CN204758259U - Testing arrangement is interfered to striking cable in horizontal dual -port plane - Google Patents
Testing arrangement is interfered to striking cable in horizontal dual -port plane Download PDFInfo
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- CN204758259U CN204758259U CN201520241333.3U CN201520241333U CN204758259U CN 204758259 U CN204758259 U CN 204758259U CN 201520241333 U CN201520241333 U CN 201520241333U CN 204758259 U CN204758259 U CN 204758259U
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Abstract
The utility model provides the utility model discloses a detect plane optical element's the striking cable of horizontal dual -port and interfere testing arrangement, form by big test port and little test port two parts, be divided into big test port module, little test port module, test alignment module, laser lamp -house module and zoom five modules of formation of image module. This interference testing arrangement can realize all bore plane optical element reflection shapes of face, transmission shape of face, the finish material refracting index homogeneity isoparametric of phi 24mm-600mm bore scope and interfere test assay.
Description
Technical field
The utility model relates to striking cable plane interference testing device, a particularly horizontal dual-port striking cable plane interference testing device, can be used for the parameter interference testing analytical equipments such as test φ 600mm bore following planar optical elements reflecting surface shape, transmission plane shape, luminescent material index of refraction homogeneity.
Background technology
Interference checking device reflects the fields such as surface testing, transmission surface testing, optical material quality analysis and optical system evaluation and is all widely used at optical element.Along with developing rapidly of precison optical component technology, adopt interference checking device replace traditional to model, see that the detection methods such as the edge of a knife become the inevitable development trend of future optical element surface testing.Especially along with the development in large-aperture optical field proposes inevitable demand to aperture interferometer pick-up unit.Therefore, in recent years one of Research And Engineeringization emphasis problem just becoming field of optical detection detected is interfered for caliber high-precision face shape.
Adopt the features such as interference checking device carries out optical detection and has noncontact, can analyze, simple operation, but vary due to the kind, size etc. of optical element, interference checking device can not be common to the detection of all optical elements.And the restriction being mainly subject to interference testing bore is analyzed for the isoparametric detection of face shape of planar optical elements, open the interference detect delay of below the φ 150mm bore just carried out both at home and abroad from the eighties in last century, also form following several fixing bore as interference testing devices such as φ 30mm, φ 60mm, φ 100mm, φ 150mm.But for bigbore correlative study again until just there is φ 300mm bore interference checking device before and after 2000, and such proving installation is also limited to the surface figure accuracy of standard reference lens.The domestic report of correlative study so far of aperture interferometer pick-up unit for φ 600mm bore seldom, external also only have the U.S. to have correlative study report at present, but gordian technique especially system integration technology and standard reference lens surface figure accuracy safeguards technique be also under study for action.Pursue φ 600mm heavy caliber interference testing reach high precision, high-resolution while and to take into account the relevant report of small-bore test less.Therefore the research of these related fields becomes one of Major Difficulties of research heavy-calibre planar optical elements test, related developments is also all still underway at home and abroad, adopts dual-port modular construction to realize φ 24mm ~ φ 600mm bore plane component high precision, high resolving power interference testing then rare relevant report.
Utility model content
The purpose of this utility model is, provides a kind of horizontal dual-port Fizeau interference proving installation for detection plane optical element.This interference testing device can provide necessary device for testing and analyzing for parameters such as test planar optical elements reflecting surface shape, transmission plane shape, luminescent material index of refraction homogeneity.This interference testing device, by 5 times of continuous zoom imaging functions of varifocal imaging module, can realize surface testing and the quality of materials analysis of all bore optical elements of φ 24mm ~ 600mm bore scope.
