CN204441256U - Wafer transfer is divided and batch facility - Google Patents
Wafer transfer is divided and batch facility Download PDFInfo
- Publication number
- CN204441256U CN204441256U CN201420849580.7U CN201420849580U CN204441256U CN 204441256 U CN204441256 U CN 204441256U CN 201420849580 U CN201420849580 U CN 201420849580U CN 204441256 U CN204441256 U CN 204441256U
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- wafer
- divided
- wafer transfer
- batch facility
- mechanical arm
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Abstract
A kind of wafer transfer is divided and batch facility, described wafer transfer divides also batch facility with automatic control system, and comprise the holder extended to form along the longitudinal direction, be arranged on the wafer adsorption device on described holder, be positioned at the wafer adjusting device near described wafer adsorption device and be arranged on the reading device at quarter of wafer adsorption device corresponding position, described wafer adsorption device comprises a mechanical arm that can move along the longitudinal direction, described wafer transfer is divided and batch facility also comprises one is positioned at screw mandrel bottom described holder, described screw mandrel extends to drive described mechanical arm to move in left-right direction in left-right direction.Setting like this, improves operating efficiency, and reduces the quality abnormals such as wafer scratch, fragmentation, batch mixing.
Description
Technical field
The utility model relates to semiconductor applications, particularly relates to wafer transfer in a kind of crystal-boat box and divides and batch facility.
Background technology
In On-Wafer Measurement process; owing to testing exception or special operation demand; need the wafer in same crystal-boat box to carry out as requested point and batch job; according to operating type in the past; all manually to inhale an operation to perform, operation is loaded down with trivial details and easily cause the quality abnormals such as scratch, fragmentation, batch mixing.
Therefore, be necessary to provide a kind of wafer transfer that can solve the problem to divide and batch facility.
Utility model content
The purpose of this utility model is to provide the wafer transfer of wafer in a kind of automatic transfer crystal-boat box to divide and batch facility.
For achieving the above object, the utility model adopts following technical scheme: a kind of wafer transfer is divided and batch facility, described wafer transfer divides also batch facility with automatic control system, and comprise the holder extended to form along the longitudinal direction, be arranged on the wafer adsorption device on described holder, the reading device at quarter being positioned at the wafer adjusting device near described wafer adsorption device and being arranged on above wafer adsorption device, described wafer adsorption device comprises a mechanical arm that can move along the longitudinal direction, described wafer transfer is divided and batch facility also comprises one is positioned at screw mandrel bottom described holder, described screw mandrel extends to drive described mechanical arm to move in left-right direction in left-right direction.
As the technical scheme that the utility model improves further, described mechanical arm is provided with suction sheet, and described suction sheet is provided with vacuum hole.
As the technical scheme that the utility model improves further, described suction sheet is O shape or opening U-shaped forward.
As the technical scheme that the utility model improves further, described wafer adsorption device also comprises is located at the slide block at described mechanical arm rear and the connector of connection sliding block and described mechanical arm, and described mechanical arm, connector, slide block arrange connection along the longitudinal direction.
As the technical scheme that the utility model improves further, be provided with the first drive below described slide block and move forward or backward to be with movable slider, described in described slider-actuated, mechanical arm moves forward or backward.
As the technical scheme that the utility model improves further, what described wafer adjusting device comprised a wafer carrying whirligig and coordinated described wafer carrying whirligig patrols limit transducer, and described wafer carrying whirligig comprises the load bearing seat be arranged on below described suction sheet and the rotating shaft upwards supporting described load bearing seat.
As the technical scheme that the utility model improves further, the second drive that described wafer carrying whirligig is also provided with motor and is driven by electrical equipment, described rotating shaft can by described second drive driven rotary, and described load bearing seat can by described rotating shaft driven rotary.
As the technical scheme that the utility model improves further, described holder is provided with left surface, the right flank relative with left surface and connects the end face of left surface and right flank, and described screw mandrel is perpendicular to described left and right side.
As the technical scheme that the utility model improves further, described wafer adjusting device is located on the right flank of described holder.
