KR102011526B1 - Compression sealed airtight terminal - Google Patents

Abstract

The compression-sealed hermetic terminal 10 of the present invention includes a metal forex 11 of iron or iron alloy, a pipe lead 12 of iron alloy inserted into the metal forex 11, and an inner wall of the metal forex 11. And an insulating glass 13 which seals the outer diameter of the pipe lead 12 in an airtight manner, and a low resistance metal such as silver, copper, aluminum or silver alloy, copper alloy, aluminum alloy penetrating the pipe lead 12. The lead 14 is provided, and a predetermined gap portion 15 for cushioning thermal expansion of the lead-out lead 14 is provided inside the metal foreign exchange 11, and the lead-out lead 14 is connected to the joint 16. By airtight bonding with the pipe lead 12 by this.

Description

Compression Seal Airtight Terminal {COMPRESSION SEALED AIRTIGHT TERMINAL}

The present invention relates to a compression sealed hermetic terminal which can be used for high power applications and has high hermetic reliability.

The hermetic terminal hermetically seals the lead through the insulating material through the metal forex or the insertion hole of the metal forex, thereby supplying electric current to the electric device or element contained in the hermetic container, or receiving a signal from the electric device or element to the outside. It is used when deriving (for example, Japanese Unexamined Patent Application Publication No. 61-260560, Japanese Unexamined Patent Application Publication No. 02-039472).

In particular, GTMS (Glass-to-Metal-Seal) hermetic terminals sealing metal foreign exchange and leads with insulating glass are roughly classified into two types, namely, sealing and compression sealing. In order to establish a reliable airtight seal, it is important to properly select the coefficient of thermal expansion of the metal material of the foreign exchange and lead and the insulating glass.

The insulating glass for sealing is determined by the metal foreign currency and the raw material of a lead, a required temperature profile, and its thermal expansion coefficient. In the case of matched sealing, the sealing material is selected so that the thermal expansion coefficient of the metal material and insulating glass is as consistent as possible. On the other hand, the compression seal is intentionally selected from metal materials of different thermal expansion coefficients and materials of insulating glass so that the metal foreign currency compresses the insulating glass and the lead.

Conventional hermetic terminals have cobalt alloys (Fe54%, Ni28) in which a mating hermetic hermetic terminal has the same thermal expansion coefficient as that of a glass material over a wide temperature range for metal foreign exchange and lead materials in order to ensure high hermetic reliability and electrical insulation. %, Co18%), and both are sealed with an insulating glass made of borosilicate glass, and in a compression-sealed airtight terminal, a forced steel such as carbon steel or stainless steel is applied such that a concentric compressive stress is applied to the glass in the use temperature range. Is sealed with an insulating glass made of soda barium glass, using a lead material of iron alloy such as iron nickel alloy (Fe50%, Ni50%) or iron chromium alloy (Fe72%, Cr28%). .

JP-A 61-260560 Japanese Patent Publication No. 02-039472

The above and other objects, features, aspects and advantages of the present invention will become apparent from the following detailed description of the invention which is understood in connection with the accompanying drawings.

According to the present invention, a lead lead consisting of a metal forex, a pipe lead inserted into the metal forex, an insulating glass for hermetically sealing the inner wall of the metal forex and the outer diameter of the pipe lead, and a low resistance metal penetrating through the pipe lead are provided. And a predetermined gap portion for buffering thermal expansion of the lead-out lead is provided inside the pipe lead, and the lead-out lead is hermetically bonded to the pipe lead by a joint portion filled with a joining material. Is provided.

According to the 2nd viewpoint of this invention, the metal foreign exchange | exchange, the pipe lead inserted into this metal foreign exchange, the insulating glass which hermetically seals the inner wall of the metal foreign exchange | exchange and the outer diameter of a pipe lead, and the low resistance metal which penetrated the pipe lead And a predetermined gap portion inside the pipe lead for cushioning thermal expansion of the lead lead, and one or two circumferential grooves in the outer diameter of the lead lead or the inner diameter of the pipe lead. A compression-sealed airtight terminal is provided in which an airtight lead and a pipe lead are hermetically bonded using a joint portion in which a joining range of a bonding material is determined by a circumferential groove portion.

According to the 3rd viewpoint of this invention, the metal foreign exchange | exchange, the pipe lead inserted into this metal foreign exchange, the insulating glass which hermetically seals the inner wall of the metal foreign exchange | exchange and the outer diameter of a pipe lead, and the low resistance metal which penetrated the pipe lead The lead lead is formed, the shaft lead portion is provided in the lead lead, and a predetermined gap portion for buffering the thermal expansion of the lead lead is formed between the shaft lead portion and the pipe lead. A compression-sealed airtight terminal is provided, which is hermetically joined to the pipe lead by a joining portion provided by filling a joining material between an inner wall of the pipe lead excluding the shaft diameter portion and an opposing lead lead thereof.

