.,Ltd. Address before: 300384 Tianjin Binhai New Area high tech Zone Huayuan Industrial Park (outside the ring) Hai Tai Road 12 Applicant before: TIANJIN HUANOU SEMICONDUCTOR MATERIAL TECHNOLOGY Co.,Ltd. |
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20181026 |