As the technical scheme that the utility model improves further, described wafer transfer is divided and batch facility also comprises one in order to install the pedestal of described holder, and described holder can move in left-right direction on described pedestal, and described screw mandrel is arranged on described pedestal.
Compared to prior art, the utility model is moved along front and back and left and right directions by mechanical arm described in automatic controlling system, thus reach and realize dividing and criticizing to the automation of wafer in crystal-boat box transfer, the personnel avoided directly contact the chance of wafer, control the exception caused because of human factor in operation to occur, more improve operating efficiency, hold coordinating to read wafer features breach and carve and number reaching the contrast locating pair with slot number in crystal-boat box of adjusting device by reader at quarter with wafer, reduce the quality abnormals such as scratch, fragmentation, batch mixing.
Accompanying drawing explanation
Fig. 1 is that the utility model wafer transfer is divided and the schematic top plan view of batch facility.
Fig. 2 is that the utility model wafer transfer is divided and the side schematic view of batch facility removal pedestal and screw mandrel.
Embodiment
Shown in please refer to the drawing 1, the utility model discloses a kind of wafer transfer with automatic control system (not shown) and divides and batch facility 100, in order to transmit wafer (not shown) in batch or in flakes.Described wafer transfer is divided and batch facility 100 comprises a holder 1, the wafer adsorption device 2 be arranged on described holder 1, correspondence are arranged on described wafer adsorption device 2 side wafer adjusting device (non-label), drive the motor 31 of described wafer adjusting device 3 start and be arranged on the screw mandrel 5 of the described holder 1 that to be used for bottom described holder 1 sliding.
Described holder 1 extends to form along the longitudinal direction, in left-right direction, described holder 1 be provided with left surface 11, the right flank 12 that is oppositely arranged with left surface 11, the end face 13 being connected described left surface 11 and right flank 12 and two the cylindrical hardware limit blocks 14 upwards vertically extended to form from the described end face 13 of described holder 1 rear and front end.Described wafer adsorption device 2 comprise one be arranged on the first drive 21 on described right flank 12, to be arranged on above described drive 21 and be positioned at the rearmost end of described right flank 12 slide block 24, be arranged on the connector 23 of described slide block 24 front end and be fixed on the mechanical arm 22 of described connector 23 front end.Described slide block 24 is controlled to make described slide block 24 can rectilinear motion along the longitudinal direction by described first drive 21.Described connector 23 roughly connects described mechanical arm 22 and described slide block 24 in Z-shaped shape, is provided with vacuum passage (non-label) in described connector 23.Described mechanical arm 22 to comprise in an opening U-shaped suction suction sheet 221 forward and connects the linking arm 222 of U-shaped suction sheet 221 and described connector 23.Described mechanical arm 22 is provided with the vacuum hole 2211 communicated with described vacuum passage, and the vacuum suction effect of described vacuum hole 2211 makes wafer not yielding in transmitting procedure.Described hardware limit block 14 in order to prevent when automatic control system is malfunctioning cause described wafer adsorption device 2 to make on-rectilinear movement along the longitudinal direction, described wafer adsorption device 2 is played to the restriction of extreme position.In other embodiments, described suction sheet also can be O shape.
Described wafer adjusting device comprises and patrols limit transducer 34 with wafer carrying whirligig 3, one and patrol the cylinder 35 of limit transducer 34 action described in controlling.Described wafer carrying whirligig 3 is arranged on the front end of described holder 1 right flank 12, and is positioned at outside described first drive 21.Described wafer carrying whirligig 3 comprises a motor 31 being positioned at bottom, to be installed on above described motor 31 and the second drive 32 controlled by described motor 31 and be fixed on the bearing part 33 of the second drive 32 near described first drive 21 one end.Described bearing part 33 comprises one can by the rotating shaft 331 of described second drive 32 driven rotary and the load bearing seat 332 being positioned at described rotating shaft 331 top, to facilitate mechanical arm 22 to be placed on described load bearing seat 332 by wafer below the U-shaped suction sheet 221 that described load bearing seat 332 is positioned at described mechanical arm 22.
