CN108020678B

CN108020678B - High-temperature sealing method for transducer electrode of sensitive component of molecular electronic type angular accelerometer

Info

Publication number: CN108020678B
Application number: CN201610960917.5A
Authority: CN
Inventors: 郑辛; 孙荣凯; 王同雷
Original assignee: Beijing Automation Control Equipment Institute BACEI
Current assignee: Beijing Automation Control Equipment Institute BACEI
Priority date: 2016-11-04
Filing date: 2016-11-04
Publication date: 2020-05-15
Anticipated expiration: 2036-11-04
Also published as: CN108020678A

Abstract

The invention belongs to the technical field of measurement, and particularly discloses a high-temperature sealing method for an electrode of a sensitive component converter of a molecular electronic type angular accelerometer. And sealing of different materials is realized through high-temperature sintering sealing of the sensitive component converter and the electrode. The stability of the working performance of the product of the angular accelerometer under different temperature conditions in the actual engineering environment and under the external mechanical environment conditions of vibration and impact is ensured. Multiple times of practice prove that the high-temperature sealing method has obvious effect.

Description

High-temperature sealing method for transducer electrode of sensitive component of molecular electronic type angular accelerometer

Technical Field

The invention belongs to the technical field of measurement, and particularly relates to a method for realizing high-temperature sealing of a sensitive component converter electrode in a molecular electronic type angular accelerometer.

Background

The molecular electronic type angular accelerometer is used for measuring angular acceleration signals of a carrier relative to a corresponding axis, and the working principle of the molecular electronic type angular accelerometer is that the flow of working liquid in a sensitive assembly of the molecular electronic type angular accelerometer causes the transfer of charges at the interface of a conversion device and liquid to form a potential difference. The potential difference between the two ends of the conversion device is measured through the electrodes, electric signals corresponding to external angular acceleration signals are directly obtained, and the electric signals are accumulated and output through the electrodes of the converter.

The sensitive component converter of the molecular electronic type angular accelerometer is a core component for sensing external angular acceleration information, and charges generated by the converter need to be accumulated on the electrodes and output. The converter electrode is one of the components on the sensor structure, and the reliability of the angular accelerometer product in practical engineering application is directly influenced by the firm sealing condition of the converter electrode.

Disclosure of Invention

The invention aims to provide a high-temperature sealing method for a transducer electrode of a sensitive component of a molecular electronic angular accelerometer, which can realize sealing of different materials and ensure stable working performance of a product of the angular accelerometer under different temperature conditions and external mechanical environment conditions of vibration impact.

The technical scheme of the invention is as follows:

a high-temperature sealing method for the transducer electrode of the sensitive component of molecular electronic angular accelerometer includes such steps as

1) The transducer and the electrode are fixed in relative position, specifically

a) Sintering and fixing the converter in the sensitive component cavity;

b) respectively processing two positioning mounting holes with the diameter of 0.8-1.2 mm on the upper surface of the sensitive assembly cavity and the positions at the two sides of the upper end of the converter;

c) inserting two electrodes into the cavity of the sensitive component through the positioning mounting holes respectively;

2) bending and shaping the two electrodes to form a circular ring;

3) high-temperature sealing of electrodes, in particular

a) Putting the sensitive assembly cavity, the converter and the electrode at the outer flame of natural flame for preheating for 5-6 minutes, wherein the flame temperature is 500-550 ℃;

b) respectively sintering two positioning mounting holes on the sensitive component cavity to seal the sensitive component cavity;

4) and annealing the sensitive assembly cavity.

The temperature is 500-600 ℃, and the time is 24-50 hours.

In the high-temperature sealing method for the transducer electrode of the sensitive component of the molecular electronic type angular accelerometer, the steps are as follows: the radius of the circular ring in the step 2) is 4-5 mm.

In the high-temperature sealing method for the transducer electrode of the sensitive component of the molecular electronic type angular accelerometer, the steps are as follows: the sintering temperature in the step 3) is 950-1000 ℃, and the sintering time is 1-1.5 min.

The invention has the following remarkable effects:

in the first step of high-temperature sealing of the electrode, the electrode cannot slide in the cavity of the sensitive component by punching the positioning mounting holes on the glass walls close to the two sides of the sensitive component converter, so that the relative fixation of the electrode and the converter is realized. And the second step realizes the final structural shape of the working state of the electrode. And thirdly, designing technological parameters of a preheating state and a sealing state by comprehensively considering factors of heat conductivity and thermal expansion coefficient, and realizing firm sealing between the metal electrode and the sensitive component cavity made of the glass material and the converter. And fourthly, combining the characteristics of the glass material, designing annealing time and temperature, and ensuring long-term reliability of sealing.

And sealing of different materials is realized through high-temperature sintering sealing of the sensitive component converter and the electrode. The stability of the working performance of the product of the angular accelerometer under different temperature conditions in the actual engineering environment and under the external mechanical environment conditions of vibration and impact is ensured. Multiple times of practice prove that the high-temperature sealing method has obvious effect.

Drawings

FIG. 1 is a schematic diagram of a transducer electrode of a sensing assembly of a molecular electronic angular accelerometer;

in the figure: 1. a sensitive component cavity; 2. a converter; 3. a first electrode; 4. a second electrode; 5. a first mounting location hole; 6. and a second mounting positioning hole.

