CN204649777U - Plug socket and semiconductor device - Google Patents

Plug socket and semiconductor device Download PDF

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Publication number
CN204649777U
CN204649777U CN201520126472.1U CN201520126472U CN204649777U CN 204649777 U CN204649777 U CN 204649777U CN 201520126472 U CN201520126472 U CN 201520126472U CN 204649777 U CN204649777 U CN 204649777U
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CN
China
Prior art keywords
groove
plug socket
conductive elastomer
detected
contact pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201520126472.1U
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Chinese (zh)
Inventor
位树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Beijing Corp
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Filing date
Publication date
Application filed by Semiconductor Manufacturing International Beijing Corp filed Critical Semiconductor Manufacturing International Beijing Corp
Priority to CN201520126472.1U priority Critical patent/CN204649777U/en
Application granted granted Critical
Publication of CN204649777U publication Critical patent/CN204649777U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a kind of plug socket and semiconductor device, and described plug socket comprises: substrate and conductive elastomer.By arranging the conductive elastomer with contact pad, when detecting different devices to be detected, only need to change the conductive elastomer with the contact pad of different spacing, do not need again to make plug socket, simultaneously, the surface of contact of the contact pad in conductive elastomer and device to be detected and testing circuit plate is smoother, can not cause damage, and then reduce testing cost to the two; Between adjacent contact pad isolate by rubber, effectively can reduce signal cross-talk during test, that the spacing between described contact pad can be done is less, is even less than 0.3mm, and then ensure that the accuracy of test.

