CN204514574U - Corner reflector or reflector array optical axis point to consistency detection system - Google Patents
Corner reflector or reflector array optical axis point to consistency detection system Download PDFInfo
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- CN204514574U CN204514574U CN201520181794.6U CN201520181794U CN204514574U CN 204514574 U CN204514574 U CN 204514574U CN 201520181794 U CN201520181794 U CN 201520181794U CN 204514574 U CN204514574 U CN 204514574U
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Abstract
Corner reflector or reflector array optical axis point to consistency detection system, and it comprises collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit, CCD measuring unit and control module; The dynamic diaphragm unit of liquid crystal light valve is arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of the dynamic diaphragm unit of liquid crystal light valve; Measured angle reverberator or reflector array are arranged on corner reflector pose adjustment unit; CCD measuring unit is arranged in the reflected light place light path after measured angle reverberator or reflector array reflection; Control module is connected with collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit and CCD measuring unit respectively.The utility model can realize the quick and Measurement accuracy of angle between the optical axis sensing of each sub-corner reflector in corner reflector or reflector array with corner reflector datum clamp face normal.
Description
Technical field
The utility model belongs to technical field of optical test, relates to the optical axis sensing consistency detection system that a kind of corner reflector optical axis points to each sub-corner reflector in consistance or reflector array.
Background technology
Corner reflector is a kind of optical device making to incide the light in corner reflector and return according to the direction paralleled with incident direction, is widely used in the laser distance measuring system such as artificial satellite, aircraft.The laser that corner reflector makes laser instrument send accurately turns back in laser distance measuring system according to the direction contrary with incident direction, by measuring the time that laser range finder sends laser and receives return laser light, can calculate the distance of target apart from laser range finder.
Along with the development of aerospace flight technology, corner reflector starts to be widely used in Aerospace Satellite spacecrafts rendezvous proving installation in eighties of last century latter stage, by installing corner reflector and the reflector array of some on satellite A, satellite B installs observation positioning camera, with active illumination device on satellite B, the light that active illumination device sends is detected by the observation positioning camera on satellite B after the corner reflector that satellite A installs returns, by judging each corner reflector and the reflector array subtended angle relative to satellite B, thus calculate the relative position relation of satellite A and satellite B, realize high-precision orbital location, for satellite conjunction docking provides satellite attitude parameters.
Corner reflector is a kind of logical light face is the face of cylinder, and reflecting surface is the light echo device of three mutually orthogonal between two planes.Incident ray returns by the opposite direction in light direction after the triple reflection of three reflectings surface in corner reflector bottom surface.When incident ray is parallel with corner reflector central shaft, the light echo of corner reflector is most effective, can more than 98% be reached, along with the increase of angle of incident light, the effective light echo area of corner reflector reduces, and when incident ray and corner reflector central shaft angle are greater than 30 °, the light echo efficiency of corner reflector is only about 10%, therefore, the light echo efficiency of corner reflector under different incidence angles degree is different.
When reality uses, the power of corner reflector light echo energy directly affects equipment to its positioning precision, particularly when using reflector array as target source, due to the sensing inconsistency of each sub-corner reflector in reflector array, must causing in observation positioning camera visual field the reflector array brightness that photographs and not of uniform sizely to cause, impact observation positioning camera is to the interpretation precision of corner reflector attitude of carrier.
Along with the development of aerospace flight technology, the light axis consistency of sub-corner reflector each in corner reflector and reflector array is had higher requirement, and still there is no device or the method for the light axis consistency of each sub-corner reflector in special test angles reverberator and reflector array at present, there are no relevant open report yet.
Utility model content
In order to solve the above-mentioned technical matters existed in background technology, the optical axis that the utility model provides each sub-corner reflector in a kind of special test angles reverberator or reflector array points to consistency detection system, points to the quick and Measurement accuracy of angle between corner reflector datum clamp face normal with the optical axis realizing each sub-corner reflector in corner reflector or reflector array.
Technical solution of the present utility model is:
The utility model provides a kind of corner reflector or reflector array optical axis points to consistency detection system, and its special character is: comprise collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit, CCD measuring unit and control module; The dynamic diaphragm unit of liquid crystal light valve is arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of the dynamic diaphragm unit of liquid crystal light valve; Measured angle reverberator or reflector array are arranged on corner reflector pose adjustment unit; CCD measuring unit is arranged in the reflected light place light path after measured angle reverberator or reflector array reflection; Control module is connected with collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit and CCD measuring unit respectively.
