CN108020678A - Molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method - Google Patents
Molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method Download PDFInfo
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- CN108020678A CN108020678A CN201610960917.5A CN201610960917A CN108020678A CN 108020678 A CN108020678 A CN 108020678A CN 201610960917 A CN201610960917 A CN 201610960917A CN 108020678 A CN108020678 A CN 108020678A
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- sensing assembly
- electrode
- converter
- temperature
- sealing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/26—Devices characterised by the use of fluids
Abstract
The invention belongs to field of measuring technique, a kind of molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method is specifically disclosed, after converter is connected with sensing assembly cavity, processes two mounting-positioning holes, electrode is put into cavity by mounting-positioning holes, to two electrode bending shapings, circular ring shape is formed, preheating 5~6/after, sinter mounting-positioning holes, electrode is sintered at the same time, then is annealed, completes the high intermediate temperature sealing of sensing assembly converter electrode.The sealing-in of different materials is realized by the high temperature sintering sealing-in of sensing assembly converter and electrode.It ensure that under angular accelerometer temperature conditionss different in Practical Project environment and under vibration, the extraneous mechanical environment condition impacted, the stabilization of product working performance.Through repeatedly facts have proved the high-temperature sealing-in method positive effect.
Description
Technical field
The invention belongs to field of measuring technique, and in particular to sensing assembly is changed in a kind of molecular electronic type angular accelerometer
The implementation method of the high intermediate temperature sealing of device electrode.
Background technology
Molecular electronic type angular accelerometer be for measuring angular acceleration signal of the carrier relative to its corresponding axis, its
Operation principle is to cause " switching device --- liquid " interface electric charge using the flowing of the working fluid in its sensing assembly
Shift and form electrical potential difference.By the electrical potential difference at electrode measurement switching device both ends, directly obtain and extraneous angular acceleration signal
Corresponding electric signal, and by converter electrode electric signal is accumulated, exported.
The sensing assembly converter of molecular electronic type angular accelerometer is the core of its sensitive extraneous angular acceleration information
Part, the electric charge that converter produces need to accumulate and export on the electrode.Converter electrode is not only the component on sensor construction
One of, the firm situation of its sealing-in also directly affects reliability of the angular accelerometer product in practical engineering application.
The content of the invention
The object of the present invention is to provide a kind of high intermediate temperature sealing of molecular electronic type angular accelerometer sensing assembly converter electrode
Method, it can realize the sealing-in of different materials, ensure angular accelerometer in different temperature conditionss and in the outer of vibratory impulse
Under boundary's mechanical environment condition, the stabilization of product working performance.
Technical scheme is as follows:
A kind of molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method, this method include as follows
Step
1) converter is fixed with electrode relative position, is specially
A) converter is sintered to fix in sensing assembly cavity;
B) sensing assembly cavity upper surface, process respectively on the position of converter upper end both sides two it is a diameter of
The positioning hole of 0.8~1.2mm;
C) two electrodes are inserted into sensing assembly cavity respectively by above-mentioned positioning hole;
2) by above-mentioned two electrode bending shapings, circular ring shape is surrounded;
3) the high intermediate temperature sealing of electrode, is specially
A) sensing assembly cavity, converter, electrode are all put at nature flame flame envelope and preheated 5~6 minutes, flame temperature
500~550 DEG C of degree;
B) two positioning holes on sensing assembly cavity are sintered respectively, make its closing;
4) sensing assembly cavity is made annealing treatment.
Temperature is 500~600 DEG C, when the time 24~50 is small.
In above-mentioned molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method:The step 2)
In circular ring shape radius be 4~5mm.
In above-mentioned molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method:The step 3)
Middle sintering temperature is 950~1000 DEG C, 1~1.5min of sintering time.
The remarkable result of the present invention is as follows:
The first step of the high intermediate temperature sealing of electrode, is determined by being close on the glass wall of its position to beat in sensing assembly converter both sides
Position mounting hole, makes electrode not slided in sensing assembly cavity, realizes being relatively fixed for electrode and transducer position.Second
Step realizes the final structure shape of electrode working status.3rd step is by considering thermal conductivity, the factor of thermal coefficient of expansion, if
Count pre- Warm status, the technological parameter of sealed state, realizes the sensing assembly cavity and converter of metal electrode and glass material
Strong seal.4th step is the characteristics of combining glass material, designs annealing time and temperature, ensure that sealing-in reliably and with long-term.
