CN204694732U - Board probe more changing device - Google Patents
Board probe more changing device Download PDFInfo
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- CN204694732U CN204694732U CN201520351706.2U CN201520351706U CN204694732U CN 204694732 U CN204694732 U CN 204694732U CN 201520351706 U CN201520351706 U CN 201520351706U CN 204694732 U CN204694732 U CN 204694732U
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- probe
- column
- connector
- cross bar
- syringe
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- 239000000523 sample Substances 0.000 title claims abstract description 153
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000009434 installation Methods 0.000 abstract description 9
- 238000011900 installation process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 11
- 238000012856 packing Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 230000007306 turnover Effects 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000006378 damage Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 230000000451 tissue damage Effects 0.000 description 1
- 231100000827 tissue damage Toxicity 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
The utility model provides a kind of board probe more changing device, comprising: pedestal, the first column, and described first uprights vertical is fixed on the upper surface of described pedestal; First connector, described first column is through described first connector; First cross bar; Second connector, described first cross bar is through described second connector; Second column, described second column is connected with described second connector; Second cross bar, described second cross bar is connected with described joint among three members and one first probe suction means; 3rd column, described 3rd column is connected with described second connector, and described 3rd column is through one the 4th connector; And the 3rd cross bar, described 3rd cross bar is connected with described 4th connector and one second probe suction means.In installation process, be mechanical operation, the probe of described probe can not meet other article because of the hand shaking of operating personnel is dynamic, ensure that the safety of described probe, also improves installation accuracy.
Description
Technical field
The utility model relates to IC manufacturing field, especially a kind of board probe more changing device.
Background technology
The probe of AFM (Atomic Force Microscope, atomic force microscope) board needs periodic replacement, and the major way changed at present is changed by mode manually.
In the process of transport; described probe can not be damaged owing to encountering the lid of described packing box to protect described probe; when described probe is in packing box; the back side of described probe upward; so when using described probe; need described probe turn-over, that is make facing up of described probe, and then described probe is placed in needle tray that probe box specifies.
In Renewal process manually, the mode of general employing tweezers gripping, described Probe clip takes out by artificial exactly tweezers by described probe from packing box, then turn-over, needs to pinch tweezers with hand always, and, to ensure that in the process of gripping the probe of described probe can not meet anything, once because hand shaking or other reasons make described probe meet other thing, namely described probe can damage and can not use, and namely described probe cancels.And described probe is being put into the process of needle tray, in the process of putting, manually there is the dead angle of putting, the position easily making described probe place is cheap, thus causes probe failure described in board automatic sucking, and installation accuracy is not high.
Utility model content
The purpose of this utility model is to provide a kind of board probe more changing device, causes tissue damage to solve and installs failure and the not high problem of installation accuracy in manual probe Renewal process.
In order to achieve the above object, the utility model provides a kind of board probe more changing device, comprising:
Pedestal;
First column, described first uprights vertical is fixed on the upper surface of described pedestal;
First connector, described first column is through described first connector, and described first connector can slide along described first column and rotate around described first column;
First cross bar, one end of described first cross bar is connected with described first connector, and the other end is connected with a bearing stage;
Second connector, described first cross bar is through described second connector, and described second connector can slide along described first cross bar and rotate around described first cross bar;
Second column, one end of described second column is connected with described second connector, and described second column is through a joint among three members, and described joint among three members can be slided along described second column and rotate around described second column;
Second cross bar, one end of described second cross bar is connected with described joint among three members, and the other end is connected with one first probe suction means;
3rd column, one end of described 3rd column is connected with described second connector, and described 3rd column is through one the 4th connector, and described 4th connector can slide along described 3rd column and rotate around described 3rd column; And
3rd cross bar, one end of described 3rd cross bar is connected with described 4th connector, and the other end is connected with one second probe suction means.
Preferably, in above-mentioned board probe more changing device, described first cross bar is parallel with the upper surface of described pedestal.
Preferably, in above-mentioned board probe more changing device, described second cross bar is parallel with the upper surface of described pedestal.
Preferably, in above-mentioned board probe more changing device, described 3rd cross bar is parallel with the upper surface of described pedestal.
Preferably, in above-mentioned board probe more changing device, described second column is vertical with described first cross bar.
Preferably, in above-mentioned board probe more changing device, described second cross bar and described second uprights vertical, described 3rd cross bar and described 3rd uprights vertical.
Preferably, in above-mentioned board probe more changing device, described second column and described 3rd column are on same straight line.