According to the 4th viewpoint of this invention, the metal foreign exchange | exchange and the pipe lead inserted into this metal foreign exchange, the insulating glass which hermetically seals the inner wall of the metal foreign exchange | exchange and the outer diameter of a pipe lead, and the low resistance metal which penetrated the pipe lead And a lead diameter consisting of the lead lead, the shaft diameter portion being provided in the inner diameter of the pipe lead, and the inner wall of the shaft diameter portion and the opposing lead lead filled with a joining material to form a joint portion. A predetermined gap portion is formed between the lead lead, and the lead lead is hermetically sealed to the shaft diameter portion of the pipe lead by a joining portion.

The gap portion of the compression-sealed hermetic terminal according to the present invention is composed of a free space having a predetermined clearance formed between the inner wall surface of the pipe lead and the outer diameter of the lead lead at a position opposed to the insulating glass. Since the thermal expansion of the lead leads can be buffered in the space of the gap portion while the compressive stress of the metal foreign exchange and the pipe leads is loaded, a compression-sealed airtight terminal using a low resistance metal having a high coefficient of thermal expansion for the lead leads can be realized. have. In addition, the joining portion is provided by filling a predetermined portion of the gap with a joining material such as a brazing filler material and joining in an airtight manner. That is, the hermetic terminal according to the present invention is provided by a free space formed by compressing and sealing the insulating glass using a metal foreign exchange and a pipe lead, and providing a gap between the pipe lead and the lead lead and forming the gap. By cushioning excessive thermal expansion of the lead-out lead made of a low resistance metal, a hermetic terminal of compression sealing with extremely small electrical resistance is realized. When the coefficient of thermal expansion of the metal foreign exchange used in the present invention is α1, the coefficient of thermal expansion of the pipe lead is α2, and the coefficient of thermal expansion of the lead lead is α3, the three-character relationship becomes α3 >> α1 ≧ α2.

1 is a plan view of a compression-sealed hermetic terminal 10 according to the first embodiment.
FIG. 2 shows the compression-sealed airtight terminal 10 according to the first embodiment, (a) is a front partial cross-sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.
3 shows a compression-sealed airtight terminal 20 according to a second embodiment, (a) is a front partial cross-sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.
4 shows a compression-sealed airtight terminal 30 according to a third embodiment, (a) is a front partial cross-sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.
Fig. 5 shows a compression-sealed airtight terminal 40 according to a fourth embodiment, wherein (a) is a front partial cross-sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.
Fig. 6 shows a compression-sealed airtight terminal 50 according to Modification 1 of the present invention, (a) is a front partial cross-sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.
7 shows a compression-sealed airtight terminal 60 according to a modification 2 of the present invention, (a) is a front sectional view of a type in which a bonding portion is embedded in insulating glass, and (b) the bonding portion is outside the insulating glass. Front section of the prepared type.

Hereinafter, the airtight terminal of this embodiment is demonstrated, referring drawings.

[First embodiment]

As shown in FIGS. 1 and 2, the compression-sealed hermetic terminal 10 of the present embodiment includes a metal forex 11 of iron or iron alloy and a pipe lead of iron alloy inserted into the metal forex 11. 12), an insulating glass 13 for hermetically sealing the inner wall of the metal foreign exchange 11 and the outer diameter of the pipe lead 12, and silver, copper, aluminum, and silver alloy penetrating the pipe lead 12. And a lead lead 14 made of a low resistance metal such as a copper alloy or an aluminum alloy, and a predetermined gap portion 15 for buffering thermal expansion of the lead lead 14 is provided inside the pipe lead 12. The lead lead 14 is hermetically joined to the pipe lead 12 by a joining portion 16 filled with a joining material such as a brazing filler metal.

The diameter phi 1 of the lead lead 14 is configured to be 50% or more and 90% or less of the inner diameter φ2 of the metal foreign exchange 11. The gap portion 15 is a joint portion 16 occupied by a joining material such as a brazing filler material in a space between the lead lead 14 and the pipe lead 12 arranged concentrically with the shaft of the lead lead 14. It consists of the remaining space except for. The joining portion 16 has a ring-shaped joining material provided in advance along the upper opening of the pipe lead 12, and heats and melts this, so that the entire circumference of the one-side opening end of the gap portion between the pipe lead 12 and the lead lead 14 is formed. Is formed by airtight bonding with a bonding material. The joining material arranged in a ring shape along the opening of the pipe lead 12 is melted by heating to fill the opening to form the joining portion 16. The bonding material may be melt-bonded in a glass sealing furnace. In this case, since the sealing of the insulating glass can be completed at the same time as the sealing of the insulating glass, the process can be shortened by two steps compared with the conventional assembling step of the hermetic terminal with a pipe lead.