For achieving the above object, the utility model adopts following technical scheme:
A kind of horizontal dual-port plane Fizeau interference proving installation, feature is that it is formed and comprises laser light source module, large test port module, little test port module, varifocal imaging module and test alignment modules:
Described laser light source module comprises standard laser light source and the convex lens focusing objective len group of 632.8nm, is convex lens focusing objective len group and the one 45 ° of dichroic reflector along LASER Light Source output beam direction successively;
Described little test port module is by along light beam working direction the one 45 ° of dichroic reflector successively, 2 45 ° of dichroic reflector, 45 ° of switched mirror, φ 120mm bore convex lens collimator objective group, φ 120mm bore transmission criteria level crossing and φ 120mm bore reflectance standard level crossing are formed, the one 45 ° of described dichroic reflector, the angle of the 2 45 ° of dichroic reflector and 45 ° of switched mirror and light path is 45 °, the numerical aperture of described φ 120mm bore convex lens collimator objective group is equal with the numerical aperture of described convex lens focus objective lens, and the focus of φ 120mm convex lens collimator objective group exports parallel light focusing focus with described convex lens focusing objective len group to described standard laser light source overlaps, described φ 120mm bore transmission criteria level crossing first surface in light beam working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 30nm, this standard flat reference surface is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group, the described first surface of φ 120mm bore reflectance standard level crossing in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 30nm, this φ 120mm bore reflectance standard level crossing is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group, standard interference test chamber is formed with φ 120mm bore transmission criteria level crossing reference surface, tested optical element is placed between the standard flat reference surface of φ 120mm bore transmission criteria level crossing and the non-reflective reference face of φ 120mm bore standard reflection level crossing, realize interference testing,
Described large test port module is by along light path the one 45 ° of dichroic reflector successively, 2 45 ° of dichroic reflector, 45 ° of turnover catoptrons, φ 600mm bore convex lens collimator objective group, φ 600mm bore transmission criteria level crossing and φ 600mm bore reflectance standard level crossing are formed, one 45 ° of dichroic reflector, the angle of the 2 45 ° of dichroic reflector and 45 ° of turnover catoptrons and light path is 45 °, the numerical aperture of described φ 600mm convex lens collimator objective group is equal with the numerical aperture of described convex lens focusing objective len group, and the focus of φ 600mm convex lens collimator objective group overlaps with the focus of described convex lens focusing objective len group, described φ 600mm bore transmission criteria level crossing first surface in light working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 63nm, this standard flat reference surface is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group, the described first surface of φ 600mm bore reflectance standard level crossing in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 63nm, the reflectance standard reference surface of described φ 600mm bore reflectance standard level crossing is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group, standard interference test chamber is formed with the standard flat reference surface of φ 600mm bore transmission criteria level crossing, tested optical elements of large caliber is placed between the standard flat reference surface of φ 600mm bore transmission criteria level crossing and the reflectance standard reference surface of φ 600mm bore reflectance standard level crossing, realize interference testing,
Described little test port and large test port share described varifocal imaging module and test alignment modules, the right to use of large port portlet to varifocal imaging module and test alignment modules is distributed: it is open or block the travel mechanism of described large test port light path away from its direction that 45 ° of described switched mirror have optical axis direction along φ 120mm bore collimator objective group by ° switched mirror of 45 described in movement, when described 45 ° of switched mirror block described large test port light path, carry out portlet test, when large test port light path described in described 45 ° of switched mirror are open, carry out large port test, no matter carry out portlet test or large port test, form at detected element surface, the standard transmission reference face of transmission criteria level crossing and the reflectance standard reference surface of reflectance standard level crossing the interference testing light returned along original optical path,
Described interference testing light returns along original optical path, through the one 45 ° of dichroic reflector after the described the 2 45 ° of dichroic reflector reflection, the first concavees lens successively along this transmitted light path direction, first convex lens, 5 times of zoom lens, varifocal imaging module described in second convex lens and the second concavees lens and CCD are formed, the first described concavees lens, first convex lens form Polaroid camera lens, image planes of this Polaroid camera lens overlap with the front focal plane of described 5 times of zoom lens, CCD imaging lens is formed by the second convex lens and the second concavees lens, described CCD adopts the technical grade high resolution CCD of 1024 × 1024 pixels, described CCD imaging lens is imaged on described CCD target surface, export interference testing image finally by CCD opto-electronic conversion, export interferogram by interpretation and analysis CCD and obtain detected element face graphic data,
Described test alignment modules comprises a mao slide, aims at imaging lens group and is aligned to picture CMOS, described interference testing light returns along original optical path, light path through the 2 45 ° of dichroic reflector is successively described hair slide, aims at imaging lens group and be aligned to picture CMOS, described hair slide is positioned on the focal plane of described φ 600mm bore convex lens collimator objective group and φ 120mm bore convex lens collimator objective group, described aligning imaging lens group and be aligned to picture CMOS to hair slide whole-view field imaging.
The angle of wedge face of described φ 120mm bore transmission criteria level crossing is the angle of wedge of 5 points.
The angle of wedge face of described φ 600mm bore transmission criteria level crossing arranges the angle of wedge of 5 points.
Output wavelength is that to export a beam divergence angle be that the parallel beam of 0.5mrad first forms the certain standard ball ground roll of numerical aperture after convex lens focusing objective len group focuses on for the standard laser light source of 632.8nm, distance certain after focus, through the one 45 ° of dichroic reflector reflection outputting standard spherical wave, so far forms standard laser light source module by standard laser light source, convex lens focusing objective len group and the one 45 ° of dichroic reflector.