Preferably, in above-mentioned board probe more changing device, described first probe suction means comprises one first syringe, and the syringe needle place of described first syringe arranges one first suction nozzle, and the inwall of described first suction nozzle side is connected with the promotion valve of described first syringe.
Preferably, in above-mentioned board probe more changing device, the inwall of described first suction nozzle side is connected by one first spring with the promotion valve of described first syringe.
Preferably, in above-mentioned board probe more changing device, described first suction nozzle is towards described bearing stage, and the promotion valve of described first syringe deviates from described bearing stage.
Preferably, in above-mentioned board probe more changing device, described second probe suction means comprises one second syringe, and the syringe needle place of described second syringe arranges one second suction nozzle, and the inwall of described second suction nozzle side is connected with the promotion valve of described second syringe.
Preferably, in above-mentioned board probe more changing device, the inwall of described second suction nozzle side is connected by one second spring with the promotion valve of described second syringe.
Preferably, in above-mentioned board probe more changing device, described second suction nozzle is towards described bearing stage, and the promotion valve of described second syringe deviates from described bearing stage.
The board probe provided at the utility model is more in changing device, the packing box of probe is placed on described bearing stage, described probe drawn by described first probe suction means, then described first connector is made to rotate around described second column, described second cross bar and described first probe suction means is driven to rotate, described 4th connector is rotated around described 3rd column, described 3rd cross bar and described second probe suction means is driven to rotate, make described first probe suction means relative with described second probe suction means, and by described second connector moving up and down on described second column, described 4th connector moving up and down on described 3rd column, adjust the distance between described first probe suction means and described second probe suction means.Then the described probe on described first probe suction means drawn by described second probe suction means, completes the turn-over of described probe.Remove the packing box on described bearing stage again, probe box is fixed on described bearing stage, adjust described second connector, described joint among three members and described 4th connector again, described probe is aimed at the needle tray in described probe box, then described probe is arranged in the needle tray of described probe box, in whole installation process, be mechanical operation, the probe of described probe can not meet other article because of the hand shaking of operating personnel is dynamic, ensure that the safety of described probe, also improve installation accuracy.
Accompanying drawing explanation
Fig. 1 is the structural representation of board probe more changing device in the utility model embodiment;
Fig. 2 be in the utility model embodiment board probe more changing device draw probe turn-over time structural representation;
In figure: 101-pedestal; 102-first column; 103-first connector; 104-first cross bar; 105-bearing stage; 106-second connector; 107-second column; 108-joint among three members; 109-second cross bar; 110-first syringe; 111-the 3rd column; 112-the 4th connector; 113-the 3rd cross bar; 114-second syringe; 115-first suction nozzle; 116-first spring; 117-second suction nozzle; 118-second spring; 119-first locking screw; 120-second locking screw; 121-the 3rd locking screw; 122-the 4th locking screw; 123-probe.
Embodiment
Below in conjunction with schematic diagram, embodiment of the present utility model is described in detail.According to following description and in conjunction with claims, advantage of the present utility model and feature will be clearer.It should be noted that, accompanying drawing all adopts the form that simplifies very much and all uses non-ratio accurately, only in order to object that is convenient, aid illustration the utility model embodiment lucidly.
Present embodiments provide a kind of board probe more changing device, as depicted in figs. 1 and 2, comprising: pedestal 101, the first column 102, described first column 102 is vertically fixed on the upper surface of described pedestal 101, and namely described first column 102 is vertically arranged.Described first column 102 is through one first connector 103, described first connector 103 can slide up and down on described first column 102, also can rotate around described first column 102, and be fixed by one first locking screw 119 between described first column 102 and described first connector 103.That is, when described first connector 103 of needs slides or rotates on described first column 102, just loosen described first locking screw 119, after described first connector 103 arrives the position of assigned address or needs, tighten described first locking screw 119 again, make between described first column 102 and described first connector 103 fixing.
Described first connector 103 is a cylindrical, one end of one first cross bar 104 is connected to the sidewall of described first connector 103, the other end of described first cross bar 104 is connected with a bearing stage 105, described bearing stage 105 is a cuboid, the upper surface of described bearing stage 105 is parallel with the upper surface of described pedestal 101, described first cross bar 104 is vertical with described first column 102, parallel with the upper surface of described pedestal 101.
Described first cross bar 104 is through one second connector 106, and described second connector 106 can slide, rotate on described first cross bar 104.That is, described second connector 106 can along described first cross bar 104 to the Slideslip near described first connector 103, also along described first cross bar 104 to the Slideslip near described bearing stage 105, can also can rotate around described first cross bar 104.Fixed by one second locking screw 120 between described first cross bar 104 and described second connector 106.The effect of described second locking screw 120 is consistent with described first locking screw 119 with using method, does not repeat them here.