The joint 16 provided in the inner diameter of the pipe lead 12 of the hermetic terminal 10 has a metal at least partially formed as shown in FIG. 2 (a) so as to buffer a large thermal expansion of the lead lead 14. Even if the inside of the foreign exchange 11, or at least part of it, is buried in the insulating glass 13, the outside of the metal foreign exchange 11, i.e., the whole of the foreign exchange 11, is provided to the outside of the insulating glass 13, as shown in FIG. Also good. In addition, when embedding the junction part 16 of FIG. 1 (a) to the insulated glass 13, the length of the junction part 16 to embed | buried is insulated glass in order to load sufficient compressive stress to the insulated glass 23. In addition, in FIG. The lead of (13) is provided to be 2/3 or less of the thickness in the axial direction.

Second Embodiment

As shown in FIG. 3, the compression-sealed hermetic terminal 20 of the present embodiment includes a metal foreign currency 21 made of iron or iron alloy and a pipe lead 22 of iron alloy inserted into the metal foreign currency 21. And an insulating glass 23 hermetically sealing the inner wall of the metal foreign currency 21 and the outer diameter of the pipe lead 22, and silver, copper, aluminum, silver alloy, copper alloy, and aluminum penetrating the pipe lead 22. The lead lead 24 which consists of low resistance metals, such as an alloy, is provided, The predetermined clearance part 25 for buffering the thermal expansion of the lead lead 24 is provided in the inside of the pipe lead 22, and the lead lead is further made. One or two circumferential grooves 27 are provided at the outer diameter of the 24 or the inner diameter of the pipe lead 22, and the circumferential grooves 27 use the joint portion 26 in which the joining range of a bonding material such as a brazing filler material is determined. The lead lead 24 and the pipe lead 22 are hermetically bonded to each other.

The diameter phi 1 of the lead lead 24 is comprised so that it may become 50% or more and 90% or less of the inner diameter phi 2 of the metal foreign exchange 21. The gap portion 25 is a joint portion 26 occupied by a joining material such as a brazing filler material in a space between the lead lead 24 and the pipe lead 22 arranged concentrically with the shaft of the lead lead 24. It consists of the remaining space except for. The joint part 26 fixes the ring-shaped joint material along the circumferential groove part 27 on the side close to the opening of the pipe lead 22 in advance, and inserts the circumferential groove part 27 to which the joint material is fixed into the pipe lead 22. Then, by heating and melting, the entire circumference of the one-side opening end of the gap portion of the pipe lead 22 and the lead lead 24 is hermetically joined with a bonding material. The hollow circumferential groove portion 27 in which one bonding material is not disposed also functions as a gap for preventing the molten bonding material from expanding too much in addition to the desired bonding portion 26. The bonding material fixed in a ring shape along the circumferential groove portion 27 on the side close to the opening is melted by heating to fill the opening to form the joining portion 26. At this time, since the circumferential groove portion 27 is provided adjacent to the junction portion 26, only the junction portion 26 sandwiched in the circumferential groove portion 27 can introduce the bonding material using a capillary phenomenon, and control the flow of the bonding material. By preventing extra expansion, the joint range can be determined. The bonding material fixed to the peripheral groove 27 on the side close to the opening may be melt-bonded in a glass sealing passage. In this case, since the sealing of the insulating glass can be completed at the same time as the sealing of the insulating glass, the process can be shortened by two steps compared with the conventional assembling step of the hermetic terminal with a pipe lead.

As shown in FIG. 3 (a), the junction part 26 provided in the inner diameter of the pipe lead of the hermetic terminal 20 has at least one portion of the metal foreign currency 21 so as to buffer a large thermal expansion of the lead lead 24. ), Or at least part of the inside, may be embedded in the insulating glass 23, or as shown in FIG. 3B, the outside of the metal foreign exchange 21, that is, the whole may be provided outside the insulating glass 23. . In addition, when embedding the junction part 26 of FIG. 3 (a) to the insulated glass 23, the length of the junction part 26 to embed | buried is insulated glass in order to load sufficient compressive stress to the insulated glass 23. In addition, in FIG. The lead of (23) is provided to be 2/3 or less of the thickness in the axial direction.