Description

Plug socket and semiconductor device
Technical field
The utility model relates to field of semiconductor manufacture, particularly relates to a kind of plug socket and semiconductor device.
Background technology
In manufacture of semiconductor technique, after having manufactured each device in IC manufacturing facility, must test and encapsulate described device to guarantee the reliability of manufactured circuit.A kind of technology that can be used to the circuit encapsulating described manufacture is BGA Package (Ball Grid Arry Package, BGA), and circuit is sealed in moulding material and avoids exposing or unexpected contact with protection circuit here.
After packaging is accomplished, need to carry out final test (FT) and electrostatic test (ESD Test) to packaging, in the process of test, need to use plug socket and testing circuit plate.When test process, device to be detected is pressed in described plug socket by a lid, and described plug socket is connected with described testing circuit plate, and described testing circuit plate has been connected test by line with detection board.
But in prior art, a kind of plug socket and testing circuit plate be corresponding a kind of packaging structure only, if realize detecting different packagings, just need the different plug socket of preparation and testing circuit plate.But all costly, such as the price of a plug socket is up to 10000 ~ 60000 yuan, and the price of a testing circuit plate also wants 1000 ~ 3000 yuan, and this will increase the cost of test for the manufacturing cost of described plug socket and described testing circuit plate.
As shown in Figure 1, in the prior art, the one side of device 11 to be detected is provided with first make contact 111, the one side of testing circuit plate 13 is provided with the second contact point 131, described device to be detected 11 is connected with described testing circuit plate 13 by running through plug socket 12, and described plug socket 12 comprises substrate 121 and contact pin 122, during connection, described first make contact 111 contacts with one end of described contact pin 122, and described second contact point 131 contacts with the other end of described contact pin 122.But, in test process, described contact pin 122 can cause damage to described device 11 to be detected, described testing circuit plate 13 and the contact point be located thereon, and even causes scrapping of described device to be detected 11 and described testing circuit plate 13, and then increases the cost of test.
Simultaneously, owing to there is no insulator separation between each contact pin 122, spacing between adjacent described contact pin 122 can not be too little, the device to be detected that the contact spacing that cannot achieve a butt joint is less than 0.3mm is tested, otherwise the signal cross-talk between successive pins 122 can be caused, and then affect the accuracy of test structure.
Therefore, provide a kind of follow-on plug socket and semiconductor device very necessary.
Utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of plug socket and semiconductor device, for solving in prior art because a kind of plug socket and testing circuit plate can only test a kind of packaging structure, and contact pin is easily treated detection means and testing circuit plate and is caused and damage and the problem that increases of the testing cost caused, and there is no insulator separation between successive pins and cause cannot carry out the problem of testing by the butt contact spacing device to be detected that is less than 0.3.
For achieving the above object and other relevant objects, the utility model provides a kind of plug socket, is suitable for being electrically connected device to be detected and testing circuit plate, and described plug socket at least comprises: substrate and conductive elastomer; Be provided with the first groove, the second groove in described substrate and be communicated with the first through hole of described first groove and the second groove, wherein, described first groove is positioned at the lower surface of described substrate, and described second groove is positioned at the upper surface of described substrate; Be provided with the contact pad of array distribution in described conductive elastomer, described contact pad runs through described conductive elastomer, and forms projection in the upper and lower surface of described conductive elastomer.
As a kind of preferred version of plug socket of the present utility model, described plug socket also comprises a draw-in groove, is placed in described first through hole; Be provided with the second through hole of through described draw-in groove upper and lower surface in described draw-in groove, be suitable for placing described device to be detected.
As a kind of preferred version of plug socket of the present utility model, the shape of described draw-in groove xsect is identical with the shape of described first through hole xsect, and the cross sectional dimensions of described draw-in groove is identical with the cross sectional dimensions of described first through hole.
As a kind of preferred version of plug socket of the present utility model, the thickness of described draw-in groove is less than or equal to the thickness of described device to be detected.
As a kind of preferred version of plug socket of the present utility model, the shape of described conductive elastomer xsect is identical with the shape of described first groove cross section, and the cross sectional dimensions of described conductive elastomer is identical with the cross sectional dimensions of described first groove.
As a kind of preferred version of plug socket of the present utility model, the thickness of described conductive elastomer is less than or equal to the degree of depth of described first groove.
As a kind of preferred version of plug socket of the present utility model, described conductive elastomer is cube structure; The length of side of described conductive elastomer is 40mm, and thickness is 4mm.
As a kind of preferred version of plug socket of the present utility model, described projection is circular, and the diameter of described projection is 0.35mm.
As a kind of preferred version of plug socket of the present utility model, described conductive elastomer is rubber elastomer; Described contact pad is elastic connecting touch pad.
The present invention also provides a kind of semiconductor device, and described semiconductor device at least comprises: device to be detected, testing circuit plate, cover plate and the plug socket described in such scheme; Wherein, described plug socket is between described device to be detected and described testing circuit plate, and be suitable for the described device to be detected of electrical connection and described testing circuit plate, described cover plate is suitable for being covered in above described device to be detected.