One end of one second column 107 is fixedly connected with described second connector 106, described second column 107 is vertical with described first cross bar 104, described second column 107 is through a joint among three members 108, fixed by one the 3rd locking screw 121 between described joint among three members 108 and described second column 107, described joint among three members 108 can be slided along described second column 107 and rotate around described second column 107.One end of one second cross bar 109 is connected with described joint among three members 108, and the other end is fixedly connected with one first probe suction means.In the present embodiment, described first probe suction means comprises one first syringe 110, described second cross bar 109 is vertical with described second column 107, parallel with the upper surface of described pedestal 101, described first syringe 110 be arranged in parallel with described second column 107, the syringe needle place of described first syringe 110 is provided with one first suction nozzle 115, and described first suction nozzle 115 is towards described bearing stage 105.The promotion valve of described first syringe 110 is connected by one first spring 116 with the inwall of described first suction nozzle 115 side, and the promotion valve of described first syringe 110 deviates from described bearing stage 105.
One the 3rd column 111 is also connected with described second connector 106, described 3rd column 111 and described second column 107 are point-blank, described 3rd column 111 is also vertical with described first cross bar 104, described 3rd column 111 is through one the 4th connector 112, fixed by one the 4th locking screw 122 between described 4th connector 112 and described 3rd column 113, described 4th connector 112 can slide along described 3rd column 111 and rotate around described 3rd column 111.One end of one the 3rd cross bar 113 is connected with described 4th connector 112, and the other end is fixedly connected with one second probe suction means.
In the present embodiment, described second probe suction means comprises one second syringe 114, and described 3rd cross bar 113 is vertical with described 3rd column 111, parallel with the upper surface of described pedestal 101.Described second syringe 114 be arranged in parallel with described 3rd column 111, and the syringe needle place of described second syringe 114 is provided with one second suction nozzle 117, and described second suction nozzle 117 is towards described bearing stage 105.The promotion valve of described second syringe 114 is connected by one second spring 118 with the inwall of described second suction nozzle 117 side, and the promotion valve of described second syringe 114 deviates from described bearing stage 105.
Because described second column 107 and described 3rd column 111 are on same straight line, and described first syringe 110 be arranged in parallel with described second column 107, described second syringe 114 be arranged in parallel with described 3rd column 111, described second cross bar 109 is connected with described second column 107 is vertical by described joint among three members 106, described 3rd cross bar 113 is connected with described 3rd column 111 is vertical by described 4th connector 112, and described first syringe 110 is fixedly connected with described second cross bar 109, described second syringe 114 is fixedly connected with described 3rd cross bar 113, therefore, by adjusting described joint among three members 108 and described 4th connector 112, described first syringe 110 and described second syringe 114 just can be driven to move, always can make described first syringe 110 and described second syringe 114 on same straight line, here also require that described second cross bar 109 is consistent with the length of described 3rd cross bar 113.
When needing to change the probe 123 of board, concrete steps are as follows:
1) packing box of described probe 123 to be placed on described bearing stage 105 and to open;
2) described second locking screw 120 is unclamped, described second connector 106 is slided on described first cross bar 104, described second column 107 that drive is fixedly connected with described second connector 106 and described 3rd column 111 slide along described first cross bar 104, thus make described first syringe 110 and described second syringe 114 all face probe packing box on described bearing stage 105, then secure the above the second locking screw 120.
3) described 3rd locking screw 121 is unclamped, described joint among three members 108 is slided along described second column 107, for adjusting the distance on the first suction nozzle 115 of described first syringe 110 and described bearing stage 105 between probe 123, when described first suction nozzle 115 can touch the back side of described probe 123 gently, fixing described 3rd locking screw 121.
4) the promotion valve of described first syringe 110 is promoted, the promotion valve of described first syringe 110 is moved to the side near described first suction nozzle 115, the promotion valve of described first syringe 110 is made to touch the side inwall of close described first suction nozzle 115 in described first syringe 110, simultaneously, described first spring 116 is compressed, then the promotion valve of described first syringe 110 is decontroled, described first spring 116 will recover deformation, just an elastic force is produced to the promotion valve of described first syringe 110, the promotion valve of described first syringe 110 is under the effect of this elastic force, away from described first suction nozzle 115, now, promotion valve and described first syringe 110 of described first syringe 110 form vacuum environment between the side inwall of the first suction nozzle 115, described probe 123 is adsorbed by described first suction nozzle 115 under the effect of atmospheric pressure.Described first suction nozzle 115 is silica gel suction nozzle, prevents from adsorption process, damage described probe 123.In the process of absorption, described first suction nozzle 115 should be made to adsorb one end of the probe away from described probe 123, is also the probe in order to avoid damaging described probe 123 in adsorption process as far as possible.