The dynamic diaphragm unit of above-mentioned liquid crystal light valve comprises liquid crystal light valve, the liquid crystal light valve control circuit be connected with liquid crystal light valve and the two-dimension translational adjustment unit for adjusting liquid crystal light valve position; Liquid crystal light valve to be positioned on two-dimension translational adjustment unit and to be arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of liquid crystal light valve; Control module is connected with liquid crystal light valve control circuit and two-dimension translational adjustment unit respectively.
The electronic control translation stage that above-mentioned two-dimension translational adjustment unit comprises lift adjustment system and is arranged in lift adjustment system; Liquid crystal light valve is arranged on electronic control translation stage; Control module is connected with lift adjustment system and electronic control translation stage respectively.
Above-mentioned corner reflector pose adjustment unit comprises corner reflector mounting tool and the two-dimensional level adjustment unit for the reference field normal position that adjusts corner reflector mounting tool; Corner reflector mounting tool to be positioned on two-dimensional level adjustment unit and to be arranged on the emitting light path of liquid crystal light valve; Measured angle reverberator or reflector array are installed on corner reflector mounting tool; Control module is connected with two-dimensional level adjustment unit.
Above-mentioned two-dimensional level adjustment unit comprises automatically controlled universal stage and is arranged on the automatically controlled angular displacement platform on automatically controlled universal stage; Described corner reflector mounting tool is arranged on automatically controlled angular displacement platform; Described control module is connected with automatically controlled universal stage and automatically controlled angular displacement platform respectively.
Above-mentioned CCD measuring unit comprise be successively set on through measured angle reverberator or reflector array reflection after reflected light place light path on convergence object lens and ccd detector; Ccd detector is arranged on the focal plane of convergence object lens; Control module is connected with ccd detector.
Above-mentioned collimated light source unit comprises collimator objective, is arranged on the asterism graticule on collimator objective focal plane and the integrating sphere light-source system after being arranged on collimator objective focal plane; Asterism graticule, collimator objective and liquid crystal light valve are successively set on the emitting light path of integrating sphere light-source system; Control module is connected with integrating sphere light-source system.
Above-mentioned integrating sphere light-source system comprises the light source closely arranged successively, automatically controlled iris and integrating sphere spheroid; Automatically controlled iris, integrating sphere spheroid and asterism graticule are successively set on the emitting light path of light source; Control module is connected with light source and automatically controlled iris respectively.
The utility model has the advantages that:
The utility model provides a kind of corner reflector or reflector array optical axis points to conforming detection system, this detection system by use liquid crystal light valve provide optional position and size by diaphragm, realize the test that diverse location corner reflector optical axis is pointed to:
Optical axis for independently different corner reflector points to test, and liquid crystal light valve can adjust position and the size of clear aperture at any time according to the size of measured angle reverberator clear aperture, realizes the test job that high precision optical axis points to, for reflector array, because all sub-corner reflectors can carry out reflective to the light beam through the outgoing of collimated light source unit simultaneously, cause judging that on CCD measuring unit corner reflector optical axis points to the corresponding informance with sub-corner reflector, and in detection system of the present utility model, be provided with liquid crystal light valve, by use liquid crystal light valve for each sub-corner reflector provides the luminous energy of different frequency to modulate, different according to the luminous energy modulating frequency of the sub-corner reflector of difference, thus obtain the corresponding relation of reflector array Neutron Angular reverberator measurement result and sub-corner reflector, solve the difficult problem that cannot judge that measurement result is corresponding with sub-corner reflector.
The utility model has filled up domestic blank in the sensing of corner reflector optical axis and reflector array in each sub-corner reflector optical axis sensing uniformity test.The measuring accuracy that the utility model points to angle between corner reflector datum clamp face normal for corner reflector optical axis can reach 5 ", conforming measuring accuracy is pointed to for the sub-corner reflector optical axis of each of reflector array and can reach 3 ".