As mentioned above, plug socket of the present utility model and semiconductor device, there is following beneficial effect: by contact pin being replaced with the conductive elastomer with contact pad, when detecting different devices to be detected, replacing is only needed to have the conductive elastomer of the contact pad of different spacing (ball pitch), do not need again to make plug socket, simultaneously, the surface of contact of the contact pad in conductive elastomer and device to be detected and testing circuit plate is smoother, damage can not be caused to the two, and then reduce testing cost; Between adjacent contact pad isolate by rubber, effectively can reduce signal cross-talk during test, that the spacing between described contact pad can be done is less, is even less than 0.3mm, and then ensure that the accuracy of test.
Accompanying drawing explanation
Fig. 1 is shown as vertical section structure schematic diagram when plug socket in prior art, device to be detected and testing circuit plate do not connect.
Fig. 2 is shown as the vertical section structure schematic diagram of the plug socket provided in the utility model embodiment one.
Fig. 3 is shown as the three-dimensional structure schematic diagram of the conductive elastomer provided in the utility model embodiment one.
Fig. 4 is shown as the plan structure schematic diagram of the substrate provided in the utility model embodiment one.
Fig. 5 is shown as the plan structure schematic diagram of the draw-in groove provided in the utility model embodiment one.
Fig. 6 is shown as vertical section structure schematic diagram when plug socket in the utility model embodiment two, device to be detected and testing circuit plate do not connect.
Fig. 7 is shown as vertical section structure schematic diagram when plug socket in the utility model embodiment two, device to be detected and testing circuit plate connect.
Element numbers explanation
11 devices to be detected
111 first make contacts
12 plug sockets
121 substrates
122 contact pins
13 testing circuit plates
131 second contact points
21 devices to be detected
211 first make contacts
22 plug sockets
221 substrates
2211 first grooves
2212 second grooves
2213 first through holes
222 conductive elastomers
223 contact pads
2231 projections
224 draw-in grooves
2241 second through holes
23 testing circuit plates
231 second contact points
24 cover plates
L 1the length of side of conductive elastomer
L 2the length of side of substrate
L 3the length of side of the first through hole
L 4the length of side of draw-in groove
L 5second through hole is to the distance of pocket edges
D 1the thickness of conductive elastomer
D 2the thickness of substrate
D 3the thickness of draw-in groove
D 1the diameter of projection
Embodiment
By particular specific embodiment, embodiment of the present utility model is described below, person skilled in the art scholar the content disclosed by this instructions can understand other advantages of the present utility model and effect easily.
Refer to Fig. 2 to Fig. 7.Notice, this instructions is appended illustrates the structure, ratio, size etc. that illustrate, content all only in order to coordinate instructions to disclose, understand for person skilled in the art scholar and read, and be not used to limit the enforceable qualifications of the utility model, therefore the not technical essential meaning of tool, the adjustment of the modification of any structure, the change of proportionate relationship or size, do not affecting under effect that the utility model can produce and the object that can reach, still all should drop on technology contents that the utility model discloses and obtain in the scope that can contain.Simultaneously, quote in this instructions as " on ", D score, "left", "right", " middle part " and " one " etc. term, also only for ease of understanding of describing, and be not used to limit the enforceable scope of the utility model, the change of its relativeness or adjustment, under changing technology contents without essence, when being also considered as the enforceable category of the utility model.
Embodiment one
The utility model provides a kind of plug socket 22, refers to Fig. 2, and wherein, Fig. 2 is the vertical section structure schematic diagram of described plug socket 22.As shown in Figure 2, described plug socket 22 at least comprises: substrate 221, conductive elastomer 222 and draw-in groove 223; Be provided with the first groove 2211, second groove 2212 in described substrate 221 and be communicated with the first through hole 2213 of described first groove 2211 and the second groove 2212, wherein, described first groove 2211 is positioned at the lower surface of described substrate 221, and described second groove 2212 is positioned at the upper surface of described substrate 221; Be provided with the contact pad 223 of array distribution in described conductive elastomer 222, described contact pad 223 runs through described conductive elastomer 222, and forms projection 2231 in the upper and lower surface of described conductive elastomer 222; Described draw-in groove 224 is placed in described first through hole 2213; The second through hole 2241 of through described draw-in groove 224 upper and lower surface is provided with in described draw-in groove 224.
Concrete, described draw-in groove 224 matches with described first through hole 2213, so that described draw-in groove 224 can be positioned in described first through hole 2213, namely the shape of described draw-in groove 224 xsect is identical with the shape of described first through hole 2213 xsect, and the cross sectional dimensions of described draw-in groove 224 is identical with the cross sectional dimensions of described first through hole 2213.
Concrete, the thickness d of described draw-in groove 224 3can design according to actual needs, preferably, in the present embodiment, the thickness d of described draw-in groove 224 3be less than or equal to the thickness of described device to be detected.
Concrete, as a same reason, described conductive elastomer 222 should match with described first groove 2211, so that described conductive elastomer 222 can be positioned in described first groove 2211, namely the shape of described conductive elastomer 222 xsect is identical with the shape of described first groove 2211 xsect, and the cross sectional dimensions of described conductive elastomer 222 is identical with the cross sectional dimensions of described first groove 2211.Preferably, as shown in Figure 3, conductive elastomer 222 described in the present embodiment is cube structure, the length of side L of described conductive elastomer 222 1for 40mm.The thickness d of described conductive elastomer 222 1can design according to actual, preferably, the thickness d of described conductive elastomer 222 1be less than or equal to the degree of depth of described first groove 2211, more preferably, in the present embodiment, the thickness d of described conductive elastomer 222 1for 4mm.