Described holder 1 also comprises the brace table 15 stretching out from described right flank 12 rear end and formed, and described cylinder 35 is upwards supported by described brace table 15 and is positioned at the right side of described slide block 24.The described limit transducer 34 that patrols is arranged on described cylinder 35 front end, so arranges, and patrols limit transducer 34 and move forward or backward with feature limit at quarter (not shown) of the wafer of correspondence induction different size described in described cylinder 35 can control.
Described wafer transfer divide and batch facility 100 also comprise installing described holder 1 pedestal 6, be arranged on pedestal 6 and the described screw mandrel 5 be positioned at bottom described holder 1 and to be arranged on pedestal 6 and to be positioned at the reader 7 at quarter above described wafer adsorption device 2.Described quarter, reader 7 was arranged at the top of described mechanical arm 22.Described screw mandrel 5 extends in left-right direction with the left and right side 11,12 perpendicular to described holder 1, thus described holder 1 can be driven can to slide along described left and right directions.Described pedestal 6 in the side of described screw mandrel 5, namely described U-shaped suction sheet 221 opening towards side be provided with crystal-boat box A and crystal-boat box B described in the crystal-boat box A, the crystal-boat box B that linearly arrange and arrange in line (non-label), described straight line parallel is in described screw mandrel 5.
When need by the wafer transfer in described crystal-boat box B in described crystal-boat box A time, set in automatic control system in batches or burst from shifting wafer in described crystal-boat box B to the instruction in described crystal-boat box A, operating personnel by scanner to the wafer-scanning in described crystal-boat box B to obtain the slot number of wafer lot number and crystal-boat box, and input automatic control system using as reference.First, described first drive 21 drives described slide block 24 Forward drive, described slide block 24 drives described connector 23 and described mechanical arm 22 to extend in described crystal-boat box B from forward slip to described mechanical arm 22, and described U-shaped suction sheet 221 adsorbs the wafer in described crystal-boat box B; Then, described first drive 21 drives described mechanical arm 22 to move backward, until get back to original position C, described wafer is placed on the load bearing seat 332 of described wafer carrying whirligig 3 by described U-shaped suction sheet, described patrol limit transducer 34 respond to described wafer feature breach and carve number, adjusted described wafer by load bearing seat 332 described in the second drive 32 driven rotary, reader 7 read the feature breach of wafer and carved number with the wafer lot number of wafer in the described crystal-boat box B of correspondence and the slot number of crystal-boat box described quarter.Then, described screw mandrel 5 drives described holder 1 to slide to the right and moves to described mechanical arm 22 just to described crystal-boat box A, described mechanical arm 22 is by the first drive 21 forward slip to described crystal-boat box A, be placed to by described wafer in groove corresponding to described crystal-boat box A, wafer transfer has operated.Subsequent, described wafer transfer is divided by described screw mandrel 5 and batch facility 100 is slided to returning position corresponding to described crystal-boat box B left, and circulation start is to complete dividing and write instructions and transfer and moving of whole wafer completely.
In sum, described wafer transfer is divided and batch facility 100 is moved along front and back and left and right directions by mechanical arm described in automatic controlling system 22, thus reach the automation of wafer in crystal-boat box is shifted, the personnel avoided directly contact the chance of wafer, control the exception caused because of human factor in operation to occur, more improve operating efficiency, by quarter reader 7 with the coordinating to read wafer features breach and carve and number reach the contrast locating pair with slot number in crystal-boat box of wafer carrying whirligig 3, reduce the quality abnormals such as scratch, fragmentation, batch mixing.
In addition, the technical scheme of above embodiment only for illustration of the utility model and described by unrestricted the utility model, understanding of this description should based on person of ordinary skill in the field, such as " front and back are run through " refers to and did not run through before installing other parts, again such as to " front ", " afterwards ", " left side ", " right side ", " on ", the description of D score isotropy, although this specification has been described in detail the utility model with reference to the above embodiments, but, those of ordinary skill in the art is to be understood that, person of ordinary skill in the field still can modify to the utility model or equivalent replacement, and all do not depart from technical scheme and the improvement thereof of spirit and scope of the present utility model, all should be encompassed in right of the present utility model.