Accompanying drawing explanation
Fig. 1 is the structural representation that corner reflector provided by the utility model or reflector array optical axis point to consistency detection system;
Fig. 2 is tested object of the present utility model---the side view of reflector array;
Fig. 3 is tested object of the present utility model---the vertical view of reflector array;
Fig. 4 is the angle schematic diagram that the optical axis of each sub-corner reflector in corner reflector or reflector array points between corner reflector datum clamp face normal;
Wherein:
1-light source; The automatically controlled iris of 2-; 3-integrating sphere spheroid; 4-asterism graticule; 5-collimator objective; 6-liquid crystal light valve; 7-lift adjustment system; 8-electronic control translation stage; The automatically controlled universal stage of 9-; The automatically controlled angular displacement platform of 10-; 11-reflector array (or corner reflector); 12-corner reflector mounting tool; 13-converges object lens; 14-CCD detector; 15-control module; The optical axis of A-corner reflector points to; B-corner reflector datum clamp face normal.
Embodiment
See Fig. 1, the utility model provides a kind of corner reflector or reflector array optical axis points to consistency detection system (being called for short: detection system), and it comprises collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit, CCD measuring unit and control module 15; The dynamic diaphragm unit of liquid crystal light valve is arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of the dynamic diaphragm unit of liquid crystal light valve; Measured angle reverberator or reflector array 11 are arranged on corner reflector pose adjustment unit; CCD measuring unit is arranged in the reflected light place light path after measured angle reverberator or reflector array reflection; Control module 15 is connected with collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit and CCD measuring unit respectively.
Particularly, as shown in Figure 1, the collimated light source unit that the utility model adopts comprises integrating sphere light-source system, asterism graticule 4 and collimator objective 5; Asterism graticule 4 is arranged on the focal plane of collimator objective 5; Integrating sphere light-source system comprises the light source 1, automatically controlled iris 2 and the integrating sphere spheroid 3 that closely arrange successively, light source 1 is arranged on the outer wall of automatically controlled iris 2 side, automatically controlled iris 2 opposite side is arranged on the ball wall of integrating sphere spheroid 3, after integrating sphere spheroid 3 is arranged on the focal plane of collimator objective 5; Automatically controlled iris 2 and integrating sphere spheroid 3 are successively set on the emitting light path of light source 1, and the dynamic diaphragm unit of asterism graticule 4, collimator objective 5 and liquid crystal light valve is successively set on the emitting light path of integrating sphere spheroid 3; Control module 15 is connected with light source 1 and automatically controlled iris 2 respectively.Light source 1 in the utility model can adopt the halogen tungsten lamp light source that degree of stability is high.
As shown in Figure 1, the dynamic diaphragm unit of liquid crystal light valve that the utility model adopts comprises liquid crystal light valve 6, the liquid crystal light valve control circuit be connected with liquid crystal light valve 6 and the two-dimension translational adjustment unit for adjusting liquid crystal light valve 6 position; Two-dimension translational adjustment unit comprises lift adjustment system 7 and is arranged on the electronic control translation stage 8 in lift adjustment system 7; Liquid crystal light valve 6 to be arranged on electronic control translation stage 8 and to be positioned on the emitting light path of collimator objective 5; Corner reflector pose adjustment unit is arranged on the emitting light path of liquid crystal light valve 6; Control module 15 is connected with liquid crystal light valve control circuit, lift adjustment system 7 and electronic control translation stage 8 respectively.Lift adjustment system 7 and electronic control translation stage 8 are used for adjusting the position of liquid crystal light valve 6, make the central shaft of liquid crystal light valve 6 and the optical axis coincidence of collimator objective 5.
As shown in Figure 1, the corner reflector pose adjustment unit that the utility model adopts comprises corner reflector mounting tool 12 and the two-dimensional level adjustment unit for the reference field normal position that adjusts corner reflector mounting tool 12; Two-dimensional level adjustment unit comprises automatically controlled universal stage 9 and is arranged on the automatically controlled angular displacement platform 10 on automatically controlled universal stage 9; Automatically controlled universal stage 9 is arranged on outside the optical emission exit of collimator objective 5; Lift adjustment system 7 is arranged on automatically controlled universal stage 9; Corner reflector mounting tool 12 to be positioned on automatically controlled angular displacement platform 10 and to be arranged on the emitting light path of liquid crystal light valve 6; Measured angle reverberator or reflector array 11 are installed on corner reflector mounting tool 12; Control module 15 is connected with automatically controlled universal stage 9 and automatically controlled angular displacement platform 10 respectively.It is parallel with the optical axis of collimated light source unit that automatically controlled universal stage 9 and automatically controlled angular displacement platform 10 are used for adjusting corner reflector mounting tool 12 reference field normal.