Third Embodiment

As shown in FIG. 4, the compression-sealed airtight terminal 30 of the present embodiment includes a metal foreign exchange 31 of iron or iron alloy, a pipe lead 32 of iron alloy inserted into the metal foreign exchange 31, and the like. And insulating glass 33 for hermetically sealing the inner wall of the metal foreign currency 31 and the outer diameter of the pipe lead 32, and silver, copper, aluminum, silver alloy, copper alloy, and aluminum alloy penetrating the pipe lead 32. The lead-out lead 34 which consists of low resistance metals, such as these, is provided, The shaft diameter part 37 is provided in the lead-out lead 34, and the lead-out lead 34 is provided between this shaft diameter part 37 and the pipe lead 32. FIG. A predetermined gap portion 35 for buffering thermal expansion of the () is formed, and the lead lead 34 is formed between the inner wall of the pipe lead 32 excluding the shaft diameter portion 37 and the lead lead 34 opposite thereto. It is characterized in that it is hermetically joined to the pipe lead 32 by the joint part 36 filled with a bonding material such as a brazing filler material.

The diameter φ1 of the lead lead 34 is configured to be 50% or more and 90% or less of the inner diameter φ2 of the metal foreign exchange 31. The gap part 35 has the remaining space between the lead lead 34 and the space between the lead lead 34 and the pipe lead 32 arranged concentrically, except for the junction 26 occupied by the joining material. It is made up of space. The joining portion 36 is provided with a ring-shaped joining material in advance along the upper opening of the pipe lead 32, and heats and melts this, so that the entire circumference of one side open end of the gap between the pipe lead 32 and the lead lead 34 is formed. Is formed by airtight bonding with a bonding material. The predetermined gap portion 35 provided between the shaft diameter portion 37 and the pipe lead 32 functions as a gap for preventing the molten bonding material from expanding too much in addition to the desired bonding portion 36. The bonding material provided in a ring shape along the upper opening of the pipe lid 32 is heated and melted to fill the opening to form the bonding portion 36. At this time, since the shaft diameter portion 37 is provided adjacent to the junction portion 36, the bonding material can be introduced into the narrowed junction portion 36 only by using a capillary phenomenon, and the flow of the bonding material is controlled to prevent extra expansion. The joining range can be determined. The bonding material disposed along the upper opening may be melt-bonded by a glass sealing passage. In this case, since sealing of insulating glass can be completed and bonding sealing of a brazing material can be completed, a process can be shortened two steps compared with the assembly process of the conventional airtight terminal with a pipe lead. Moreover, by providing the shaft diameter part 37 in the lead-out lead 34, the clearance part 35 can be adjusted to desired clearance, without being influenced by the junction thickness of the junction part 36. FIG.

As shown in FIG. 4 (a), the junction part 36 provided in the inner diameter of the pipe lead of the hermetic terminal 30 has at least one portion of the metal foreign currency 31 so as to buffer a large thermal expansion of the lead lead 34. ), Or at least a part of the inside may be buried in the insulating glass 33, or as shown in FIG. 4B, the outside of the metal foreign exchange 31, that is, the whole, may be provided outside the insulating glass 33. In addition, when embedding the junction part 36 of FIG. 4 (a) to the insulated glass 33, the length of the junction part 36 to embed | buried is insulated glass in order to load sufficient compressive stress to the insulated glass 33. In addition, in FIG. The lead of (33) is provided to be 2/3 or less of the thickness in the axial direction.

Fourth Embodiment

As shown in FIG. 5, the compression-sealed hermetic terminal 40 of the present embodiment includes a metal foreign exchange 41 of iron or iron alloy, a pipe lead 42 of iron alloy inserted into the metal foreign exchange 41, and the like. And insulating glass 43 for hermetically sealing the inner wall of the metal foreign exchange 41 and the outer diameter of the pipe lead 42, and silver, copper, aluminum, silver alloy, copper alloy, and aluminum alloy penetrating the pipe lead 42. The lead lead 44 which consists of low resistance metals, such as these, is provided, The shaft diameter part 47 is provided in the inner diameter of the pipe lead 42, and the inner wall of the shaft diameter part 47 and the lead lead 44 which it opposes are provided. The gap is filled with a joining material such as a brazing filler material to form a joining portion 46. A predetermined gap portion 45 is formed between the inner diameter of the pipe lead 42 except the shaft diameter portion 47 and the lead lead 44. The lead lead 44 is hermetically joined to the shaft diameter portion 47 of the pipe lead 42 by the joining portion 46.