Claims (10)
1. a wafer transfer is divided and batch facility, described wafer transfer divides also batch facility with automatic control system, and comprise the holder extended to form along the longitudinal direction, be arranged on the wafer adsorption device on described holder, be positioned at the wafer adjusting device near described wafer adsorption device and be arranged on the reading device at quarter of wafer adsorption device corresponding position, described wafer adsorption device comprises a mechanical arm that can move along the longitudinal direction, it is characterized in that: described wafer transfer is divided and batch facility also comprises one is positioned at screw mandrel bottom described holder, described screw mandrel extends to drive described mechanical arm to move in left-right direction in left-right direction.
2. wafer transfer as claimed in claim 1 is divided and batch facility, and it is characterized in that: described mechanical arm is provided with suction sheet, described suction sheet is provided with vacuum hole.
3. wafer transfer as claimed in claim 2 is divided and batch facility, it is characterized in that: described suction sheet is O shape or opening U-shaped forward.
4. wafer transfer as claimed in claim 1 is divided and batch facility, it is characterized in that: described wafer adsorption device also comprises is located at the slide block at described mechanical arm rear and the connector of connection sliding block and described mechanical arm, and described mechanical arm, connector, slide block arrange connection along the longitudinal direction.
5. wafer transfer as claimed in claim 4 is divided and batch facility, it is characterized in that: be provided with the first drive below described slide block and move forward or backward to be with movable slider, described in described slider-actuated, mechanical arm moves forward or backward.
6. wafer transfer as claimed in claim 2 is divided and batch facility, it is characterized in that: what described wafer adjusting device comprised a wafer carrying whirligig and coordinated described wafer carrying whirligig patrols limit transducer, and described wafer carrying whirligig comprises the load bearing seat be arranged on below described suction sheet and the rotating shaft upwards supporting described load bearing seat.
7. wafer transfer as claimed in claim 6 is divided and batch facility, it is characterized in that: the second drive that described wafer carrying whirligig is also provided with motor and is driven by electrical equipment, described rotating shaft can by described second drive driven rotary, and described load bearing seat can by described rotating shaft driven rotary.
8. wafer transfer as claimed in claim 1 is divided and batch facility, it is characterized in that: described holder is provided with left surface, the right flank relative with left surface and connects the end face of left surface and right flank, and described screw mandrel is perpendicular to described left and right side.
9. wafer transfer as claimed in claim 7 is divided and batch facility, it is characterized in that: described wafer adjusting device is located on the right flank of described holder.
10. wafer transfer as claimed in claim 1 is divided and batch facility, it is characterized in that: described wafer transfer is divided and batch facility also comprises one in order to install the pedestal of described holder, described holder can move in left-right direction on described pedestal, and described screw mandrel is arranged on described pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420849580.7U CN204441256U (en) | 2014-12-29 | 2014-12-29 | Wafer transfer is divided and batch facility |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420849580.7U CN204441256U (en) | 2014-12-29 | 2014-12-29 | Wafer transfer is divided and batch facility |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204441256U true CN204441256U (en) | 2015-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420849580.7U Expired - Fee Related CN204441256U (en) | 2014-12-29 | 2014-12-29 | Wafer transfer is divided and batch facility |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204441256U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485302A (en) * | 2014-12-29 | 2015-04-01 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
-
2014
- 2014-12-29 CN CN201420849580.7U patent/CN204441256U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104485302A (en) * | 2014-12-29 | 2015-04-01 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
| CN104485302B (en) * | 2014-12-29 | 2017-05-10 | 颀中科技（苏州）有限公司 | Wafer transfer batching and collecting equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150701 Termination date: 20171229 |
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| CF01 | Termination of patent right due to non-payment of annual fee |