As shown in Figure 1, the CCD measuring unit that the utility model adopts comprises convergence object lens 13 in the reflected light place light path that is successively set on after measured angle reverberator or reflector array 11 reflect and ccd detector 14; Ccd detector 14 is arranged on the focal plane of convergence object lens 13; Control module 15 is connected with ccd detector 14.
The principle that the detection system utilizing the utility model to provide carries out detecting is: by control module 15 bright light source 1, the luminous energy that light source 1 sends enters into integrating sphere spheroid 3 after automatically controlled iris 2 blocks light, the clear aperture size of automatically controlled iris 2 is controlled by control module 15, the size that luminous energy that light source 1 sends enters into integrating sphere spheroid 3 can be adjusted, the luminous energy that incides integrating sphere spheroid 3 illuminates asterism graticule 4 from the optical emission exit outgoing of integrating sphere spheroid 3 after the repeatedly diffuse reflection homogenize of integrating sphere inwall, incide on liquid crystal light valve 6 from the light beam of outgoing asterism graticule 4 after collimator objective 5 collimates, liquid crystal light valve 6 adjusts position and the size in its territory, transparent zone according to the bore of measured angle reverberator and position, collimated light beam incides on measured angle reflector array (or corner reflector) 11 after liquid crystal light valve 6, incide after the glass-reflected of corner reflector front surface and converge on object lens 13, incide the light beam converged on object lens 13 and detected reception by ccd detector 14 after converging, in conjunction with the image point position on ccd detector 14 and the focal length converging object lens 13, the optical axis that can calculate measured angle reverberator points to the angle (as shown in Figure 3) between A and corner reflector datum clamp face normal B.
When reality is tested, the lateral attitude of the height and electronic control translation stage 8 that control lift adjustment system 7 by control module 15 adjusts the position of liquid crystal light valve 6, makes the center of liquid crystal light valve 6, the center of measured angle reverberator and the center conllinear of collimator objective 5; The position of the angle and automatically controlled angular displacement platform 10 that control automatically controlled universal stage 9 by control module 15 adjusts reference field normal and collimator objective 5 optical axis coincidence of corner reflector mounting tool 12; Effective clear aperture in the territory, transparent zone and measured angle reverberator that control liquid crystal light valve 6 by control module 15 matches.
The utility model by use liquid crystal light valve 6 provide optional position and size by diaphragm, realize the test that diverse location corner reflector optical axis is pointed to.Optical axis for independently different corner reflector points to test, and liquid crystal light valve 6 can adjust position and the size of clear aperture at any time according to the size of measured angle reverberator clear aperture, realizes the test job that high precision optical axis points to, for reflector array, because the light beam of all sub-corner reflector meeting collimation light source cell outgoing simultaneously carries out reflective, cause judging that on CCD measuring unit corner reflector optical axis points to the corresponding informance with sub-corner reflector, and in detection system of the present utility model, be provided with liquid crystal light valve 6, by use liquid crystal light valve for each sub-corner reflector provides the luminous energy of different frequency to modulate, different according to the luminous energy modulating frequency of the sub-corner reflector of difference, obtain the corresponding relation of reflector array Neutron Angular reverberator measurement result and sub-corner reflector, thus solve the difficult problem that cannot judge that measurement result is corresponding with sub-corner reflector.
