CN204474746U - A kind of filming equipment for neodymium iron boron magnetic body - Google Patents
A kind of filming equipment for neodymium iron boron magnetic body Download PDFInfo
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- CN204474746U CN204474746U CN201520095442.9U CN201520095442U CN204474746U CN 204474746 U CN204474746 U CN 204474746U CN 201520095442 U CN201520095442 U CN 201520095442U CN 204474746 U CN204474746 U CN 204474746U
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- negative electrode
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Abstract
The utility model relates generally to a kind of filming equipment for neodymium iron boron magnetic body, the ultimate principle of special filming equipment is double-deck glow plasma surface metallurgic, its principal feature is that structure comprises vacuum chamber, parallel equidistant in the middle part of vacuum chamber and the source electrode of mutually insulated and negative electrode, heat insulation grid outside source electrode and negative electrode, anode above vacuum chamber, the vacuum system at the Ar inlet below vacuum chamber and vacuum chamber rear, the temp measuring system outside vacuum chamber; The metallic diaphragm thickness of Surface Creation is even and the utilization ratio of metal targets is high, and in whole coating process, temperature is relatively on the low side, less to the infringement of magnet, and controllability is strong, pollution-free, harmless to human body, and device structure is simple, and target is restricted little.
Description
Technical field:
The utility model relates to neodymium iron boron magnetic body processing technique field, specifically a kind of filming equipment for neodymium iron boron magnetic body.
Background technology:
Novel permanent magnetic neodymium iron boron magnetic body is the third generation rare earth material of 1983 appearance, usually by Nd
2fe
14the rich neodymium phase composite of B principal phase and grain boundaries is a kind of magnetic functional material, its solidity to corrosion difference and the easy temperature influence of magnetic texure.Adopt the mode of vacuum plating can carry out the plating of preservative property metallic diaphragm and functional metal rete in neodymium-iron-boron surface, and vacuum plating process safety, pollution-free, little to magnet damage.
Current neodymium iron boron magnetic body generally adopts multi-arc ion coating
,magnetron sputtering
,magnetic control multi-arc ion coating carries out the preparation of solidity to corrosion or functional rete in neodymium-iron-boron surface, on the one hand to restricted large (target should not magnetic conduction) of target when utilizing aforesaid method plated film, target utilization is low on the other hand, and when needs plate some noble metals, cost is too high-leveled and difficult to accept.
Adopt vacuum evaporation can form layer of metal rete in neodymium-iron-boron surface, target utilization comparatively multi-arc ion coating during evaporation
,magnetron sputtering
,magnetic control multi-arc ion coating is high, but for the higher target of fusing point, during evaporation, vacuum room temp is too high, the magnetic tissue of neodymium iron boron magnetic body can be made to change so that affect its magnetize after performance.
Utility model content:
The purpose of this utility model is the deficiency overcoming above-mentioned prior art, and provides a kind of filming equipment for neodymium iron boron magnetic body; Mainly solve that existing neodymium iron boron magnetic body surface vacuum coating target utilization is low, vacuum chamber temperature crosses the problems such as high.
The technical solution of the utility model is: a kind of filming equipment for neodymium iron boron magnetic body, comprise vacuum chamber, its special character is, the source electrode establishing mutually insulated to be equally spaced in described vacuum chamber and negative electrode, outside source electrode and negative electrode, heat insulation grid are set, above vacuum chamber, establish anode; Anode and negative electrode are connected on positive pole and the negative pole of pulsed bias power supply respectively, and anode and source electrode are connected on positive pole and the negative pole of DC bias power respectively, and plus earth; Establish vacuum system on rear side of vacuum chamber, Ar inlet is established in the bottom of vacuum chamber, and vacuum chamber fire door is established in the front side of vacuum chamber, is provided with viewing window in the middle part of vacuum chamber fire door, and at vacuum chamber peripheral hardware optics temperature measurer, optics temperature measurer position is corresponding with viewing window.
Further, described source electrode and negative electrode mutually insulated and parallel equidistant, source electrode surface is 5-200mm with the distance on corresponding parallel cathode surface.
Further, described source electrode and the structure of negative electrode are flat, vertical or cartridge type.
Compared with the prior art a kind of filming equipment for neodymium iron boron magnetic body described in the utility model has following positively effect, 1, the metallic diaphragm thickness of neodymium iron boron magnetic body Surface Creation evenly and the utilization ratio of metal targets is high; 2, in whole coating process, temperature is relatively on the low side, less to the infringement of magnet; 3, whole coating process controllability is strong, pollution-free, harmless to human body; 4, device structure is simple, and target is restricted little.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present utility model;
Fig. 2 is flat source electrode, negative electrode displacement structure schematic diagram;
Fig. 3 is vertical source electrode, negative electrode displacement structure schematic diagram;
Fig. 4 is cartridge type source electrode, negative electrode displacement structure schematic diagram.
Wherein, the heat insulation grid of 1 anode 2 source electrode 3 negative electrode 4 vacuum chamber fire door 5 viewing window 6 optics temperature measurer 7 Ar inlet 8 vacuum chamber 9 pulsed bias power supply 10 DC bias power 11 vacuum system 12.
Embodiment:
In order to Comprehension and Implementation better, provide specific embodiment below in conjunction with accompanying drawing and describe the utility model in detail; Illustrated embodiment is only for explaining the utility model, and institute's act device structure picture only represents essential structure of the present utility model, does not limit by the scope of utility model.