The diameter φ1 of the lead lead 44 is configured to be 50% or more and 90% or less of the inner diameter φ2 of the metal foreign exchange 41. The gap portion 45 is the remaining space except the joint portion 46 occupied by the bonding material among the spaces between the lead lead 44 and the pipe lead 42 arranged concentrically with the axis of the lead lead 44. Is done. The joining portion 46 is provided with a ring-shaped joining material in advance along the upper opening of the pipe lead 42, and heats and melts the entire circumference of one side open end of the gap between the pipe lead 42 and the lead lead 44. It forms by airtight bonding with a bonding material. The predetermined gap portion 45 provided between the shaft diameter portion 47 of the pipe lid 42 and the lead lead 44 serves as a gap for preventing the molten bonding material from expanding too much in addition to the desired bonding portion 46. do. The bonding material provided in a ring shape along the upper opening of the pipe lid 42 is melted by heating to fill the opening to form the bonding portion 46. At this time, since the junction part 46 is provided in the same range as the shaft diameter part 47, it can flow in a bonding material only in the junction part 46 narrowed by the shaft diameter part 47 using a capillary phenomenon, and the flow of a bonding material Control to prevent extra expansion to determine the joint range. The bonding material disposed along the upper opening may be melt-bonded by a glass sealing passage. In this case, since the sealing of the insulating glass can be completed at the same time as the sealing of the insulating glass, the process can be shortened by two steps as compared with the conventional step of assembling the hermetic terminal with a pipe lead. In addition, by providing the shaft diameter portion 47 in the inner diameter of the pipe lead 42, the gap 45 becomes easy to adjust to the desired clearance without being influenced by the joining thickness of the joining portion 46, and the shaft Since the length in the lead axial direction of the neck part 47 can be matched with the joint length of the junction part 46, the size adjustment of the junction part 46 becomes easy.

The joint 46 provided at the inner diameter of the pipe lead of the hermetic terminal 40 has at least a portion of the metal foreign exchange 41 as shown in FIG. 5A so as to buffer a large thermal expansion of the lead lead 44. ), Or at least a part of the inside of the metal sheet may be embedded in the insulating glass 43, or as shown in FIG. 5B, the outside of the metal foreign exchange 41, that is, the whole, may be provided to the outside of the insulating glass 43. In addition, when embedding the junction part 46 of FIG. 5 (a) to the insulated glass 43, the length of the junction part 46 to embed | buried is insulated glass in order to load sufficient compressive stress to the insulated glass 43. In addition, in FIG. The lead of (43) is provided to be 2/3 or less of the thickness in the axial direction.

The hermetic terminals of the first to fourth embodiments described above are both sealed and sealed with an insulating glass using a metal foreign currency and a pipe lead, and a gap portion is provided between the pipe lead and the lead lead. The free space formed and the rigidity of the pipe lead buffer excessive thermal expansion of the lead lead made of a low resistance metal, thereby realizing a hermetic terminal of a compression seal with extremely low electrical resistance. Such a hermetic terminal, if the thermal expansion coefficient of the metal forex is α1, the pipe lead coefficient of α2 and the lead lead of α3, the three-way relationship satisfies the relationship of α3 >> α1≥α2 The diameter φ1 is preferably configured to be 50% or more and 90% or less of the inner diameter φ2 of the metal forex.

The width of the gap portion for buffering the thermal expansion of the lead-out lead is equal to the distance between the inner wall of the pipe lead and the outer wall of the lead-out lead, and this gap can be adjusted by the joint. It is preferable that they are 0.01 mm or more and 1 mm or less, and, as for the width | variety of such a gap part, it is more preferable that they are 0.01 mm or more and 0.5 mm or less. In consideration of the deviation due to the machining accuracy of the lead lead and the pipe lead, it is most preferable to be 0.1 mm or more and 0.3 mm or less. When the width | variety of this clearance part is less than 0.01 mm, airtight sealing by bonding materials, such as a brazing filler material, becomes difficult. The means for determining the joining portion to a desired joining range forms a gap of 0.2 mm or more in the gaps other than the joining table, so that a circumferential groove or an axis diameter part is provided in the gap adjacent to the joining table. In addition, by narrowing the gap between the joints and the gap between the adjacent portions and introducing the brazing filler material to the junction table using a capillary phenomenon, the flow of the brazing filler material can be controlled and extra expansion can be prevented to determine the joining range.