5) as shown in Figure 2, rotate described joint among three members 108 and described 4th connector 112 simultaneously, make described first suction nozzle 115 relative with described second suction nozzle 117, and make described second suction nozzle 117 can touch slightly described probe 123.Because described first suction nozzle 115 is relative with described second suction nozzle 117, at this moment, faced by described second suction nozzle 117 is exactly the side that described probe 123 exposes probe, because described first suction nozzle absorption is the one end of probe away from described probe 123, therefore, described second suction nozzle 117 is also the one end of the probe touched away from described probe 123.
Press the promotion valve of described first syringe 110 and the promotion valve of described second syringe 114 simultaneously, all there is deformation in described first spring 117 and described second spring 118, then the promotion valve of described second syringe 114 is unclamped, then the promotion valve of described second syringe 114 and described second syringe 114 just form vacuum environment between the inwall of described second suction nozzle side, described probe 123 under atmospheric pressure, adsorbed by described second suction nozzle 117, complete the turn-over to described probe 123.
6) rotate described second connector 106, make described second syringe 114 be positioned at the top of described bearing stage 105.
7) packing box of described probe 123 is taken off, probe 123 box is placed on described bearing stage 105, described 4th connector 112 is first made to slide along described 3rd column 111, make described second suction nozzle 117 away from described bearing stage 105, in order to avoid touch the described probe 123 of absorption on described second suction nozzle 117.And then rotate described 4th connector 112, described probe 123 is positioned at directly over described bearing stage 105.And then by described 4th connector 112 of adjustment, described probe 123 is aimed at the needle tray in the probe box on described bearing stage 105.
8) the promotion valve of described second syringe 114 is pressed, make the promotion valve of described second syringe 114 can touch the inwall of the second suction nozzle 117 side described in described second syringe 114, atmospheric pressure now suffered by described probe 123 both sides is identical, described probe 123 is under its Action of Gravity Field, be placed in the needle tray of described probe box, thus complete the installation of described probe 123.
In the process of whole installation, be mechanical operation, the probe of described probe 123 can not meet other article because of the hand shaking of operating personnel, ensure that the safety of described probe 123.And in step 8) in, repeatedly can adjust described probe 123 and the position relationship of needle tray in described probe box, also just there is not the installing angle in manual installation procedure, thus improve the precision of installation.
To sum up, the board probe provided in the utility model embodiment is more in changing device, the packing box of probe is placed on described bearing stage, described probe drawn by described first probe suction means, then described first connector is made to rotate around described second column, described second cross bar and described first probe suction means is driven to rotate, described 4th connector is rotated around described 3rd column, described 3rd cross bar and described second probe suction means is driven to rotate, make described first probe suction means relative with described second probe suction means, and by described second connector moving up and down on described second column, described 4th connector moving up and down on described 3rd column, adjust the distance between described first probe suction means and described second probe suction means.Then the described probe on described first probe suction means drawn by described second probe suction means, completes the turn-over of described probe.Remove the packing box on described bearing stage again, probe box is fixed on described bearing stage, adjust described second connector, described joint among three members and described 4th connector again, described probe is aimed at the needle tray in described probe box, then described probe is arranged in the needle tray of described probe box, in whole installation process, be mechanical operation, the probe of described probe can not meet other article because of the hand shaking of operating personnel is dynamic, ensure that the safety of described probe, also improve installation accuracy.
Above are only preferred embodiment of the present utility model, any restriction is not played to the utility model.Any person of ordinary skill in the field; not departing from the scope of the technical solution of the utility model; the technical scheme disclose the utility model and technology contents make the variations such as any type of equivalent replacement or amendment; all belong to the content not departing from the technical solution of the utility model, still belong within protection domain of the present utility model.