Concrete, the shape of described projection 2231 is circular, the diameter D of described projection 2231 1for 0.35mm.
Concrete, the number of described contact pad 223 can design according to structure to be detected, under the prerequisite that the size of described conductive elastomer 222 is certain, the array that can consist of the number adjusting described contact pad 223 adjusts the spacing between adjacent touch pad 223.In the process of test, without the need to changing described substrate 221, only need prepare the conductive elastomer 222 of the described contact pad 223 with different spacing, the detection to multiple difference device to be detected can be realized, because the cost of described conductive elastomer 222 is far below the cost of described substrate 221, this must be conducive to the reduction of testing cost.Meanwhile, compared to prior art, eliminate the time again making described 221, this just saves the time of test greatly, shortens test period.
Concrete, described conductive elastomer 222 is rubber elastomer, and described contact pad 223 is elastic connecting touch pad, and preferably, in the present embodiment, described contact pad 223 is tin copper-clad contact pad.Described contact pad 223 is arranged in described rubber conductive elastomer, to make between each described contact pad 223 all isolate by the rubber that insulate, even if the interference produced between adjacent described contact pad 223 in test process still effectively can be avoided in the spacing between adjacent described contact pad 223 is very little, and then ensure that the accuracy of test result.In the present embodiment, the spacing between adjacent described contact pad 223 can reach 0.3mm, even less, namely uses and is provided with the described conductive elastomer 222 of described contact pad 223, can detect by the butt contact spacing device to be detected that is less than 0.3mm.Described contact pad 223 is set to elastic connecting touch pad, when testing, when described structure to be detected and described testing circuit plate contact with described contact pad 223, described contact pad 223 correspondingly can deform along with pressure, thus reduces the damage to described structure to be detected and described testing circuit plate.
Concrete, as shown in Fig. 4 to Fig. 5, in the present embodiment, the shape of cross section of described substrate 221, first through hole 2213, draw-in groove 224 and the second through hole 2241 is square.In the present embodiment, the draw-in groove 224 with the second through hole 2241 is set, in the process of test, according to the size of device to be detected, the draw-in groove 224 only needing replacing to have the second through hole 2241 of different size can realize the detection to the device to be detected with different size, without the need to changing expensive plug socket substrate 221, greatly save the cost of test.For the length of side of device to be detected for 24.5mm, accordingly, the length of side L of described draw-in groove 224 4for 45mm, thickness d 3for 3.5mm, the distance L at described second through hole 2241 to draw-in groove 224 edge 5for 10.3mm; Correspondingly, the length of side L of described substrate 221 2for 59mm, thickness d 2for 9.5mm, the length of side L of described first through hole 2211 3with the length of side L of described draw-in groove 224 4unanimously, 45mm is.
Embodiment two
The present embodiment provides a kind of semiconductor device, consults Fig. 6 to Fig. 7 incorporated by reference to embodiment one, and described semiconductor device at least comprises: device 21 to be detected, testing circuit plate 23, cover plate 24 and plug socket 22; Wherein, described plug socket 22 is between described device 21 to be detected and described testing circuit plate 23, and be suitable for the described device 21 to be detected of electrical connection and described testing circuit plate 23, described cover plate 24 is suitable for being covered in above described device to be detected 21.
Concrete, the structure of described plug socket 22 is identical with the structure of the plug socket 22 described in embodiment one, specifically refers to embodiment one, is not repeated here.
Concrete, described device 21 to be detected has first make contact 211, and described testing circuit 23 has the second contact point 231.As shown in Figure 7, in the process of test, described device to be detected 21 to be placed in described plug socket 22 and to contact with the one side of described conductive elastomer 222, described testing circuit plate 23 is positioned at the below of described plug socket 22, and contact with the another side of described conductive elastomer 222, concrete, one end of the contact pad 223 of the described conductive elastomer 222 in described plug socket 22 contacts with described first make contact 211, and the other end contacts the electrical connection realizing described device to be detected 21 and described testing circuit 23 with described second contact point 231.
In sum, the utility model provides a kind of plug socket and semiconductor device, by contact pin being replaced with the conductive elastomer with contact pad, when detecting different devices to be detected, replacing is only needed to have the conductive elastomer of the contact pad of different spacing (ball pitch), do not need again to make plug socket, simultaneously, the surface of contact of the contact pad in conductive elastomer and device to be detected and testing circuit plate is smoother, damage can not be caused to the two, and then reduce testing cost; Between adjacent contact pad isolate by rubber, effectively can reduce signal cross-talk during test, that the spacing between described contact pad can be done is less, is even less than 0.3mm, and then ensure that the accuracy of test.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not for limiting the utility model.Any person skilled in the art scholar all without prejudice under spirit of the present utility model and category, can modify above-described embodiment or changes.Therefore, such as have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the utility model discloses, must be contained by claim of the present utility model.