The method that the corner reflector utilizing the utility model to provide or reflector array optical axis sensing consistency detection system carry out detecting comprises the following steps:
1) angle theta between collimated light source cell optic axis and CCD measuring unit optical axis has been demarcated;
2) regulated as follows by control module 15:
2.1) lift adjustment system 7 and electronic control translation stage 8 is regulated to make the central shaft of liquid crystal light valve 6 and the optical axis coincidence of collimated light source unit;
2.2) automatically controlled universal stage 9 and automatically controlled angular displacement platform 10 is regulated to make the reference field normal of corner reflector mounting tool 12 parallel with the optical axis of collimated light source unit;
3) automatically controlled universal stage 9 is regulated to make corner reflector mounting tool 12 rotate θ/2 angle to CCD measuring unit direction by control module 15, measured angle reverberator or reflector array are installed on corner reflector mounting tool, by control module 15 bright light source 1, measure each sub-corner reflector in measured angle reverberator or reflector array 11 by CCD measuring unit and reflect the convergent point of light;
4) optical axis utilizing the miss distance of convergent point to calculate each sub-corner reflector in measured angle reverberator or reflector array 11 points to the angle between corner reflector datum clamp face normal, and specific formula for calculation is:
Wherein: α is that corner reflector optical axis points to and corner reflector datum clamp face normal angle in the horizontal direction;
β is that corner reflector optical axis points to and the angle of corner reflector datum clamp face normal in pitch orientation;
ξ is that corner reflector optical axis points to and the angle of corner reflector datum clamp face normal in space;
S is the pixel dimension of ccd detector;
N
xfor convergent point miss distance in the horizontal direction;
N
yfor convergent point miss distance in the pitch direction;
F is the focal length converging object lens.
Optical axis for independently different corner reflector points to test, step 3) in measured angle reverberator is installed on corner reflector mounting tool after, ensuing concrete steps are: some bright light source 1, the clear aperture simultaneously being adjusted liquid crystal light valve 6 by control module 15 is identical with the effective aperture of measured angle reverberator, the convergent point of light of being returned through measured angle reflector reflects by the measurement of CCD measuring unit.As the method, change other corner reflectors, some bright light source 1, measures the convergent point reflecting light through other corner reflectors, thus the optical axis obtaining each corner reflector points to the angle ξ between its datum clamp face normal
i;
Optical axis for each sub-corner reflector in reflector array points to test, step 3) in by after in measured angle reflector array, each sub-corner reflector is installed on corner reflector mounting tool, by control module 15 bright light source 1, because now CCD measuring unit can receive the asterism that all sub-corner reflectors reflect back simultaneously, therefore, cannot judge that each sub-corner reflector optical axis points to and the angle of corner reflector datum clamp face normal and the corresponding relation of each sub-corner reflector.Solution is: arrange liquid crystal light valve 6 by control module 15 and make the light of its different logical optical position different by frequency, such as: corresponding 1 work song corner reflector be 10Hz by position modulation frequency, 2 work song corner reflectors be 2Hz by position modulation frequency, so analogize, the modulating frequency of the luminous energy that each sub-corner reflector is received is all not identical, the frequency corresponding to the different asterism pictures that CCD measuring unit receives is all not identical yet, automatically the modulating frequency of each asterism picture is identified by control module 15, obtain the corresponding relation of different asterism picture and each sub-corner reflector.As the method, can realize the sub-corner reflector optical axis of each of reflector array point to datum clamp face normal angle quick, measure in real time.
The corner reflector that the utility model provides or reflector array optical axis point to consistency detection system and detection method fill up domestic cannot fast, Measurement accuracy corner reflector optical axis points to the blank with datum clamp face normal angle, and solve for each of reflector array corner reflector optical axis sensing consistance cannot directly, the difficult problem of quick, Measurement accuracy.The measuring accuracy that the utility model points to angle between datum clamp face normal for corner reflector optical axis can reach 5 ", conforming measuring accuracy is pointed to for the sub-corner reflector optical axis of each of reflector array and can reach 3 ".
Claims (8)
1. corner reflector or reflector array optical axis point to a consistency detection system, it is characterized in that: comprise collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit, CCD measuring unit and control module; The dynamic diaphragm unit of liquid crystal light valve is arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of the dynamic diaphragm unit of liquid crystal light valve; Measured angle reverberator or reflector array are arranged on corner reflector pose adjustment unit; CCD measuring unit is arranged in the reflected light place light path after measured angle reverberator or reflector array reflection; Control module is connected with collimated light source unit, the dynamic diaphragm unit of liquid crystal light valve, corner reflector pose adjustment unit and CCD measuring unit respectively.