Embodiment 1, see Fig. 1,2, adopts flat for the structure of source electrode 2 and negative electrode 3; In vacuum chamber 8, be provided with the anode 1 being placed in top, arrange mutually insulated in vacuum chamber 8 and to be equally spaced negative electrode 3 and source electrode 2, the two is parallel to each other, and source electrode 2 surface is 5-200mm with the distance on corresponding negative electrode 3 surface; Outside negative electrode 3 with source electrode 2, arrange heat insulation grid 12, anode 1 and negative electrode 3 are connected on positive pole and the negative pole of pulsed bias power supply 9 respectively, and anode 1 and source electrode 2 are connected on positive pole and the negative pole of DC bias power 10 respectively, and anode 1 ground connection; Vacuum system 11 is arranged on rear side of vacuum chamber 8, Ar inlet 7 is bottom vacuum chamber 8, the installed in front vacuum chamber fire door 4 of vacuum chamber 8, viewing window 5 is had in the middle part of vacuum chamber fire door 4, at vacuum chamber 8 outer installation optics temperature measurer 6, optics temperature measurer 6 position is corresponding with viewing window 5, can measure negative electrode 3 surface temperature by optics temperature measurer 6; Source electrode 2 is pre-metallizing, and pre-metallizing comprises dysprosium, terbium, holmium, praseodymium, neodymium, niobium, molybdenum, copper, titanium, aluminium, cobalt or its alloy, and negative electrode 3 is neodymium iron boron magnetic body.
Embodiment 2, see Fig. 3, with embodiment 1, difference is that the structure of source electrode 2 and negative electrode 3 adopts vertical.
Embodiment 3, see Fig. 4, with embodiment 1, difference is that the structure of source electrode 2 and negative electrode 3 adopts cartridge type.
The utility model is a kind of filming equipment for neodymium iron boron magnetic body, and ultimate principle is double-deck glow plasma surface metallurgic, and basic plated film flow process is as follows:
1, carry out oil removing to neodymium iron boron magnetic body, pickling is placed in baking oven and dries;
2, using preplating metal targets as source electrode, neodymium iron boron magnetic body is as negative electrode; Distance between neodymium-iron-boron surface and corresponding metal targets source electrode surface remains between 5-200mm;
3, by vacuum chamber to 3*10
-3-9*10
-1after Pa, rush argon gas to 10-100Pa;
4, open cathode power and progressively improve voltage, glow plasma cleaning being carried out to neodymium iron boron magnetic body, after having cleaned, turns cathode voltage down zero;
5, open source electrode power supply and improve source voltage, glow plasma cleaning being carried out to source electrode target, after having cleaned, turns down source voltage to zero;
6, progressively improve source voltage and cathode voltage, and make the voltage difference of source electrode and negative electrode, remain (source voltage is greater than cathode voltage) between 0-500v; After neodymium-iron-boron surface reaches certain temperature, stop increasing the voltage of source electrode and negative electrode, make temperature keep stable, and start timing held for some time;
7, after insulation terminates, after powered-down makes neodymium iron boron magnetic body be cooled to room temperature, neodymium iron boron magnetic body surface measurements thicknesses of layers is taken out.
Claims (3)
1. the filming equipment for neodymium iron boron magnetic body, comprise vacuum chamber (8), it is characterized in that, the source electrode (2) establishing mutually insulated to be equally spaced in described vacuum chamber (8) and negative electrode (3), arrange heat insulation grid (12) outside source electrode (2) and negative electrode (3), anode (1) is established in vacuum chamber (8) top; Anode (1) and negative electrode (3) are connected on positive pole and the negative pole of pulsed bias power supply (9) respectively, and anode (1) and source electrode (2) are connected on positive pole and the negative pole of DC bias power (10) respectively, and anode (1) ground connection; Vacuum chamber (8) rear side establishes vacuum system (11), Ar inlet (7) is established in the bottom of vacuum chamber (8), vacuum chamber fire door (4) is established in the front side of vacuum chamber (8), vacuum chamber fire door (4) middle part is provided with viewing window (5), at vacuum chamber (8) peripheral hardware optics temperature measurer (6), optics temperature measurer (6) position is corresponding with viewing window (5).
2. a kind of filming equipment for neodymium iron boron magnetic body according to claim 1, it is characterized in that, described source electrode (2) and negative electrode (3) mutually insulated and parallel equidistant, source electrode (2) the surface distance surperficial with corresponding parallel cathode (3) is 5-200mm.
3. a kind of filming equipment for neodymium iron boron magnetic body according to claim 1, is characterized in that, described source electrode (2) and the structure of negative electrode (3) are flat, vertical or cartridge type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095442.9U CN204474746U (en) | 2015-02-11 | 2015-02-11 | A kind of filming equipment for neodymium iron boron magnetic body |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520095442.9U CN204474746U (en) | 2015-02-11 | 2015-02-11 | A kind of filming equipment for neodymium iron boron magnetic body |
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| CN204474746U true CN204474746U (en) | 2015-07-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104651779A (en) * | 2015-02-11 | 2015-05-27 | 烟台首钢磁性材料股份有限公司 | Coating equipment and coating technology for neodymium-iron-boron magnet |
-
2015
- 2015-02-11 CN CN201520095442.9U patent/CN204474746U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104651779A (en) * | 2015-02-11 | 2015-05-27 | 烟台首钢磁性材料股份有限公司 | Coating equipment and coating technology for neodymium-iron-boron magnet |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Fushan District, Shandong city of Yantai province Yongda Street 265500 No. 888 Patentee after: Yantai Dongxing magnetic material Co.,Ltd. Address before: Fushan District, Shandong city of Yantai province Yongda Street 265500 No. 888 Patentee before: YANTAI SHOUGANG MAGNETIC MATERIALS Inc. |
|
| CP01 | Change in the name or title of a patent holder |