The joining portion provided in the inner diameter of the pipe lead of the hermetic terminal may be provided so that at least part of the inside of the metal foreign exchange, i.e., at least part of it, is embedded in the insulating glass so as to buffer large thermal expansion of the lead lead. The outer side, that is, the whole may be provided to the outside of the insulating glass. When embedding the bonded portion in the insulating glass, in order to load sufficient compressive stress to the insulating glass, the length of the bonded portion to be embedded is provided to be 2/3 or less of the thickness of the insulating glass. In other words, due to the rigidity (elastic deformation) of the pipe lead, the compressive stress of the glass also slightly decreases in the range facing the gap except the joint portion, and is somewhat compressed compared with the case of using a solid lead instead of a tubular shape. Since this catching side becomes weak, in order to ensure the required airtightness, the area of the clearance gap suitable for the sealing area of the insulated glass is needed. For example, when the length of the bonded portion embedded is more than two-thirds of the thickness in the axial direction of the lead of the insulated glass, the effective area capable of applying compressive stress to the glass becomes extremely narrow, thereby ensuring airtight reliability. I can't do it.

In the metal foreign exchange of the compression-sealed hermetic terminal of the first to fourth embodiments, flange portions as shown in 48, 58, and 68 of FIGS. 5 to 7 may be provided as necessary. In addition, although not shown in particular, you may use the metal plate which provided one or more through-holes as a metal foreign currency. In this case, the metal hole of the metal plate is used as the inner diameter of the metal foreign exchange.

The compression-sealed hermetic terminal of the first to fourth embodiments is not limited to one manufacturing method, but the metal foreign exchanger and the pipe lead inserted into the metal foreign exchange at a predetermined position provided in the heat-resistant sealing jig such as graphite; A cylindrical glass pellet composed of insulating glass disposed between the inner diameter of the metal foreign currency and the outer diameter of the pipe lead, silver, copper, aluminum, silver alloy, copper alloy penetrating the inner diameter of the pipe lead, An entry step of setting a lead lead made of a low resistance metal such as an aluminum alloy and a joining material such as a brazing material disposed between the lead lead and the inner diameter of the pipe lead, and each of the structural members in the entry step. A sealing jig set at a predetermined position is passed through the sealing path to melt the glass pellets and the bonding material in a batch, and the airtight seal between the metal foreign currency and the pipe lead is sealed with insulating glass. Moreover, it becomes possible to manufacture by two steps of the sealing process which provides a predetermined clearance part inside the pipe lead for buffering the thermal expansion of the lead-out lead, and air-tightly connects the pipe lead and the lead-out lead with a bonding material.

EXAMPLE

Example 1

The compression-sealed hermetic terminal 10 of Example 1 which concerns on this invention is a metal foreign exchange | exchange of cold rolled steel (equivalent to JISS400) of outer diameter 100mm, inner diameter 30mm, and thickness 15mm, as shown to Fig.2 (a). (11), pipe lead 12 of iron nickel alloy (Fe50%, Ni50%) having an outer diameter of 20 mm, an inner diameter of 16.2 mm, and a thickness of 1.9 mm inserted into the metal foreign exchange 11, and the inner wall of the metal foreign exchange 11 And an insulated glass 13 made of soda barium glass which hermetically seals the outer diameter of the pipe lead 12, and a lead lead 14 made of aluminum having a diameter of 16 mm and a length of 100 mm that penetrates the pipe lead 12. In addition, a gap portion 15 having a width of 0.1 mm for buffering thermal expansion of the lead-out lead 14 is provided inside the pipe lead 12, and the lead-out lead 14 is formed by the joining portion 16 of the silver solder material. It is hermetically joined with the pipe lead 12. In addition, the pipe lead 12 may use a cobalt alloy (Fe54%, Ni28%, Co18%) instead of the iron nickel alloy.

Example 2

Compression-sealed airtight terminal 20 according to the second embodiment of the present invention is composed of 42 alloys (Fe58%, Ni42%) having an outer diameter of 100 mm, an inner diameter of 30 mm, and a thickness of 15 mm, as shown in FIG. Metal foreign exchange 21, pipe lead 22 of covar alloy (Fe54%, Ni28%, Co18%) having an outer diameter of 20 mm, an inner diameter of 16.2 mm, and a thickness of 1.9 mm inserted into the metal foreign currency 21, and a metal foreign currency Insulating glass 23 of boron silicate glass which hermetically seals the inner wall of the pipe 21 and the outer diameter of the pipe lead 22, and a nickel plated copper material having a diameter of 16 mm and a length of 100 mm that penetrates the pipe lead 22. A lead portion 24 is formed, and a gap portion 25 having a width of 0.2 mm for cushioning thermal expansion of the lead lead 24 is provided inside the metal foreign exchange 21, and the outer diameter of the lead lead 24 is also provided. Alternatively, two circumferential grooves 27 having a depth of 0.3 mm are provided in the inner diameter of the pipe lead 22, and the circumferential groove portions 27 of the silver brazing filler material in which the joining range of the brazing filler material is determined are provided. Characterized in that a bonding a derived using the lead 24 and the lead pipe 22 is confidential.

