CN204594601U - A kind of near-field coupling wireless and passive superhigh temperature pressure transducer - Google Patents
A kind of near-field coupling wireless and passive superhigh temperature pressure transducer Download PDFInfo
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- CN204594601U CN204594601U CN201520312985.1U CN201520312985U CN204594601U CN 204594601 U CN204594601 U CN 204594601U CN 201520312985 U CN201520312985 U CN 201520312985U CN 204594601 U CN204594601 U CN 204594601U
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- high temperature
- field coupling
- temperature resistant
- pressure transducer
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Abstract
The utility model discloses a kind of near-field coupling wireless and passive superhigh temperature pressure transducer, described sensor is made up of near-field coupling power sensing structure, high temperature resistant waveguide and high temperature resistant antenna, described near-field coupling power sensing structure is made up of planar resonator, dielectric layer or metal and medium composite bed, described dielectric layer or metal and medium composite bed form the quick film of power, and the hollow high temperature resistant cylindrical shell used between planar resonator, dielectric layer or metal and medium composite bed separates.The utility model is theoretical as pressure signal, electromagnetic field couples foundation design power sensing structure using near-field coupling, greatly reduces sensor body sum pressure signal, electromagnetic field couples sensitivity; Based on the near-field coupling power sensing structure of near-field coupling theory without the need to sidewall metallizing, reduce difficulty of processing, avoid cavity wall corner, bending and shape sudden change place washing, ensure that metallic coating and substrate bonding reliability, and then ensure this superhigh temperature pressure transducer reliability.
Description
Technical field
The utility model relates to superhigh temperature sensory field, is specifically related to a kind of near-field coupling wireless and passive superhigh temperature pressure transducer.
Background technology
Superhigh temperature (> 500 DEG C) sensing is monitoring, detects and safeguard that the engine systems such as turbine, jet, punching press and the course of work thereof need one of the infotech and manufacturing capacity of development especially.There is thermal extremes in these occasions, big-block engine is if turbine engine, impulse force engine operating temperature are all more than 1300 DEG C, and some occasion is even up to 2000 DEG C.In use except thermal extremes, also there is immense pressure in these systems, force value is even up to 20Mpa.Pressure is non-uniform Distribution on engine interior and casing, is closely related with position, intake velocity etc.Comprehensively understand the temperature of engine interior and casing in real time, pressure information is design, manufacture the prerequisite of high-performance enginer, this just requires that instrument and measuring technology industry provide temperature and pressure senser element and the system of corresponding superhigh temperature resistant.
In hyperthermal environments, the existing active device based on electronic signal cannot work.Silicon-based semiconductor is when temperature is more than 400 DEG C and malfunction; Senser element is even oxidized, the failure conditions such as burns at extreme temperatures; Wire and device connecting line at high temperature performance degradation simultaneously, therefore the transmission of its signal becomes one of key issue of superhigh temperature working sensor.Under hyperthermal environments, high temperature resistant, the power supply of power supply is changed, safeguarded in addition will be a very difficult task.Therefore now in the rugged surroundings such as superhigh temperature, wireless and passive sensing technology is all adopted.
For the severe life condition of hyperthermal environments, some researchers and utility model people propose the wireless and passive pressure transducer adopted based on LC resonance mutual inductance coupled wave theory, and the LC oscillation circuit that this pressure transducer is made up of telefault and capacitive pressure sensing head forms.Its principle of work is: when sensing head is subject to ambient pressure, capacitance variations causes the resonance frequency of lc circuit to change, thus the change of pressure size is converted into the change of resonance frequency, utilize the inductive antenna outside presser sensor head own inductance coil coupling certain distance, the signal finally received antenna carries out detection and Decoupling Analysis, can draw the force value size on far-end sensitive structure.But there is the problems such as distance sensing is short, the loss of signal large (quality factor q is low), the pressure detection problem under therefore someone proposes to adopt microwave resonance cavate wireless and passive sensing technology to solve superhigh temperature rugged surroundings at present in this kind of wireless and passive pressure transducer.Microwave resonance cavate wireless and passive pressure transducer, relative to LC resonance mutual inductance manifold type wireless and passive pressure transducer, has the advantage that distance sensing is large, the loss of signal is low.When microwave resonance cavate wireless and passive pressure transducer is applied under hyperthermal environments, usually being usually that core material makes cavity with refractory ceramics, wall applies refractory metal thin layer more within it and form resonator cavity, when this resonator cavity is in pressure environment, chamber lid (generally thinner) will be out of shape, thus cause the resonance frequency of whole resonator cavity to change, therefore pass through coupled antenna thereon the resonance frequency change information collected is launched, receiving trap receives this resonance frequency change information and Decoupling Analysis can obtain the pressure of environment residing for chamber, this i.e. microwave resonance cavate wireless and passive pressure transducer basic comprising and principle of work.But metallizing is difficult on the sidewall of ceramic chamber, particularly micro-ceramic chamber (microcavity as sensor is many between tens microns to number mm in size) upper side wall is little, is unfavorable for very much sidewall coating processing.Simultaneously because in ceramic chamber wall all coated with metal time, cavity wall corner, bending and shape sudden change place, the stress of metallic coating is very large, and these places are weakness of metallic coating and ceramic bonding, very easily cause metallic coating to ftracture, peel off, have a strong impact on the reliability of device.