Detailed Description

The invention is further illustrated by the accompanying drawings and the detailed description.

As shown in figure 1, the parts related to the high-temperature sealing of the transducer electrode of the sensitive component of the molecular electronic type angular accelerometer comprise a sensitive component cavity 1, a transducer 2 and two electrodes 3 and 4. The sensitive component and the converter thereof are made of glass materials, and the electrode is made of metal materials. After the converter 2 is connected with the sensitive component cavity 1, two

mounting positioning holes

5 and 6 are punched at the boundary of the thickness dimension of the sensitive component converter, the first electrode 3 and the second electrode 4 are respectively placed into the cavity along the inner wall of the sensitive component cavity 1 through the first mounting positioning hole 5 and the second mounting positioning hole 6, and the two electrodes 3 and 4 are bent and shaped, so that the electrodes form an approximate annular structure in the sensitive component cavity. The primarily connected sensitive assembly cavity 1, the converter 2 and the electrodes 3 and 4 are uniformly placed at a natural flame outer flame position for preheating for 5-6 minutes, the

positions

5 and 6 of the installation positioning holes of the sensitive assembly cavity 1 are respectively sintered by a glass sintering lamp gun, so that the glass at the

positions

5 and 6 is melted, the two positioning and mounting

holes

5 and 6 are sealed through the melted glass, and the electrodes 3 and 4 are sintered in the positioning and mounting

holes

5 and 6. And (3) putting the sintered sensitive component cavity 1 into a high-temperature annealing furnace for annealing to finish the high-temperature sealing of the sensitive component converter electrode.

The method comprises the following specific steps:

1) the relative position of the converter 2 and the

electrodes

5 and 6 is fixed

Connecting the converter 2 with the sensitive component cavity 1, and sintering and fixing;

two positioning and mounting holes with the diameter of 0.8-1.2 mm, namely a first mounting and positioning hole 5 and a second mounting and positioning hole 6, are respectively processed on the upper surface of the sensitive component cavity 1 and the positions at the two sides of the upper end of the converter 2, the two electrodes (namely the first electrode 3 and the second electrode 4) are respectively inserted into the first mounting and positioning hole 5 and the second mounting and positioning hole 6, and the sensitive component cavity is placed into the cavity along the inner wall of the sensitive component cavity.

2) Electrode bend reshaping

And bending and shaping the first electrode 3 and the second electrode 4 to enable the two electrodes to be butted in the sensitive assembly cavity 1 and to form a circular structure with the radius of 4-5 mm.

3) High temperature sealing of electrodes

Placing the sensitive assembly cavity 1, the converter 2, the first electrode 3 and the second electrode 4 which are preliminarily connected in the steps at the flame temperature of 500-550 ℃ outside natural flame for preheating for 5-6 minutes;

and respectively sintering the positions of the first mounting positioning hole 5 and the second mounting positioning hole 6 of the sensitive component cavity 1 by using a glass sintering lamp gun, melting the glass at the positions of the first mounting positioning hole 5 and the second mounting positioning hole 6, sealing the two

positioning mounting holes

5 and 6 by using the melted glass, and sintering the electrodes 3 and 4 in the

positioning mounting holes

5 and 6 at the same time, wherein the sintering temperature is 950-1000 ℃, and the sintering time is 1 min.

4) Post-sealing annealing treatment

And (3) putting the sintered sensitive component cavity 1 into a high-temperature annealing furnace for annealing treatment to finish the high-temperature sealing of the sensitive component converter electrode. The temperature is 500-600 ℃, and the time is more than 24 hours.

Claims

1. A high-temperature sealing method for a transducer electrode of a sensitive component of a molecular electronic angular accelerometer is characterized by comprising the following steps

1) The converter (2) is fixed relative to the electrodes, in particular

a) Sintering and fixing the converter (2) in the sensitive component cavity (1);

b) respectively processing two positioning mounting holes with the diameter of 0.8-1.2 mm on the upper surface of the sensitive assembly cavity (1) and the positions at the two sides of the upper end of the converter (2);

c) inserting two electrodes into the sensitive assembly cavity (1) through the positioning mounting holes respectively;

2) bending and shaping the two electrodes to form a circular ring;

3) high-temperature sealing of electrodes, in particular

a) Placing the sensitive assembly cavity (1), the converter (2) and the electrode at the outer flame of natural flame for preheating for 5-6 minutes, wherein the flame temperature is 500-550 ℃;

b) respectively sintering two positioning mounting holes on the sensitive component cavity (1) to seal the sensitive component cavity;

4) annealing the sensitive assembly cavity (1);

the temperature is 500-600 ℃, and the time is 24-50 hours;

the electrode is a metal electrode; the sensitive assembly cavity and the converter are made of glass materials.

2. The method for high-temperature sealing of transducer electrodes of a sensitive component of a molecular electronic type angular accelerometer according to claim 1, characterized in that: the radius of the circular ring in the step 2) is 4-5 mm.

3. The method for high-temperature sealing of transducer electrodes of a sensitive component of a molecular electronic type angular accelerometer according to claim 1, characterized in that: the sintering temperature in the step 3) is 950-1000 ℃, and the sintering time is 1-1.5 min.