The sealing-in of different materials is realized by the high temperature sintering sealing-in of sensing assembly converter and electrode.It ensure that angle accelerates
Degree is counted under temperature conditionss different in Practical Project environment and under vibration, the extraneous mechanical environment condition impacted, product work
Make the stabilization of performance.Through repeatedly facts have proved the high-temperature sealing-in method positive effect.
Brief description of the drawings
Fig. 1 is molecular electronic type angular accelerometer sensing assembly converter electrode schematic diagram;
In figure:1. sensing assembly cavity;2. converter;3. first electrode;4. second electrode;5. the first mounting-positioning holes;
6. the second mounting-positioning holes.
Embodiment
Below by the drawings and the specific embodiments, the invention will be further described.
As shown in Figure 1, the component that the high intermediate temperature sealing of molecular electronic type angular accelerometer sensing assembly converter electrode is related to, bag
Include 2, two sensing assembly cavity 1, converter electrodes 3,4.Sensing assembly and its converter are glass material, and electrode is metal
Material.After converter 2 is connected with sensing assembly cavity 1, two peaces are made a call in the boundary of sensing assembly converter thicknesses size
Location hole 5,6 is filled, first electrode 3, second electrode 4 are positioned 6 along sensitivity by the installation of the first mounting-positioning holes 5, second respectively
1 inner wall of component cavity is put into cavity, and carries out bending shaping to two electrodes 3,4, makes electrode in sensing assembly cavity near
Like cirque structure.The sensing assembly cavity 1 tentatively connected, converter 2, electrode 3,4 are uniformly put into outside nature flame
Preheated 5~6 minutes at flame, sinter mounting-positioning holes 5,6 positions of sensing assembly cavity 1 respectively with glass sintering lamp rifle, make 5,6
Glass melting at position, it is by the glass of fusing that two positioning holes 5,6 are closed, while the sintering of electrode 3,4 is being positioned
In mounting hole 5,6.Sensing assembly cavity 1 after sintering is put into high-temperature annealing furnace and is annealed, completes sensing assembly conversion
The high intermediate temperature sealing of device electrode.
Comprise the following steps that:
1) converter 2 is fixed with electrode 5,6 relative positions
Converter 2 is connected with sensing assembly cavity 1, is sintered to fix;
1 upper surface of sensing assembly cavity, process respectively on the position of 2 upper end both sides of converter two it is a diameter of
The positioning hole of 0.8~1.2mm, i.e. the first mounting-positioning holes 5 and the second mounting-positioning holes 6, by above-mentioned two electrodes (i.e.
One electrode 3 and second electrode 4), it is inserted into respectively in the first mounting-positioning holes 5 and the second mounting-positioning holes 6, along sensing assembly cavity
Inner wall is put into cavity.
2) electrode bending shaping
Bending shaping is carried out to first electrode 3 and second electrode 4, makes the docking in sensing assembly cavity 1 of two electrodes, encloses
Into the cirque structure that radius is 4~5mm.
3) the high intermediate temperature sealing of electrode
Sensing assembly cavity 1, converter 2, first electrode 3 and the second electrode 4 tentatively connected through above-mentioned steps is all
It is put at nature flame flame envelope and preheats 5~6 minutes, 500~550 DEG C of flame temperature;
1 first mounting-positioning holes 5 of sensing assembly cavity and the second mounting-positioning holes 6 are sintered respectively with glass sintering lamp rifle
Put, make glass melting at the first mounting-positioning holes 5 and the second mounting-positioning holes 6,950~1000 DEG C of sintering temperature, sintering time
1min, it is by the glass of fusing that two positioning holes 5,6 are closed, while electrode 3,4 is sintered in positioning hole 5,6
In.
4) sealing-in after annealing is handled
Sensing assembly cavity 1 after sintering is put into high-temperature annealing furnace and is made annealing treatment, completes sensing assembly conversion
The high intermediate temperature sealing of device electrode.Temperature be 500~600 DEG C, when the time 24 is small more than.