Utility model content
For avoiding and thoroughly solving the above-mentioned processing problems and follow-up dependability problem that metal current coating/refractory ceramics resonator cavity wireless and passive superhigh temperature pressure transducer brings, the utility model provides a kind of near-field coupling wireless and passive superhigh temperature pressure transducer.
For achieving the above object, the technical scheme that the utility model is taked is:
Near-field coupling wireless and passive superhigh temperature pressure transducer, described sensor is by near-field coupling power sensing structure, high temperature resistant waveguide and high temperature resistant antenna are formed, described near-field coupling power sensing structure is by planar resonator, dielectric layer or metal and medium composite bed are formed, described dielectric layer or metal and medium composite bed form the quick film of power, planar resonator, dielectric layer or the hollow high temperature resistant cylindrical shell used between metal and medium composite bed separate, dielectric layer or metal and medium composite bed, hollow high temperature resistant cylindrical shell, planar resonator three is sealed to one, described high temperature resistant antenna is connected with described planar resonator by high temperature resistant waveguide.
As preferably, described high temperature resistant antenna is made up of refractory ceramics and refractory metal.
As preferably, described high temperature resistant antenna is the one in microstrip antenna, element antenna or its derivative antenna.
As preferably, described high temperature resistant waveguide is the one in the coaxial cable that forms of refractory metal or rectangle, circle, special-shaped hollow waveguide.
As preferably, described high temperature resistant waveguide is the one that refractory ceramics and refractory metal form in microstrip transmission line, strip line, co-planar waveguide or substrate integration wave-guide.
The utility model has following beneficial effect:
1) theoretical as pressure signal, electromagnetic field couples foundation design power sensing structure using near-field coupling, greatly reduce sensor body sum pressure signal, electromagnetic field couples sensitivity;
2) based on the near-field coupling power sensing structure of near-field coupling theory without the need to sidewall metallizing, reduce difficulty of processing, avoid cavity wall corner, bending and shape sudden change place washing, ensure that metallic coating and substrate bonding reliability, and then ensure this superhigh temperature pressure transducer reliability.
Accompanying drawing explanation
Fig. 1 is near-field coupling wireless and passive superhigh temperature pressure transducer overall package figure in the utility model embodiment.
Fig. 2 is the cross-sectional view of near-field coupling wireless and passive superhigh temperature pressure transducer entirety in the utility model embodiment.
Fig. 3 is the wiring layout of near-field coupling wireless and passive superhigh temperature pressure transducer entirety in the utility model embodiment.
Fig. 4 is the quick film figure of power in the utility model embodiment.
Fig. 5 is the utility model embodiment midplane resonator figure.
Fig. 6 is high temperature resistant cylindrical shell figure in the utility model embodiment.
Fig. 7 is substrate figure in the utility model embodiment.
Fig. 8 is high temperature resistant antenna diagram in the utility model embodiment.
In figure, the quick film of 1-power; 2-planar resonator; 3-is high temperature resistant cylindrical shell; Waveguide that 4-is high temperature resistant; 5-is high temperature resistant antenna
Embodiment
In order to make the purpose of this utility model and advantage clearly understand, below in conjunction with embodiment, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
As shown in figures 1-8, the utility model embodiment provides a kind of near-field coupling wireless and passive superhigh temperature pressure transducer, described sensor is by near-field coupling power sensing structure, high temperature resistant waveguide 4 and high temperature resistant antenna 5 are formed, described near-field coupling power sensing structure is by planar resonator 2, dielectric layer or metal and medium composite bed are formed, described dielectric layer or metal and medium composite bed form the quick film 1 of power, planar resonator 2, dielectric layer or the hollow high temperature resistant cylindrical shell 3 used between metal and medium composite bed separate, dielectric layer or metal and medium composite bed, hollow high temperature resistant cylindrical shell 3, planar resonator 2 three is sealed to one, described high temperature resistant antenna 5 is connected with described planar resonator 2 by high temperature resistant waveguide 4.
Described high temperature resistant antenna 5 is made up of refractory ceramics and refractory metal.
Described high temperature resistant antenna 5 is the one in microstrip antenna, element antenna or its derivative antenna.
One in the coaxial cable that described high temperature resistant waveguide 4 is formed for refractory metal or rectangle, circle, special-shaped hollow waveguide.