The standard ball ground roll that standard laser light source module exports arrive after being exported by the one 45 ° of dichroic reflector the 2 45 ° of dichroic reflector beam direction is transferred 90 ° backward before arrive 45 ° of switched mirror and transfer again 90 ° and arrive forward portlet convex lens collimator objective groups.The numerical aperture arranging portlet convex lens collimator objective group is equal with the numerical aperture of convex lens focus objective lens, and the focus of portlet convex lens collimator objective group exports parallel light focusing focus with convex lens focusing objective len group to standard sources overlaps.By above-mentioned setting, after light beam is by portlet convex lens collimator objective group, form portlet standard parallel light, directional light wavefront error PV value is better than 30nm.The standard parallel light of portlet arrives portlet reflectance standard level crossing through portlet transmission criteria level crossing forward, wherein portlet transmission criteria level crossing first surface in light working direction is angle of wedge face, second is standard flat reference surface and surface figure accuracy PV value is better than 30nm, vertical and the portlet standard parallel light optical axis in canonical reference face, the first surface of portlet reflectance standard level crossing in light working direction is reflectance standard reference surface and surface figure accuracy PV value is better than 30nm, it is also perpendicular to portlet standard parallel light optical axis, itself and portlet transmission criteria level crossing reference surface is made to form standard interference test chamber, tested optical element is placed in and realizes interference testing between portlet transmission criteria Plane reference face and standard reflection flat mirror reflects reference surface and produce interfering test pattern.Portlet transmission criteria level crossing first surface angle of wedge face arranges the angle of wedge of 5 points, makes transmission criteria level crossing self two faces not form self-interference and disturbed test.So far light beam working direction is pressed successively by the one 45 ° of dichroic reflector, the 2 45 ° of dichroic reflector, 45 ° of switched mirror, portlet convex lens collimator objective groups, portlet transmission criteria level crossing, portlet reflectance standard level crossing forms little test port module jointly.
When removing 45 ° of switched mirror along portlet convex lens collimator objective group optical axis direction near its direction, the standard ball ground roll that standard laser light source module exports is arrived after being exported by the one 45 ° of dichroic reflector after the 2 45 ° of dichroic reflector turns to 90 ° and arrives 45 ° of turnover catoptrons, and transferring 90 ° through 45 ° of turnover catoptrons arrives forward large port convex lens collimator objective group again.The numerical aperture arranging large port convex lens collimator objective group is also equal with the numerical aperture of convex lens focusing objective len group, and the focus of large port convex lens collimator objective group also exports parallel light focusing focus with convex lens focusing objective len group to standard sources overlaps.By above-mentioned setting, after light beam is by large port convex lens collimator objective group, form the standard parallel light of large port, directional light wavefront error PV value is better than 63nm.The standard parallel light of large port arrives reflectance standard level crossing through large port transmission criteria level crossing forward, wherein large port transmission criteria level crossing first surface in light working direction is angle of wedge face, second is standard flat reference surface and surface figure accuracy PV value is better than 63nm, canonical reference face is perpendicular to large port standard parallel light optical axis, the first surface of large port reflectance standard level crossing in light working direction is reflectance standard reference surface and surface figure accuracy PV value is better than 63nm, it is also perpendicular to large port standard parallel light optical axis, itself and large port transmission criteria level crossing canonical reference face is made to form standard interference test chamber.Tested optical elements of large caliber is placed in and realizes interference testing between φ 600mm bore transmission criteria Plane reference face and standard reflection level crossing reference surface and produce interfering test pattern.Large port transmission criteria level crossing first surface angle of wedge face arranges the angle of wedge of 5 points, makes transmission criteria level crossing self two faces not form self-interference and disturbed test.Press light beam working direction successively by the one 45 ° of dichroic reflector, the 2 45 ° of dichroic reflector, 45 ° of turnover catoptrons, large port convex lens collimator objective groups equally, large port transmission criteria level crossing, large port reflectance standard level crossing forms large test port module jointly.
Little test port and large test port share varifocal imaging module and test alignment modules, carry out allocated size port to varifocal imaging module and the right to use of testing alignment modules by mobile 45 ° of switched mirror.When mobile 45 ° of switched mirror shift out large test port light path along portlet collimator objective group optical axis direction near its direction, the interference testing light of large test port, back through after 45 ° of turnover catoptrons and the 2 45 ° of dichroic reflector, enters varifocal imaging module through the one 45 ° of dichroic reflector after part reflection turns to 90 °.First pass through the Polaroid camera lens be made up of a slice concavees lens and a slice convex lens successively after interferogram enters varifocal imaging module along light working direction, interfering test pattern is imaged on once practising physiognomy.Arranging once practises physiognomy overlaps with 5 times of zoom lens front focal planes, formed interference image of once practising physiognomy is entering CCD imaging lens head group by 5 times of zoom lens output directional light interferograms, CCD imaging lens head group forms by along a slice convex lens in light working direction and a slice concavees lens successively, and CCD adopts the technical grade high resolution CCD of 1024 × 1024 pixels.Namely interferogram is practised physiognomy on CCD target surface by being imaged on secondary after CCD imaging lens head group, exports can show and analyzable interference testing image finally by CCD opto-electronic conversion, by interpretation with analyze CCD and export interferogram and obtain detected element face graphic data.Large test port maximum caliber is less than for detected element bore, interfering test pattern can be made to realize 1 ~ 5 times of continuous zoom by regulating zoom lens, in other words minimum is that the optical element of portlet bore can pass through maximum 5 times of zooms, realize the high resolving power interference image being full of CCD target surface when large port is tested equally, realize from portlet bore to the high resolving power interference testing of large port bore scope at large test port.Here varifocal imaging module is formed by Polaroid camera lens, zoom lens and CCD imaging lens and imaging CCD successively.When large test port test, detected element surface, the light of standard transmission reference mirror surface and standard reflection mirror surface reflection arrives the 2 45 ° of dichroic reflector back through large collimating mirror group through 45 ° of turnover catoptrons, part reflection enters varifocal imaging module and realizes interference image output, a part of light therethrough the 2 45 ° of dichroic reflector enters test alignment modules in addition, this part light arrives the hair slide be placed on large collimator objective focal plane after by the 2 45 ° of dichroic reflector, hair slide is focused to focus that each face aforementioned is corresponding respectively.Install after hair slide and aim at imaging lens group and be aligned to picture CMOS, to hair slide whole-view field imaging, then can see from CMOS output image the focus point being in all test lead planes within alignment angle scope and returning.Its reference surface reflect focalization point is made to be in the middle of mao slide visual field by adjustment criteria transmission reference mirror angle, then regulate other testing element angles of test lead that its test surfaces reflect focalization point is overlapped with reference surface reflect focalization point, realize test and aim at adjustment.By arranging the 2 45 ° of dichroic reflector and hair slide bore, and aim at cmos imaging mirror group field angle, can realize test lead maximum ± Large visual angle of 1 ° aims at.Here test alignment modules is formed by the 2 45 ° of dichroic reflector, hair slide, aligning imaging lens and aligning CMOS successively.