2. corner reflector according to claim 1 or reflector array optical axis point to consistency detection system, it is characterized in that: the dynamic diaphragm unit of described liquid crystal light valve comprises liquid crystal light valve, the liquid crystal light valve control circuit be connected with liquid crystal light valve and the two-dimension translational adjustment unit for adjusting liquid crystal light valve position; Liquid crystal light valve to be positioned on two-dimension translational adjustment unit and to be arranged on the emitting light path of collimated light source unit; Corner reflector pose adjustment unit is arranged on the emitting light path of liquid crystal light valve; Control module is connected with liquid crystal light valve control circuit and two-dimension translational adjustment unit respectively.
3. corner reflector according to claim 2 or reflector array optical axis point to consistency detection system, it is characterized in that: the electronic control translation stage that described two-dimension translational adjustment unit comprises lift adjustment system and is arranged in lift adjustment system; Liquid crystal light valve is arranged on electronic control translation stage; Control module is connected with lift adjustment system and electronic control translation stage respectively.
4. the corner reflector according to Claims 2 or 3 or reflector array optical axis point to consistency detection system, it is characterized in that: described corner reflector pose adjustment unit comprises corner reflector mounting tool and the two-dimensional level adjustment unit for the reference field normal position that adjusts corner reflector mounting tool; Corner reflector mounting tool to be positioned on two-dimensional level adjustment unit and to be arranged on the emitting light path of liquid crystal light valve; Measured angle reverberator or reflector array are installed on corner reflector mounting tool; Control module is connected with two-dimensional level adjustment unit.
5. corner reflector according to claim 4 or reflector array optical axis point to consistency detection system, it is characterized in that: described two-dimensional level adjustment unit comprises automatically controlled universal stage and is arranged on the automatically controlled angular displacement platform on automatically controlled universal stage; Described corner reflector mounting tool is arranged on automatically controlled angular displacement platform; Described control module is connected with automatically controlled universal stage and automatically controlled angular displacement platform respectively.
6. corner reflector according to claim 5 or reflector array optical axis point to consistency detection system, it is characterized in that: described CCD measuring unit comprises convergence object lens in the reflected light place light path that is successively set on after measured angle reverberator or reflector array reflection and ccd detector; Ccd detector is arranged on the focal plane of convergence object lens; Control module is connected with ccd detector.
7. corner reflector according to claim 6 or reflector array optical axis point to consistency detection system, it is characterized in that: described collimated light source unit comprises collimator objective, is arranged on the asterism graticule on collimator objective focal plane and the integrating sphere light-source system after being arranged on collimator objective focal plane; Asterism graticule, collimator objective and liquid crystal light valve are successively set on the emitting light path of integrating sphere light-source system; Control module is connected with integrating sphere light-source system.
8. corner reflector according to claim 7 or reflector array optical axis point to consistency detection system, it is characterized in that: described integrating sphere light-source system comprises the light source closely arranged successively, automatically controlled iris and integrating sphere spheroid; Automatically controlled iris, integrating sphere spheroid and asterism graticule are successively set on the emitting light path of light source; Control module is connected with light source and automatically controlled iris respectively.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520181794.6U CN204514574U (en) | 2015-03-27 | 2015-03-27 | Corner reflector or reflector array optical axis point to consistency detection system |
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| CN201520181794.6U CN204514574U (en) | 2015-03-27 | 2015-03-27 | Corner reflector or reflector array optical axis point to consistency detection system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104748945A (en) * | 2015-03-27 | 2015-07-01 | 中国科学院西安光学精密机械研究所 | Optical axis orientation consistency detection system and method of corner reflector or corner reflector array |
| CN114486204A (en) * | 2022-02-21 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Collimating objective lens adjusting mechanism and objective lens testing system |
-
2015
- 2015-03-27 CN CN201520181794.6U patent/CN204514574U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104748945A (en) * | 2015-03-27 | 2015-07-01 | 中国科学院西安光学精密机械研究所 | Optical axis orientation consistency detection system and method of corner reflector or corner reflector array |
| CN104748945B (en) * | 2015-03-27 | 2017-08-25 | 中国科学院西安光学精密机械研究所 | Corner reflector or reflector array optical axis point to consistency detection system and method |
| CN114486204A (en) * | 2022-02-21 | 2022-05-13 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Collimating objective lens adjusting mechanism and objective lens testing system |
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