Described high temperature resistant waveguide 4 is the one that refractory ceramics and refractory metal form in microstrip transmission line, strip line, co-planar waveguide or substrate integration wave-guide.
This is concrete implements design and adopts new cavity resonator structure based on near-field coupling principle, is formed the power sensing structure of near field coupling structure as this superhigh temperature pressure transducer using the very near dielectric layer of distance or metal level and planar resonator.There is electromagnetism evanscent field in the space that described planar resonator is very near, be very easily subject to external disturbance, can be used as the sensitive probe of the extraneous change of impression.Therefore when the dielectric layer in described near field coupling structure or metal level are subject to external pressure or masterpiece used time, deform, change dielectric layer or the distance between metal level and planar resonator, make dielectric layer or the electromagnetic field between metal level and planar resonator, evanscent field resets, and then affect resonance frequency and the radiation efficiency of planar resonator.A high temperature resistant antenna or bottom compound high temperature resistant antenna signal transmission unit as described power sensing structure is connected again in planar resonator side, get final product wireless transmission, transmit force sensing structure responsive to change the change of planar resonator resonance frequency and radiation efficiency change caused because of pressure, analyze the change of planar resonator resonance frequency and radiation efficiency changes and can obtain pressure changing information.Described planar resonator is coated in refractory substrates with ad hoc structure refractory metal and makes, and decreases the difficulty of processing of the washing pottery chamber power sensing structure of open report at present; Avoid cavity wall corner, bending and shape sudden change place washing, ensure that metallic coating and substrate bonding reliability, and then ensure this superhigh temperature pressure transducer reliability.
The above is only preferred implementation of the present utility model; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (5)
1. a near-field coupling wireless and passive superhigh temperature pressure transducer, it is characterized in that, described sensor is by near-field coupling power sensing structure, high temperature resistant waveguide and high temperature resistant antenna are formed, described near-field coupling power sensing structure is by planar resonator, dielectric layer or metal and medium composite bed are formed, described dielectric layer or metal and medium composite bed form the quick film of power, planar resonator, dielectric layer or the hollow high temperature resistant cylindrical shell used between metal and medium composite bed separate, dielectric layer or metal and medium composite bed, hollow high temperature resistant cylindrical shell, planar resonator three is sealed to one, described high temperature resistant antenna is connected with described planar resonator by high temperature resistant waveguide.
2. near-field coupling wireless and passive superhigh temperature pressure transducer according to claim 1, it is characterized in that, described high temperature resistant antenna is made up of refractory ceramics and refractory metal.
3. near-field coupling wireless and passive superhigh temperature pressure transducer according to claim 1, is characterized in that, described high temperature resistant antenna is the one in microstrip antenna, element antenna or its derivative antenna.
4. near-field coupling wireless and passive superhigh temperature pressure transducer according to claim 1, is characterized in that, described high temperature resistant waveguide is the coaxial cable that forms of refractory metal or rectangle, circle, one in special-shaped hollow waveguide.
5. near-field coupling wireless and passive superhigh temperature pressure transducer according to claim 1, it is characterized in that, described high temperature resistant waveguide is the one that refractory ceramics and refractory metal form in microstrip transmission line, strip line, co-planar waveguide or substrate integration wave-guide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520312985.1U CN204594601U (en) | 2015-05-15 | 2015-05-15 | A kind of near-field coupling wireless and passive superhigh temperature pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520312985.1U CN204594601U (en) | 2015-05-15 | 2015-05-15 | A kind of near-field coupling wireless and passive superhigh temperature pressure transducer |
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| Publication Number | Publication Date |
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| CN204594601U true CN204594601U (en) | 2015-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201520312985.1U Withdrawn - After Issue CN204594601U (en) | 2015-05-15 | 2015-05-15 | A kind of near-field coupling wireless and passive superhigh temperature pressure transducer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105136350A (en) * | 2015-05-15 | 2015-12-09 | 中北大学 | Near-field coupling wireless passive superhigh temperature pressure sensor and manufacturing method thereof |
| CN107402031A (en) * | 2017-06-19 | 2017-11-28 | 中北大学 | Temperature, pressure biparameter sensor and preparation method based on microwave scattering principle |
-
2015
- 2015-05-15 CN CN201520312985.1U patent/CN204594601U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105136350A (en) * | 2015-05-15 | 2015-12-09 | 中北大学 | Near-field coupling wireless passive superhigh temperature pressure sensor and manufacturing method thereof |
| CN105136350B (en) * | 2015-05-15 | 2017-11-21 | 中北大学 | A kind of near-field coupling wireless and passive superhigh temperature pressure sensor and preparation method thereof |
| CN107402031A (en) * | 2017-06-19 | 2017-11-28 | 中北大学 | Temperature, pressure biparameter sensor and preparation method based on microwave scattering principle |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20150826 Effective date of abandoning: 20171121 |