When mobile 45 ° of switched mirror move into large test port light path along portlet collimator objective group optical axis direction away from its direction, little test port is returned test light and enter varifocal imaging module and test alignment modules by 45 ° of switched mirror reflections, the interfering test pattern realizing little test port exports and tests to aim at and regulates.Same by adjustment 5 times of zoom lens, small-bore detected element can be realized in the unified high resolving power test of CCD.In conjunction with large test port testing beam diameter scope, the utility model device achieves the high resolving power interference testing of unified scope from small to large.
Technique effect of the present utility model:
The utility model horizontal dual-port plane Fizeau interference proving installation is that the parameters such as test planar optical elements reflecting surface shape, transmission plane shape, luminescent material index of refraction homogeneity provide necessary device for testing and analyzing.This interference testing device, by 5 times of continuous zoom imaging functions of varifocal imaging module, can realize the parameter interference testing analysis such as all bore planar optical elements reflecting surface shapes, transmission plane shape, luminescent material index of refraction homogeneity of φ 24mm ~ 600mm bore scope.
Accompanying drawing explanation
Fig. 1 is the utility model horizontal dual-port plane Fizeau interference proving installation index path
Embodiment
Below in conjunction with accompanying drawing, the utility model is elaborated, but protection domain of the present utility model should do not limited with this.
First refer to Fig. 1, Fig. 1 is horizontal dual-port plane Fizeau interference proving installation light path schematic diagram, as seen from the figure, the utility model horizontal dual-port plane Fizeau interference proving installation, forms and comprises laser light source module, large test port module, little test port module, varifocal imaging module and test alignment modules:
Described laser light source module comprises standard laser light source 233 and the convex lens focusing objective len group 232 of 632.8nm, is convex lens focusing objective len group 232 and the one 45 ° of dichroic reflector 231 along standard laser light source 233 output beam direction successively;
Described little test port module is by along light beam working direction the one 45 ° of dichroic reflector 231 successively, 2 45 ° of dichroic reflector 221, 45 ° of switched mirror 214, φ 120mm bore convex lens collimator objective group 213, φ 120mm bore transmission criteria level crossing 212 and φ 120mm bore reflectance standard level crossing 211 are formed, the one 45 ° of described dichroic reflector 231, 2 45 ° of dichroic reflector 221 and 45 ° of switched mirror 114 are 45 ° with the angle of light path, the numerical aperture of described φ 120mm bore convex lens collimator objective group 213 is equal with the numerical aperture of described convex lens focusing objective len group 232, and the focus of φ 120mm bore convex lens collimator objective group 213 exports parallel light focusing focus with described convex lens focusing objective len group 232 to described standard laser light source 233 overlaps, described φ 120mm bore transmission criteria level crossing 212 first surface in light beam working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 30nm, this standard flat reference surface is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group 213, the described first surface of φ 120mm bore reflectance standard level crossing 211 in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 30nm, this φ 120mm bore reflectance standard level crossing 211 is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group 213, standard interference test chamber is formed with φ 120mm bore transmission criteria level crossing reference surface, tested optical element is placed between the standard flat reference surface of φ 120mm bore transmission criteria level crossing and the non-reflective reference face of φ 120mm bore standard reflection level crossing 211, realize interference testing,
Described large test port module is by along light path the one 45 ° of dichroic reflector 231 successively, 2 45 ° of dichroic reflector 221, 45 ° of turnover catoptrons 104, φ 600mm bore convex lens collimator objective group 103, φ 600mm bore transmission criteria level crossing 102 and φ 600mm bore reflectance standard level crossing 101 are formed, one 45 ° of dichroic reflector 231, 2 45 ° of dichroic reflector 221 and 45 ° of turnover catoptrons 104 are 45 ° with the angle of light path, the numerical aperture of described φ 600mm bore convex lens collimator objective group 103 is equal with the numerical aperture of described convex lens focusing objective len group 232, and the focus of φ 600mm bore convex lens collimator objective group 103 overlaps with the focus of described convex lens focusing objective len group 232, described φ 600mm bore transmission criteria level crossing 102 first surface in light working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 63nm, this standard flat reference surface is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group 103, the described first surface of φ 600mm bore reflectance standard level crossing 101 in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 63nm, the reflectance standard reference surface of described φ 600mm bore reflectance standard level crossing 101 is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group 103, standard interference test chamber is formed with the standard flat reference surface of φ 600mm bore transmission criteria level crossing 102, tested optical elements of large caliber is placed between the standard flat reference surface of φ 600mm bore transmission criteria level crossing and the reflectance standard reference surface of φ 600mm bore reflectance standard level crossing, realize interference testing,