Although not particularly shown, the two peripheral grooves 27 provided in the lead-out lead 24 of the compression-sealed airtight terminal 20 may be deformed into one peripheral groove. For example, the silver brazing filler material is arranged in advance along the upper opening of the pipe lead 22, and only the circumferential groove portion 27 at the lower side of the joining portion 26 is provided in an empty state. By inflow | flowing into the junction part 26 from the upper opening by using it, molten brazing filler material other than the desired junction part 26 can be prevented from expanding. As the pipe lead 22, iron nickel alloys (Fe50%, Ni50%) may be used in place of the cobar alloy.

Example 3

As shown in Fig. 4A, the compression-sealed hermetic terminal 30 of the third embodiment of the present invention is made of a metal foreign exchange of austenitic stainless steel SUS304 having an outer diameter of 100 mm, an inner diameter of 30 mm, and a thickness of 15 mm. 31), a pipe lead 32 of an iron nickel alloy (Fe50%, Ni50%) having an outer diameter of 20 mm, an inner diameter of 16.2 mm, and a thickness of 1.9 mm inserted into the metal foreign currency 31, and an inner wall of the metal foreign currency 31; An induction lead 34 made of an insulated glass 33 of soda barium glass which hermetically seals the outer diameter of the pipe lead 32 and a nickel plated copper material having a diameter of 16 mm and a length of 100 mm that penetrates the pipe lead 32. And a shaft diameter portion 37 provided on the lead-out lead 34 and having a width of 0.5 mm for buffering thermal expansion of the lead-out lead 34 between the shaft diameter portion 37 and the pipe lead 32. The gap portion 35 is formed, and the lead lead 34 is hermetically joined to the pipe lead 32 by the joining portion 36 made of silver brazing filler metal. The shaft diameter portion 37 provided in the lead-out lead 34 of the compression-sealed hermetic terminal 30 may be modified such that only a part of the shaft is reduced in diameter as in Modification Example 1 shown in FIG. 6. As the pipe lead 32, an iron chromium alloy (Fe72%, Cr28%) may be used instead of the iron nickel alloy.

Example 4

Compression-sealed airtight terminal 40 of the fourth embodiment of the present invention, as shown in Fig. 5 (b), is a metal foreign exchange 41 of carbon steel having an outer diameter of 120 mm, an inner diameter of 30 mm, and a thickness of 15 mm, and a metal. The hermetic sealing of the pipe lead 42 made of iron chromium alloy having an outer diameter of 20 mm, an inner diameter of 17.0 mm, and a thickness of 1.9 mm inserted into the foreign exchange 41, the inner wall of the metal foreign currency 41, and the outer diameter of the pipe lead 42. Insulating glass 43 made of soda-lime glass and lead lead 44 made of silver having a diameter of 16 mm and a length of 100 mm penetrating the pipe lead 42 are provided. 47, a gap portion 45 having a width of 0.5 mm is formed between the inner diameter of the pipe lead 42 except the shaft diameter portion 47 and the lead lead 44, and the lead lead 44 is It is characterized by being hermetically joined to the shaft diameter portion 47 of the pipe lead 42 by the joining portion 46 of silver brazing material. The shaft diameter portion 47 provided in the lead-out lead 44 of the compression-sealed airtight terminal 40 may be deformed such that only the inner diameter side is reduced in diameter as in the modification 2 shown in FIG. 7. The pipe lead 42 may use an iron nickel alloy instead of the iron chromium alloy.

The present invention can be used particularly for airtight terminals which are durable to high voltage and high current and require high insulation. According to the present invention, a high thermal expansion coefficient material that cannot be used as a lead material of a hermetic terminal because the thermal expansion is greater than that of iron and iron-based alloys used in the metal foreign exchange can be used for the lead lead. Furthermore, since low resistance metals such as silver, copper, aluminum, or alloys thereof, which are high thermal expansion coefficient materials, can be used for lead-out leads of the hermetic terminals, the hermetic terminals which are easy to cope with high-rate power devices can be compressed and sealed. It can be manufactured inexpensively and stably. Moreover, the compression acts on the insulating glass due to the thermal expansion coefficient aberration between the metal foreign exchange and the pipe lead, so that there is no fear of leak leakage. Moreover, the compression sealing type airtight terminal which concerns on this invention is a 4 step | part of the entry process, glass sealing process, lead-out lead insertion process, and welding process in which the airtight terminal which used the conventional pipe lead sets each component part to a sealing jig. The granulated body can be shortened to two steps of the sealing step in which each component part is hermetically sealed by melting the entrance step of setting each component part to the sealing jig and the insulating glass and the bonding material in the furnace.