Claims (13)
1. a board probe more changing device, is characterized in that, comprising:
Pedestal;
First column, described first uprights vertical is fixed on the upper surface of described pedestal;
First connector, described first column is through described first connector, and described first connector can slide along described first column and rotate around described first column;
First cross bar, one end of described first cross bar is connected with described first connector, and the other end is connected with a bearing stage;
Second connector, described first cross bar is through described second connector, and described second connector can slide along described first cross bar and rotate around described first cross bar;
Second column, one end of described second column is connected with described second connector, and described second column is through a joint among three members, and described joint among three members can be slided along described second column and rotate around described second column;
Second cross bar, one end of described second cross bar is connected with described joint among three members, and the other end is connected with one first probe suction means;
3rd column, one end of described 3rd column is connected with described second connector, and described 3rd column is through one the 4th connector, and described 4th connector can slide along described 3rd column and rotate around described 3rd column; And
3rd cross bar, one end of described 3rd cross bar is connected with described 4th connector, and the other end is connected with one second probe suction means.
2. board probe more changing device as claimed in claim 1, it is characterized in that, described first cross bar is parallel with the upper surface of described pedestal.
3. board probe more changing device as claimed in claim 1, it is characterized in that, described second cross bar is parallel with the upper surface of described pedestal.
4. board probe more changing device as claimed in claim 1, it is characterized in that, described 3rd cross bar is parallel with the upper surface of described pedestal.
5. board probe more changing device as claimed in claim 1, it is characterized in that, described second column is vertical with described first cross bar.
6. board probe more changing device as claimed in claim 1, is characterized in that, described second cross bar and described second uprights vertical, described 3rd cross bar and described 3rd uprights vertical.
7. board probe more changing device as claimed in claim 1, it is characterized in that, described second column and described 3rd column are on same straight line.
8. board probe more changing device as claimed in claim 1, it is characterized in that, described first probe suction means comprises one first syringe, and the syringe needle place of described first syringe arranges one first suction nozzle, and the inwall of described first suction nozzle side is connected with the promotion valve of described first syringe.
9. board probe more changing device as claimed in claim 8, it is characterized in that, the inwall of described first suction nozzle side is connected by one first spring with the promotion valve of described first syringe.
10. board probe more changing device as claimed in claim 8, it is characterized in that, described first suction nozzle is towards described bearing stage, and the promotion valve of described first syringe deviates from described bearing stage.
11. board probes as claimed in claim 1 more changing device, it is characterized in that, described second probe suction means comprises one second syringe, and the syringe needle place of described second syringe arranges one second suction nozzle, and the inwall of described second suction nozzle side is connected with the promotion valve of described second syringe.
12. board probes as claimed in claim 11 more changing device, is characterized in that, the inwall of described second suction nozzle side is connected by one second spring with the promotion valve of described second syringe.
13. board probes as claimed in claim 11 more changing device, is characterized in that, described second suction nozzle is towards described bearing stage, and the promotion valve of described second syringe deviates from described bearing stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520351706.2U CN204694732U (en) | 2015-04-20 | 2015-05-27 | Board probe more changing device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510187352 | 2015-04-20 | ||
| CN2015101873527 | 2015-04-20 | ||
| CN201520351706.2U CN204694732U (en) | 2015-04-20 | 2015-05-27 | Board probe more changing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204694732U true CN204694732U (en) | 2015-10-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520351706.2U Active CN204694732U (en) | 2015-04-20 | 2015-05-27 | Board probe more changing device |
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| Country | Link |
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| CN (1) | CN204694732U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106291006A (en) * | 2016-07-27 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of probe more changing device and replacing options thereof and test equipment |
| CN108627679A (en) * | 2017-03-15 | 2018-10-09 | 中华精测科技股份有限公司 | Probe suction device |
| CN109459590A (en) * | 2018-09-20 | 2019-03-12 | 河南大学 | Apply the probe unit of microscope with atomic force of fixed function power |
-
2015
- 2015-05-27 CN CN201520351706.2U patent/CN204694732U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106291006A (en) * | 2016-07-27 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of probe more changing device and replacing options thereof and test equipment |
| CN106291006B (en) * | 2016-07-27 | 2019-01-22 | 京东方科技集团股份有限公司 | A kind of probe more changing device and its replacing options and test equipment |
| CN108627679A (en) * | 2017-03-15 | 2018-10-09 | 中华精测科技股份有限公司 | Probe suction device |
| CN109459590A (en) * | 2018-09-20 | 2019-03-12 | 河南大学 | Apply the probe unit of microscope with atomic force of fixed function power |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee after: Wuhan Xinxin Integrated Circuit Co.,Ltd. Country or region after: China Address before: 430205 No.18, Gaoxin 4th Road, Donghu Development Zone, Wuhan City, Hubei Province Patentee before: Wuhan Xinxin Semiconductor Manufacturing Co.,Ltd. Country or region before: China |