Described little test port and large test port share described varifocal imaging module and test alignment modules, the right to use of large port portlet to varifocal imaging module and test alignment modules is distributed: it is open or block the travel mechanism of described large test port light path away from its direction that 45 ° of described switched mirror 214 have optical axis direction along φ 120mm bore convex lens collimator objective group 213 by ° switched mirror of 45 described in movement 214, when described 45 ° of switched mirror 214 block described large test port light path, carry out portlet test, when large test port light path described in described 45 ° of switched mirror 214 are open, carry out large port test, no matter carry out portlet test or large port test, form at detected element surface, the standard transmission reference face of transmission criteria level crossing and the reflectance standard reference surface of reflectance standard level crossing the interference testing light returned along original optical path,
Described interference testing light returns along original optical path, through the one 45 ° of dichroic reflector 231 after the described the 2 45 ° of dichroic reflector 221 reflects, the first concavees lens 241 successively along this transmitted light path direction, first convex lens 242, 5 times of zoom lens 243, varifocal imaging module described in second convex lens 244 and the second concavees lens 245 and CCD246 are formed, the first described concavees lens 241, first convex lens 242 form Polaroid camera lens, image planes of this Polaroid camera lens overlap with the front focal plane of described 5 times of zoom lens 243, described CCD imaging lens is made up of the second convex lens 244 and the second concavees lens 245, described CCD adopts the technical grade high resolution CCD of 1024 × 1024 pixels, described CCD imaging lens is imaged on described CCD target surface, export interference testing image finally by CCD opto-electronic conversion, export interferogram by interpretation and analysis CCD and obtain detected element face graphic data,
Described test alignment modules comprises mao slide 222, aims at imaging lens group 223 and is aligned to picture CMOS224, described interference testing light returns along original optical path, light path through the 2 45 ° of dichroic reflector 221 is successively described hair slide 222, aims at imaging lens group 223 and be aligned to picture CMOS224, described hair slide 222 is positioned on the focal plane of described φ 600mm bore convex lens collimator objective group 103 and φ 120mm bore convex lens collimator objective group 213, described aligning imaging lens group 223 and be aligned to picture CMOS224 to hair slide 222 whole-view field imaging.
In Fig. 1, output wavelength is that to export a beam divergence angle be that the parallel beam of 0.5mrad first forms the standard ball ground roll that numerical aperture is F5 after convex lens focusing objective len group 232 focuses on for the standard laser light source 233 of 632.8nm, and distance certain after focus reflects outputting standard spherical wave through the one 45 ° of dichroic reflector 231.Convex lens focusing objective len group 232 focuses on face plating 50% reflection that the standard ball ground roll formed arrives the one 45 ° of dichroic reflector 231, the reflective membrane of 50% transmission, the anti-reflection film that another side plating residue emissivity is less than 0.5%.In the utility model, the reference wavelength of all coated elements is standard sources output wavelength 632.8nm.
One 45 ° of dichroic reflector 231 reflects outputting standard spherical wave and arrives the 2 45 ° of dichroic reflector 221, beam direction is transferred 90 ° backward before arrive 45 ° of switched mirror 214, transfer 90 ° again and arrive forward portlet φ 120mm bore convex lens collimator objective group 213, bore is φ 120mm.Here the one 45 ° of dichroic reflector 231 of the 2 45 ° of dichroic reflector 221 reflects outputting standard spherical wave arrival face plating 70% reflection, the spectro-film of 30% transmission, the anti-reflection film that another side plating residual reflectance is less than 0.5%.The numerical aperture arranging portlet convex lens collimator objective group 231 is equal with the numerical aperture of convex lens focusing objective len group 232 is F5, and the focus of portlet convex lens collimator objective group 214 and convex lens focusing objective len group 232 pairs of standard laser light sources 233 export light focused spot overlaps.By above-mentioned setting, the standard parallel light wavefront error PV that portlet convex lens collimator objective 213 exports reaches 30nm.The standard parallel light that φ 120mm bore convex lens collimator objective group 213 exports arrives portlet reflectance standard level crossing 211 through portlet transmission criteria level crossing 212 forward, and portlet transmission criteria level crossing 212 and reflectance standard level crossing 211 bore are φ 120mm here.Portlet transmission criteria level crossing 212 first surface in light working direction is angle of wedge face.Second is canonical reference face and surface figure accuracy PV value is better than 30nm, canonical reference face is perpendicular to φ 120mm bore convex lens collimator objective group 213 optical axis, the first surface of portlet reflectance standard level crossing 211 in light working direction is reflectance standard reference surface and surface figure accuracy PV value is better than 30nm, it is also perpendicular to portlet φ 120mm bore convex lens collimator objective group 213 optical axis, itself and portlet transmission criteria level crossing 212 canonical reference face is made to form standard interference test chamber, tested optical element is placed between portlet transmission criteria level crossing 212 reference surface and standard reflection level crossing 211 non-reflective reference face, realize interference testing and produce interfering test pattern.Portlet transmission criteria level crossing 212 first surface angle of wedge face arranges the angle of wedge of 5 points, makes transmission criteria level crossing self two faces not form self-interference and disturbed test.So far light beam working direction is pressed successively by the one 45 ° of dichroic reflector the 231, the 2 45 ° of dichroic reflector 221,45 ° of switched mirror 214, φ 120mm bore convex lens collimator objective group 213, portlet transmission criteria level crossing 212, portlet reflectance standard level crossing 211 is the little test port module of composition jointly.