Claims (3)
- A kind of 1. molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method, it is characterised in that the party Method includes the following steps1) converter (2) is fixed with electrode relative position, is speciallyA) converter (2) is sintered to fix in sensing assembly cavity (1);B) sensing assembly cavity (1) upper surface, process respectively on the position of converter (2) upper end both sides two it is a diameter of The positioning hole of 0.8~1.2mm;C) two electrodes are inserted into sensing assembly cavity (1) respectively by above-mentioned positioning hole;2) by above-mentioned two electrode bending shapings, circular ring shape is surrounded;3) the high intermediate temperature sealing of electrode, is speciallyA) sensing assembly cavity (1), converter (2), electrode are all put at nature flame flame envelope and preheated 5~6 minutes, flame 500~550 DEG C of temperature;B) two positioning holes on sensing assembly cavity (1) are sintered respectively, make its closing;4) sensing assembly cavity (1) is made annealing treatment.Temperature is 500~600 DEG C, when the time 24~50 is small.
- 2. molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method as claimed in claim 1, its It is characterized in that:Circular ring shape radius in the step 2) is 4~5mm.
- 3. molecular electronic type angular accelerometer sensing assembly converter electrode high-temperature sealing-in method as claimed in claim 1, its It is characterized in that:Sintering temperature is 950~1000 DEG C in the step 3), 1~1.5min of sintering time.
Priority Applications (1)
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CN201610960917.5A CN108020678B (en) | 2016-11-04 | 2016-11-04 | High-temperature sealing method for transducer electrode of sensitive component of molecular electronic type angular accelerometer |
Applications Claiming Priority (1)
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CN201610960917.5A CN108020678B (en) | 2016-11-04 | 2016-11-04 | High-temperature sealing method for transducer electrode of sensitive component of molecular electronic type angular accelerometer |
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CN108020678A true CN108020678A (en) | 2018-05-11 |
CN108020678B CN108020678B (en) | 2020-05-15 |
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CN201610960917.5A Active CN108020678B (en) | 2016-11-04 | 2016-11-04 | High-temperature sealing method for transducer electrode of sensitive component of molecular electronic type angular accelerometer |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110568219A (en) * | 2019-08-27 | 2019-12-13 | 北京自动化控制设备研究所 | Sintering device and method for molecular electronic type angular acceleration electromechanical converter |
CN111056736A (en) * | 2018-10-17 | 2020-04-24 | 北京自动化控制设备研究所 | Method for manufacturing temperature compensator of molecular electronic type angular accelerometer |
Citations (5)
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US4232553A (en) * | 1979-01-12 | 1980-11-11 | Kbg Corporation | Angular acceleration sensing apparatus |
JPH11304478A (en) * | 1998-04-23 | 1999-11-05 | Shinichi Ito | Tilt angle sensor |
CN1370979A (en) * | 2002-04-03 | 2002-09-25 | 中国航天科工集团第三研究院第三十三研究所 | Molecule-type liquid-ring angular accelerometer |
CN101464200A (en) * | 2008-12-31 | 2009-06-24 | 潮州市三江电子有限公司 | Metal connecting seat for pressure transmitter seal chamber |
CN103145350A (en) * | 2013-02-26 | 2013-06-12 | 中国科学院电工研究所 | Device and method for sealing metal and glass |
-
2016
- 2016-11-04 CN CN201610960917.5A patent/CN108020678B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4232553A (en) * | 1979-01-12 | 1980-11-11 | Kbg Corporation | Angular acceleration sensing apparatus |
JPH11304478A (en) * | 1998-04-23 | 1999-11-05 | Shinichi Ito | Tilt angle sensor |
CN1370979A (en) * | 2002-04-03 | 2002-09-25 | 中国航天科工集团第三研究院第三十三研究所 | Molecule-type liquid-ring angular accelerometer |
CN101464200A (en) * | 2008-12-31 | 2009-06-24 | 潮州市三江电子有限公司 | Metal connecting seat for pressure transmitter seal chamber |
CN103145350A (en) * | 2013-02-26 | 2013-06-12 | 中国科学院电工研究所 | Device and method for sealing metal and glass |
Non-Patent Citations (3)
Title |
---|
WANG MEILING等: "Experimental Model Identification of Liquid-Circular Angular Accelerometer using Subspace Method", 《PROCEEDINGS OF THE 35TH CHINESE CONTROL CONFERENCE》 * |
付元等: "分子液环式角加速度测量演示系统研制", 《导航与控制》 * |
李国忠等: "提高角加速度传感器环境适应性的研究", 《光电子技术》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111056736A (en) * | 2018-10-17 | 2020-04-24 | 北京自动化控制设备研究所 | Method for manufacturing temperature compensator of molecular electronic type angular accelerometer |
CN110568219A (en) * | 2019-08-27 | 2019-12-13 | 北京自动化控制设备研究所 | Sintering device and method for molecular electronic type angular acceleration electromechanical converter |
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