While the embodiments of the present invention have been described, it should be considered that the embodiments disclosed herein are exemplary in all respects and not restrictive. It is intended that the scope of the invention be indicated by the claims, and include all modifications within the meaning and range equivalent to the claims.

10, 20: confidential terminal 11, 21: metal foreign exchange
12, 22: pipe lead 13, 23: insulating glass
14, 24: lead lead 15, 25: gap portion
16, 26: junction 27: peripheral groove

Claims (14)

delete A metal forex, a pipe lead inserted into the metal forex, an insulating glass for hermetically sealing the inner wall of the metal forex and the outer diameter of the pipe lead, and a lead lead made of a low resistance metal penetrating the pipe lead,
A predetermined gap portion for buffering thermal expansion of the lead lead is provided inside the pipe lead, and one or two circumferential grooves are provided at an outer diameter of the lead lead or an inner diameter of the pipe lead, The hermetic sealing type hermetic terminal, wherein the lead lead and the pipe lead are hermetically bonded using a joint portion in which a bonding range of a bonding material has been determined. A metal forex, a pipe lead inserted into the metal forex, an insulating glass for hermetically sealing the inner wall of the metal forex and the outer diameter of the pipe lead, and a lead lead consisting of a low resistance metal penetrating the pipe lead. ,
The shaft lead portion is provided in the lead lead, and a predetermined gap portion for buffering thermal expansion of the lead lead is formed between the shaft lead portion and the pipe lead, and the lead lead leads the pipe lead except for the shaft lead portion. The pipe lead is hermetically joined to the pipe lead by a joining portion provided by filling a joining material between the inner wall of the and the lead lead opposite thereto;
The lead lead is made of a low resistance metal which is copper, aluminum, copper alloy, or aluminum alloy,
The bonding material is a compression-sealed hermetic terminal, characterized in that the silver lead material. delete The method of claim 2 or 3,
At least a portion of the bonding portion is embedded in the insulating glass. The method of claim 5,
The length of the said junction part embedded in the said insulated glass was provided so that it might become 2/3 or less of the thickness of the said insulated glass, The compression sealing type airtight terminal characterized by the above-mentioned. The method of claim 2 or 3,
The said bonding part provided the whole outside the said insulated glass, The compression sealing type airtight terminal characterized by the above-mentioned. The method of claim 2 or 3,
The lead lead-out hermetic sealing terminal is characterized in that the diameter is 50% or more and 90% or less of the inner diameter of the metal foreign exchange. The method of claim 2,
The lead lead is a compression-sealed hermetic terminal, characterized in that the low-resistance metal is silver, copper, aluminum, silver alloy, copper alloy or aluminum alloy. The method of claim 2 or 3,
The pipe lead is a compression-sealed airtight terminal, characterized in that the iron chromium alloy, Kovar alloy, iron nickel alloy or iron alloy made of stainless steel. The method of claim 2 or 3,
The metal foreign exchange is a compression-sealed hermetic terminal, characterized in that made of any one iron alloy of the group consisting of iron or carbon steel, stainless steel and iron nickel alloy. The method of claim 2 or 3,
The gap is a compression sealed hermetic terminal, characterized in that the width of 0.01mm or more and 1mm or less. The method of claim 2 or 3,
A compression-sealed airtight terminal, wherein a circumferential groove portion or a shaft diameter portion is provided in the gap portion to further provide a gap of 0.2 mm or more to determine a junction portion. A method for producing a compression-sealed hermetic terminal according to claim 2 or 3,
A cylindrical glass pellet composed of a metal forex, a pipe lead inserted into the metal forex, and an insulating glass disposed between an inner diameter of the metal forex and an outer diameter of the pipe lead at a predetermined position provided in the heat-resistant sealing jig; An entrance step of setting a lead lead penetrating the inner diameter of the pipe lead and a bonding material disposed between the lead lead and the inner diameter of the pipe lead;
In the entrance step, the sealing jig having each of the constituent members set at a predetermined position is passed through the sealing path to melt the glass pellets and the bonding material in a lump, and the air gap between the metal foreign currency and the pipe lead is hermetically sealed with the insulating glass. And a sealing step of providing a predetermined gap portion inside the pipe lead for sealing and buffering thermal expansion of the lead lead, and hermetically bonding the pipe lead and the lead lead with the bonding material. The manufacturing method of the compression sealing type airtight terminal made into.

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