When along φ 120mm bore convex lens collimator objective group 213 optical axis direction, it removes 45 ° of switched mirror 214 near direction, the standard ball ground roll of the 2 45 ° of dichroic reflector 221 reflection arrives 45 ° of turnover catoptrons 104, and transferring 90 ° through 45 ° of turnover catoptrons 104 arrives forward φ 600mm bore convex lens collimator objective groups 103.The numerical aperture arranging φ 600mm bore convex lens collimator objective group is also F5, and bore is φ 600mm.The focus of φ 600mm bore convex lens collimator objective group 103 also exports light focused spot with convex lens focusing objective len group 232 pairs of standard laser light sources 233 and overlaps.By above-mentioned setting, be better than 63nm by the standard parallel light wavefront error PV value exported after φ 600mm bore convex lens collimator objective group 103.φ 600mm bore convex lens collimator objective group 103 outputting standard directional light arrives large port reflectance standard level crossing 101 through large port transmission criteria level crossing 102 forward, wherein φ 600mm bore transmission criteria level crossing 102 first surface in light working direction is angle of wedge face, second is standard flat reference surface and surface figure accuracy PV value is better than 63nm, and canonical reference face is perpendicular to φ 600mm bore convex lens collimator objective group 103 optical axis.The first surface of large port reflectance standard level crossing 101 in light working direction is reflectance standard reference surface and surface figure accuracy PV value is better than 63nm, it also perpendicular to φ 600mm bore convex lens collimator objective group 103 optical axis, makes itself and large port transmission criteria level crossing 102 reference surface form standard interference test chamber.Tested optical elements of large caliber is placed in and realizes interference testing between large port transmission criteria plane 102 reference surface and standard reflection level crossing 101 non-reflective reference face and produce interfering test pattern.Large port transmission criteria level crossing 102 first surface angle of wedge face arranges the angle of wedge of 5 points, makes transmission criteria level crossing self two faces not form self-interference and disturbed test.Press light beam working direction successively by the one 45 ° of dichroic reflector the 231, the 2 45 ° of dichroic reflector 221,45 ° of turnover catoptrons 104, large port φ 600mm bore convex lens collimator objective group 103 equally, large port transmission criteria level crossing 102, large port reflectance standard level crossing 101 is the large test port module of composition jointly.
Little test port and large test port share varifocal imaging module and test alignment modules, carry out allocated size port to varifocal imaging module and the right to use of testing alignment modules by mobile 45 ° of switched mirror 214.When mobile 45 ° of switched mirror 214, along portlet convex lens collimator objective group 214 optical axis direction, it shifts out large test port light path near direction, the interference testing light of large test port oppositely reflects through 45 ° of turnover catoptrons 104, enters varifocal imaging module after 50% light reflection turns to 90 ° after arriving the 2 45 ° of dichroic reflector 221 by the one 45 ° of dichroic reflector 231.After interference testing light enters varifocal imaging module by along in light working direction first by the Polaroid camera lens that is made up of a slice concavees lens 214 and a slice convex lens group 242 successively, interfering test pattern is imaged on once practise physiognomy, arranging once practises physiognomy overlaps with 5 times of zoom lens 243 front focal planes, formed interference image of once practising physiognomy enters CCD imaging lens head group exporting parallel interferogram by 5 times of zoom lens 243, CCD imaging lens head group forms along light working direction forms 245 by a slice convex lens 244 and a slice concavees lens successively, sampling CCD246 adopts the technical grade high resolution CCD of 1024 × 1024 pixels.Namely interferogram is practised physiognomy on CCD246 target surface by being imaged on secondary after CCD imaging lens head group, export finally by CCD246 opto-electronic conversion and can to show and can the test interference image of analysis, by interpretation with analyze CCD246 and export interferogram and obtain detected element face graphic data.Detected element bore is less than large test port maximum caliber φ 600mm's, test interferogram can be made to realize 1 ~ 5 times of continuous zoom by regulating zoom lens 243, in other words minimum is that the optical element of portlet bore φ 120mm can pass through maximum 5 times of zooms, realize the high resolving power interference testing being full of CCD246 target surface when large port is tested equally, achieve the high resolving power interference testing of the unified scope of φ 120mm ~ 600mm at large test port.Here varifocal imaging module is formed by Polaroid camera lens 241 and 242, zoom lens 243, CCD imaging lens head group 244 and 245 and image-forming assembly CCD246 successively.When large test port test, detected element is surperficial, standard transmission reference mirror 102 is surperficial and the light of standard reflection mirror 101 reference surface reflection is reverse once after excessive collimating mirror group 103,45 ° of turnover catoptrons 104 arrive the 2 45 ° of dichroic reflector 221, has 50% light reflection to enter varifocal imaging module and realizes interference image output.Other 50% light therethrough the 2 45 ° of dichroic reflector 