Claims (10)

1. a plug socket, be suitable for being electrically connected device to be detected and testing circuit plate, it is characterized in that, described plug socket at least comprises: substrate and conductive elastomer;
Be provided with the first groove, the second groove in described substrate and be communicated with the first through hole of described first groove and the second groove, wherein, described first groove is positioned at the lower surface of described substrate, and described second groove is positioned at the upper surface of described substrate;
Be provided with the contact pad of array distribution in described conductive elastomer, described contact pad runs through described conductive elastomer, and forms projection in the upper and lower surface of described conductive elastomer.
2. plug socket according to claim 1, is characterized in that: described plug socket also comprises a draw-in groove, is placed in described first through hole; Be provided with the second through hole of through described draw-in groove upper and lower surface in described draw-in groove, be suitable for placing described device to be detected.
3. plug socket according to claim 2, is characterized in that: the shape of described draw-in groove xsect is identical with the shape of described first through hole xsect, and the cross sectional dimensions of described draw-in groove is identical with the cross sectional dimensions of described first through hole.
4. plug socket according to claim 2, is characterized in that: the thickness of described draw-in groove is less than or equal to the thickness of described device to be detected.
5. plug socket according to claim 1, is characterized in that: the shape of described conductive elastomer xsect is identical with the shape of described first groove cross section, and the cross sectional dimensions of described conductive elastomer is identical with the cross sectional dimensions of described first groove.
6. plug socket according to claim 1, is characterized in that: the thickness of described conductive elastomer is less than or equal to the degree of depth of described first groove.
7. plug socket according to claim 1, is characterized in that: described conductive elastomer is cube structure; The length of side of described conductive elastomer is 40mm, and thickness is 4mm.
8. plug socket according to claim 1, is characterized in that: described projection is for circular, and the diameter of described projection is 0.35mm.
9. plug socket according to claim 1, is characterized in that: described conductive elastomer is rubber elastomer; Described contact pad is elastic connecting touch pad.
10. a semiconductor device, is characterized in that, described semiconductor device at least comprises: device to be detected, testing circuit plate, cover plate and plug socket as claimed in any one of claims 1-9 wherein;
Wherein, described plug socket is between described device to be detected and described testing circuit plate, and be suitable for the described device to be detected of electrical connection and described testing circuit plate, described cover plate is suitable for being covered in above described device to be detected.
CN201520126472.1U 2015-03-04 2015-03-04 Plug socket and semiconductor device Expired - Fee Related CN204649777U (en)

Priority Applications (1)

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CN201520126472.1U CN204649777U (en) 2015-03-04 2015-03-04 Plug socket and semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520126472.1U CN204649777U (en) 2015-03-04 2015-03-04 Plug socket and semiconductor device

Publications (1)

Publication Number Publication Date
CN204649777U true CN204649777U (en) 2015-09-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108780117A (en) * 2016-03-23 2018-11-09 李诺工业股份有限公司 Test jack component

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108780117A (en) * 2016-03-23 2018-11-09 李诺工业股份有限公司 Test jack component
US10976348B2 (en) 2016-03-23 2021-04-13 Leeno Industrial Inc. Test socket assembly

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150916

Termination date: 20190304

CF01 Termination of patent right due to non-payment of annual fee