221 enters test alignment modules, this part light, being arrived the hair slide 222 be placed on φ 600mm bore convex lens collimator objective group 103 focal plane afterwards by the 2 45 ° of dichroic reflector 221, hair slide 222 focuses on focus that each face aforementioned is corresponding respectively.Install after hair slide 222 and aim at imaging lens group 223 and be aligned to picture CMOS224, to hair slide 222 whole-view field imaging, then can see from CMOS224 output image the focus point being in all test lead planes within alignment angle scope and returning.Its reference surface reflect focalization point is made to be in the middle of mao slide 222 visual field by adjustment criteria transmission reference mirror 102 angle, then regulate other testing element angles of test lead that its test surfaces reflect focalization point is overlapped with reference surface reflect focalization point, realize test and aim at adjustment.Arranging the 2 45 ° of dichroic reflector 221 bore is φ 110mm, and arranging mao slide 222 bore is φ 80mm, arranges to aim at imaging lens group 223 field angle and be ± 1 °, can realize test lead maximum ± the Large visual angle aligning of 1 °.Here successively by the 2 45 ° of dichroic reflector 221, hair slide 222, aim at imaging lens 223 and be aligned to and jointly form test alignment modules as CMOS224.
When mobile 45 ° of switched mirror 214, along portlet convex lens collimator objective group 214 optical axis direction, it moves into large test port light path away from direction, make little test port return test light and enter varifocal imaging module and test alignment modules through 45 ° of switched mirror 214 reflections, the interfering test pattern realizing little test port exports and tests to aim at and regulates.Same by adjustment 5 times of zoom lens 243, the high resolving power test of minimum φ 24mm bore detected element in CCD is unified can be realized.Again in conjunction with large test port testing beam diameter scope, the utility model device can realize the parameter interference testing analysis such as all bore planar optical elements reflecting surface shapes, transmission plane shape, luminescent material index of refraction homogeneity of the unified scope of φ 24mm ~ φ 600mm.
Claims (3)
1. a horizontal dual-port plane Fizeau interference proving installation, is characterised in that it is formed and comprises laser light source module, large test port module, little test port module, varifocal imaging module and test alignment modules:
Described laser light source module comprises standard laser light source (233) and the convex lens focusing objective len group (232) of 632.8nm, is convex lens focusing objective len group (232) and the one 45 ° of dichroic reflector (231) along LASER Light Source (233) output beam direction successively;
Described little test port module is by along light beam working direction the one 45 ° of dichroic reflector (231) successively, 2 45 ° of dichroic reflector (221), 45 ° of switched mirror (214), φ 120mm bore convex lens collimator objective group (213), φ 120mm bore transmission criteria level crossing (212) and φ 120mm bore reflectance standard level crossing (211) are formed, the one 45 ° of described dichroic reflector (231), 2 45 ° of dichroic reflector (221) and 45 ° of switched mirror (114) are 45 ° with the angle of light path, the numerical aperture of described φ 120mm bore convex lens collimator objective group (213) is equal with the numerical aperture of described convex lens focusing objective len group (232), and the focus of φ 120mm bore convex lens collimator objective group (213) exports parallel light focusing focus with described convex lens focusing objective len group (232) to described standard laser light source (233) overlaps, described φ 120mm bore transmission criteria level crossing (212) first surface in light beam working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 30nm, this standard flat reference surface is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group (213), the described first surface of φ 120mm bore reflectance standard level crossing (211) in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 30nm, this φ 120mm bore reflectance standard level crossing (211) is perpendicular to the optical axis of φ 120mm bore convex lens collimator objective group (213), standard interference test chamber is formed with φ 120mm bore transmission criteria level crossing reference surface, between the standard flat reference surface that tested optical element is placed in φ 120mm bore transmission criteria level crossing and the non-reflective reference face of φ 120mm bore standard reflection level crossing (211), realize interference testing,
Described large test port module is by along light path the one 45 ° of dichroic reflector (231) successively, 2 45 ° of dichroic reflector (221), 45 ° of turnover catoptrons (104), φ 600mm bore convex lens collimator objective group (103), φ 600mm bore transmission criteria level crossing (102) and φ 600mm bore reflectance standard level crossing (101) are formed, one 45 ° of dichroic reflector (231), 2 45 ° of dichroic reflector (221) and 45 ° of turnover catoptrons (104) are 45 ° with the angle of light path, the numerical aperture of described φ 600mm bore convex lens collimator objective group (103) is equal with the numerical aperture of described convex lens focusing objective len group (232), and the focus of φ 600mm bore convex lens collimator objective group (103) overlaps with the focus of described convex lens focusing objective len group (232), described φ 600mm bore transmission criteria level crossing (102) first surface in light working direction is angle of wedge face, second is standard flat reference surface, and surface figure accuracy PV value is better than 63nm, this standard flat reference surface is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group (103), the described first surface of φ 600mm bore reflectance standard level crossing (101) in light working direction is reflectance standard reference surface, and surface figure accuracy PV value is better than 63nm, the reflectance standard reference surface of described φ 600mm bore reflectance standard level crossing (101) is perpendicular to the optical axis of φ 600mm bore convex lens collimator objective group (103), standard interference test chamber is formed with the standard flat reference surface of φ 600mm bore transmission criteria level crossing (102), tested optical elements of large caliber is placed between the standard flat reference surface of φ 600mm bore transmission criteria level crossing and the reflectance standard reference surface of φ 600mm bore reflectance standard level crossing, realize interference testing,
Described little test port and large test port share described varifocal imaging module and test alignment modules, the right to use of large port portlet to varifocal imaging module and test alignment modules is distributed: it is open or block the travel mechanism of described large test port light path away from its direction that 45 ° of described switched mirror (214) have optical axis direction along φ 120mm bore convex lens collimator objective group (213) by ° switched mirror of 45 described in movement (214), when described 45 ° of switched mirror (214) block described large test port light path, carry out portlet test, when large test port light path described in described 45 ° of switched mirror (214) are open, carry out large port test, no matter carry out portlet test or large port test, form at detected element surface, the standard transmission reference face of transmission criteria level crossing and the reflectance standard reference surface of reflectance standard level crossing the interference testing light returned along original optical path,
Described interference testing light returns along original optical path, through the one 45 ° of dichroic reflector (231) after the described the 2 45 ° of dichroic reflector (221) reflection, along the first concavees lens (241) successively of the optical path direction after this transmission, first convex lens (242), 5 times of zoom lens (243), varifocal imaging module described in second convex lens (244) and the second concavees lens (245) and CCD (246) are formed, described the first concavees lens (241), first convex lens (242) form Polaroid camera lens, image planes of this Polaroid camera lens overlap with the front focal plane of described 5 times of zoom lens (243), described the second convex lens (244) and the second concavees lens (245) form CCD imaging lens jointly, the object plane of this CCD imaging lens overlaps with the outgoing image planes of described 5 times of zoom lens (243), described CCD adopts the technical grade high resolution CCD of 1024 × 1024 pixels, described CCD imaging lens is imaged on described CCD target surface, export interference testing image finally by CCD opto-electronic conversion, export interferogram by interpretation and analysis CCD and obtain detected element face graphic data,
Described test alignment modules comprises a mao slide (222), aim at imaging lens group (223) and be aligned to picture CMOS (224), described interference testing light returns along original optical path, it light path through the 2 45 ° of dichroic reflector (221) is successively described hair slide (222), aim at imaging lens group (223) and be aligned to picture CMOS (224), described hair slide (222) is positioned on the focal plane of described φ 600mm bore convex lens collimator objective group (103) and φ 120mm bore convex lens collimator objective group (213), described aligning imaging lens group (223) and be aligned to picture CMOS (224) to hair slide (222) whole-view field imaging.
2. horizontal dual-port plane Fizeau interference proving installation according to claim 1, is characterized in that the angle of wedge face of described φ 120mm bore transmission criteria level crossing is the angle of wedge of 5 points.
3. horizontal dual-port plane Fizeau interference proving installation according to claim 1 and 2, is characterized in that the angle of wedge face of described φ 600mm bore transmission criteria level crossing arranges the angle of wedge of 5 points.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN108036738A (en) * | 2017-12-18 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of method that spherical mirror surface type detection is carried out using horizontal interferometer |
| CN108931189A (en) * | 2018-10-09 | 2018-12-04 | 上海乾曜光学科技有限公司 | Double vision field interferometer |
| CN109060316A (en) * | 2018-10-09 | 2018-12-21 | 上海乾曜光学科技有限公司 | The discrete zooming system of interferometer |
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2015
- 2015-04-20 CN CN201520241333.3U patent/CN204758259U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN105675262B (en) * | 2016-01-14 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | The high depth of parallelism wavefront of optical components detection device of heavy caliber |
| CN108036738A (en) * | 2017-12-18 | 2018-05-15 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of method that spherical mirror surface type detection is carried out using horizontal interferometer |
| CN108931189A (en) * | 2018-10-09 | 2018-12-04 | 上海乾曜光学科技有限公司 | Double vision field interferometer |
| CN109060316A (en) * | 2018-10-09 | 2018-12-21 | 上海乾曜光学科技有限公司 | The discrete zooming system of interferometer |
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